JPH05672B2 - - Google Patents
Info
- Publication number
- JPH05672B2 JPH05672B2 JP2806487A JP2806487A JPH05672B2 JP H05672 B2 JPH05672 B2 JP H05672B2 JP 2806487 A JP2806487 A JP 2806487A JP 2806487 A JP2806487 A JP 2806487A JP H05672 B2 JPH05672 B2 JP H05672B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- ultrasonic transducer
- lower electrode
- ultrasonic
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 21
- 229910052710 silicon Inorganic materials 0.000 description 21
- 239000010703 silicon Substances 0.000 description 21
- 238000005530 etching Methods 0.000 description 19
- 229920006267 polyester film Polymers 0.000 description 16
- 238000000034 method Methods 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 10
- 230000010355 oscillation Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910000838 Al alloy Inorganic materials 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ONRPGGOGHKMHDT-UHFFFAOYSA-N benzene-1,2-diol;ethane-1,2-diamine Chemical compound NCCN.OC1=CC=CC=C1O ONRPGGOGHKMHDT-UHFFFAOYSA-N 0.000 description 1
- 238000001444 catalytic combustion detection Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2806487A JPS63196877A (ja) | 1987-02-12 | 1987-02-12 | 超音波トランスジユ−サ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2806487A JPS63196877A (ja) | 1987-02-12 | 1987-02-12 | 超音波トランスジユ−サ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63196877A JPS63196877A (ja) | 1988-08-15 |
| JPH05672B2 true JPH05672B2 (zh) | 1993-01-06 |
Family
ID=12238333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2806487A Granted JPS63196877A (ja) | 1987-02-12 | 1987-02-12 | 超音波トランスジユ−サ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63196877A (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3040554B2 (ja) * | 1991-10-08 | 2000-05-15 | ジーイー横河メディカルシステム株式会社 | 超音波探触子 |
-
1987
- 1987-02-12 JP JP2806487A patent/JPS63196877A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63196877A (ja) | 1988-08-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102667193B1 (ko) | Cmos 상의 pmut 모놀리식 집적 | |
| CN109643378B (zh) | 超声换能器件及电子装置 | |
| JP4067964B2 (ja) | 小型超音波トランスデューサ | |
| US7907744B2 (en) | Capacitive vibration sensor and method for manufacturing same | |
| US7471034B2 (en) | Ultrasound transducer and method of producing the same | |
| Jia et al. | Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture | |
| US5381386A (en) | Membrane hydrophone | |
| KR20040028630A (ko) | 마이크로-머신화된 초음파 변환기(ｍｕｔ) 어레이 | |
| JP2002528887A (ja) | 圧電トランスデューサ | |
| US5541468A (en) | Monolithic transducer array case and method for its manufacture | |
| US20200101492A1 (en) | Capacitive transducer, manufacturing method thereof, and image forming apparatus | |
| WO2021217439A1 (zh) | 超声换能器、信息采集元件及电子设备 | |
| JP2008119318A (ja) | 超音波探触子及び超音波診断装置 | |
| JP2005340961A (ja) | 音波受信装置 | |
| JP2005051689A (ja) | 超音波アレイセンサおよび超音波センサ並びに超音波アレイセンサの製造方法 | |
| JP2545714B2 (ja) | 超音波トランスジューサおよびその製造方法 | |
| JPH07121159B2 (ja) | 超音波トランスジユ−サ | |
| JPH07136164A (ja) | 超音波探触子 | |
| JPH05672B2 (zh) | ||
| CN112697262B (zh) | 水听器及其制造方法 | |
| JPH0577240B2 (zh) | ||
| US5724315A (en) | Omnidirectional ultrasonic microprobe hydrophone | |
| JP2009244235A (ja) | 水中用超音波アレイセンサ | |
| JP2545713B2 (ja) | 超音波トランスジューサとその製造方法 | |
| JPH0552120B2 (zh) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |