JPH0574763B2 - - Google Patents
Info
- Publication number
- JPH0574763B2 JPH0574763B2 JP58135495A JP13549583A JPH0574763B2 JP H0574763 B2 JPH0574763 B2 JP H0574763B2 JP 58135495 A JP58135495 A JP 58135495A JP 13549583 A JP13549583 A JP 13549583A JP H0574763 B2 JPH0574763 B2 JP H0574763B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzles
- air
- measured
- nozzle
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 16
- 238000004891 communication Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 101000603877 Homo sapiens Nuclear receptor subfamily 1 group I member 2 Proteins 0.000 description 1
- 101001098529 Homo sapiens Proteinase-activated receptor 1 Proteins 0.000 description 1
- 101001098560 Homo sapiens Proteinase-activated receptor 2 Proteins 0.000 description 1
- 101001100204 Homo sapiens Ras-related protein Rab-40A-like Proteins 0.000 description 1
- 101000713170 Homo sapiens Solute carrier family 52, riboflavin transporter, member 1 Proteins 0.000 description 1
- 101000713169 Homo sapiens Solute carrier family 52, riboflavin transporter, member 2 Proteins 0.000 description 1
- 102100038416 Ras-related protein Rab-40A-like Human genes 0.000 description 1
- 102100036863 Solute carrier family 52, riboflavin transporter, member 1 Human genes 0.000 description 1
- 102100036862 Solute carrier family 52, riboflavin transporter, member 2 Human genes 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
- G01B13/16—Measuring arrangements characterised by the use of fluids for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
- G01B13/08—Measuring arrangements characterised by the use of fluids for measuring diameters
- G01B13/10—Measuring arrangements characterised by the use of fluids for measuring diameters internal diameters
Description
【発明の詳細な説明】
＜産業上の利用分野＞
本発明は被測定物の内径、真円度、円筒度、直
角度を検測するエアー式の測定装置に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to an air-type measuring device for measuring the inner diameter, roundness, cylindricity, and squareness of an object to be measured.
＜従来技術＞
エアー式の測定装置としては、被測定面に近接
して配置されたエアーノズルの背圧がノズルと被
測定面との隙間に応じて変化するのを利用してい
る。かかるエアーノズルとしては、各ノズル単独
に圧力検出器を接続して独立ノズル方式と、一対
の対向するノズルを１つの圧力検出器に接続した
対向ノズル方式とがある。前者においては、ノズ
ル毎に圧力検出器が設けられるため、一対のノズ
ルで直径寸法の測定をする場合には、各ノズルに
対応した圧力検出器の出力信号を演算回路で演算
する必要がある。このため各圧力検出器の信号レ
ベルを判定するレベル判定回路の他に２信号を１
信号に変換する演算回路をも必要とするため、構
成機器が多くなりコスト高となる。<Prior art> Air-type measuring devices utilize the fact that the back pressure of an air nozzle placed close to the surface to be measured changes depending on the gap between the nozzle and the surface to be measured. Such air nozzles include an independent nozzle type in which a pressure detector is connected to each nozzle alone, and an opposed nozzle type in which a pair of opposing nozzles are connected to one pressure detector. In the former, a pressure detector is provided for each nozzle, so when measuring the diameter dimension of a pair of nozzles, it is necessary to use a calculation circuit to calculate the output signal of the pressure detector corresponding to each nozzle. Therefore, in addition to the level judgment circuit that judges the signal level of each pressure detector, two signals are
Since it also requires an arithmetic circuit to convert it into a signal, the number of components increases, resulting in high costs.
後者においては、供給路を共通にする一対のノ
ズルの背圧を１つの圧力検出器に導くものである
ため、直径寸法に応じた信号が１つの圧力検出器
から出力され、圧力検出器が減らせる上に演算回
路を必要としない。 In the latter case, the back pressure of a pair of nozzles sharing a common supply path is guided to one pressure detector, so a signal according to the diameter is output from one pressure detector, reducing the number of pressure detectors. Moreover, it does not require an arithmetic circuit.
