JPH0580095B2 - - Google Patents
Info
- Publication number
- JPH0580095B2 JPH0580095B2 JP2288073A JP28807390A JPH0580095B2 JP H0580095 B2 JPH0580095 B2 JP H0580095B2 JP 2288073 A JP2288073 A JP 2288073A JP 28807390 A JP28807390 A JP 28807390A JP H0580095 B2 JPH0580095 B2 JP H0580095B2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- ion beam
- slit
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 45
- 150000002500 ions Chemical class 0.000 claims description 41
- 238000000605 extraction Methods 0.000 claims description 30
- 230000004907 flux Effects 0.000 claims description 21
- 125000006850 spacer group Chemical group 0.000 claims description 12
- 230000005684 electric field Effects 0.000 claims description 11
- 239000000696 magnetic material Substances 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 13
- 239000002245 particle Substances 0.000 description 9
- 238000010849 ion bombardment Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- -1 oxygen ions Chemical class 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 1
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 230000009528 severe injury Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2288073A JPH04162331A (ja) | 1990-10-24 | 1990-10-24 | 冷陰極型シート状イオンビーム発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2288073A JPH04162331A (ja) | 1990-10-24 | 1990-10-24 | 冷陰極型シート状イオンビーム発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04162331A JPH04162331A (ja) | 1992-06-05 |
| JPH0580095B2 true JPH0580095B2 (https=) | 1993-11-05 |
Family
ID=17725464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2288073A Granted JPH04162331A (ja) | 1990-10-24 | 1990-10-24 | 冷陰極型シート状イオンビーム発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04162331A (https=) |
-
1990
- 1990-10-24 JP JP2288073A patent/JPH04162331A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04162331A (ja) | 1992-06-05 |
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