JPH0584058B2 - - Google Patents

Description

[Detailed description of the invention]

[0001]

[Field of Industrial Application] The present invention relates to a method for selecting semiconductor devices such as ICs, LSIs, etc., which measures the electrical performance of semiconductor devices, judges the results, and sorts them into multiple categories.

[0002]

[Prior Art] Conventionally, these devices have a rod-shaped magazine that stores semiconductor devices to be measured (hereinafter simply referred to as devices) attached to the supply side of the device.
These elements are sent out, measured, sorted, and stored according to their classification in a large number of magazines placed separately on the storage side.The magazine is filled with the elements after magazine supply and sorting. Removal was done manually. However, as the speed of measurement and sorting increases, the number of sorting devices that one worker can handle is limited, so attempts have been made to somehow automate this and develop high-performance devices.

[0003] As an example of a conventional device, a cassette that accommodates a large number of magazines is considered, and it is attempted to rationalize handling by using this cassette. For example, JP-A-56-66767 discloses a method in which a plurality of magazines are housed in a cassette in parallel, the whole cassette is supplied to the device, and the cassette that has finished ejecting elements is directly transferred to the classification storage section. Unloading can also be handled using cassettes.

[0004]

[Problems to be Solved by the Invention] However, if we consider the case of three classifications, it is necessary to arrange three cassettes and feed the selected elements into the magazines therein. Furthermore, when the number of classified items N increases, it is necessary to arrange N cassettes and feed the elements into them.If the cassettes are arranged flat, it takes up a large area, and the entire device must therefore become large. do not have. Therefore, in order to make the device smaller, it may be possible to reduce the number of magazines housed in the cassette, but this would increase the frequency of replacing the cassette and would not be able to fully meet the demands for automation. Further, in the example shown above, since the cassette moves within the apparatus, the apparatus is inevitably large and must be made strong, which has the disadvantage of making the apparatus difficult to handle.

[0005] The present invention improves these points and makes the entire semiconductor device sorting device small and capable of continuous high-speed operation. Therefore, only the magazine moves within the device, and the cassette is Used for supplying and final removal. Another object of the present invention is to provide a method for sorting semiconductor devices that can be three-dimensionally compact by accommodating magazines vertically in a cassette.

[0006]

[Means for Solving the Problems] In order to achieve the above object, the present invention stores magazines for storing semiconductor elements in a supply cassette vertically, and takes out the magazines one by one from below the cassette. , the device is ejected from the removed magazine, and if it is detected that the device remains in the magazine after ejection, the magazine is ejected from the system, and the magazine is detected to be empty after the device has been ejected. In this case, the magazine is temporarily stocked, the ejected elements are measured and classified into N types based on the measurement results, and the classified elements are placed in N magazines arranged in parallel at an angle. If the magazine corresponding to the positioned element can store an element, the positioned element is stored in the magazine, the elements are sorted into N types, and the positioning is performed. If the magazine corresponding to the loaded element is full of stored elements,
The positioned elements are placed on standby, the magazine filled with stored elements is replaced with an empty magazine in the stock, and the replaced full magazine is stored in a take-out cassette waiting directly above the magazine. Features.

[0007]

[Function] According to the present invention, one magazine is loaded from the bottom of the supply cassette in which the magazines are stacked vertically.
The books are taken out one by one and the semiconductor elements are released from the magazine. The elements are then ejected, emptied, and the magazine stored in place. Furthermore, the elements released from the magazine are measured and classified into N types based on the results. The classified elements are positioned at positions corresponding to the N magazines at predetermined positions.

[0008] Then, when the magazine corresponding to the positioned element is full of stored elements, the positioned element is placed on standby, and on the other hand, when the magazine corresponding to the positioned element can store elements, the positioned element is The processed elements are stored in a magazine. When the magazine is full of stored elements,
The magazine is replaced with an empty magazine stored in a predetermined position, and is stored in a take-out cassette waiting directly above the magazine.

[0009] In this way, the magazines can be accommodated in the cassette in a vertically stacked manner, and furthermore, the cassette is only used in the initial supply and final removal positions and does not move within the device.

