JPH0570259A - Production of metal-nonmetal joined body - Google Patents

Production of metal-nonmetal joined body

Info

Publication number
JPH0570259A
JPH0570259A JP26312491A JP26312491A JPH0570259A JP H0570259 A JPH0570259 A JP H0570259A JP 26312491 A JP26312491 A JP 26312491A JP 26312491 A JP26312491 A JP 26312491A JP H0570259 A JPH0570259 A JP H0570259A
Authority
JP
Japan
Prior art keywords
metal
foil
joined body
roll
joined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26312491A
Other languages
Japanese (ja)
Inventor
Masaya Ito
正也 伊藤
Fumihiko Haraguchi
史彦 原口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP26312491A priority Critical patent/JPH0570259A/en
Publication of JPH0570259A publication Critical patent/JPH0570259A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To produce a ceramic-metal joined body without forming a pool of a brazing filler metal after joining with the brazing filler metal. CONSTITUTION:When a metal is joined to a nonmetal with Ti foil and a brazing filler metal or a clad material consisting of them to produce a metal-nonmetal joined body, the thickness of the Ti foil is regulated to 2-10mum and the total thickness of the brazing filler metal and the Ti foil is regulated to <=40mum.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、セラミック、グラファ
イト等の非金属と金属との接合方法に関し、特にエンジ
ン用部品としてのロッカ−ア−ム、タペット、セラミッ
クロ−タ等に適用できる。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for joining non-metals such as ceramics and graphite to metals, and is particularly applicable to rocker arms, tappets, ceramic rotors and the like as engine parts.

【従来技術】従来より金属と非金属等とをロ−材を用い
て接合する技術が公開されている。そんな中で特開昭6
2−110868号公報では、そのロ−材として活性金
属ロ−の製造法が開示されている。その製造法は、金属
基材(ロ−材)の表面にTi等の活性金属層を被着させ
たもので、金属層とロ−材の厚みの比を規定している。
2. Description of the Related Art Conventionally, a technique for joining metal and non-metal or the like using a roller has been disclosed. Under such circumstances, JP-A-6
Japanese Unexamined Patent Publication No. 2-110868 discloses a method for producing an active metal rod as the roller material. In the manufacturing method, an active metal layer such as Ti is deposited on the surface of a metal substrate (raw material), and the thickness ratio of the metal layer and the raw material is specified.

【0002】[0002]

【発明が解決しようとする課題】しかし、上記公報のロ
−材を用いて接合した接合体は、接合後ロ−材が金属と
セラミックの接合面間よりはみ出てロ−だまりとなり、
そのロ−だまりが、残留応力の原因となり接合体自体の
強度劣化をもたらすという欠点を有する。また、接合時
にロ−だまりと位置決め用の治工具とがくっついてしま
うので治工具の耐久性もなくなってしまう。本発明の目
的は、セラミックと金属をロ−材を用いて接合した接合
体において、接合後ロ−だまりが多く発生しない接合体
の製造方法を提供することである。
However, in the joined body joined by using the roll material of the above publication, the roll material protrudes from between the joining surfaces of the metal and the ceramic and becomes a lodge after joining.
The lodge has a drawback that it causes residual stress and deteriorates the strength of the joined body itself. Further, since the lodge and the jig for positioning are attached to each other at the time of joining, the durability of the jig is lost. It is an object of the present invention to provide a method for manufacturing a joined body in which ceramics and metals are joined together by using a roller, in which many lodges do not occur after joining.

【0003】[0003]

