JPH0582720A - Resin sealed type semiconductor device - Google Patents

Resin sealed type semiconductor device

Info

Publication number
JPH0582720A
JPH0582720A JP24088891A JP24088891A JPH0582720A JP H0582720 A JPH0582720 A JP H0582720A JP 24088891 A JP24088891 A JP 24088891A JP 24088891 A JP24088891 A JP 24088891A JP H0582720 A JPH0582720 A JP H0582720A
Authority
JP
Japan
Prior art keywords
resin
insulating member
electric signal
semiconductor device
semiconductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24088891A
Other languages
Japanese (ja)
Inventor
Akihiro Yaguchi
昭弘 矢口
Asao Nishimura
朝雄 西村
Maya Obata
まや 小幡
Ryuji Kono
竜治 河野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP24088891A priority Critical patent/JPH0582720A/en
Publication of JPH0582720A publication Critical patent/JPH0582720A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/4826Connecting between the body and an opposite side of the item with respect to the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73215Layer and wire connectors

Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To provide a resin-sealed type semiconductor apparatus which is capable of preventing the short circuit between metal small-gage wires without increasing their outside dimensions even when a plurality of highly integrated semiconductor devices are mounted in a semiconductor apparatus. CONSTITUTION:Semiconductor devices 1 and 1' are bonded with their circuit formation sides 1a and 1'a by way of insulation components 3 which electrically insulate electric signal leads 2 with the devices 1 and 1' so that they are held with each of the leads 2. The devices 1 and 1' are electrically connected to the leads 2 by means of metal small-gauge wires 4 and 4'. The devices 1 and 1' are laid out so that their mutual circuit formation sides 1a and 1'a may face each other. The leads 2 are extended between the opposed sides of the circuit formation sides 1a and 1'a. A second insulation component 8 is laid out between the leads 2 and 2' while the insulation component 8 is held with the stacked part of the leads 2.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、少なくとも2個の半導
体素子を積層した樹脂封止型半導体装置に係り、特に金
属細線同士のショートを防止するのに好適な樹脂封止型
半導体装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin-encapsulated semiconductor device in which at least two semiconductor elements are laminated, and more particularly to a resin-encapsulated semiconductor device suitable for preventing short circuits between metal thin wires.

【0002】[0002]

【従来の技術】従来より樹脂封止型半導体装置では、半
導体素子を素子搭載部であるタブの上に固定すると共に
タブの周囲に複数のリードを配設し、半導体素子とリー
ドを金属細線によって電気的に接続して、その周囲を樹
脂で封止する構造が採用されている。
2. Description of the Related Art Conventionally, in a resin-sealed semiconductor device, a semiconductor element is fixed on a tab which is an element mounting portion, a plurality of leads are arranged around the tab, and the semiconductor element and the lead are formed by a fine metal wire. A structure is adopted in which it is electrically connected and the periphery is sealed with resin.

【0003】近年、半導体装置の高集積化を達成するた
めに、複数の半導体素子を搭載した半導体装置に対する
要求が強くなってきている。従来のようにタブ上に半導
体素子を固定した構造で、複数の半導体素子を搭載した
構造としては、特開昭62−119952号公報、特開
平1−257361号公報、特開昭60−147161
号公報などがある。
In recent years, in order to achieve high integration of semiconductor devices, there is an increasing demand for semiconductor devices having a plurality of semiconductor elements. As a conventional structure in which a semiconductor element is fixed on a tab and a plurality of semiconductor elements are mounted, Japanese Patent Laid-Open Nos. 62-119952, 1-257361, and 60-147161 are available.
There is a bulletin, etc.

【0004】半導体装置の集積度を上げるために、複数
の半導体素子を搭載した構造が検討されている一方、半
導体素子自身も高集積化によって素子寸法が大形化する
傾向にある。その反面、半導体装置の外形寸法は、半導
体装置を搭載する基板設計の制約や高密度実装化の要求
により、自由に拡大できないか或いは逆に小形化される
傾向にある。
In order to increase the degree of integration of a semiconductor device, a structure in which a plurality of semiconductor elements are mounted is being studied, while the semiconductor element itself tends to have a larger size due to higher integration. On the other hand, the external dimensions of the semiconductor device cannot be freely expanded or, on the contrary, tend to be miniaturized due to the restrictions of the design of the substrate on which the semiconductor device is mounted and the demand for high-density mounting.

【0005】このような状況において、従来のようにタ
ブ上に半導体素子を固定する構造では、半導体装置の外
形寸法一定のままで半導体素子の寸法を大形化していく
と、リードを樹脂に固定する部分の長さ(インナーリー
ド部の樹脂埋込部の長さ)が不足し、リ−ドに充分な固
定強度を与えられないという問題が生じた。
In such a situation, in the conventional structure in which the semiconductor element is fixed on the tab, when the size of the semiconductor element is increased while the external dimensions of the semiconductor device are kept constant, the leads are fixed to the resin. There was a problem that the length of the portion to be filled (the length of the resin-embedded portion of the inner lead portion) was insufficient, and sufficient fixing strength could not be given to the lead.

【0006】そこで、このような問題を回避するため、
複数のインナーリードを半導体素子の回路形成面上に絶
縁部材を介して接着する構造が、特開昭61−2419
59号公報により提案されている。この構造をリード・
オン・チップと呼ぶ。
Therefore, in order to avoid such a problem,
A structure in which a plurality of inner leads are adhered to a circuit forming surface of a semiconductor element via an insulating member is disclosed in Japanese Patent Laid-Open No. 61-2419.
It is proposed by Japanese Patent Publication No. 59. Lead this structure
Called on-chip.

【0007】本発明が対象としているリード・オン・チ
ップ構造の半導体素子を2個積層した樹脂封止型半導体
装置の例を図15に示す。
FIG. 15 shows an example of a resin-sealed semiconductor device in which two semiconductor elements having a lead-on-chip structure, which are the object of the present invention, are laminated.

【0008】半導体素子1、1´は、その回路形成面1
a、1´aに電気信号用インナーリ−ド2、2´を半導
体素子1、1´と電気的に絶縁する絶縁部材3、3´を
介して接着剤などにより接着することにより、夫々電気
信号用インナーリ−ド2、2´で保持されている。半導
体素子1、1´と電気信号用インナーリード2、2´
は、金属細線4、4´によって電気的に接続されてい
る。
The semiconductor elements 1 and 1 ′ have a circuit forming surface 1 thereof.
a, 1'a, the inner leads 2, 2'for electrical signals are adhered to each other with an adhesive or the like via insulating members 3, 3 'which electrically insulate the semiconductor elements 1, 1'. It is held by inner leads 2, 2 '. Semiconductor elements 1, 1'and inner leads 2, 2'for electric signals
Are electrically connected by thin metal wires 4 and 4 '.

【0009】このようなリード・オン・チップ構造の2
個の半導体素子を、回路形成面同士が対向するように配
置し、電気信号用インナーリード2、2´の積層部2a
において電気信号用インナーリード同士が接合されてい
る。そして、これらは樹脂5で封止されて樹脂封止体6
を形成している。
2 of such a lead-on-chip structure
The individual semiconductor elements are arranged such that the circuit forming surfaces face each other, and the laminated portion 2a of the inner leads 2, 2'for electrical signals is arranged.
In, the inner leads for electric signals are joined together. Then, these are sealed with the resin 5 to form the resin sealing body 6.
Is formed.

【0010】一方の電気信号用インナーリード2´は、
樹脂封止体6の内部で切断されており、他方の電気信号
用インナーリード2のみが電気信号用アウターリード7
と連なっている。
One inner lead 2'for electric signal is
It is cut inside the resin encapsulant 6, and only the other inner lead 2 for electric signal is used for the outer lead 7 for electric signal.
It is connected with.

【0011】リ−ド・オン・チップ構造の半導体素子を
積層することによって、大形の半導体素子を搭載しても
半導体装置の外形寸法が大きくなることがなく、また充
分なリ−ド固定強度が得られる樹脂封止型半導体装置を
提供することができる。
By stacking semiconductor elements having a read-on-chip structure, the external dimensions of the semiconductor device do not increase even when a large-sized semiconductor element is mounted, and the lead fixing strength is sufficient. It is possible to provide a resin-encapsulated semiconductor device that can obtain

【0012】[0012]

【発明が解決しようとする課題】しかしながら、図15
に示したようなリ−ド・オン・チップ構造の半導体素子
を積層した樹脂封止型半導体装置では、2個の半導体素
子1、1´の回路形成面同士が対向しているため、金属
細線4、4´も互いに向き合っている。
However, as shown in FIG.
In the resin-sealed semiconductor device in which the semiconductor elements having the lead-on-chip structure as shown in FIG. 2 are stacked, since the circuit forming surfaces of the two semiconductor elements 1 and 1 ′ face each other, the metal thin wire is 4, 4'also face each other.

【0013】そのため、比較的長い金属細線や、製造時
のばらつきによって必要以上に長くなった金属細線が存
在していると、半導体素子の積層時または樹脂封止工程
時に金属細線4、4´同士がショートする恐れがある。
金属細線4、4´がショートすると半導体素子の機能を
著しく低下させる原因となる。したがって、金属細線
4、4´同士のショート防止を考慮する必要がある。
Therefore, if there is a relatively long metal thin wire or a metal thin wire that is longer than necessary due to variations in manufacturing, the metal thin wires 4, 4'are stacked together during the semiconductor element stacking or the resin sealing process. May be short-circuited.
When the thin metal wires 4 and 4 ′ are short-circuited, the function of the semiconductor element is significantly deteriorated. Therefore, it is necessary to consider prevention of short circuit between the thin metal wires 4 and 4 '.

【0014】本発明は、複数の高集積半導体素子を半導
体装置内に搭載しても、半導体装置の外形寸法が大形化
せず、充分なリード固定強度が得られ、かつ金属細線の
ショート防止を考慮した樹脂封止型半導体装置を提供す
ることを目的とする。
According to the present invention, even if a plurality of highly integrated semiconductor elements are mounted in a semiconductor device, the external dimensions of the semiconductor device do not become large, sufficient lead fixing strength is obtained, and short-circuiting of metal thin wires is prevented. An object of the present invention is to provide a resin-sealed semiconductor device in consideration of the above.

【0015】[0015]

【課題を解決するための手段】上記目的を達成するため
本発明は積層された2個のリード・オン・チップ構造半
導体素子を保持する電気信号用インナーリードの間に絶
縁部材を介在させた。
In order to achieve the above object, the present invention interposes an insulating member between the inner leads for electric signals which hold two stacked semiconductor elements of lead-on-chip structure.

【0016】本発明の樹脂封止型半導体装置は、少なく
とも2個の半導体素子の回路形成面同士が対向するよう
に半導体素子を配置し、各半導体素子の回路形成面に第
1の絶縁部材を接着し、該第1の絶縁部材の上に電気信
号用リードを配設し、該電気信号用リードと前記半導体
素子とを夫々例えば金属細線で電気的に接続し、該各電
気信号用リード同士を接合し、これらの周囲を樹脂で封
止して樹脂封止体を形成したものであり、以下のいずれ
かの構成を特徴とする。
In the resin-sealed semiconductor device of the present invention, the semiconductor elements are arranged such that the circuit forming surfaces of at least two semiconductor elements face each other, and the first insulating member is provided on the circuit forming surface of each semiconductor element. Adhering, arranging electric signal leads on the first insulating member, electrically connecting the electric signal leads and the semiconductor element with, for example, metal thin wires, and connecting the electric signal leads to each other. Are joined together and the periphery thereof is sealed with a resin to form a resin sealing body, which is characterized by any of the following configurations.

【0017】(1)前記電気信号用リードの対向面間に
封止樹脂以外の第2の絶縁部材を介在させる。
(1) A second insulating member other than the sealing resin is interposed between the facing surfaces of the electrical signal leads.

【0018】(2)(1)において第2の絶縁部材を前
記電気信号用リードに接着する。
(2) In (1), the second insulating member is bonded to the electrical signal lead.

【0019】(3)(1)において第2の絶縁部材を前
記電気信号用リードに導電性接着剤で接着する。
(3) In (1), the second insulating member is bonded to the electrical signal lead with a conductive adhesive.

【0020】(4)対向する前記半導体素子夫々の側の
金属細線同士を絶縁する部材でかつ封止樹脂以外の第2
の絶縁部材を備える。
(4) A second member other than the sealing resin, which is a member that insulates the metal thin wires on the sides of the semiconductor elements facing each other from each other.
Insulating member.

【0021】(5)電気信号用リード間の金属細線が配
設されている領域に封止樹脂以外の第2の絶縁部材を介
在させる。
(5) A second insulating member other than the sealing resin is interposed in the region where the thin metal wire is provided between the electric signal leads.

【0022】(6)電気信号用リード間の金属細線が配
設されている領域と前記電気信号用リード同士の接合部
の周辺に封止樹脂以外の第2の絶縁部材を介在させる。
(6) A second insulating member other than the sealing resin is interposed around the area where the thin metal wires are arranged between the electric signal leads and around the joint between the electric signal leads.

【0023】(7)電気信号用リードの間に封止樹脂以
外の複数の第2の絶縁部材を介在させる。
(7) A plurality of second insulating members other than the sealing resin are interposed between the electric signal leads.

【0024】(8)半導体素子の回路形成面に第1の絶
縁部材を接着し、該第1の絶縁部材の上に電気信号用リ
ードを配設し、該電気信号用リードと前記半導体素子と
を夫々金属細線で電気的に接続し、該電気信号用リード
上に第2の絶縁部材が接着されている少なくとも2個の
半導体素子を、半導体素子の回路形成面同士が対向する
ように積層し、これらの周囲を樹脂で封止して樹脂封止
体を形成する。
(8) A first insulating member is adhered to the circuit forming surface of the semiconductor element, an electric signal lead is disposed on the first insulating member, and the electric signal lead and the semiconductor element are connected to each other. Are electrically connected by thin metal wires, and at least two semiconductor elements having the second insulating member bonded to the electrical signal leads are laminated so that the circuit forming surfaces of the semiconductor elements face each other. Then, the periphery of these is sealed with resin to form a resin sealing body.

【0025】[0025]

【作用】電気信号用インナーリード間に絶縁部材を介在
させることによって、金属細線同士の接触が絶縁部材に
よって妨げられるので、金属細線のショートを防止する
ことができる。それによって、半導体素子の機能低下あ
るいは破壊がなくなる。
By interposing an insulating member between the inner leads for electric signals, the contact between the metal thin wires is prevented by the insulating member, so that short-circuiting of the metal thin wires can be prevented. As a result, the function of the semiconductor element is not degraded or destroyed.

【0026】従って、大形の半導体素子を搭載可能と
し、かつ金属細線のショート防止も考慮した信頼性の高
い樹脂封止型半導体装置を得ることができる。
Therefore, it is possible to obtain a highly reliable resin-encapsulated semiconductor device in which a large-sized semiconductor element can be mounted and in which the short circuit of the metal fine wire is also taken into consideration.

【0027】[0027]

【実施例】以下、本発明の一実施例を図1、図2および
図3によって説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1, 2 and 3.

【0028】図1は本発明の一実施例である樹脂封止型
半導体装置の断面図である。図2は図1に示した樹脂封
止型半導体装置の第2絶縁部材の形状を示すため、第2
絶縁部材から下の部分を取り除いた平面図である。図3
は図1に示した樹脂封止型半導体装置の部分拡大断面図
である。なお、図1は図2に示した樹脂封止型半導体装
置のイ−イ線断面図である。
FIG. 1 is a sectional view of a resin-sealed semiconductor device which is an embodiment of the present invention. 2 shows the shape of the second insulating member of the resin-encapsulated semiconductor device shown in FIG.
It is a top view which removed the lower part from the insulating member. Figure 3
FIG. 2 is a partially enlarged sectional view of the resin-encapsulated semiconductor device shown in FIG. 1 is a sectional view taken along the line EE of the resin-sealed semiconductor device shown in FIG.

【0029】半導体素子1、1´は、その回路形成面1
a、1´aに電気信号用インナーリ−ド2、2´を半導
体素子1、1´と電気的に絶縁する絶縁部材3、3´を
介して接着剤などにより接着することによりそれぞれ電
気信号用インナーリ−ド2、2´で保持されている。
The semiconductor elements 1 and 1 ′ have a circuit forming surface 1 thereof.
a, 1'a, the inner leads 2, 2'for electric signals are adhered by an adhesive agent or the like via insulating members 3, 3 'which electrically insulate the semiconductor elements 1, 1'. It is held by inner leads 2, 2 '.

【0030】また、半導体素子1、1´と電気信号用イ
ンナーリ−ド2、2´は、金属細線4、4´によって電
気的に接続されている。
The semiconductor elements 1 and 1'and the electric signal inner leads 2 and 2'are electrically connected by thin metal wires 4 and 4 '.

【0031】半導体素子1、1´は、その回路形成面1
a、1´a同士が対向するように配置されており、電気
信号用インナーリード2、2´は、回路形成面1a、1
´aの対向面間で引き延ばされている。
The semiconductor elements 1 and 1 ′ have a circuit forming surface 1 thereof.
a, 1'a are arranged so as to face each other, and the inner leads 2, 2'for electric signals are connected to the circuit forming surfaces 1a, 1 '
It is stretched between the opposing surfaces of ′ a.

【0032】一方の電気信号用インナーリード2は、そ
の一端側を電気信号用アウターリード7と一体に構成し
ており、他方の電気信号用インナーリード2´の一端は
樹脂封止体6の内部で切断されている。
One end of the inner lead 2 for electric signals is integrally formed with the outer lead 7 for electric signal, and the other end of the inner lead 2 ′ for electric signal is inside the resin sealing body 6. Has been cut off with.

【0033】電気信号用インナーリ−ド2、2´の間に
は、第2絶縁部材8が配置されており、この絶縁部材8
は電気信号用インナーリ−ド2、2´の積層部2aで保
持、固定されている。第2絶縁部材の形状は図2に点線
で示すように長方形である。
A second insulating member 8 is arranged between the electric signal inner leads 2 and 2 '.
Is held and fixed by the laminated portion 2a of the electric signal inner leads 2, 2 '. The shape of the second insulating member is a rectangle as shown by the dotted line in FIG.

【0034】本実施例で示した樹脂封止型半導体装置で
は、第2絶縁部材8は図3に示すように接着剤9によっ
て電気信号用インナーリード2、2´に接着されてい
る。電気信号用インナーリード2、2´同士は、第2絶
縁部材8が接着されていない積層部2aで溶接などによ
り接合されている。
In the resin-sealed semiconductor device shown in this embodiment, the second insulating member 8 is adhered to the electric signal inner leads 2, 2'by the adhesive 9 as shown in FIG. The electric signal inner leads 2, 2'are joined by welding or the like at the laminated portion 2a to which the second insulating member 8 is not adhered.

【0035】第2絶縁部材8を電気信号用インナーリー
ド2、2´に接着するため、電気信号用インナーリード
2、2´が半導体素子1、1´の投影面積内に存在する
部分および第2絶縁部材8の接着部分は、他より薄肉に
なっている。
Since the second insulating member 8 is adhered to the electric signal inner leads 2, 2 ', the electric signal inner leads 2, 2'are present in the projected area of the semiconductor element 1, 1'and the second portion. The bonded portion of the insulating member 8 is thinner than the others.

【0036】本実施例では、半導体素子1、1´、電気
信号用インナーリード2、2´、絶縁部材3、3´、金
属細線4、4´および第2絶縁部材8を樹脂5で封止し
て半導体装置を形成する。
In this embodiment, the semiconductor elements 1, 1 ′, the inner leads 2, 2 ′ for electric signals, the insulating members 3, 3 ′, the thin metal wires 4, 4 ′ and the second insulating member 8 are sealed with the resin 5. Then, a semiconductor device is formed.

【0037】本実施例によれば、電気信号用インナーリ
ード2、2´間に絶縁部材を介在させることによって、
金属細線4、4´同士の接触を妨げることができ、金属
細線同士のショートを防止することができる。それによ
って半導体素子の機能低下もしくは破壊が無くなり、金
属細線のショート防止も考慮した信頼性の高い樹脂封止
型半導体装置を得ることができる。
According to this embodiment, by interposing an insulating member between the electric signal inner leads 2, 2 ',
It is possible to prevent the contact between the metal thin wires 4 and 4'and prevent a short circuit between the metal thin wires. As a result, the function of the semiconductor element is not deteriorated or destroyed, and a highly reliable resin-sealed semiconductor device can be obtained in consideration of prevention of short circuit of the metal thin wire.

【0038】また、本実施例に示したように半導体素子
1、1´とほぼ同じサイズの第2絶縁部材8を介在させ
ることによって、電気信号用インナーリード2、2´同
士の接合時に発生する熱などから半導体素子1、1´を
保護することができる。
Further, as shown in this embodiment, by interposing the second insulating member 8 having substantially the same size as that of the semiconductor elements 1 and 1 ', this occurs when the electrical signal inner leads 2 and 2'are joined together. It is possible to protect the semiconductor elements 1, 1'from heat or the like.

【0039】次に、本実施例に示した樹脂封止型半導体
装置の製造方法について説明する。
Next, a method of manufacturing the resin-sealed semiconductor device shown in this embodiment will be described.

【0040】半導体素子1、1´の回路形成面1a、1
´aに、電気信号用インナーリード2、2´をそれぞれ
半導体素子1、1´と電気的に絶縁する絶縁部材3、3
´を介して接着剤により接着し半導体素子1、1´と電
気信号用インナーリード2、2´を、金属細線4、4´
によって電気的に接続する。一方の電気信号用インナー
リード2の電気信号用インナーリード同士の積層部2a
部分に第2絶縁部材8を接着剤9によって接着する。
Circuit forming surfaces 1a, 1 of the semiconductor elements 1, 1 '
In'a, insulating members 3, 3 for electrically insulating the inner leads 2, 2'for electric signals from the semiconductor elements 1, 1 ', respectively.
The semiconductor elements 1 and 1 ′ and the inner leads 2 and 2 ′ for electric signals are bonded to each other with an adhesive through the metal thin wires 4 and 4 ′.
To connect electrically. Laminated portion 2a of inner leads 2 for one electric signal of one inner lead 2 for electric signals
The second insulating member 8 is adhered to the portion with an adhesive 9.

【0041】次いで2個の半導体素子1、1´の、回路
形成面1a、1´a同士が対向して配置されるように電
気信号用インナーリード2、2´を重ね合わせ、他方の
電気信号用インナーリード2´の積層部2aに第2絶縁
部材8を接着剤9によって接着し、電気信号用インナー
リード2、2´の間に第2絶縁部材8を介在させる。
Then, the inner leads 2 and 2 ′ for electric signals are overlapped so that the circuit forming surfaces 1 a and 1 ′ of the two semiconductor elements 1 and 1 ′ are opposed to each other, and the other electric signal is formed. The second insulating member 8 is adhered to the laminated portion 2a of the inner lead 2'for electrical connection with the adhesive 9, and the second insulating member 8 is interposed between the inner leads 2, 2'for electric signals.

【0042】電気信号用インナーリード同士は、積層部
2aではんだ、レーザ溶接あるいは抵抗溶接などによっ
て接合する。一方の電気信号用インナーリード2´の一
端は樹脂封止体6の内部で切断し、その後これらを樹脂
5で封止する。他方の電気信号用インナーリード2の一
端は樹脂封止体6の外部で電気信号用アウターリード7
となり、所定の形状に成型される。
The electric signal inner leads are joined to each other at the laminated portion 2a by soldering, laser welding or resistance welding. One end of one of the electric signal inner leads 2 ′ is cut inside the resin encapsulation body 6 and then these are encapsulated with the resin 5. One end of the other electric signal inner lead 2 is outside the resin encapsulation body 6 and the electric signal outer lead 7 is provided.
And is molded into a predetermined shape.

【0043】絶縁部材3、3´および第2絶縁部材8と
しては、エポキシ系樹脂、フェノール樹脂、ポリイミド
樹脂などから選択された1種又は複数の樹脂を主成分と
し、これに必要に応じて無機質フィラ−、各種添加剤な
どを加えた材料を使用する。
The insulating members 3 and 3'and the second insulating member 8 contain, as a main component, one or more resins selected from epoxy resins, phenol resins, polyimide resins, etc. A material containing a filler and various additives is used.

【0044】電気信号用インナーリード2、2´及び電
気信号用アウターリード7は、例えば、Fe−Ni合金
(Fe−42Niなど)、Cu合金などで形成されてい
る。
The electric signal inner leads 2 and 2'and the electric signal outer leads 7 are formed of, for example, an Fe-Ni alloy (Fe-42Ni or the like), a Cu alloy, or the like.

【0045】金属細線4、4´にはアルミニウム(A
l)、金(Au)、あるいは銅(Cu)などの細線を使
用する。
Aluminum (A
1), gold (Au), copper (Cu), or other thin wire is used.

【0046】樹脂5には、フェノール系硬化剤、シリコ
ーンゴム及びフィラーが添加されたエポキシ樹脂を使用
し、この他に難燃化剤、カップリング剤、着色剤などが
若干量添加されている。フィラーは酸化珪素粒で形成さ
れている。
The resin 5 is an epoxy resin to which a phenolic curing agent, silicone rubber and a filler are added, and a flame retardant, a coupling agent, a coloring agent and the like are added in a small amount. The filler is formed of silicon oxide particles.

【0047】電気信号用アウターリード7が樹脂封止体
6の外部に引き出されている方向は図1に示したような
2方向に限定するものではなく、1方向あるいは3方向
以上であっても良い。更に図では電気信号用アウターリ
ード7を下方に折り曲げ、その先端を樹脂封止体6の下
面まで曲げたJベンド型を例にとって示してあるが、電
気信号用アウターリード7は任意の方向、形状に折り曲
げても良いし、また折り曲げなくとも良い。
The direction in which the electric signal outer leads 7 are drawn out of the resin encapsulant 6 is not limited to two directions as shown in FIG. 1, but may be one direction or three or more directions. good. Further, in the figure, the J-bend type in which the outer lead 7 for electric signal is bent downward and the tip thereof is bent to the lower surface of the resin encapsulant 6 is shown as an example, but the outer lead 7 for electric signal is formed in any direction and shape. It may or may not be bent.

【0048】図1に示した実施例では、電気信号用イン
ナーリード2、2´に部分的に薄肉部を設けて、この薄
肉部に第2絶縁部材8を接着する例を示したが、図4に
示すように電気信号用インナーリード2、2´に薄肉部
を設けずに絶縁部材8を電気信号用インナーリード2、
2´に接着しても差し支えない。
In the embodiment shown in FIG. 1, the inner leads 2, 2'for electric signals are partially provided with a thin portion, and the second insulating member 8 is bonded to the thin portion. As shown in FIG. 4, the insulating member 8 is attached to the electric signal inner leads 2 and 2 ′ without providing a thin portion on the electric signal inner leads 2 and 2 ′.
It does not matter if it is glued to 2 '.

【0049】また図1および図4に示した実施例では、
第2絶縁部材を電気信号用インナーリード2、2´に接
着するのとは異なる手段によって電気信号用インナーリ
ード2、2´同士を接合する例を示した。
Further, in the embodiment shown in FIGS. 1 and 4,
An example has been shown in which the electric signal inner leads 2, 2'are joined together by a means different from the method of adhering the second insulating member to the electric signal inner leads 2, 2 '.

【0050】しかし、図5に示すように第2の絶縁部材
8を電気信号用インナーリードに接着するための接着剤
9を用いて電気信号用インナーリード2、2´同士を接
合しても良い。この場合、接着剤9には導電性の接着剤
を使用する。
However, as shown in FIG. 5, the electric signal inner leads 2, 2'may be joined together by using an adhesive 9 for adhering the second insulating member 8 to the electric signal inner leads. .. In this case, a conductive adhesive is used as the adhesive 9.