このように対向ノズル方式においては、構成機
器が低減できるので内径、真円度、円筒度の測定
の場合にはコスト的にきわめて有利になる。 In this manner, the opposed nozzle method can reduce the number of components, making it extremely advantageous in terms of cost when measuring inner diameter, roundness, and cylindricity.
しかしながら、端面に対する穴内周面の直角度
を測定する場合に、穴径側定のままの構成では穴
径の差は検出できても同一径で穴が傾いているよ
うな場合は検出不能である。 However, when measuring the perpendicularity of the inner circumferential surface of a hole to the end face, if the hole diameter side remains constant, differences in hole diameter can be detected, but if the holes have the same diameter but are tilted, it is impossible to detect the difference. .
このため従来は直角度の測定は、穴径、円筒
度、真円度の測定とは別行程で別個の測定ヘツド
を用いて測定が行われていた。 For this reason, in the past, the measurement of squareness was performed in a separate process from the measurements of hole diameter, cylindricity, and roundness using a separate measuring head.
このため測定装置のコストアツプを招くばかり
でなく、別々のステーシヨンにて測定しなければ
ならないので測定時間が長くかかる欠点があつ
た。 This not only leads to an increase in the cost of the measuring device, but also has the disadvantage that the measurement time is long because the measurements must be performed at separate stations.
＜発明の目的＞
本発明の目的は、内径、円筒度、真円度等の測
定に加えて直角度の測定も同一測定ヘツドの一回
の挿入動作で達成することであり、併せて測定装
置のコストダウンを図り、測定時間を短縮するこ
とである。<Object of the invention> The object of the invention is to measure not only inner diameter, cylindricity, roundness, etc., but also squareness with a single insertion operation of the same measuring head, and also to provide a measuring device. The aim is to reduce costs and shorten measurement time.
＜発明の構成＞
本発明の特徴とする構成は、被測定物の穴内周
面に対向する複数の第１エアーノズル及び被測定
物の端面に対向する複数の第２エアーノズルを備
えた検測ヘツドを設けるとともに各エアーノズル
の背圧変化を検出する圧力検出器を設けてなる測
定装置において、前記第１エアーノズルは被測定
物の穴内周面に対向し同一平面内において少なく
とも４位相に配置された複数のエアーノズルの組
を軸方向に２組離間して設け、前記第１エアーノ
ズルの同一平面内に位置し逆向きの一対のエアー
ノズルを互いに接続して１つの圧力検出器に両ノ
ズル背圧を導く第１の接続状態と、前記第１エア
ーノズルの軸方向に離間した２平面内に位置し逆
向きの一対のエアーノズルを互いに接続して１つ
の圧力検出器に両ノズル背圧を導く第２の接続状
態とに切替可能な切替手段を設け、前記第１の接
続状態で前記第１エアーノズルの背圧より前記被
測定物の内径、円筒度および真円度の少なくとも
１つを演算し、前記第２の接続状態で前記第１エ
アーノズルの背圧および前記第２エアーノズルの
背圧より前記被測定物の端面に対する穴直角度を
演算するデータ処理装置を有するものである。<Configuration of the Invention> The characteristic configuration of the present invention is an inspection system including a plurality of first air nozzles facing the inner peripheral surface of the hole of the object to be measured and a plurality of second air nozzles facing the end surface of the object to be measured. In a measuring device provided with a head and a pressure detector for detecting changes in back pressure of each air nozzle, the first air nozzles are arranged in at least four phases in the same plane, facing the inner peripheral surface of the hole of the object to be measured. Two sets of air nozzles are provided spaced apart in the axial direction, and a pair of air nozzles located in the same plane of the first air nozzle and facing oppositely are connected to each other to connect one pressure sensor to both sets of air nozzles. A first connection state in which a nozzle back pressure is introduced, and a pair of air nozzles located in two planes spaced apart in the axial direction of the first air nozzle and facing oppositely are connected to each other to connect both nozzle back pressures to one pressure sensor. A switching means is provided that can switch between a second connected state in which pressure is introduced, and in the first connected state, at least one of the inner diameter, cylindricity, and roundness of the object to be measured is controlled by the back pressure of the first air nozzle. and a data processing device that calculates the perpendicularity of the hole to the end surface of the object to be measured from the back pressure of the first air nozzle and the back pressure of the second air nozzle in the second connected state. be.
ここに切替弁を第１の接続状態に切替えれば、
穴内周面に対向するエアーノズルは、対向ノズル
方式で内径、円筒度、真円度等の測定ができるこ
とになり、第２の接続状態に切替えれば、端面に
対する穴内周面の直角度の測定が対向ノズル方式
のままでできることになり、被測定物に対する１
回の挿入動作で全ての測定が迅速に行なえること
になる。 If the switching valve is switched to the first connection state,
The air nozzle facing the inner circumferential surface of the hole can measure the inner diameter, cylindricity, roundness, etc. using the opposed nozzle method, and by switching to the second connection state, it is possible to measure the perpendicularity of the inner circumferential surface of the hole to the end surface. can be done using the facing nozzle method, and the
All measurements can be performed quickly with just one insertion operation.
＜実施例＞
以下本発明の実施例を図面に基づいて説明す
る。第１図は検測ヘツド１０を示す縦断面図であ
り、基準端面１１の中央に軸状突出部１２が垂直
に突設され、その外周面には複数のエアーノズル
１３（第１エアーノズル）が開口している。この
エアーノズル１３は同一平面内において円周上４
等分位置に開口するエアーノズルの組が軸線方向
位置を異にして２組、計８個のエアーノズルが設
けられている。基準端面１１にも位相を同じくし
て４個のエアーノズル１４（第２エアーノズル）
が開口している。各ノズル１３の周囲には、流出
流体の相互干渉をなくすための逃がし溝１５が刻
設され、各逃がし溝１５は軸方向溝１６を通じて
大気中に連通されている。基準端面１１に開口す
るノズル１４の周囲には放射状の逃がし溝１７が
刻設されている。各ノズル１３，１４の一端は検
測ヘツド１０に穿設された給気路２０，２１とそ
れぞれ連通し、基準端面に開口するエアーノズル
１４は第５図に示すように給気路２１を介して圧
力検出ユニツトPDに連通されている。<Examples> Examples of the present invention will be described below based on the drawings. FIG. 1 is a longitudinal cross-sectional view showing the inspection head 10, in which a shaft-like protrusion 12 is vertically protruded from the center of the reference end face 11, and a plurality of air nozzles 13 (first air nozzles) are provided on the outer peripheral surface of the shaft-shaped protrusion 12. is open. This air nozzle 13 has 4 points on the circumference within the same plane.
A total of eight air nozzles, two sets of air nozzles opening at equal positions and at different axial positions, are provided. Four air nozzles 14 (second air nozzles) are also arranged in the same phase on the reference end face 11.
is open. A relief groove 15 is formed around each nozzle 13 to eliminate mutual interference of outflow fluid, and each relief groove 15 communicates with the atmosphere through an axial groove 16. A radial relief groove 17 is carved around the nozzle 14 that opens into the reference end surface 11 . One end of each nozzle 13, 14 communicates with air supply passages 20, 21 bored in the inspection head 10, respectively, and the air nozzle 14, which opens at the reference end face, communicates with the air supply passage 21, as shown in FIG. It is connected to the pressure detection unit PD.
軸状突出部１２の外周面に開口する８個のノズ
ル１３と格別に連通された給気路２０は、電磁切
替弁SV１〜SV８（切替手段）を介して、同一平
面内で対向する一対のノズルどうしを互いに連通
させる第１の状態、又軸方向位置を異にする２平
面内において対向する一対のノズルどうしを互い
に連通させる第２の状態に切替可能に接続されて
いる。接続切替される一対のノズルの接続点Ｏ，
Ｐ，Ｑ，Ｒは連通路２２を介して圧力検出ユニツ
トPDに接続されている。 The air supply path 20, which is in special communication with the eight nozzles 13 that open on the outer circumferential surface of the shaft-like protrusion 12, is connected to a pair of opposing nozzles in the same plane via electromagnetic switching valves SV1 to SV8 (switching means). The nozzles are connected so as to be switchable between a first state in which the nozzles communicate with each other, and a second state in which a pair of nozzles facing each other in two planes having different axial positions communicate with each other. Connection point O of a pair of nozzles to be switched,
P, Q, and R are connected to a pressure detection unit PD via a communication path 22.
第６図，第７図は被測定物Ｗとノズル位置を示
すものであり、各ノズル位置を示すアルフア記号
は第５図のノズルに付したアルフア記号と対応さ
せてある。 6 and 7 show the object to be measured W and the nozzle positions, and the alpha symbols indicating each nozzle position correspond to the alpha symbols attached to the nozzles in FIG. 5.
前記電磁切替弁SV１〜SV８の切替作用による
各ノズル相互の連通関係を次に説明する。 The communication relationship between the nozzles due to the switching action of the electromagnetic switching valves SV1 to SV8 will be explained next.
電磁切替弁SV１〜SV８のソレノイドが全て無
勢された図示状態においては、ノズルＫ，Ｇ，
Ｆ，Ｊに通ずる給気路は閉止され、同一平面内に
おいて互いに対向する一対のノズルどうし、例え
ばＨとＦとかＬとＪの連通はされていないし、又
異なる平面内において対応する一対のノズル、例
えばＨとＪとかＦとＬの連通もされていない。 In the illustrated state in which all the solenoids of the electromagnetic switching valves SV1 to SV8 are deenergized, nozzles K, G,
The air supply passages leading to F and J are closed, and there is no communication between a pair of nozzles that face each other in the same plane, for example, H and F or L and J, and a pair of corresponding nozzles in different planes. For example, H and J or F and L are not connected.
(1) 同一平面内対向ノズルの連通
内径、円筒度、真円度の測定は、同一平面内に
位置する４個のノズルの互いに対向するものどう
しを連通させ、両ノズルの合成背圧を１つの圧力
検出器に導き計測が行われる。かかる連通切替え
は第５図の状態より電磁切替弁SV１，SV４，
SV６，SV７のソレノイドを付勢することによ
り、ノズルＩとＫ，ＥとＧ，ＦとＨ，ＬとＪがそ
れぞれ連通され、互いに連通された一対のノズル
の背圧変化が圧力検出ユニツトの圧力センサに導
かれて計測される。(1) Communication of opposing nozzles in the same plane To measure the inner diameter, cylindricity, and roundness, four nozzles located in the same plane that face each other are communicated, and the combined back pressure of both nozzles is The pressure is measured by two pressure detectors. Such communication switching is performed using the electromagnetic switching valves SV1, SV4,
By energizing the solenoids SV6 and SV7, nozzles I and K, E and G, F and H, and L and J are communicated with each other, and changes in the back pressure of the pair of mutually communicated nozzles are detected as the pressure of the pressure detection unit. It is guided by a sensor and measured.
内径測定としては、一対のノズルの組が４組
（Ｅ＋Ｇ），（Ｆ＋Ｈ），（Ｉ＋Ｋ），（Ｊ＋Ｌ）ある
ので各組の最小値を内径測定値とする。 For inner diameter measurement, since there are four pairs of nozzles (E+G), (F+H), (I+K), and (J+L), the minimum value of each pair is taken as the inner diameter measurement value.
真円度測定としては、４組の計測値より、直交
するノズル相互の差より｜（Ｅ＋Ｇ）−（Ｆ＋Ｈ）｜
又は｜（Ｉ＋Ｋ）−（Ｊ＋Ｌ）｜の最大値とする。 To measure roundness, use the difference between orthogonal nozzles from four sets of measured values |(E+G)-(F+H)|
Or, it is the maximum value of |(I+K)-(J+L)|.
円筒度測定としては、４組の計測値より、同一
位相ノズル相互の差より｜（Ｅ＋Ｇ）−（Ｉ＋Ｋ）｜
又は｜（Ｆ＋Ｈ）−（Ｊ＋Ｌ）｜の最大値とする。 For cylindricity measurement, from the four sets of measured values, from the difference between the same phase nozzles | (E + G) - (I + K) |
Or the maximum value of |(F+H)-(J+L)|.
(2) 異なる平面内対向ノズルの連通
被測定物Ｗのフランジ端面に対する穴内周面の
直角度の測定は、異なる平面内に位置しかつ対向
するものどうしを連通させて計測が行われる。か
かる連通路切替えは、第５図の状態より電磁切替
弁SV２，SV３，SV５，SV８のソレノイドを付
勢することにより、ノズルＥとＫ、ＩとＧ、Ｌと
Ｆ、ＪとＨがそれぞれれ連通され、互いに連通さ
れた一対のノズルの背圧変化が圧力検出ユニツト
PDのセンサに導かれて計測される。(2) Communication of opposing nozzles in different planes The perpendicularity of the inner circumferential surface of the hole with respect to the flange end face of the object W to be measured is measured by communicating the nozzles located in different planes and facing each other. Such communication path switching is performed by energizing the solenoids of the electromagnetic switching valves SV2, SV3, SV5, and SV8 from the state shown in FIG. The change in back pressure of a pair of nozzles communicated with each other is detected by the pressure detection unit.
It is guided and measured by the PD sensor.
直角度の測定としては、基準端面１１に開口す
るノズルＡ，Ｃを基準にしてこれを含む内面での
穴直角度の測定と、ノズルＢ，Ｄを基準にしてこ
れを含む面内での穴直角度の測定とがある。 To measure the perpendicularity, measure the perpendicularity of the hole on the inner surface that includes nozzles A and C that open on the reference end face 11 as a reference, and measure the perpendicularity of the hole within the surface that includes nozzles B and D as a reference. There is a measurement of squareness.
ここにL1，L2を内径測定ノズルの軸方向間隔
（L1＝ノズルＦとＪの軸方向間隔、L2＝ノズルＥ
とＩの軸方向間隔）とし、L3を端面測定用ノズ
ルの対角方向の間隔とする。 Here, L 1 and L 2 are the axial distance between the inner diameter measurement nozzles (L 1 = axial distance between nozzles F and J, L 2 = nozzle E
and I), and L3 is the diagonal distance between the end face measurement nozzles.
ノズルＡ，Ｃ基準の場合の直角度は次式
PARl＝｜L1／L2 （Ｅ＋Ｋ）−（Ｉ＋Ｇ）／２＋L1／
L3（Ａ−Ｃ）｜
で求められる。 The squareness for nozzles A and C is calculated using the following formula: PARl=|L 1 /L 2 (E+K)-(I+G)/2+L 1 /
It is determined by L 3 (A-C) |
ノズルＢ，Ｄ基準の場合の直角度は次式
PAR2＝｜L1／L2 （Ｆ＋Ｌ）−（Ｈ＋Ｊ）／２＋L1／
L3（Ｂ−Ｄ）｜
で求められる。 The squareness for nozzles B and D is determined by the following formula: PAR2=|L 1 /L 2 (F+L)-(H+J)/2+L 1 /
It is determined by L 3 (B-D) |
PAR1，RAR2の最大値を直角度の計測値とす
る。 The maximum value of PAR1 and RAR2 is the measured value of squareness.
尚、第５図における圧力検出ユニツトPDには
給気ライン２３よりレギユレータバルブ２４を介
して定圧エアーが供給されている。 Note that constant pressure air is supplied to the pressure detection unit PD in FIG. 5 from an air supply line 23 via a regulator valve 24.
圧力検出ユニツトPDのそれぞれは第８図に示
すように、前記給気ライン２３からの分岐路２５
と第１オリフイス２６を介して各ノズル給気路は
連通され、このノズル給気路にはノズル給気路２
０又は２１の圧力、即ちノズル背圧を検出する圧
力センサ３０が設けられている。圧力センサ３０
からの出力信号はAD変換器３１を介してデータ
処理装置３２に与えられ、各圧力センサ３０の出
力より前記内径、円筒度、真円度、直角度の計測
値が算出されれる。 As shown in FIG. 8, each of the pressure detection units PD is connected to a branch path 25 from the air supply line 23.
Each nozzle air supply path communicates with the nozzle air supply path 2 through the first orifice 26.
