JPH0565645A - Diamond formed body - Google Patents
Diamond formed bodyInfo
- Publication number
- JPH0565645A JPH0565645A JP3224180A JP22418091A JPH0565645A JP H0565645 A JPH0565645 A JP H0565645A JP 3224180 A JP3224180 A JP 3224180A JP 22418091 A JP22418091 A JP 22418091A JP H0565645 A JPH0565645 A JP H0565645A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- pipe
- formed body
- diamond film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明はダイアモンドの成形体
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a diamond compact.
【０００２】[0002]
【従来の技術】従来、ダイアモンドは結晶体として工業
用や装飾用に用いられているに過ぎなかった。2. Description of the Related Art Conventionally, diamond has only been used as a crystal body for industrial and decorative purposes.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記従来技術
によると用途が切削工具の先端や、レコード針の先端あ
るいは観賞用装飾品として用いられるにすぎなかった。However, according to the above-mentioned prior art, the application was only used as the tip of a cutting tool, the tip of a record needle, or an ornamental ornament.
【０００４】この発明は、ダイアモンドの持つ、高硬
度、耐薬品性等の特性を最大限に産業上に活用すべく、
ダイアモンドの成形体を提供する事を目的とする。The present invention is designed to maximize the industrial properties of diamond, such as high hardness and chemical resistance.
The object is to provide a molded body of diamond.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決し、上記
目的を達成するために、この発明は、ダイアモンド成形
体に関し、（１） 母型表面又は内面にダイアモンド膜
を形成し、前記母型を除去してダイアモンド膜から成る
成形品と成す手段を取る事、および（２） 管の内面に
ダイアモンド膜を被覆する手段を取る事、等の手段を取
る。In order to solve the above problems and to achieve the above objects, the present invention relates to a diamond molded body, which comprises (1) forming a diamond film on the surface or inner surface of the mother die, Are removed to form a molded product made of a diamond film, and (2) a means for coating the inner surface of the pipe with the diamond film is taken.
【０００６】[0006]
【実施例】以下、実施例によりこの発明を詳述する。EXAMPLES The present invention will be described in detail below with reference to examples.
【０００７】最近、Ｂ．Ｖ．ＳＰＩＴＳＹＮ ｅｔ．ａ
ｌ．，Ｊ．ｏｆ ＣｒｙｓｔａｌＧｒｏｗｔｈ，５２，
２１９（１９８１）．やＳ．ＭＡＴＳＵＭＯＴＯｅｔ．
ａｌ．，Ｊａｐ．Ｊ．ｏｆ Ａｐｐｌ．Ｐｈｙｓ．，２
１，Ｌ１８３（１９８２）．およびＹ．ＭＯＲＩ ｅ
ｔ．ａｌ．，Ａｐｐｌ．Ｐｈｙｓ．Ｌｅｔｔ．，５８，
９４０（１９９１）．等によると、メタンガス等の炭化
水素ガスをソースとしてプラズマＣＶＤにより金属、半
導体、プラスチック等の固体表面にダイアモンド膜が形
成できるようになっている。Recently, B. V. SPITSYN et. a
l. , J. of Crystal Growth, 52,
219 (1981). And S. MATSUMOTO et.
al. , Jap. J. of Appl. Phys. , 2
1, L183 (1982). And Y. MORI e
t. al. , Appl. Phys. Lett. , 58,
940 (1991). According to et al., A diamond film can be formed on a solid surface of metal, semiconductor, plastic or the like by plasma CVD using a hydrocarbon gas such as methane gas as a source.