【0051】第2絶縁部材8は、少なくとも金属細線
4、4´自身と金属細線4、4´が半導体素子1、1´
および電気信号用インナーリード2、2´に接続される
部分を含む領域の投影面積内に配置され、金属細線同士
4、4´のショートを防止できるものであればその大き
さ、形状は図2に示したような半導体素子1、1´とほ
ぼ同じ大きさの長方形状に限定されるものではない。
In the second insulating member 8, at least the metal thin wires 4 and 4'and the metal thin wires 4 and 4'are semiconductor elements 1 and 1 '.
And the size and shape of the thin wires 4 and 4 ', which are arranged within the projected area of the region including the portions connected to the inner leads 2 and 2'for electric signals and which can prevent short-circuiting between the thin metal wires 4 and 4'. It is not limited to the rectangular shape having substantially the same size as the semiconductor elements 1 and 1'as shown in FIG.

【0052】図6、図7は第2絶縁部材8の他の形状の
例を示す本発明による樹脂封止型半導体装置である。図
6は第2絶縁部材の形状を示すため、第2絶縁部材から
下の部分を取り除いた平面図である。第2絶縁部材8の
形状は図6中の点線で示す。図7は図6に示した樹脂封
止型半導体装置のロ−ロ線断面図である。
6 and 7 show a resin-sealed semiconductor device according to the present invention showing another example of the shape of the second insulating member 8. FIG. 6 is a plan view showing the shape of the second insulating member with the lower portion removed from the second insulating member. The shape of the second insulating member 8 is shown by the dotted line in FIG. FIG. 7 is a cross-sectional view of the resin-sealed semiconductor device shown in FIG.

【0053】第2絶縁部材8は、金属細線4、4´自身
と金属細線4、4´が半導体素子1、1´および電気信
号用インナーリード2、2´に接続される部分を含む領
域の投影面積内に配置されている。
The second insulating member 8 is formed in a region including the metal thin wires 4 and 4 ′ itself and a portion where the metal thin wires 4 and 4 ′ are connected to the semiconductor elements 1 and 1 ′ and the inner leads 2 and 2 ′ for electric signals. It is located within the projected area.

【0054】図8、図9は第2絶縁部材のさらに他の形
状の例を示す本発明による樹脂封止型半導体装置であ
る。図8は第2絶縁部材の形状を示すため、第2絶縁部
材から下の部分を取り除いた平面図である。図9は図8
に示した樹脂封止型半導体装置のハ−ハ線断面図であ
る。
FIG. 8 and FIG. 9 show a resin-sealed semiconductor device according to the present invention showing an example of still another shape of the second insulating member. FIG. 8 is a plan view showing the shape of the second insulating member with the lower portion removed from the second insulating member. 9 is shown in FIG.
3 is a cross-sectional view of the resin-encapsulated semiconductor device shown in FIG.

【0055】第2絶縁部材8は、金属細線4、4´同士
のショートが発生しやすい半導体素子1、1´と金属細
線4、4´までの距離が最も大きくなる領域のみに設置
されている。図6および図8に示したような形状の第2
絶縁部材8を用いた樹脂封止型半導体装置であっても、
金属細線同士のショートを防止することができる。
The second insulating member 8 is installed only in a region where the distance between the semiconductor thin wires 1 and 4 ', which are likely to cause a short circuit between the thin metal wires 4 and 4', and the thin metal wires 4 and 4 ', becomes the largest. .. The second shape as shown in FIG. 6 and FIG.
Even in a resin-sealed semiconductor device using the insulating member 8,
It is possible to prevent a short circuit between the thin metal wires.

【0056】図10、図11は第2絶縁部材のさらに他
の形状の例を示す本発明による樹脂封止型半導体装置で
ある。図10は第2絶縁部材の形状を示すため、第2絶
縁部材から下の部分を取り除いた平面図である。
10 and 11 show a resin-sealed semiconductor device according to the present invention showing an example of still another shape of the second insulating member. FIG. 10 is a plan view showing the shape of the second insulating member with the lower portion removed from the second insulating member.

【0057】図11は図10に示した樹脂封止型半導体
装置のニ−ニ線断面図である。第2絶縁部材8は、金属
細線4、4´同士のショートが発生しやすい部分と電気
信号用インナーリード2、2´同士の積層部2a内に設
けられている。
FIG. 11 is a cross-sectional view of the resin-sealed semiconductor device shown in FIG. The second insulating member 8 is provided in a portion where the short-circuiting between the metal thin wires 4 and 4'is likely to occur and the laminated portion 2a between the inner leads 2 and 2'for electric signals.

【0058】本実施例に示した樹脂封止型半導体では、
金属細線同士のショートを防止することができるととも
に、電気信号用インナーリード同士の接合時に発生する
熱などから半導体素子を保護することもできる。
In the resin-sealed semiconductor shown in this embodiment,
It is possible to prevent a short circuit between the metal thin wires and protect the semiconductor element from heat generated when the inner leads for electric signals are joined.

【0059】図12は本発明の他の実施例を示す樹脂封
止型半導体装置の断面図、図13は図12に示した樹脂
封止型半導体装置の部分拡大断面図である。
FIG. 12 is a sectional view of a resin-sealed semiconductor device showing another embodiment of the present invention, and FIG. 13 is a partially enlarged sectional view of the resin-sealed semiconductor device shown in FIG.

【0060】図1に示した実施例では、電気信号用イン
ナーリード2、2´間に一枚の第2絶縁部材を介在させ
る例を示したが、第2絶縁部材8を2枚以上介在させた
ものであっても差し支えない。
Although the embodiment shown in FIG. 1 shows an example in which one second insulating member is interposed between the electric signal inner leads 2 and 2 ', two or more second insulating members 8 are interposed. It does not matter even if it is a thing.

【0061】図12、図13は電気信号用インナーリー
ド2、2´間に2枚の第2絶縁部材3を介在させた例を
示す本発明による樹脂封止型半導体装置である。図にお
いて電気信号用インナーリード2、2´間には、第2絶
縁部材8、8´が配置されており、この絶縁部材8、8
´は電気信号用インナーリード2、2´の積層部2aで
保持されている。
12 and 13 show a resin-sealed semiconductor device according to the present invention showing an example in which two second insulating members 3 are interposed between the electric signal inner leads 2 and 2 '. In the figure, a second insulating member 8, 8'is arranged between the electric signal inner leads 2, 2 '. The insulating member 8, 8'
′ Is held by the laminated portion 2a of the electric signal inner leads 2, 2 ′.

【0062】第2絶縁部材8、8´はそれぞれ接着剤9
によって電気信号用インナーリード2、2´に接着され
ており、第2絶縁部材8、8´同士も接着剤9によって
接着されている。
The second insulating members 8 and 8'are each made of an adhesive 9
Are adhered to the electric signal inner leads 2 and 2 ′, and the second insulating members 8 and 8 ′ are also adhered to each other with an adhesive 9.

【0063】電気信号用インナーリード2、2´同士
は、第2絶縁部材8、8´が接着されていない積層部2
a内部で溶接などによって接合されている。
The inner leads 2, 2'for electrical signals have a laminated portion 2 in which the second insulating members 8, 8'are not adhered.
It is joined by welding or the like inside a.

【0064】第2絶縁部材8、8´をそれぞれ電気信号
用インナーリード2、2´に接着するため、電気信号用
インナーリード2、2´が半導体素子1、1´の投影面
積内に存在する部分および第2絶縁部材8の接着部分
は、他より薄肉になっている。
Since the second insulating members 8 and 8'are bonded to the electric signal inner leads 2 and 2 ', respectively, the electric signal inner leads 2 and 2'are present within the projected area of the semiconductor elements 1 and 1'. The part and the bonded part of the second insulating member 8 are thinner than the others.

【0065】次に、本実施例に示した樹脂封止型半導体
装置の製造方法について説明する。
Next, a method of manufacturing the resin-sealed semiconductor device shown in this embodiment will be described.

【0066】半導体素子1、1´の回路形成面1a、1
´aに、電気信号用インナーリード2、2´を夫々半導
体素子1、1´と電気的に絶縁する絶縁部材3、3´を
介して接着剤により接着し、半導体素子1、1´と電気
信号用インナーリード2、2´を、金属細線4、4´に
よって電気的に接続する。
Circuit forming surfaces 1a, 1 of the semiconductor elements 1, 1 '
The electrical signal inner leads 2 and 2'are bonded to the semiconductor element 1 and 1'by means of an adhesive through insulating members 3 and 3'which electrically insulate the semiconductor elements 1 and 1 ', respectively. The signal inner leads 2, 2'are electrically connected by the thin metal wires 4, 4 '.

【0067】第2絶縁部材8、8´をそれぞれ電気信号
用インナーリード2、2´の電気信号用インナーリード
同士の積層部2a部分に接着剤9によって接着する。
The second insulating members 8 and 8'are adhered to the laminated portions 2a of the electric signal inner leads 2 and 2'of the electric signal inner leads, respectively, with the adhesive 9.

【0068】次いで、2個の半導体素子1、1´の、回
路形成面1a、1´a同士が対向して配置されるように
電気信号用インナーリード2、2´を重ね合わせ、第2
絶縁部材8、8´同士を接着剤9によって接着し、電気
信号用インナーリード2、2´の間に第2絶縁部材8を
介在させる。
Then, the inner leads 2 and 2'for electric signals are superposed so that the circuit forming surfaces 1a and 1'a of the two semiconductor elements 1 and 1'are arranged so as to face each other.
The insulating members 8 and 8'are adhered to each other with the adhesive 9, and the second insulating member 8 is interposed between the electric signal inner leads 2 and 2 '.

【0069】その後、電気信号用インナーリード同士
を、積層部2aではんだ、レーザ溶接あるいは抵抗溶接
などによって接合する。
Thereafter, the electric signal inner leads are joined together at the laminated portion 2a by soldering, laser welding, resistance welding or the like.

【0070】一方の電気信号用インナーリード2´の一
端は樹脂封止体6の内部で切断し、その後これらを樹脂
5で封止する。他方の電気信号用インナーリード2の一
端は樹脂封止体6の外部で電気信号用アウターリード7
となり、所定の形状に成型される。
One end of one of the inner leads 2 ′ for electric signals is cut inside the resin encapsulation body 6 and then these are encapsulated with the resin 5. One end of the other electric signal inner lead 2 is outside the resin encapsulation body 6 and the electric signal outer lead 7 is provided.
And is molded into a predetermined shape.

【0071】本実施例によっても、電気信号用インナー
リード2、2´間に介在させた絶縁部材によって、金属
細線同士のショートを防止することができる。
Also in this embodiment, it is possible to prevent a short circuit between the fine metal wires by the insulating member interposed between the inner leads 2, 2'for electric signals.

【0072】図12に示した実施例では、電気信号用イ
ンナーリード2、2´に部分的に薄肉部を設けて、この
薄肉部に第2絶縁部材8、8´をそれぞれ接着する例を
示したが、図14に示すように電気信号用インナーリー
ド2、2´に薄肉部を設けずに絶縁部材8、8´を夫々
電気信号用インナーリード2、2´に接着しても差し支
えない。
The embodiment shown in FIG. 12 shows an example in which the inner leads 2 and 2'for electric signals are partially provided with thin portions and the second insulating members 8 and 8'are respectively bonded to the thin portions. However, as shown in FIG. 14, the insulating members 8 and 8 ′ may be adhered to the electric signal inner leads 2 and 2 ′, respectively, without providing the thin portions on the electric signal inner leads 2 and 2 ′.

【0073】図14に示した実施例では電気信号用イン
ナーリード2、2´同士の接合は、はんだあるいは導電
性接着剤9´で行う。
In the embodiment shown in FIG. 14, the electric signal inner leads 2, 2'are joined together by solder or a conductive adhesive 9 '.

【0074】[0074]

【発明の効果】本発明によれば、複数の高集積半導体素
子を半導体装置内に搭載しても、半導体装置の外形寸法
が大形化せず、充分なリード固定強度が得られると共
に、金属細線同士のショートを防止することによって半
導体素子の機能低下あるいは破壊がなくなり、信頼性の
高い樹脂封止型半導体装置を得ることができる。
According to the present invention, even when a plurality of highly integrated semiconductor elements are mounted in a semiconductor device, the external dimensions of the semiconductor device do not become large, and sufficient lead fixing strength can be obtained and metal By preventing short-circuiting between the thin wires, the functional deterioration or destruction of the semiconductor element is eliminated, and a highly reliable resin-sealed semiconductor device can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す樹脂封止型半導体装置
の断面図である。
FIG. 1 is a cross-sectional view of a resin-encapsulated semiconductor device showing an embodiment of the present invention.

【図2】図1に示した本発明の樹脂封止型半導体装置の
第2絶縁部材の形状を示す平面図である。
FIG. 2 is a plan view showing a shape of a second insulating member of the resin-sealed semiconductor device of the present invention shown in FIG.

【図3】図1に示した本発明の樹脂封止型半導体装置の
第2絶縁部材を電気信号用インナーリードへ接着する方
法を示す部分断面図である。
3 is a partial cross-sectional view showing a method of adhering a second insulating member of the resin-sealed semiconductor device of the present invention shown in FIG. 1 to an inner lead for electric signal.

【図4】図1に示した本発明の樹脂封止型半導体装置の
第2絶縁部材を電気信号用インナーリードへ接着する他
の方法を示す部分断面図である。
FIG. 4 is a partial cross-sectional view showing another method of adhering the second insulating member of the resin-sealed semiconductor device of the present invention shown in FIG. 1 to the inner lead for electric signal.

【図5】図1に示した本発明の樹脂封止型半導体装置の
第2絶縁部材を電気信号用インナーリードへ接着するの
と同時に電気信号用インナーリード同士を接着する方法
を示す部分断面図である。
5 is a partial cross-sectional view showing a method of bonding the second insulating member of the resin-encapsulated semiconductor device of the present invention shown in FIG. 1 to the inner leads for electric signals and at the same time bonding the inner leads for electric signals to each other. Is.

【図6】第2絶縁部材の他の形状の例を示す本発明によ
る樹脂封止型半導体装置の平面図である。
FIG. 6 is a plan view of a resin-sealed semiconductor device according to the present invention showing another example of the shape of the second insulating member.

【図7】図6に示した樹脂封止型半導体装置のロ−ロ線
断面図である。
7 is a cross-sectional view of the resin-sealed semiconductor device shown in FIG.

【図8】第2絶縁部材のさらに他の形状の例を示す本発
明による樹脂封止型半導体装置の平面図である。
FIG. 8 is a plan view of a resin-sealed semiconductor device according to the present invention, showing an example of still another shape of the second insulating member.

【図9】図8に示した樹脂封止型半導体装置のハ−ハ線
断面図である。
9 is a cross-sectional view of the resin-encapsulated semiconductor device shown in FIG. 8 taken along the line of FIG.

【図10】第2絶縁部材のさらに他の形状の例を示す本
発明による樹脂封止型半導体装置の平面図である。
FIG. 10 is a plan view of a resin-sealed semiconductor device according to the present invention showing still another example of the shape of the second insulating member.

【図11】図10に示した樹脂封止型半導体装置のニ−
ニ線断面図である。
FIG. 11 is a view of the resin-sealed semiconductor device shown in FIG.
FIG.

【図12】本発明の他の一実施例を示す樹脂封止型半導
体装置の断面図である。
FIG. 12 is a sectional view of a resin-encapsulated semiconductor device showing another embodiment of the present invention.

【図13】図12に示した本発明の樹脂封止型半導体装
置の第2絶縁部材を電気信号用インナーリードへ接着す
る方法を示す部分断面図である。
13 is a partial cross-sectional view showing a method of adhering the second insulating member of the resin-sealed semiconductor device of the present invention shown in FIG. 12 to an inner lead for electric signal.

【図14】図12に示した樹脂封止型半導体装置の第2
絶縁部材を電気信号用インナーリードへ接着する他の方
法を示す部分断面図である。
14 is a second view of the resin-sealed semiconductor device shown in FIG.
It is a fragmentary sectional view showing other methods of pasting up an insulating member to an inner lead for electric signals.

【図15】従来のリード・オン・チップ構造の半導体素
子を2個積層した樹脂封止型半導体装置の例を示す断面
図である。
FIG. 15 is a cross-sectional view showing an example of a conventional resin-encapsulated semiconductor device in which two semiconductor elements having a lead-on-chip structure are laminated.

【符号の説明】[Explanation of symbols]

1、1´…半導体素子、1a、1a´…回路形成面、
2、2´…電気信号用インナーリード、2a…積層部、
3、3´…絶縁部材、4、4´…金属細線、5…樹脂、
6…樹脂封止体、7…電気信号用アウターリード、8、
8´…第2絶縁部材、9、9´…接着剤。
1, 1 '... semiconductor element, 1a, 1a' ... circuit forming surface,
2, 2 '... inner lead for electric signal, 2a ... laminated part,
3, 3 '... Insulating member 4, 4' ... Thin metal wire, 5 ... Resin,
6 ... Resin sealing body, 7 ... Outer lead for electric signal, 8,
8 '... 2nd insulating member, 9, 9' ... Adhesive.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 河野 竜治 茨城県土浦市神立町502番地 株式会社日 立製作所機械研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Ryuji Kono 502 Jinmachi-cho, Tsuchiura-shi, Ibaraki Pref.

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】少なくとも2個の半導体素子の回路形成面
同士が対向するように半導体素子を配置し、各半導体素
子の回路形成面に第1の絶縁部材を接着し、該第1の絶
縁部材の上に電気信号用リードを配設し、該電気信号用
リードと前記半導体素子とを夫々電気的に接続し、該各
電気信号用リード同士を接合し、これらの周囲を樹脂で
封止して樹脂封止体を形成した樹脂封止型半導体装置に
おいて、前記電気信号用リードの対向面間に封止樹脂以
外の第2の絶縁部材を介在させたことを特徴とする樹脂
封止型半導体装置。
1. A semiconductor element is arranged such that the circuit forming surfaces of at least two semiconductor elements face each other, and a first insulating member is bonded to the circuit forming surface of each semiconductor element. An electrical signal lead is disposed on the above, the electrical signal lead and the semiconductor element are electrically connected to each other, the electrical signal leads are joined to each other, and the periphery thereof is sealed with resin. In a resin-encapsulated semiconductor device in which a resin encapsulant is formed by means of a resin-encapsulated semiconductor device, a second insulating member other than encapsulating resin is interposed between the facing surfaces of the electrical signal leads. apparatus.
【請求項2】前記第2の絶縁部材を前記電気信号用リー
ドに接着したことを特徴とする請求項1記載の樹脂封止
型半導体装置。
2. The resin-encapsulated semiconductor device according to claim 1, wherein the second insulating member is bonded to the electrical signal lead.
【請求項3】前記第2の絶縁部材を前記電気信号用リー
ドに導電性接着剤で接着したことを特徴とする請求項1
記載の樹脂封止型半導体装置。
3. The second insulating member is bonded to the electrical signal lead with a conductive adhesive.
The resin-encapsulated semiconductor device described.
【請求項4】少なくとも2個の半導体素子の回路形成面
同士が対向するように半導体素子を配置し、各半導体素
子の回路形成面に第1の絶縁部材を接着し、該第1の絶
縁部材の上に電気信号用リードを配設し、該電気信号用
リードと前記半導体素子とを夫々金属細線で電気的に接
続し、該各電気信号用リード同士を接合し、これらの周
囲を樹脂で封止して樹脂封止体を形成した樹脂封止型半
導体装置において、対向する前記半導体素子夫々の側の
金属細線同士を絶縁する部材でかつ封止樹脂以外の第2
の絶縁部材を備えたことを特徴とする樹脂封止型半導体
装置。
4. A semiconductor element is arranged such that the circuit forming surfaces of at least two semiconductor elements face each other, and a first insulating member is adhered to the circuit forming surface of each semiconductor element. An electric signal lead is disposed on the above, the electric signal lead and the semiconductor element are electrically connected to each other by a thin metal wire, the electric signal leads are joined to each other, and the periphery thereof is made of resin. In a resin-encapsulated semiconductor device in which a resin encapsulant is formed by encapsulating, a second member other than the encapsulating resin, which is a member that insulates the metal thin wires on the sides of the semiconductor elements facing each other
A resin-encapsulated semiconductor device, comprising:
【請求項5】少なくとも2個の半導体素子の回路形成面
同士が対向するように半導体素子を配置し、各半導体素
子の回路形成面に第1の絶縁部材を接着し、該第1の絶
縁部材の上に電気信号用リードを配設し、該電気信号用
リードと前記半導体素子とを夫々金属細線で電気的に接
続し、該各電気信号用リード同士を接合し、これらの周
囲を樹脂で封止して樹脂封止体を形成した樹脂封止型半
導体装置において、前記電気信号用リード間の金属細線
が配設されている領域に封止樹脂以外の第2の絶縁部材
を介在させたことを特徴とする樹脂封止型半導体装置。
5. A semiconductor element is arranged such that the circuit forming surfaces of at least two semiconductor elements face each other, and a first insulating member is adhered to the circuit forming surface of each semiconductor element. An electric signal lead is disposed on the above, the electric signal lead and the semiconductor element are electrically connected to each other by a thin metal wire, the electric signal leads are joined to each other, and the periphery thereof is made of resin. In a resin-encapsulated semiconductor device in which a resin encapsulant is formed by encapsulation, a second insulating member other than the encapsulating resin is interposed in the region where the thin metal wires are arranged between the electrical signal leads. A resin-encapsulated semiconductor device characterized by the above.
【請求項6】少なくとも2個の半導体素子の回路形成面
同士が対向するように半導体素子を配置し、各半導体素
子の回路形成面に第1の絶縁部材を接着し、該第1の絶
縁部材の上に電気信号用リードを配設し、該電気信号用
リードと前記半導体素子とを夫々金属細線で電気的に接
続し、該各電気信号用リード同士を接合し、これらの周
囲を樹脂で封止して樹脂封止体を形成した樹脂封止型半
導体装置において、前記電気信号用リード間の金属細線
が配設されている領域と前記電気信号用リード同士の接
合部の周辺に封止樹脂以外の第2の絶縁部材を介在させ
たことを特徴とする樹脂封止型半導体装置。
6. A semiconductor element is arranged such that the circuit forming surfaces of at least two semiconductor elements face each other, and a first insulating member is adhered to the circuit forming surface of each semiconductor element. An electric signal lead is disposed on the above, the electric signal lead and the semiconductor element are electrically connected to each other by a thin metal wire, the electric signal leads are joined to each other, and the periphery thereof is made of resin. In a resin-encapsulated semiconductor device in which a resin encapsulant is formed by encapsulation, encapsulation is performed around a region where a thin metal wire is provided between the electrical signal leads and a joint between the electrical signal leads. A resin-encapsulated semiconductor device, wherein a second insulating member other than resin is interposed.
【請求項7】少なくとも2個の半導体素子の回路形成面
同士が対向するように半導体素子を配置し、各半導体素
子の回路形成面に第1の絶縁部材を接着し、該第1の絶
縁部材の上に電気信号用リードを配設し、該電気信号用
リードと前記半導体素子とを夫々金属細線で電気的に接
続し、該各電気信号用リード同士を接合し、これらの周
囲を樹脂で封止して樹脂封止体を形成した樹脂封止型半
導体装置において、前記電気信号用リードの間に封止樹
脂以外の複数の第2の絶縁部材を介在させたことを特徴
とする樹脂封止型半導体装置。
7. A semiconductor element is arranged such that the circuit forming surfaces of at least two semiconductor elements face each other, and a first insulating member is bonded to the circuit forming surface of each semiconductor element, and the first insulating member is provided. An electric signal lead is disposed on the above, the electric signal lead and the semiconductor element are electrically connected to each other by a thin metal wire, the electric signal leads are joined to each other, and the periphery thereof is made of resin. In a resin-encapsulated semiconductor device in which a resin encapsulation body is formed by encapsulation, a plurality of second insulating members other than encapsulation resin are interposed between the electrical signal leads. Static semiconductor device.
【請求項8】半導体素子の回路形成面に第1の絶縁部材
を接着し、該第1の絶縁部材の上に電気信号用リードを
配設し、該電気信号用リードと前記半導体素子とを夫々
金属細線で電気的に接続し、該電気信号用リード上に第
2の絶縁部材が接着されている少なくとも2個の半導体
素子を、半導体素子の回路形成面同士が対向するように
積層し、これらの周囲を樹脂で封止して樹脂封止体を形
成したことを特徴とする樹脂封止型半導体装置。
8. A first insulating member is adhered to a circuit forming surface of a semiconductor element, an electric signal lead is disposed on the first insulating member, and the electric signal lead and the semiconductor element are connected to each other. Each of them is electrically connected by a thin metal wire, and at least two semiconductor elements in which the second insulating member is adhered on the electrical signal leads are laminated so that the circuit forming surfaces of the semiconductor elements face each other, A resin-encapsulated semiconductor device, characterized in that the periphery thereof is encapsulated with a resin to form a resin encapsulant.
JP24088891A 1991-09-20 1991-09-20 Resin sealed type semiconductor device Pending JPH0582720A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24088891A JPH0582720A (en) 1991-09-20 1991-09-20 Resin sealed type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24088891A JPH0582720A (en) 1991-09-20 1991-09-20 Resin sealed type semiconductor device

