JPH0577261B2 - - Google Patents
Info
- Publication number
- JPH0577261B2 JPH0577261B2 JP26758286A JP26758286A JPH0577261B2 JP H0577261 B2 JPH0577261 B2 JP H0577261B2 JP 26758286 A JP26758286 A JP 26758286A JP 26758286 A JP26758286 A JP 26758286A JP H0577261 B2 JPH0577261 B2 JP H0577261B2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- sample
- rays
- infrared rays
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000862 absorption spectrum Methods 0.000 claims description 17
- 238000005259 measurement Methods 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 102100025274 Monocarboxylate transporter 6 Human genes 0.000 description 2
- 108091006602 SLC16A5 Proteins 0.000 description 2
- 108091006603 SLC16A6 Proteins 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は極微小部分の赤外吸収スペクトル測定
を行う装置にかかわり、特に極微小部分の観察も
同時に行うことができ、極微小部分の物質の測定
を行うのに好適な赤外吸収スペクトル測定顕微鏡
装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an apparatus for measuring infrared absorption spectra of extremely small parts, and in particular, it is capable of simultaneously observing extremely small parts, and it is possible to observe substances in extremely small parts at the same time. The present invention relates to an infrared absorption spectrum measuring microscope device suitable for measuring.
一般に、赤外吸収スペクトル装置は公知のもの
であり、赤外光源、赤外光の各波長ごとの測定信
号を得るためのモノクロメータまたは干渉計、お
よび検知器等から構成されている。標準的な赤外
吸収スペクトル測定装置は、試料の測定位置に赤
外光を集束させ、赤外光を透過させて測定するよ
うに構成されている。従つて、赤外光に対し透明
な物質はこのような方法で測定できるが、赤外光
に対し不透明な物質は、その表面で反射、拡散す
る光を集めて測定する必要がある。このために
は、既成の、赤外分光光度計の赤外線を上記測定
試料へ導き、反射または拡散する赤外線を検出す
る装置を付設しなければならない。特に、測定す
る試料が極微小な場合は、特別な配慮が必要であ
る。このような配慮がなされた従来の装置とし
て、第20回応用スペクトロメトリ講演要旨集、第
69頁に記載の装置がある。この装置は、だ円面反
射鏡で赤外線を集束して斜めに試料に照射し、赤
外線を再びだ円面反射鏡で集めて検出するように
なつている。しかし、観察は上部から別の可視光
で行うようになつているため、測定部と観察して
いる場所とが異なる恐れがあり、極めて小さい試
料では正確に観察している場所の赤外吸収スペク
トルが測定できない欠点があつた。
In general, infrared absorption spectrometers are well known and are comprised of an infrared light source, a monochromator or interferometer for obtaining measurement signals for each wavelength of infrared light, a detector, and the like. A standard infrared absorption spectrum measurement device is configured to focus infrared light on a measurement position of a sample and to transmit the infrared light for measurement. Therefore, substances that are transparent to infrared light can be measured using this method, but for substances that are opaque to infrared light, it is necessary to collect and measure the light that is reflected and diffused on the surface of the substance. For this purpose, it is necessary to attach an existing device for guiding the infrared rays of an infrared spectrophotometer to the measurement sample and detecting the reflected or diffused infrared rays. In particular, special consideration is required when the sample to be measured is extremely small. As a conventional device with such considerations, the 20th Applied Spectrometry Lecture Abstracts, Vol.
There is a device described on page 69. This device uses an ellipsoidal reflector to focus infrared rays and irradiates the sample obliquely, and then uses an ellipsoidal reflector to collect the infrared rays again for detection. However, since observation is performed using different visible light from above, there is a risk that the measurement part and the location being observed may be different, and in the case of extremely small samples, the infrared absorption spectrum of the location being observed is accurate. There was a drawback that it could not be measured.
赤外吸収スペクトル測定用赤外線の光学系路
と、観察のための可視光線の光学系路とは、少な
くとも試料の測定点では一致している必要がある
が、上記従来技術は、必ず一致するようには配慮
されておらず、特に微小試料では、観察している
場所のどこを測定しているのか判らないという問
題があつた。
The infrared optical system path for infrared absorption spectrum measurement and the visible light optical system path for observation must match at least at the measurement point of the sample, but the conventional technology described above ensures that they always match. There was a problem in that it was not possible to determine which part of the observation area was being measured, especially for micro samples.
本発明の目的は、赤外吸収スペクトル測定用赤
外線の光学系路と、観察のための可視光線の光学
系路の一部を完全に一致させ、試料の赤外吸収ス
ペクトル測定点と観察点とを完全に一致させた赤
外吸収スペクトル測定顕微鏡装置を提供すること
にある。 An object of the present invention is to completely match a part of an infrared optical system path for infrared absorption spectrum measurement and a part of a visible light optical system path for observation, so that the infrared absorption spectrum measurement point and observation point of a sample can be completely matched. The object of the present invention is to provide an infrared absorption spectrum measuring microscope device that perfectly matches the above.
上記目的は、赤外分光光度計に、公知の可視光
線落射照明方式の金属顕微鏡を組合せて用い、赤
外分光光度計からの赤外光線を可視光線落射照明
光学系を通して顕微鏡に入射させ、顕微鏡の対物
レンズで赤外光線を被測定物に集光させ、試料で
反射した赤外光線を対物レンズで集め、この赤外
光線を検出器で受けて、被測定物の赤外吸収スペ
クトルを測定できるようにすることにより、達成
される。
The above purpose is to use an infrared spectrophotometer in combination with a known metallurgical microscope with visible light epi-illumination method, to make the infrared light from the infrared spectrophotometer enter the microscope through the visible light epi-illumination optical system, and to The infrared rays are focused on the object to be measured using an objective lens, the infrared rays reflected by the sample are collected by the objective lens, and the infrared rays are received by a detector to measure the infrared absorption spectrum of the object to be measured. This is achieved by making it possible.
公知の顕微鏡では、試料を照明するための落射
照明光と、試料から反射してくる観察のための光
が全く同じ場所を通るので、これらの光を分ける
ため、第１図の符号４および第５図に示すような
ハーフミラーが用いられている。このハーフミラ
ーは一般に厚さがあるため、光軸にずれを生じ
る。この可視光線と赤外光線のそれぞれのずれ
ｄ，dIRは、式(1)、(2)から求めることができる。 In known microscopes, the epi-illumination light for illuminating the sample and the light for observation reflected from the sample pass through the same location. A half mirror as shown in FIG. 5 is used. Since this half mirror is generally thick, it causes a shift in the optical axis. The respective deviations d and dIR between the visible light and the infrared light can be obtained from equations (1) and (2).
dVS＝ｔsin（90°−θ−ψVS）／cosψVS ……(1)
dIR＝ｔsin（90°−θ−ψIR）／cosψIR ……(2)
ここで、ｔはハーフミラーの厚さ、θはハーフ
ミラーの傾き、ψVS、ψIRは式(3)、(4)から求められ
る角度である。 d VS = tsin (90°-θ-ψ VS )/cosψ VS ...(1) d IR = tsin (90°-θ-ψ IR )/cosψ IR ...(2) Here, t is the half mirror's The thickness, θ is the inclination of the half mirror, and ψ VS and ψ IR are the angles obtained from equations (3) and (4).