【課題を解決するための手段】その手段は、金属と非金
属とをTi箔及びロ−材又はTi箔とロ−材とのクラッ
ド材を用いて接合する接合体の製造方法において、前記
Ti箔の厚さが3μm以上かつ10μm以下で前記ロ−
材と前記Ti箔の厚さの和が40μm以下であることを
特徴とする金属と非金属の接合体の製造方法を用いるこ
とである。ここでTi箔及びロ−材を用いてとは、ロ−
材よりTi箔がセラミック側にあっても金属側にあって
もどちらでもよい。Ti箔とロ−材とのクラッド材と
は、真空蒸着法、スパッタリング法、イオンプレ−ティ
ング法等の物理的蒸着法、化学的蒸着法、金属メッキ、
圧着などによりロ−材にTi層を被着させたものであ
る。尚、被着方法によってはロ−材とTi層の間に反応
層を生じる場合もあるが、Ti層の厚みはその反応層の
厚みを含むとする。また、ロ−材は、Ag系、Ag−C
u系の合金、Ag−Pd系の合金又はAg−Cu−In
系の合金であることが望ましい。
[Means for Solving the Problems] The means is a method for manufacturing a joined body, in which a metal and a nonmetal are joined using a Ti foil and a roll material or a clad material of a Ti foil and a roll material. If the thickness of the foil is 3 μm or more and 10 μm or less, the roll
The sum of the thickness of the material and the thickness of the Ti foil is 40 μm or less. Here, using Ti foil and a roll material means
It does not matter whether the Ti foil is on the ceramic side or the metal side of the material. The Ti foil and the cladding material of the ro material are a physical vapor deposition method such as a vacuum vapor deposition method, a sputtering method and an ion plating method, a chemical vapor deposition method, a metal plating,
The Ti layer is adhered to the roll material by pressure bonding or the like. A reaction layer may be formed between the roller and the Ti layer depending on the deposition method, but the thickness of the Ti layer includes the thickness of the reaction layer. The raw material is Ag-based or Ag-C.
u-based alloy, Ag-Pd-based alloy or Ag-Cu-In
It is desirable that the alloy be a system alloy.

【0004】[0004]

【作用】ロ−材とTi箔の厚さの和を40μm以下にす
ることにより、ロ−だまりの少ない接合体を得ることが
できかつ接合体の寸法精度もよくすることができる。ま
た、ロ−だまりが少ないので残留応力が少なく接合体の
使用中にセラミックにクラックが発生する可能性も少な
い。更にロ−だまりが少ないので位置決め用のグラファ
イト製等のセット治工具にロ−が接着することがない。
Ti箔の厚さが2μm未満になると、十分な接合強度を
得ることができず、10μmをこえると、接合部のもろ
い層(Ti3 Si等のTiSi金属間化合物)がなくな
り接合強度が安定する。一般的に活性金属であるTi
は、他の金属に比べてセラミックとのなじみもよく安定
している。そして、Tiを含むロ−材は、ロ−材自体が
硬いので圧延ロ−ルで加工するのは困難な場合もある
が、それに対しTiを含まないロ−材は、硬くなく加工
しやすい。
By setting the sum of the thickness of the roll material and the thickness of the Ti foil to 40 μm or less, it is possible to obtain a joined body with a small amount of pooling and improve the dimensional accuracy of the joined body. Further, since there is little lodge, the residual stress is small and the possibility that cracks will occur in the ceramic during use of the bonded body is small. Furthermore, since the lodges are small, the lows do not adhere to the set jig or tool made of graphite for positioning.
If the thickness of the Ti foil is less than 2 μm, sufficient bonding strength cannot be obtained, and if it exceeds 10 μm, the brittle layer (TiSi intermetallic compound such as Ti 3 Si) at the bonding portion disappears and the bonding strength becomes stable. .. Ti, which is generally an active metal
Is better and more compatible with ceramics than other metals. The Ti-containing roll may be difficult to process with a rolling roll because the roll itself is hard, whereas the Ti-free roll is not hard and is easy to process.

【0005】一方、Ti入り銀ロ−は、ロ−付けする雰
囲気の影響を受けやすく高真空中にてロ−付けする必要
があり、ロ−材自体が硬く圧延ロ−ルにて厚さを調節す
るのは困難である。また、Ti入り銀ロ−は、Tiがロ
−材中に全体に均一に分散されているため、雰囲気の影
響を受け加熱時にロ−材の粘性が上がり良好な接合体が
得られない。それに対しTiをクラッドした銀ロ−は、
Ti入り銀ロ−に比べ雰囲気の影響を受けにくく良好な
接合体が得られる。
On the other hand, Ti-containing silver rolls are easily affected by the atmosphere in which they are rolled, and it is necessary to roll them in a high vacuum. It is difficult to adjust. In addition, since the Ti-containing silver roll has Ti dispersed uniformly throughout the roll, the viscosity of the roll increases due to the influence of the atmosphere, and a good bonded body cannot be obtained. On the other hand, silver clad with Ti is
A good bonded body is obtained which is less affected by the atmosphere as compared with a silver roller containing Ti.

【実施例】本願発明の製造方法について図1を参考にし
て説明する。図1は、金属2とセラミック3をロ−材4
を用いて接合した接合体1であり、エンジン部品である
タペット、ロッカ−ア−ム、セラミックロ−タ等に適用
できる。
EXAMPLE A manufacturing method of the present invention will be described with reference to FIG. FIG. 1 shows a metal 2 and a ceramic 3 as a roller material 4.
It is a joined body 1 joined by using, and can be applied to tappets, rocker arms, ceramic rotors and the like which are engine parts.

【図1】[Figure 1]

【0006】そして図2は、図1の要部Aの拡大図を示
す。接合面外周には、ロ−だまり6が接合面のロ−材の
厚みに応じ生ずる。
FIG. 2 is an enlarged view of the main part A of FIG. A lodge 6 is formed on the outer periphery of the joint surface depending on the thickness of the material of the joint surface.

【図2】金属2とセラミック3のロ−材4による接合
は、ロ−材4に適した温度、時間、雰囲気、真空度等に
より接合される。まず、接合するセラミック3として
は、ジルコニア、アルミナ、ムライト、窒化珪素、炭化
珪素、AlN,ガラスセラミック、PZT、TiN、超
硬、サ−メット等の公知のセラミックがある。また、接
合する金属2としては、ニッケルクロムモリブデン鋼、
コバ−ル、モリブデン、銅、ニッケル、インコロイ90
3等が可能である。そして必要の応じておもり7等によ
り接合面に荷重を加え、位置決め用のグラファイト製等
の治工具5を用いて接合する。位置決め用のグラファイ
ト製等の治工具5は、ロ−材4がある温度になると液体
状になり、その時に接合面同士がずれるのを防止するた
めである。 (実施例1)表1に示すロ−材及びTi箔により、直径
10mmの長さ10mmの窒化珪素とニッケルクロムモ
リブデン綱(JIS−SNCM630)を接合した。窒
化珪素とニッケルクロムモリブデン綱のサイズは、それ
ぞれ同じで直径10mmで長さ10mmである。ロ−材
のサイズは、直径10mmで厚さは表1に示すように種
々変化させた。
FIG. 2 is a view of joining the metal 2 and the ceramic 3 with the roller material 4 by using a temperature, a time, an atmosphere, a vacuum degree and the like suitable for the roller material 4. First, as the ceramic 3 to be bonded, there are known ceramics such as zirconia, alumina, mullite, silicon nitride, silicon carbide, AlN, glass ceramic, PZT, TiN, cemented carbide, and cermet. Further, as the metal 2 to be joined, nickel chrome molybdenum steel,
Kovar, molybdenum, copper, nickel, Incoloy 90
3rd grade is possible. Then, if necessary, a load is applied to the joint surface by a weight 7 or the like, and the jig 5 for positioning is used for joining. This is because the jig 5 for positioning made of graphite or the like is in a liquid state when the temperature of the roller 4 reaches a certain temperature and prevents the joining surfaces from being displaced from each other at that time. (Example 1) Silicon nitride having a diameter of 10 mm and a length of 10 mm and nickel-chromium-molybdenum steel (JIS-SNCM630) were bonded together by using the roll material and the Ti foil shown in Table 1. The sizes of silicon nitride and nickel-chromium-molybdenum are the same, and the diameter is 10 mm and the length is 10 mm. The size of the roll material was 10 mm in diameter and the thickness was variously changed as shown in Table 1.

【表1】 [Table 1]

【0007】ロ−付け条件は、温度750℃で1×10
-2Paの真空中にて10分間行い、各試料No.につき
10個ずつ接合した。 (実施例2)表2に示すTi箔とロ−材とのクラッド材
により、実施例1と同じ窒化珪素とニッケルクロムモリ
ブデン綱(JIS−SNCM630)を接合した。本実
施のクラッド材は、ロ−材にイオンプレ−ティングによ
りTi箔を被着したものを用いた。各試料No.につき
10個ずつ接合した。尚、試料No.17〜No.20
について、金属(ニッケルクロムモリブデン綱)側の接
合端面は、予めNiメッキが施されそしてTiを含まな
いロ−材を介して厚さ0.5mmのNi板が接合されて
いる。
The loading conditions are 1 × 10 at a temperature of 750 ° C.
Performed in a vacuum of -2 Pa for 10 minutes, and 10 pieces each were joined. (Example 2) The same silicon nitride and nickel-chromium-molybdenum steel (JIS-SNCM630) as in Example 1 were joined by the clad material of the Ti foil and the roll material shown in Table 2. The clad material used in this embodiment was a material obtained by depositing a Ti foil on the material by ion plating. Each sample No. 10 pieces each were joined. Sample No. 17-No. 20
With respect to the metal (nickel chrome molybdenum steel) side, the Ni end plate having a thickness of 0.5 mm is joined to the joint end surface on the metal (nickel chrome molybdenum steel) side through a Ni material which is preliminarily plated with Ni and does not contain Ti.

【表2】 [Table 2]

【0008】(実施例1)及び(実施例2)により得ら
れた接合体11を各試料5個は初期の片持ち曲げ強度を
測定し、残りの各5個は、−40℃と150℃の熱サイ
クルを500回繰り返した後片持ち曲げ強度を測定し
た。片持ち曲げ強度は、図3に示すように接合体11の
金属部分(JIS−SNCM630)12をチャック8
ではさみセラミック(窒化珪素)部分13で接合面から
7mmの位置に静荷重を加えることにより行った。結果
を表1及び表2に示す。また、(実施例1)について各
10個の各試料No.のうち、接合時に位置決め用のグ
ラファイト治工具にくっついた個数を表1に示す。
Five cantilevers of each of the bonded bodies 11 obtained in (Example 1) and (Example 2) were measured for initial cantilever bending strength, and the other five each had -40 ° C and 150 ° C. After repeating the heat cycle of 500 times, the cantilever bending strength was measured. As for cantilever bending strength, as shown in FIG. 3, the metal part (JIS-SNCM630) 12 of the joined body 11 was chucked.
Then, the scissors ceramic (silicon nitride) portion 13 was subjected to a static load at a position 7 mm from the joint surface. The results are shown in Tables 1 and 2. In addition, each of the ten sample Nos. Among them, Table 1 shows the number of the graphite jigs and tools for positioning which are bonded at the time of joining.

【図3】(結果)得られた接合体の接合部外観を目視に
より観察したところ、ロ−材とTiの厚さの和が40μ
mを越えてる試料(No.3R、No.4R、No.8
R,No.16R)は、ロ−だまりが比較的多く発生し
た。他のロ−材とTiの厚さの和が40μmを越えてい
ない試料は、ロ−だまりが比較的少なく良好な外観をし
ていた。
FIG. 3 (Results) When the appearance of the joint portion of the obtained joint body was visually observed, the sum of the thicknesses of the roll material and Ti was 40 μm.
Samples exceeding m (No. 3R, No. 4R, No. 8)
R, No. In 16R), relatively many lodges occurred. The samples in which the sum of the thicknesses of Ti and the other materials did not exceed 40 μm had a relatively small amount of lodge and had a good appearance.

【0009】また、ロ−材とTiの和が、大きいほど接
合時にグラファイト治工具とくっついた(4R,8R,
3R)。接合面について超音波探傷装置を用いてすきま
の発生具合を調べたところすべての試料について接合さ
れていない部分はなく良好であった。Ti厚さが2μm
未満の試料(No.12R、No.13R、No.17
R、No.18R)は、セラミックとの反応性に乏しく
初期強度、熱サイクル後の強度共に低くなった。また、
ロ−材とTiの厚さの和が40μmを越えてる試料(N
o.3R、No.4R、No.8R,No.16R)
は、ロ−だまり不均一の為初期強度、熱サイクル後の強
度共にバラツキが大きかった。また、耐久後の劣化も大
きい。
Further, the larger the sum of the raw material and the Ti is, the more closely the graphite jig and tool are bonded (4R, 8R,
3R). When the degree of crevice generation was examined on the bonded surfaces using an ultrasonic flaw detector, there was no unbonded portion for all samples and it was good. Ti thickness is 2 μm
Samples less than (No. 12R, No. 13R, No. 17
R, No. 18R) had poor reactivity with ceramics and had low initial strength and low strength after thermal cycling. Also,
Samples where the sum of the thickness of the roll material and Ti exceeds 40 μm (N
o. 3R, No. 4R, No. 8R, No. 16R)
Had a large variation in both the initial strength and the strength after the heat cycle due to the non-uniformity of rolling. Also, the deterioration after durability is large.

