JPH0580784B2 - - Google Patents

Info

Publication number
JPH0580784B2
JPH0580784B2 JP60244976A JP24497685A JPH0580784B2 JP H0580784 B2 JPH0580784 B2 JP H0580784B2 JP 60244976 A JP60244976 A JP 60244976A JP 24497685 A JP24497685 A JP 24497685A JP H0580784 B2 JPH0580784 B2 JP H0580784B2
Authority
JP
Japan
Prior art keywords
exb
ion beam
aperture
blanking
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60244976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62103949A (ja
Inventor
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP60244976A priority Critical patent/JPS62103949A/ja
Publication of JPS62103949A publication Critical patent/JPS62103949A/ja
Publication of JPH0580784B2 publication Critical patent/JPH0580784B2/ja
Granted legal-status Critical Current

Links

JP60244976A 1985-10-30 1985-10-30 集束イオンビ−ム装置 Granted JPS62103949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60244976A JPS62103949A (ja) 1985-10-30 1985-10-30 集束イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60244976A JPS62103949A (ja) 1985-10-30 1985-10-30 集束イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS62103949A JPS62103949A (ja) 1987-05-14
JPH0580784B2 true JPH0580784B2 (enEXAMPLES) 1993-11-10

Family

ID=17126745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60244976A Granted JPS62103949A (ja) 1985-10-30 1985-10-30 集束イオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS62103949A (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0539555Y2 (enEXAMPLES) * 1986-08-29 1993-10-07

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220263A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd イオンマイクロビ−ム装置

Also Published As

Publication number Publication date
JPS62103949A (ja) 1987-05-14

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