JPH057818B2 - - Google Patents
Info
- Publication number
- JPH057818B2 JPH057818B2 JP59086793A JP8679384A JPH057818B2 JP H057818 B2 JPH057818 B2 JP H057818B2 JP 59086793 A JP59086793 A JP 59086793A JP 8679384 A JP8679384 A JP 8679384A JP H057818 B2 JPH057818 B2 JP H057818B2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- cylinder
- rectangular cross
- section
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59086793A JPS60232654A (ja) | 1984-04-28 | 1984-04-28 | 走査形電子顕微鏡に於ける試料台装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59086793A JPS60232654A (ja) | 1984-04-28 | 1984-04-28 | 走査形電子顕微鏡に於ける試料台装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60232654A JPS60232654A (ja) | 1985-11-19 |
JPH057818B2 true JPH057818B2 (cs) | 1993-01-29 |
Family
ID=13896655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59086793A Granted JPS60232654A (ja) | 1984-04-28 | 1984-04-28 | 走査形電子顕微鏡に於ける試料台装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60232654A (cs) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS455382Y1 (cs) * | 1966-04-06 | 1970-03-14 | ||
JPS5948509B2 (ja) * | 1979-08-31 | 1984-11-27 | 株式会社国際精工 | 電子顕微鏡等の試料傾斜装置 |
JPS58144754U (ja) * | 1982-03-24 | 1983-09-29 | 株式会社明石製作所 | 試料移動装置 |
-
1984
- 1984-04-28 JP JP59086793A patent/JPS60232654A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60232654A (ja) | 1985-11-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |