JPH0584628B2 - - Google Patents
Info
- Publication number
- JPH0584628B2 JPH0584628B2 JP61149136A JP14913686A JPH0584628B2 JP H0584628 B2 JPH0584628 B2 JP H0584628B2 JP 61149136 A JP61149136 A JP 61149136A JP 14913686 A JP14913686 A JP 14913686A JP H0584628 B2 JPH0584628 B2 JP H0584628B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- photocathode
- ultraviolet lamp
- electron beam
- photoelectrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010894 electron beam technology Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 5
- FHGTUGKSLIJMAV-UHFFFAOYSA-N tricesium;antimony Chemical compound [Sb].[Cs+].[Cs+].[Cs+] FHGTUGKSLIJMAV-UHFFFAOYSA-N 0.000 claims description 3
- SOWXYAAAVMKBPO-UHFFFAOYSA-N [Cs].[O].[Bi].[Ag] Chemical compound [Cs].[O].[Bi].[Ag] SOWXYAAAVMKBPO-UHFFFAOYSA-N 0.000 claims description 2
- 230000004907 flux Effects 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000003472 neutralizing effect Effects 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61149136A JPS636737A (ja) | 1986-06-25 | 1986-06-25 | 電子線照射装置における帯電防止装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61149136A JPS636737A (ja) | 1986-06-25 | 1986-06-25 | 電子線照射装置における帯電防止装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS636737A JPS636737A (ja) | 1988-01-12 |
| JPH0584628B2 true JPH0584628B2 (enrdf_load_html_response) | 1993-12-02 |
Family
ID=15468533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61149136A Granted JPS636737A (ja) | 1986-06-25 | 1986-06-25 | 電子線照射装置における帯電防止装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636737A (enrdf_load_html_response) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2365512A3 (en) | 2000-06-27 | 2012-01-04 | Ebara Corporation | Inspection system by charged particle beam |
| EP1304717A4 (en) | 2000-07-27 | 2009-12-09 | Ebara Corp | FLOOR BEAM ANALYSIS APPARATUS |
| JP4828162B2 (ja) * | 2005-05-31 | 2011-11-30 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡応用装置および試料検査方法 |
| JP4796791B2 (ja) * | 2005-06-08 | 2011-10-19 | 株式会社ホロン | 荷電粒子線装置および荷電粒子線像生成方法 |
| JP4994749B2 (ja) | 2006-09-05 | 2012-08-08 | 株式会社アドバンテスト | 電子ビーム寸法測定装置及び電子ビーム寸法測定方法 |
-
1986
- 1986-06-25 JP JP61149136A patent/JPS636737A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS636737A (ja) | 1988-01-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |