Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works LtdfiledCriticalMatsushita Electric Works Ltd
Priority to JP5911485ApriorityCriticalpatent/JPS61216765A/ja
Publication of JPS61216765ApublicationCriticalpatent/JPS61216765A/ja
Publication of JPH0573474B2publicationCriticalpatent/JPH0573474B2/ja
Verfahren und Vorrichtung zum elektrostatischen Aufsprühen einer Flüssigkeitsschicht auf ein Substrat und zum Trocknen der Flüssigkeitsschicht auf dem Substrat