[0010]

Embodiments The method for selecting semiconductor devices according to the present invention will be explained in detail below with reference to the accompanying drawings. FIG. 1 shows a cassette used in the present invention, in which a bar-shaped magazine 2 storing a large number of elements 1 is pushed upward from the bottom of a cassette 3 and is held by claws 4 provided on both sides. Use one that can be taken out from below by opening 4.

[0011] Next, the overall configuration of a sorting apparatus used in the semiconductor element sorting method according to the present invention will be explained with reference to FIGS. 2 and 3. The above-mentioned cassette 3 containing vertically stacked magazines 2 full of elements to be selected and sorted is set at the cassette supply position A. Below that is a magazine take-out position B, where the magazines 2 are taken out one by one from the cassette 3 and transported to the left in the figure. The magazine sent was C.
At the magazine tilt position, the magazine is tilted with the element delivery port facing down, and the stored elements are slid down one by one. Then, the magazine that has finished sending out the elements is inspected at this position to see if any elements remain. If it is detected that an element remains, assistance in sending out the element is performed a predetermined number of times by applying vibration or blowing air. Next, the magazine is returned to the horizontal position, and if there are any elements remaining in the magazine despite the element delivery assistance, only that magazine is ejected from the system at position D. Only the magazine that is confirmed to be completely empty will be placed in the lowering position E.
The magazine is lowered at the position F, enters the magazine standby position at position F, and is stored.

[0012] On the other hand, the elements sent out from the magazine tilted position C go through the single-piece feeding mechanism and enter the measurement position G, as in the conventional device, where the electrical performance is measured and judged, and the elements are sorted and classified. a, b, c, d
...is determined and stored. The element passes through the chute and at the H position, passes through the inclined chute in the right direction in the figure by the direction changing mechanism and enters the sorting position I. Here, an element holding device is provided on the conveyor belt to receive the elements. Then, the belt is moved by the specified amount to move the elements to the specified classification positions a, b,
It is positioned at the positions corresponding to c, d... and discharged to the respective classification positions a, b, c, d.... That is, a
If the element is classified as , the holding device stops at the storage position a and releases the element. Further, next to the sorting device I, an element standby position J and an element classification storage position K are provided, and N magazines and a waiting part of their introduction part are arranged at equal intervals on one inclined plane. At the element standby position J, normally the elements just pass through, but one of the magazines at the storage position K becomes full, and while that magazine is replaced, the element standby mechanism is operated at the end of the path. is temporarily closed to temporarily store the incoming elements so as not to interfere with the continuation of the sorting work.

[0013] In FIG. 3, the empty magazine that has entered the above-mentioned magazine standby position F is carried by the magazine exchange mechanism described later to the position of a full magazine in the element classification storage position K and is exchanged. , the full magazine is pushed up by the exchange mechanism and pushed into the cassette 3 at the magazine storage position L from below. That is, if the d classification magazine that stores the elements classified by d at the K position is now full, the empty magazine is moved under the d magazine by the exchange mechanism and set at that position, and the full magazine is It is then pushed from below into the cassette 3 that accommodates the d magazine, which is waiting in the upper L position.

[0014] In the above configuration, first a spare magazine is placed in the magazine standby position F, N magazines are installed in the element classification storage position K, and when the cassette 3 is supplied to the A position, the magazines in the supply cassette are loaded one after another. Empty magazines are replenished after full magazines, enabling well-balanced continuous unmanned operation, and all that is needed is to supply and unload cassettes. Since an element standby mechanism is provided, the operation of inspecting and sorting elements can be continued regardless of whether a full magazine is replaced or stored in a cassette.

[0015] Below, mechanisms provided at each position of the sorting device used in the semiconductor element sorting method according to the present invention will be explained. FIG. 4 shows an example of the structure of the claws provided on both sides of the cassette. Here nail 4
An inclined surface 6 is provided below the lever 7, and when the lever 7 presses the inclined surface 6 from below, the claw 4 compresses the spring 8 and turns clockwise to drop the lowest magazine 2 downward. ing. FIG. 5 shows an example of a magazine ejection mechanism at the cassette supply position A and the magazine ejection position B. The cassettes 3 containing the magazines 2 in a vertical row are set in a predetermined position by a guide 9. Incidentally, claws 4 are attached to the lower part of both sides of the cassette 3. Here, since the magazine ejecting mechanism at the bottom of the figure is symmetrical, the left side will be explained. The lever 7 pivots and enters the inclined surface 6 of the pawl 4 and hits the pawl 4.
Open the cassette to the left and release the bottom of the cassette. At this time, the magazine receiver 12 rises to support the magazine 2 from below. Next, the second claw 10 enters the second magazine from the bottom and supports the second or more magazines, and one magazine 2 is placed on the receiver 12. Chain 14 is under the receiver 12.
is provided, and the chain is provided with a protrusion 15. The chain 14 is connected to the chain wheel 13, and the wheel rotates according to a command.
The receiver 12 is lowered to receive the magazine 2, and the magazine 2 is placed on the protrusion 15 and conveyed by the chain 14 in a direction perpendicular to the plane of the paper. Note that the magazine is taken out and conveyed when the inclined magazine at position C becomes empty and the inclined table returns to the horizontal position.

[0016] The magazine sent to the tilt table is tilted with the outlet closed, and when the connection with the chute to the measurement position G is completed, the outlet is opened, and one piece is transferred to the measurement G similar to the conventional automatic inspection device. The element is sent out via a feeding mechanism. When the feeding is completed, the magazine is inspected to see if there are any remaining elements. For this purpose, a method of passing a light beam through the magazine, a method of inserting a feeler, etc. are used.
If it is found that there are any remaining elements, the magazine is vibrated and pressurized air is injected to help send out the elements, and then the remaining elements are detected again. For the magazine that is determined to remain here, the trap is opened at the next element-remaining magazine processing position D, and only that magazine is ejected from the system.
This is because, in the present invention, the magazine used for supplying elements is used as is for storing elements by classification.

[0017] Next, when sorting elements, an element standby mechanism is provided at the J position, but this is a chute with a stopper at its downstream end, and when the magazine below becomes full, the magazine is While the magazine is being replaced with an empty magazine, the stopper of the standby mechanism of that series is operated to temporarily stock the elements to be sorted, and when the magazine replacement is completed, the stopper is opened and the elements to be sorted are temporarily stocked in the standby mechanism J. Feed the element into the magazine.

[0018] Next, the magazine exchange mechanism will be explained. In FIG. 3, when magazine d for classification storage becomes full, the magazine exchange mechanism receives one empty magazine from magazine standby position F, and
Full magazine d directly below position magazine d
At the same time, a new magazine is loaded therein, and the magazine d is further pushed up and pushed into the cassette d from below to return to the magazine exchange mechanism.

[0019] FIG. 6 shows an example of a magazine exchange mechanism. The magazine exchange mechanism 20 is moved on two rails 23 and 24 having the same inclination angle as the column of element classification storage magazines at the K position by a moving table 25 in a direction perpendicular to the plane of the paper according to a command. And moving table 25
An intermediate plate 27 is provided which moves parallel to and perpendicular to the table 25 by an air cylinder 26 provided at
Install 9. There is a fulcrum 3 on the right side of the intermediate plate 27 in the figure.
1 is provided, a rotating plate 32 is attached to this, a long hole is provided in the middle thereof, and a shaft 33 is inserted into this. axis 33
The rod having a tip at its tip is moved by an air cylinder 34 to rotate the rotating plate 32 clockwise about the fulcrum 31. At the left end of the rotating plate 32, a magazine receiver 35 is provided facing upward, and the intermediate plate 2
A magazine receiver 36 is provided at the right end of the magazine receiver 7, and the full storage magazine 21 is rotated on the upper surface of these two magazine receivers 35 and 36 as will be described later.
It is configured to be pushed into the cassette 3.
Incidentally, each of the storage magazines 21 at the K position is provided with a magazine clamper 22, and guide plates 37 and 38 are provided for guiding the movement of the magazines.

[0020] In such a structure, when the magazine 21 set at the element classification storage position K becomes full with the elements that have been measured and sorted, the empty magazine 30 is held on the magazine receivers 28 and 29 and moved to the cassette standby position. The magazine exchange mechanism 20, which is waiting for F, moves on the rails 23 and 24, and as shown in FIG.
As shown in FIG. 3, the magazine receivers 35 and 36 stop in contact with the full magazine n21. Next, when the magazine clamper 22 releases the clamp on the full magazine 21, the air cylinder 34 is activated at the same time, the turning plate 32 turns clockwise around the fulcrum 31, and the magazine receiver 35 moves to the position 35' shown by the dashed line. Turn and stop. At this time, since the full magazine 21 is supported on the magazine receivers 35 and 36, it rotates while being guided by the guide plates 37 and 38 and stops at a position 21' shown by a dashed line. Then, the air cylinder 26 is operated to move the intermediate plate 2
7, the magazine receiver 36, which had been stopped at the position 35', moves to the 35" position, the fulcrum moves to the 31' position, and the magazine receiver 36 moves up to the 36' position. Therefore, the full magazine 21' The two claws 4 on both sides of the cassette 3 are pushed apart to accommodate the cassette 3 from the bottom as shown at 21''.

[0021] On the other hand, the empty magazine 30 is simultaneously pushed up to the element classification storage position K by the previous operation of the air cylinder 26 and stopped, and is clamped by the magazine clamper 22 so that it can store newly measured and sorted elements. set to the state. In this way, the full magazine 21 is accommodated in the cassette 3, and after the empty magazine 30 is set at the element classification accommodation position K, the magazine exchange mechanism 20 descends and moves on the rails 23, 24 to the magazine standby position. Return to F, hold a new empty magazine and wait. In the above description, the two receivers 35 and 36 of the rotating plate 32 are provided with an escape mechanism to prevent them from coming into contact with the magazine set at the K position when returning downward.

[0022] In the above explanation, known elements and magazine transport, movement mechanisms, command mechanisms, etc. have been omitted because the explanation would be complicated, but the present invention's method for ensuring the flow of elements and magazines If so, you can use any of them. In addition, in the above explanation, the supply cassette is inserted horizontally, and one magazine is taken out and tilted backward.
As described above, the cassette to be supplied is loaded with the cassette tilted from the beginning, one magazine is taken out from the outlet of the element in the closed state in the tilted state, it is opened at the element delivery position, and the magazine is fed out. It is also possible to move to the process of

[0023]

Effects of the Invention As explained above, according to the semiconductor device sorting method according to the present invention, the entire semiconductor device sorting device is made small and capable of continuous high-speed operation. Only the magazine is used, and the cassette is used to remove the first supply and the last supply. By accommodating the magazines vertically in the cassette, a three-dimensional compact structure can be achieved.

[Brief explanation of the drawing]

[Fig. 1] Fig. 1 is an explanatory diagram of semiconductor elements, magazines, and cassettes handled by the present invention.

[FIG. 2] FIG. 2 is an explanatory diagram showing the configuration of an apparatus for carrying out the semiconductor element sorting method of the present invention.

[Fig. 3] Fig. 3 is an explanatory diagram showing the configuration of an apparatus for carrying out the semiconductor element sorting method of the present invention.

[Fig. 4] Fig. 4 is a sectional view of the lower part of a cassette of an apparatus for carrying out the method for sorting semiconductor elements of the present invention.

[Fig. 5] Fig. 5 is a side view of a magazine ejecting and conveying mechanism of an apparatus implementing the semiconductor element sorting method of the present invention.

[Fig. 6] Fig. 6 is a side view of a magazine exchange mechanism of an apparatus implementing the semiconductor device sorting method of the present invention.

[Explanation of symbols]

1...Semiconductor element 2...Magazine 3...cassette.

Claims (1)

[Claims] Claim 1: A supply cassette stores magazines for storing semiconductor devices vertically, the magazines are taken out one by one from below the cassette, the devices are ejected from the taken out magazines, and the devices are placed in the magazines after being ejected. If it is detected that an element remains, the magazine is ejected from the system, and if it is detected that the magazine is empty after the element has been released, the magazine is temporarily stocked and the ejected element is measured. and classifying the classified elements into N types based on the measurement results, positioning the classified elements at positions corresponding to N magazines arranged in parallel at an angle, and placing the classified elements in the magazines corresponding to the positioned elements. is capable of storing elements, the positioned element is stored in a magazine and the elements are sorted into N types, and when the magazine corresponding to the positioned element is full of stored elements; , putting the positioned elements on standby, exchanging the magazine full of stored elements with an empty magazine in the stock, and storing the exchanged full magazine in a take-out cassette waiting directly above it. A method for sorting semiconductor devices characterized by the following.