Publications (1)

Publication Number Publication Date
JPH0582720A true JPH0582720A (en) 1993-04-02

Family

ID=17066186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24088891A Pending JPH0582720A (en) 1991-09-20 1991-09-20 Resin sealed type semiconductor device

Country Status (1)

Country Link
JP (1) JPH0582720A (en)

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Publication number Priority date Publication date Assignee Title
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KR100285664B1 (en) * 1998-05-15 2001-06-01 박종섭 Stack package and method for fabricating the same
JP2003028700A (en) * 2001-07-16 2003-01-29 Hisashi Ando Apparatus for measuring axle load of traveling motor vehicle
US6841883B1 (en) 2003-03-31 2005-01-11 Micron Technology, Inc. Multi-dice chip scale semiconductor components and wafer level methods of fabrication
US6858467B2 (en) 1999-09-01 2005-02-22 Micron Technology, Inc. Method for fabricating semiconductor packages with stacked dice and leadframes
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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100226737B1 (en) * 1996-12-27 1999-10-15 구본준 Semiconductor device stacked package
KR100285664B1 (en) * 1998-05-15 2001-06-01 박종섭 Stack package and method for fabricating the same
US6316825B1 (en) * 1998-05-15 2001-11-13 Hyundai Electronics Industries Co., Ltd. Chip stack package utilizing a connecting hole to improve electrical connection between leadframes
US6677181B2 (en) * 1998-05-15 2004-01-13 Hyundai Electronics Industries Co., Ltd. Method for fabricating stacked chip package device
US6858467B2 (en) 1999-09-01 2005-02-22 Micron Technology, Inc. Method for fabricating semiconductor packages with stacked dice and leadframes
JP2003028700A (en) * 2001-07-16 2003-01-29 Hisashi Ando Apparatus for measuring axle load of traveling motor vehicle
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US7432600B2 (en) 2003-01-27 2008-10-07 Micron Technology, Inc. System having semiconductor component with multiple stacked dice
US7335994B2 (en) 2003-01-27 2008-02-26 Micron Technology, Inc. Semiconductor component having multiple stacked dice
US7388294B2 (en) 2003-01-27 2008-06-17 Micron Technology, Inc. Semiconductor components having stacked dice
US7060526B2 (en) 2003-03-31 2006-06-13 Micron Technology, Inc. Wafer level methods for fabricating multi-dice chip scale semiconductor components
US7224051B2 (en) 2003-03-31 2007-05-29 Micron Technology, Inc. Semiconductor component having plate and stacked dice
US6998717B2 (en) 2003-03-31 2006-02-14 Micron Technology, Inc. Multi-dice chip scale semiconductor components
US7459393B2 (en) 2003-03-31 2008-12-02 Micron Technology, Inc. Method for fabricating semiconductor components with thinned substrate, circuit side contacts, conductive vias and backside contacts
US7498675B2 (en) 2003-03-31 2009-03-03 Micron Technology, Inc. Semiconductor component having plate, stacked dice and conductive vias
US6841883B1 (en) 2003-03-31 2005-01-11 Micron Technology, Inc. Multi-dice chip scale semiconductor components and wafer level methods of fabrication

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