JPH0574560B2 - - Google Patents

Info

Publication number
JPH0574560B2
JPH0574560B2 JP29184387A JP29184387A JPH0574560B2 JP H0574560 B2 JPH0574560 B2 JP H0574560B2 JP 29184387 A JP29184387 A JP 29184387A JP 29184387 A JP29184387 A JP 29184387A JP H0574560 B2 JPH0574560 B2 JP H0574560B2
Authority
JP
Japan
Prior art keywords
growth
substrate holder
epitaxial growth
substrate
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP29184387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01133995A (ja
Inventor
Tsunehiro Unno
Mineo Wajima
Hisafumi Tate
Taiichiro Konno
Hiroshi Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP29184387A priority Critical patent/JPH01133995A/ja
Publication of JPH01133995A publication Critical patent/JPH01133995A/ja
Publication of JPH0574560B2 publication Critical patent/JPH0574560B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP29184387A 1987-11-20 1987-11-20 液相エピタキシャル成長装置 Granted JPH01133995A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29184387A JPH01133995A (ja) 1987-11-20 1987-11-20 液相エピタキシャル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29184387A JPH01133995A (ja) 1987-11-20 1987-11-20 液相エピタキシャル成長装置

Publications (2)

Publication Number Publication Date
JPH01133995A JPH01133995A (ja) 1989-05-26
JPH0574560B2 true JPH0574560B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-18

Family

ID=17774137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29184387A Granted JPH01133995A (ja) 1987-11-20 1987-11-20 液相エピタキシャル成長装置

Country Status (1)

Country Link
JP (1) JPH01133995A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH01133995A (ja) 1989-05-26

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