ψVS＝sin-1・nair／nVS・sinθ ……(3)
ψIR＝sin-1・nair／nIR・sinθ ……(4)
なお、式(3)のnair、nVSは空気およびハーフミラ
ーの可視光線における屈折率、式(4)のnair、nIRは
赤外線のそれぞれの屈折率である。ハーフミラー
を、赤外光線および可視光線ともに使用できる材
料、例えば臭化カリウム（KBr）で作つた場合、
nVS＝1.5、nIR＝1.75、nair＝１であるから、θ＝45
度の場合、dVS＝0.329t、dIR＝0.395tとなる。従つ
て、ハーフミラーの厚さが例えば100μｍあると、
光軸は可視光線で32.9μｍ、赤外光線で35.9μｍず
れてしまう。そこで、本発明では、赤外光線に対
しては、右半分は全反射にし、左半分は全体の光
を透過する部分ミラーを用いている。しかし、赤
外光線では像の観察の必要がなく、このような反
射鏡でも使用できるが、可視光線では、このよう
な部分ミラーでは像が正しく観察できないので、
ハーフミラーを用いる必要がある。そこで、ハー
フミラーとしては、光軸のずれが無視できる厚さ
のもの（厚さが50μｍ以下）を使用している。 ψ VS = sin -1・n air /n VS・sinθ ...(3) ψ IR = sin -1・n air /n IR・sinθ ...(4) Note that n air and n VS in equation (3) is the refractive index of air and the half mirror in visible light, and n air and n IR in equation (4) are the respective refractive indices of infrared light. If the half mirror is made of a material that can be used with both infrared and visible light, such as potassium bromide (KBr),
Since n VS = 1.5, n IR = 1.75, n air = 1, θ = 45
In the case of degrees, d VS = 0.329t, d IR = 0.395t. Therefore, if the thickness of the half mirror is, for example, 100 μm,
The optical axis shifts by 32.9 μm for visible light and 35.9 μm for infrared light. Therefore, in the present invention, for infrared rays, a partial mirror is used in which the right half fully reflects the light and the left half transmits the entire light. However, with infrared light, there is no need to observe the image, and such a reflecting mirror can be used, but with visible light, the image cannot be observed correctly with a partial mirror like this.
It is necessary to use a half mirror. Therefore, a half mirror with a thickness (thickness of 50 μm or less) is used so that the deviation of the optical axis can be ignored.
この赤外光線を分光して検出するための赤外線
分光光度計は、一般にフーリエ変換赤外線分光光
度計が用いられているが、この種の分光光度計で
は波長校正のためのヘリウム−ネオンレーザ光線
が用いられており、この光線は目に有害である。
従つて、観察のときはこれを除く必要があるの
で、ハーフミラーの前段の赤外光線と可視光線の
切換ミラーと、接眼レンズへ可視光線を導入する
ためのミラーとを、連動して作動するようにして
いる。 A Fourier transform infrared spectrophotometer is generally used as an infrared spectrophotometer to separate and detect this infrared light, but this type of spectrophotometer uses a helium-neon laser beam for wavelength calibration. The rays are harmful to the eyes.
Therefore, it is necessary to remove this during observation, so the infrared and visible light switching mirror in front of the half mirror and the mirror for introducing visible light into the eyepiece are operated in conjunction. That's what I do.
部分ミラーは、入射した赤外光線を対物レンズ
側に全反射し、対物レンズから戻る赤外光線はミ
ラーがない部分を抜ける。可視光線用のハーフミ
ラーは、可視光線光源（タングステン光源等）か
らの可視光線の一部を対物レンズ側に全反射し、
対物レンズから戻る光の一部を透過し、観察に使
われる。これらの２枚の鏡は、第４図に示すよう
に相隣り合うように配置し、レバー等の切換手段
により入れ換わるようにする。また、これら２枚
の鏡は、入射する赤外光線と可視光線の切換ミラ
ーと連動して動くようにしてあり、赤外光線と可
視光線とを誤用することがない。
The partial mirror totally reflects the incident infrared rays toward the objective lens, and the infrared rays that return from the objective lens pass through the portion where there is no mirror. A half mirror for visible light totally reflects part of the visible light from a visible light source (such as a tungsten light source) toward the objective lens.
A portion of the light returning from the objective lens is transmitted through and used for observation. These two mirrors are arranged next to each other as shown in FIG. 4, and are switched by a switching means such as a lever. Furthermore, these two mirrors are moved in conjunction with a switching mirror for incident infrared rays and visible rays, so that infrared rays and visible rays are not misused.