A pressure sensor 30 is provided to detect a pressure of 0 or 21, ie, nozzle back pressure. Pressure sensor 30
The output signal from the pressure sensor 30 is given to the data processing device 32 via the AD converter 31, and the measured values of the inner diameter, cylindricity, roundness, and squareness are calculated from the output of each pressure sensor 30.
＜発明の効果＞
以上述べたように検測ヘツドを被測定物Ｗに挿
入した状態において、電磁切替弁SV１〜SV８を
適宜切替えることにより、同一平面内に位置する
一対の対向ノズル、例えばＨとＦを互いに連通さ
せて、両ノズルの合成された背圧が圧力センサに
て計測され、前記のように他の組のノズル背圧計
測値とに応じて内径、円筒度、真円度の測定がな
される。<Effects of the Invention> As described above, when the inspection head is inserted into the object to be measured W, by appropriately switching the electromagnetic switching valves SV1 to SV8, a pair of opposing nozzles located in the same plane, for example H and F are communicated with each other, the combined back pressure of both nozzles is measured by a pressure sensor, and the inner diameter, cylindricity, and roundness are measured according to the back pressure measurement values of other sets of nozzles as described above. will be done.
又測定ヘツドの挿入状態において電磁切替弁を
切替えると、異なる平面内に位置する一対の対向
ノズル、例えばＦとＬを互いに連通させ、両ノズ
ルの合成された背圧が圧力センサにて計測され、
端面に開口するノズル、例えばＢとＤの計測値を
基準に穴の直角度の測定がなされる。 Furthermore, when the electromagnetic switching valve is switched while the measurement head is inserted, a pair of opposing nozzles located in different planes, for example F and L, are communicated with each other, and the combined back pressure of both nozzles is measured by a pressure sensor.
The perpendicularity of the hole is measured based on the measured values of the nozzles, for example B and D, which open at the end face.
このように１つの測定スーシヨンにおける１回
の測定ヘツドの挿入動作で第１の接続状態と第２
の接続状態とを切替手段によつて切り替えること
により、被測定物の内径、円筒度、真円度のいず
れかの測定に加えて、被測定物の端面に対する穴
直角度を測定できるため、測定ステーシヨンの削
減を図ることができるばかりでなく、測定時間も
大幅に短縮できる利点がある。 In this way, one measurement head insertion operation in one measurement session changes the first connection state and the second connection state.
By switching the connection status of This has the advantage that not only can the number of stations be reduced, but also the measurement time can be significantly shortened.
図面は本発明の実施例を示すもので、第１図は
検測ヘツドの縦断面図、第２図はその要部外観
図、第３図は第２図における−線矢視断面
図、第４図は第２図における−線矢視断面
図、第５図はノズル接続状態を切替える回路線
図、第６図、第７図は各ノズル位置と被測定物と
の関係を示す図、第８図は圧力検出ユニツトの構
成を示す図である。
１０……検測ヘツド、１３，１４……エアーノ
ズル、２０，２１……給気路、２２……連通路、
２３……供給ライン、２４……レギユレータバル
ブ、PD……圧力検出ユニツト、２５……分岐路、
２６……オリフイス、３０……圧力センサ、３１
……AD変換器。
The drawings show an embodiment of the present invention, and FIG. 1 is a longitudinal sectional view of the inspection head, FIG. 2 is an external view of the main part thereof, and FIG. Figure 4 is a sectional view taken along the - line in Figure 2, Figure 5 is a circuit diagram for switching the nozzle connection state, Figures 6 and 7 are diagrams showing the relationship between each nozzle position and the object to be measured. FIG. 8 is a diagram showing the configuration of the pressure detection unit. 10... Testing head, 13, 14... Air nozzle, 20, 21... Air supply path, 22... Communication path,
23... Supply line, 24... Regulator valve, PD... Pressure detection unit, 25... Branch path,
26... Orifice, 30... Pressure sensor, 31
...AD converter.
