JPH0564406B2 - - Google Patents

Info

Publication number
JPH0564406B2
JPH0564406B2 JP60161926A JP16192685A JPH0564406B2 JP H0564406 B2 JPH0564406 B2 JP H0564406B2 JP 60161926 A JP60161926 A JP 60161926A JP 16192685 A JP16192685 A JP 16192685A JP H0564406 B2 JPH0564406 B2 JP H0564406B2
Authority
JP
Japan
Prior art keywords
container
plasma generation
ion source
generation container
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60161926A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6224537A (ja
Inventor
Yasuo Yamashita
Yasuo Kamiide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60161926A priority Critical patent/JPS6224537A/ja
Publication of JPS6224537A publication Critical patent/JPS6224537A/ja
Publication of JPH0564406B2 publication Critical patent/JPH0564406B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60161926A 1985-07-24 1985-07-24 イオン源 Granted JPS6224537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60161926A JPS6224537A (ja) 1985-07-24 1985-07-24 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60161926A JPS6224537A (ja) 1985-07-24 1985-07-24 イオン源

Publications (2)

Publication Number Publication Date
JPS6224537A JPS6224537A (ja) 1987-02-02
JPH0564406B2 true JPH0564406B2 (fr) 1993-09-14

Family

ID=15744660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60161926A Granted JPS6224537A (ja) 1985-07-24 1985-07-24 イオン源

Country Status (1)

Country Link
JP (1) JPS6224537A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2540492B2 (ja) * 1986-01-16 1996-10-02 日新電機株式会社 イオン源用ア−クチヤンバ−装置
JPH01246756A (ja) * 1988-03-29 1989-10-02 Mitsubishi Electric Corp イオン源装置
JP5257399B2 (ja) * 2010-04-16 2013-08-07 日新イオン機器株式会社 イオン源及びイオン注入装置

Also Published As

Publication number Publication date
JPS6224537A (ja) 1987-02-02

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