【0010】[0010]

【効果】本発明に係わる製造方法は、ロ−だまりが少な
く寸法精度の高い接合体を得ることができ産業上有益な
発明である。
[Effect] The manufacturing method according to the present invention is an industrially useful invention because it can obtain a joined body with little dimensional accumulation and high dimensional accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の製造方法の1実施例を示す図である。FIG. 1 is a diagram showing an embodiment of a manufacturing method of the present invention.

【図2】図1の要部Aの拡大図である。FIG. 2 is an enlarged view of a main part A of FIG.

【図3】接合体の片持ち曲げ強度試験の方法を示す図で
ある。
FIG. 3 is a diagram showing a method of a cantilever bending strength test of a joined body.

【符号の説明】[Explanation of symbols]

1、11 接合体 2、12 金属 3、13 セラミック 4、14 ロ−材 5 治工具 6 ロ−だまり 7 おもり 8 チャック 1, 11 Joined body 2, 12 Metal 3, 13 Ceramic 4, 14 Roll material 5 Jig and tool 6 Rhodare 7 Weight 8 Chuck

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】金属と非金属とをTi箔及びロ−材又はT
i箔とロ−材とのクラッド材を用いて接合する接合体の
製造方法において、 前記Ti箔の厚さが2μm以上かつ10μm以下で前記
ロ−材と前記Ti箔の厚さの和が40μm以下であるこ
とを特徴とする金属と非金属の接合体の製造方法
1. A metal foil and a non-metal, a Ti foil and a roll material or T.
In a method for manufacturing a joined body, in which a clad material of an i-foil and a roll material is used for joining, a total thickness of the roll material and the Ti foil is 40 μm when the thickness of the Ti foil is 2 μm or more and 10 μm or less. A method for producing a metal-nonmetal joined body characterized by the following:
【請求項2】ロ−材が、Ag系、Ag−Cu系の合金、
Ag−Pd系の合金又はAg−Cu−In系の合金であ
ることを特徴とする請求項1記載の金属と非金属の接合
体の製造方法
2. The alloy is an Ag-based or Ag-Cu-based alloy,
It is an Ag-Pd type alloy or an Ag-Cu-In type alloy, The manufacturing method of the metal-nonmetal joined body of Claim 1 characterized by the above-mentioned.
JP26312491A 1991-09-13 1991-09-13 Production of metal-nonmetal joined body Pending JPH0570259A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26312491A JPH0570259A (en) 1991-09-13 1991-09-13 Production of metal-nonmetal joined body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26312491A JPH0570259A (en) 1991-09-13 1991-09-13 Production of metal-nonmetal joined body

Publications (1)

Publication Number Publication Date
JPH0570259A true JPH0570259A (en) 1993-03-23

Family

ID=17385156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26312491A Pending JPH0570259A (en) 1991-09-13 1991-09-13 Production of metal-nonmetal joined body

Country Status (1)

Country Link
JP (1) JPH0570259A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015122446A1 (en) * 2014-02-12 2015-08-20 三菱マテリアル株式会社 Copper/ceramic bond and power module substrate
US10103035B2 (en) 2014-02-12 2018-10-16 Mitsubishi Materials Corporation Copper-ceramic bonded body and power module substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015122446A1 (en) * 2014-02-12 2015-08-20 三菱マテリアル株式会社 Copper/ceramic bond and power module substrate
US10103035B2 (en) 2014-02-12 2018-10-16 Mitsubishi Materials Corporation Copper-ceramic bonded body and power module substrate

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