【０００８】いま、円形のシリコンウエーハ表面にプラ
ズマＣＶＤ法によりダイアモンド膜を形成し、その後弗
酸と硝酸の混液に浸漬する事によりシリコンをエッチン
グ除去すると、円形のダイアモンドカッターのダイアモ
ンド刃ができる。該ダイアモンド刃の厚さが１ミクロン
の場合には切削幅が１ミクロンの切削が可能となり、１
０ミクロンの場合には切削幅が１０ミクロンの切削が可
能となる。尚、シリコンウエーハに代え金属円盤やプラ
スチック円盤を用いても良く、金属円盤の除去には通常
の酸類によるエッチング除去を、プラスチック円盤の除
去には有機溶剤による除去や酸化処理による除去を行う
事ができる。Now, a diamond film is formed on the surface of a circular silicon wafer by a plasma CVD method, and then the silicon is removed by etching by immersing it in a mixed solution of hydrofluoric acid and nitric acid, whereby a diamond blade of a circular diamond cutter is formed. When the thickness of the diamond blade is 1 micron, it is possible to cut with a cutting width of 1 micron.
In the case of 0 micron, it is possible to cut with a cutting width of 10 microns. A metal disk or a plastic disk may be used in place of the silicon wafer, and the metal disk may be removed by etching with normal acids, and the plastic disk may be removed with an organic solvent or an oxidation treatment. it can.
【０００９】つぎに、円筒形の母材の内面あるいは外面
にプラズマＣＶＤ法によりダイアモンド膜を形成し、前
記母材を除去する事によりダイアモンドパイプを製作す
る事ができる。Next, a diamond film can be manufactured by forming a diamond film on the inner surface or outer surface of the cylindrical base material by plasma CVD and removing the base material.
【００１０】上記の如く、母材型の表面にダイアモンド
膜を形成後、母材を除去する事によりダイアモンド容器
や一層複雑な形のダイアモンド成形体を製作する事がで
きる。As described above, by forming the diamond film on the surface of the base material mold and then removing the base material, a diamond container or a diamond compact having a more complicated shape can be manufactured.
【００１１】この様にして製作されたダイアモンド成形
体は、硬度の高いところから切削治具として用いられた
り、耐薬品性の高いところから化学反応用の容器やパイ
プとして用いられたり、物理反応用容器やパイプとして
も用いられたりする事ができる。尚、母材は必ずしも除
去する必要は無い。The diamond compact thus produced is used as a cutting jig because of its high hardness, or as a container or pipe for chemical reaction because of its high chemical resistance, and for physical reaction. It can also be used as a container or pipe. The base material does not necessarily have to be removed.
【００１２】つぎに、河川のしゅんせつや、石炭のパイ
プ輸送に用いられているパイプの内面にダイアモンド膜
を形成する事により、パイプが砂利や石炭により摩耗す
るのを防ぐ事ができ、輸送パイプの寿命を長くできる作
用がある。[0012] Next, by forming a diamond film on the dredging of rivers or on the inner surface of pipes used for pipe transportation of coal, it is possible to prevent the pipes from being worn by gravel and coal, and Has the effect of extending the life.
【００１３】[0013]
【発明の効果】この発明により、ダイアモンド成形体が
容易に製作する事ができる効果が有り、この様にして製
作されたダイアモンド成形体は、硬度の高いところから
切削治具として用いられたり、耐薬品性の高いところか
ら化学反応用の容器やパイプとして用いられたり、物理
反応用容器やパイプとしても用いられたりする事ができ
たり、輸送パイプの寿命を長くできる効果等もある。According to the present invention, there is an effect that a diamond molded body can be easily manufactured. The diamond molded body manufactured in this manner is used as a cutting jig because of its high hardness and Since it has high chemical properties, it can be used as a container or pipe for chemical reaction, can also be used as a container or pipe for physical reaction, and has the effect of extending the life of the transportation pipe.
Claims (2)
形成し、前記母型を除去してダイアモンド膜から成る成
形品と成す事を特徴とするダイアモンド成形体。1. A diamond molded body comprising a diamond film formed on a surface or an inner surface of the master mold, and the master mold is removed to form a molded product of the diamond film.