Claims (1)
アーノズル及び被測定物の端面に対向する複数の
第２エアーノズルを備えた検測ヘツドを設けると
ともに各エアーノズルの背圧変化を検出する圧力
検出器を設けてなる測定装置において、前記第１
エアーノズルは被測定物の穴内周面に対向し同一
平面内において少なくとも４位相に配置された複
数のエアーノズルの組を軸方向に２組離間して設
け、前記第１エアーノズルの同一平面内に位置し
逆向きの一対のエアーノズルを互いに接続して１
つの圧力検出器に両ノズル背圧を導く第１の接続
状態と、前記第１エアーノズルの軸方向に離間し
た２平面内に位置し逆向きの一対のエアーノズル
を互いに接続して１つの圧力検出器に両ノズル背
圧を導く第２の接続状態とに切替可能な切替手段
を設け、前記第１の接続状態で前記第１エアーノ
ズルの背圧より前記被測定物の内径、円筒度およ
び真円度の少なくとも１つを演算し、前記第２の
接続状態で前記第１エアーノズルの背圧および前
記第２エアーノズルの背圧より前記被測定物の端
面に対する穴直角度を演算するデータ処理装置を
有することを特徴とする測定装置。1. An inspection head equipped with a plurality of first air nozzles facing the inner peripheral surface of the hole of the object to be measured and a plurality of second air nozzles facing the end surface of the object to be measured is provided, and changes in back pressure of each air nozzle are detected. In the measuring device comprising a pressure detector that
The air nozzle is provided with two sets of air nozzles arranged in at least four phases in the same plane facing the inner circumferential surface of the hole of the object to be measured, and two sets of air nozzles are spaced apart in the axial direction. A pair of air nozzles located in opposite directions are connected to each other.
a first connection state in which back pressure of both nozzles is introduced to one pressure detector; and a pair of air nozzles located in two planes spaced apart in the axial direction of the first air nozzle and facing oppositely connected to each other to obtain one pressure sensor. A switching means is provided that can switch to a second connected state in which the back pressure of both nozzles is introduced to the detector, and in the first connected state, the inner diameter, cylindricity, and data for calculating at least one of roundness and calculating a hole perpendicularity to an end surface of the object to be measured from the back pressure of the first air nozzle and the back pressure of the second air nozzle in the second connected state; A measuring device comprising a processing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13549583A JPS6027806A (en) | 1983-07-25 | 1983-07-25 | Measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13549583A JPS6027806A (en) | 1983-07-25 | 1983-07-25 | Measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6027806A JPS6027806A (en) | 1985-02-12 |
| JPH0574763B2 true JPH0574763B2 (en) | 1993-10-19 |
Family
ID=15153070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13549583A Granted JPS6027806A (en) | 1983-07-25 | 1983-07-25 | Measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6027806A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002107133A (en) * | 2000-09-28 | 2002-04-10 | Honda Motor Co Ltd | Air micro device for measuring axial deviation, and measurement method therefor |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19746966C1 (en) * | 1997-10-24 | 1999-06-17 | Theysohn Friedrich Fa | Testing device for extruded long profiles in particular |
| US6708566B1 (en) | 2003-02-21 | 2004-03-23 | Robert Bosch Gmbh | Air gauge for measuring the geometry of precision machined fluid passages |
| JP2009150780A (en) * | 2007-12-20 | 2009-07-09 | Honda Motor Co Ltd | Back pressure type gas micrometer, and internal diameter simultaneous inspection system and internal diameter simultaneous inspection method of plurality of hole parts to be inspected |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56137206A (en) * | 1980-03-31 | 1981-10-27 | Toshiba Corp | Gauging nozzle for air micrometer |
-
1983
- 1983-07-25 JP JP13549583A patent/JPS6027806A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56137206A (en) * | 1980-03-31 | 1981-10-27 | Toshiba Corp | Gauging nozzle for air micrometer |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002107133A (en) * | 2000-09-28 | 2002-04-10 | Honda Motor Co Ltd | Air micro device for measuring axial deviation, and measurement method therefor |
| JP4565725B2 (en) * | 2000-09-28 | 2010-10-20 | 本田技研工業株式会社 | Air micro apparatus for measuring axis deviation and measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6027806A (en) | 1985-02-12 |
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