前記部分ミラーの代りに、仮に赤外光線にも利
用できるハーフミラーを用いた場合、赤外光線か
ら対物レンズに反射するとき光量は1/2になり、
対物レンズから戻る光がハーフミラーを透過する
ときにさらに1/2になるので、ハーフミラーの使
用により赤外線の光量は1/4に減じるが、本発明
で用いる部分ミラーは、赤外光線を正しく調整す
ることによつて赤外光線をほとんど損失なく反
射、透過することができるので、赤外光線の光量
の損失を少なくする作用がある。 If a half mirror, which can also be used for infrared light, is used instead of the partial mirror, the amount of light will be halved when reflected from the infrared light to the objective lens.
When the light returning from the objective lens passes through the half mirror, it is further reduced to 1/2, so the amount of infrared light is reduced to 1/4 by using the half mirror. By adjusting it, infrared rays can be reflected and transmitted with almost no loss, so there is an effect of reducing the loss of the amount of infrared rays.
以下、本発明の一実施例を第１図ないし第４図
により説明する。
An embodiment of the present invention will be described below with reference to FIGS. 1 to 4.
第１図は該実施例の要部を示す構成図である。
図において、１３は平面反射鏡で、フーリエ変換
赤外線分光光度計の干渉計（図示せず）から出た
平行な赤外光線を受けて、カセグレン型対物レン
ズ（以下物体レンズと略記す）５の下方から照射
するモード（透過モードで測定）と、対物レンズ
５の上方から落射方式で照射するモード（反射測
定のモード）とに切り換えるためのものである。
１４は長い焦点距離の放物面反射鏡で、対物レン
ズ５に赤外光線を導入するためのものである。２
はタングステン光源１から出た可視光線を対物レ
ンズ５に照射するための平面反射鏡で、この平面
反射鏡２を第４図に示すレバー１７の動作により
赤外光線の光路に入れることにより、赤外光線か
ら可視光線へと切り換えることを可能にしてい
る。４はミラー系で、赤外光線または可視光線を
対物レンズ５側に照射し、また試料から反射して
きた光（赤外光線または可視光線）を接眼レンズ
１２、TVモニタ７、水眼・カドミウム・テルル
半導体検出器６（以下MCTと記す）へ導くため
のものである。 FIG. 1 is a block diagram showing the main parts of this embodiment.
In the figure, reference numeral 13 denotes a plane reflecting mirror, which receives parallel infrared rays emitted from an interferometer (not shown) of a Fourier transform infrared spectrophotometer, and directs a Cassegrain objective lens (hereinafter abbreviated as object lens) 5. This is for switching between a mode in which the light is irradiated from below (transmission mode measurement) and a mode in which the light is irradiated from above the objective lens 5 in an epi-illumination method (reflection measurement mode).
Reference numeral 14 denotes a long focal length parabolic reflector for introducing infrared rays into the objective lens 5. 2
is a plane reflecting mirror for irradiating the objective lens 5 with the visible light emitted from the tungsten light source 1.By putting this plane reflecting mirror 2 into the optical path of the infrared rays by operating the lever 17 shown in FIG. This makes it possible to switch from external light to visible light. 4 is a mirror system that irradiates infrared rays or visible rays to the objective lens 5 side, and also directs the light (infrared rays or visible rays) reflected from the sample to the eyepiece 12, TV monitor 7, water eye, cadmium, etc. This is for guiding to a tellurium semiconductor detector 6 (hereinafter referred to as MCT).
このミラー系４は、第２図から第４図に示すよ
うになつている。すなわち、放物面反射鏡１４か
らきた赤外光線は、第２図、第４図に示す部分ミ
ラー１５の反射面で反射し、対物レンズ５に照射
され、また試料からの赤外光線は、部分ミラー５
の右側の鏡のない部分を通り抜ける。一方、可視
光線は、第３図、第４図に示すハーフミラー１６
で反射して対物レンズ５に導かれ、また対物レン
ズ５からの可視光線はこのハーフミラー１６を通
り抜ける。部分ミラー１５は、厚さ0.3μｍに金め
つきした平面反射鏡で、ナイフエツジの形をして
いる。ハーフミラー１６は、厚さ20μｍのガラス
製の板である。これら部分ミラー１５とハーフミ
ラー１６とは、１本のレバー１７に固定されてお
り、このレバー１７を操作することにより可視光
線と赤外光線とに切り換えることができる。 This mirror system 4 is constructed as shown in FIGS. 2 to 4. That is, the infrared rays coming from the parabolic reflector 14 are reflected by the reflecting surface of the partial mirror 15 shown in FIGS. 2 and 4 and are irradiated onto the objective lens 5, and the infrared rays from the sample are partial mirror 5
Go through the part without a mirror on the right side. On the other hand, visible light is transmitted through the half mirror 16 shown in FIGS. 3 and 4.
The visible light beam is reflected by the beam and guided to the objective lens 5, and the visible light beam from the objective lens 5 passes through this half mirror 16. The partial mirror 15 is a plane reflecting mirror plated with gold and having a thickness of 0.3 μm, and has a knife edge shape. The half mirror 16 is a glass plate with a thickness of 20 μm. These partial mirror 15 and half mirror 16 are fixed to one lever 17, and by operating this lever 17, the light can be switched between visible light and infrared light.
第１図において、１１は赤外線スペクトルを測
定するエリアを絞るためのアパーチユア、１０は
TVモニタ７とMCT６とに赤外光線光路を切り
換えるための鏡、８，９はMCT６へ赤外光線を
集光するためのミラー系である。１８は接眼レン
ズ１２に可視光線を切り換えるための平面鏡で、
平面反射鏡２と平面鏡１８とは前記レバー１７と
連結されており、これらは同時に動作する。ま
た、１９は試料台である。 In Fig. 1, 11 is an aperture for narrowing down the area for measuring the infrared spectrum, and 10 is an aperture.
A mirror is used to switch the optical path of the infrared rays between the TV monitor 7 and the MCT 6, and 8 and 9 are mirror systems for condensing the infrared rays onto the MCT 6. 18 is a plane mirror for switching visible light to the eyepiece 12;
The plane reflecting mirror 2 and the plane mirror 18 are connected to the lever 17 and operate simultaneously. Further, 19 is a sample stage.
以上のように構成された赤外線顕微鏡装置で
は、対物レンズ５の焦点に配置したアパーチユア
１１部に赤外光線と可視光線とでできる像のずれ
は、厚さ20μｍのハーフミラー１６の屈折率が1.5
であるから、式(1)から計算して6.6μｍであり、測
定にはほとんど影響しない。 In the infrared microscope device configured as described above, the image shift caused by infrared light and visible light in the aperture 11 located at the focal point of the objective lens 5 is caused by the refractive index of 1.5 of the half mirror 16 with a thickness of 20 μm.
Therefore, it is calculated from equation (1) to be 6.6 μm, which has almost no effect on the measurement.
本発明によれば、赤外光線と可視光線とがほと
んど同じ位置に像を結ぶため、観察した位置その
ものの赤外吸収スペクトルが測定でき、高精度の
赤外吸収スペクトル測定顕微鏡装置を実現するこ
とができる。
According to the present invention, since infrared rays and visible rays form images at almost the same position, it is possible to measure the infrared absorption spectrum at the observed position itself, thereby realizing a highly accurate infrared absorption spectrum measuring microscope device. I can do it.
第１図は本発明による赤外吸収スペクトル測定
顕微鏡装置の一実施例の要部を示す構成図、第２
図ないし第４図は第１図のミラー系４の説明図、
第５図はハーフミラーを光が通り抜けるときの光
軸のずれの説明図である。
４……ミラー系、５……カセグレン型対物レン
ズ、１５……部分ミラー、１６……ハーフミラ
ー、１７……レバー。
FIG. 1 is a configuration diagram showing the essential parts of an embodiment of an infrared absorption spectrum measuring microscope device according to the present invention, and FIG.