て成る事を特徴とするダイアモンド成形体。2. A diamond compact formed by coating the inner surface of a tube with a diamond film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3224180A JPH0565645A (en) | 1991-09-04 | 1991-09-04 | Diamond formed body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3224180A JPH0565645A (en) | 1991-09-04 | 1991-09-04 | Diamond formed body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0565645A true JPH0565645A (en) | 1993-03-19 |
Family
ID=16809781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3224180A Pending JPH0565645A (en) | 1991-09-04 | 1991-09-04 | Diamond formed body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0565645A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10046973A1 (en) * | 2000-09-19 | 2002-04-25 | Kinik Company Taipei | Manufacture of chemical vapor deposition diamond product, e.g. cutting tool, involves depositing chemical vapor deposition diamond to desired thickness at mold interface, dissolving mold, and mounting remaining diamond in holder |
| CN108559971A (en) * | 2018-03-13 | 2018-09-21 | 同济大学 | A kind of preparation method of diamond thick-film cutting tooth |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62136569A (en) * | 1985-12-09 | 1987-06-19 | Showa Denko Kk | Coating method for diamond |
| JPS6242029B2 (en) * | 1985-09-24 | 1987-09-05 | Sumitomo Electric Industries | |
| JPS6326371A (en) * | 1986-07-17 | 1988-02-03 | Toshiba Corp | Production of heat conductive tubular member |
| JPH03141110A (en) * | 1989-10-24 | 1991-06-17 | Showa Denko Kk | Production of product in steric shape made of diamond |
| JPH03146665A (en) * | 1989-10-31 | 1991-06-21 | Shimadzu Corp | Production of hard carbon film |
| JPH03149140A (en) * | 1989-11-02 | 1991-06-25 | Asahi Daiyamondo Kogyo Kk | Manufacture of gaseous phase compound diamond tool |
| JPH04136172A (en) * | 1990-09-26 | 1992-05-11 | Showa Denko Kk | Method for coating inside with diamond |
| JPH05117854A (en) * | 1991-05-01 | 1993-05-14 | General Electric Co <Ge> | Preparation of article by chemical vapor deposition and supporting member used in the preparation |
-
1991
- 1991-09-04 JP JP3224180A patent/JPH0565645A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6242029B2 (en) * | 1985-09-24 | 1987-09-05 | Sumitomo Electric Industries | |
| JPS62136569A (en) * | 1985-12-09 | 1987-06-19 | Showa Denko Kk | Coating method for diamond |
| JPS6326371A (en) * | 1986-07-17 | 1988-02-03 | Toshiba Corp | Production of heat conductive tubular member |
| JPH03141110A (en) * | 1989-10-24 | 1991-06-17 | Showa Denko Kk | Production of product in steric shape made of diamond |
| JPH03146665A (en) * | 1989-10-31 | 1991-06-21 | Shimadzu Corp | Production of hard carbon film |
| JPH03149140A (en) * | 1989-11-02 | 1991-06-25 | Asahi Daiyamondo Kogyo Kk | Manufacture of gaseous phase compound diamond tool |
| JPH04136172A (en) * | 1990-09-26 | 1992-05-11 | Showa Denko Kk | Method for coating inside with diamond |
| JPH05117854A (en) * | 1991-05-01 | 1993-05-14 | General Electric Co <Ge> | Preparation of article by chemical vapor deposition and supporting member used in the preparation |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10046973A1 (en) * | 2000-09-19 | 2002-04-25 | Kinik Company Taipei | Manufacture of chemical vapor deposition diamond product, e.g. cutting tool, involves depositing chemical vapor deposition diamond to desired thickness at mold interface, dissolving mold, and mounting remaining diamond in holder |
| DE10046973B4 (en) * | 2000-09-19 | 2005-09-15 | Kinik Company | Method of making a CVD diamond tool and use |
| CN108559971A (en) * | 2018-03-13 | 2018-09-21 | 同济大学 | A kind of preparation method of diamond thick-film cutting tooth |
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