JPH0574560B2 - - Google Patents
Info
- Publication number
- JPH0574560B2 JPH0574560B2 JP29184387A JP29184387A JPH0574560B2 JP H0574560 B2 JPH0574560 B2 JP H0574560B2 JP 29184387 A JP29184387 A JP 29184387A JP 29184387 A JP29184387 A JP 29184387A JP H0574560 B2 JPH0574560 B2 JP H0574560B2
- Authority
- JP
- Japan
- Prior art keywords
- growth
- substrate holder
- epitaxial growth
- substrate
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29184387A JPH01133995A (ja) | 1987-11-20 | 1987-11-20 | 液相エピタキシャル成長装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29184387A JPH01133995A (ja) | 1987-11-20 | 1987-11-20 | 液相エピタキシャル成長装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01133995A JPH01133995A (ja) | 1989-05-26 |
JPH0574560B2 true JPH0574560B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-10-18 |
Family
ID=17774137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29184387A Granted JPH01133995A (ja) | 1987-11-20 | 1987-11-20 | 液相エピタキシャル成長装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01133995A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-11-20 JP JP29184387A patent/JPH01133995A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH01133995A (ja) | 1989-05-26 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 15 Free format text: PAYMENT UNTIL: 20081018 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081018 Year of fee payment: 15 |