4 to 4 are explanatory diagrams of the mirror system 4 in FIG. 1,
FIG. 5 is an explanatory diagram of the deviation of the optical axis when light passes through a half mirror. 4 ...mirror system, 5...Cassegrain objective lens, 15...partial mirror, 16...half mirror, 17...lever.
Claims (1)
または赤外線に透明な材質からなる対物レンズに
より集光して、この集光赤外線を試料に落射照明
し、試料から反射してくる赤外線を集光、検出し
て赤外吸収スペクトルを測定し、かつ赤外線の代
りに可視光線を用いて該試料の観察を行う赤外吸
収スペクトル測定顕微鏡装置において、切換手段
を介して赤外線または可視光線のいずれかを試料
に照射し、試料から反射してくる赤外線または可
視光線を測定側あるいは観察側に導く光路中に、
落射照明赤外線の一部は全反射し、試料から反射
してくる赤外線は完全に通り抜け可能な部分ミラ
ーと、落射照明可視光線を試料側に反射し、試料
から反射してくる可視光線を透過する厚さが50μ
ｍ以下のハーフミラーとを配置し、該部分ミラー
と該ハーフミラーとを切り換える切換手段を設け
たことを特徴とする赤外吸収スペクトル測定顕微
鏡装置。 ２ 特許請求の範囲第１項記載の赤外吸収スペク
トル測定顕微鏡装置において、試料に入射する赤
外線、可視光線を切り換える切換手段を、部分ミ
ラーとハーフミラーとの切換手段と連動して作動
するようにしたことを特徴とする赤外吸収スペク
トル測定顕微鏡装置。[Claims] 1. Infrared rays are collected by an objective lens made of a combination of reflecting mirrors or an objective lens made of a material transparent to infrared rays, and the collected infrared rays are epi-illuminated onto a sample and reflected from the sample. In an infrared absorption spectrum measuring microscope device that collects and detects infrared rays to measure an infrared absorption spectrum and observes the sample using visible rays instead of infrared rays, the infrared rays or visible rays are switched through a switching means. In the optical path, the infrared or visible light reflected from the sample is guided to the measurement side or observation side.
A partial mirror allows part of the infrared rays of epi-illumination to be totally reflected, and the infrared rays reflected from the sample can completely pass through, and a partial mirror that reflects the visible rays of epi-illumination towards the sample and transmits the visible rays reflected from the sample. Thickness is 50μ
1. An infrared absorption spectrum measuring microscope apparatus, characterized in that a half mirror having a size of 1.5 m or less is arranged, and a switching means is provided for switching between the partial mirror and the half mirror. 2. In the infrared absorption spectrum measuring microscope device according to claim 1, the switching means for switching between infrared rays and visible light incident on the sample is operated in conjunction with the switching means between a partial mirror and a half mirror. An infrared absorption spectrum measuring microscope device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61267582A JPS63121731A (en) | 1986-11-12 | 1986-11-12 | Microscopic instrument for measuring infrared absorption spectrum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61267582A JPS63121731A (en) | 1986-11-12 | 1986-11-12 | Microscopic instrument for measuring infrared absorption spectrum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121731A JPS63121731A (en) | 1988-05-25 |
| JPH0577261B2 true JPH0577261B2 (en) | 1993-10-26 |
Family
ID=17446771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61267582A Granted JPS63121731A (en) | 1986-11-12 | 1986-11-12 | Microscopic instrument for measuring infrared absorption spectrum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121731A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04294253A (en) * | 1991-03-22 | 1992-10-19 | Shimadzu Corp | Infrared microscope |
-
1986
- 1986-11-12 JP JP61267582A patent/JPS63121731A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63121731A (en) | 1988-05-25 |
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