JPH0573249B2 - - Google Patents

Info

Publication number
JPH0573249B2
JPH0573249B2 JP22931486A JP22931486A JPH0573249B2 JP H0573249 B2 JPH0573249 B2 JP H0573249B2 JP 22931486 A JP22931486 A JP 22931486A JP 22931486 A JP22931486 A JP 22931486A JP H0573249 B2 JPH0573249 B2 JP H0573249B2
Authority
JP
Japan
Prior art keywords
tray
gap
substrate
trays
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP22931486A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6384020A (ja
Inventor
Katsumi Morita
Toshihiko Fukuyama
Kazuo Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Japan Inc
Original Assignee
Applied Materials Japan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Japan Inc filed Critical Applied Materials Japan Inc
Priority to JP22931486A priority Critical patent/JPS6384020A/ja
Publication of JPS6384020A publication Critical patent/JPS6384020A/ja
Publication of JPH0573249B2 publication Critical patent/JPH0573249B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP22931486A 1986-09-26 1986-09-26 Ｃｖｄ装置 Granted JPS6384020A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22931486A JPS6384020A (ja) 1986-09-26 1986-09-26 Ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22931486A JPS6384020A (ja) 1986-09-26 1986-09-26 Ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6384020A JPS6384020A (ja) 1988-04-14
JPH0573249B2 true JPH0573249B2 (enrdf_load_stackoverflow) 1993-10-14

Family

ID=16890199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22931486A Granted JPS6384020A (ja) 1986-09-26 1986-09-26 Ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS6384020A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4941429A (en) * 1988-12-20 1990-07-17 Texas Instruments Incorporated Semiconductor wafer carrier guide tracks

Also Published As

Publication number Publication date
JPS6384020A (ja) 1988-04-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term