JPH056356B2 - - Google Patents
Info
- Publication number
- JPH056356B2 JPH056356B2 JP58081965A JP8196583A JPH056356B2 JP H056356 B2 JPH056356 B2 JP H056356B2 JP 58081965 A JP58081965 A JP 58081965A JP 8196583 A JP8196583 A JP 8196583A JP H056356 B2 JPH056356 B2 JP H056356B2
- Authority
- JP
- Japan
- Prior art keywords
- laser rod
- laser
- rod
- excitation
- optical means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005284 excitation Effects 0.000 claims description 27
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000000694 effects Effects 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
- H01S3/092—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
- H01S3/093—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp focusing or directing the excitation energy into the active medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0602—Crystal lasers or glass lasers
- H01S3/061—Crystal lasers or glass lasers with elliptical or circular cross-section and elongated shape, e.g. rod
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0602—Crystal lasers or glass lasers
- H01S3/0615—Shape of end-face
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明はレーザロツドを励起ランプで光励起
してレーザ光を発振させる固体レーザ装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a solid-state laser device that oscillates laser light by optically exciting a laser rod with an excitation lamp.
一般に上記固体レーザ装置は、平行に離間対向
した一対の共振器ミラー間にレーザロツドを配置
するとともに、このレーザロツドの径方向側方に
励起ランプを平行に配置してなる。そして、上記
励起ランプによりレーザロツドを光励起してその
端面からレーザ光を出力させるようになつてい
る。
Generally, the solid-state laser device described above includes a laser rod disposed between a pair of resonator mirrors spaced apart from each other in parallel, and an excitation lamp disposed in parallel on the radial side of the laser rod. The laser rod is optically excited by the excitation lamp to output laser light from its end face.
ところで、このような固体レーザ装置による
と、発振されたレーザ光をレンズで集束してたと
えば切断加工に用いると、その走査方向、つまり
Ｘ方向とこれに直交するＹ方向とでは切断幅が異
なるという現象が生じる。 By the way, according to such a solid-state laser device, when the oscillated laser beam is focused by a lens and used for cutting, for example, the cutting width is different in the scanning direction, that is, the X direction and the Y direction perpendicular to this. A phenomenon occurs.
このような現象が生じる原因として発明者は以
下に述べる結論を得た。つまり、レーザロツドは
その径方向側方から励起ランプによつて光励起さ
れると、レーザロードの断面内における温度分布
が軸線に対して対称とならない。しかも、レーザ
ロツドは常時水冷されているから、その温度分布
の不均一が継続されることになる。このような状
態にあるレーザロツドの熱歪み効果によるレンズ
作用を測定したところ、レーザロツドを励起ラン
プで光励起する方向Ｘと、この方向Ｘと直交しか
つレーザロツドの軸線とも直交する方向Ｙとでの
レーザ光の集束度合に差が生じることが確認され
た。つまり、第１図に示すようにＸ方向の焦点距
離がＹ方向の焦点距離よりも大きくなり、しかも
これらの焦点距離の差は励起ランプに印加する電
圧を大きくすればする程拡大する。したがつて、
このようなＸ方向とＹ方向との集束度合の差によ
り、レーザ光のパターン形状がレーザロツドの軸
線に対して対称な形状とならなくなる。そのた
め、このレーザ光をレンズで集束して走査させる
と、その走査方向によつて切断幅が異なるという
現象が生じる。 The inventor came to the following conclusion as to the cause of such a phenomenon. That is, when the laser rod is optically excited from the radial side by the excitation lamp, the temperature distribution within the cross section of the laser rod will not be symmetrical with respect to the axis. Moreover, since the laser rod is constantly water-cooled, its temperature distribution continues to be non-uniform. When we measured the lens action due to the thermal distortion effect of the laser rod in such a state, we found that the laser beam was emitted in the direction It was confirmed that there were differences in the degree of convergence. That is, as shown in FIG. 1, the focal length in the X direction is larger than the focal length in the Y direction, and the difference in these focal lengths increases as the voltage applied to the excitation lamp increases. Therefore,
Due to such a difference in the degree of convergence between the X direction and the Y direction, the pattern shape of the laser beam is no longer symmetrical with respect to the axis of the laser rod. Therefore, when this laser beam is focused by a lens and scanned, a phenomenon occurs in which the cutting width differs depending on the scanning direction.
このような問題を解決する手段としてレーザ装
置から出力されるレーザ光の一部だけを通過させ
る小孔が穿設された制限板を設け、そのレーザ光
のパターン形状を軸対称にすることが考えられる
が、このような手段によると、発振されるレーザ
光の全てを有効に利用することができないから、
効率低下を招くという不都合が生じる。 One idea to solve this problem is to provide a restriction plate with a small hole that allows only a portion of the laser beam output from the laser device to pass through, and to make the pattern shape of the laser beam axially symmetrical. However, with this method, all of the emitted laser light cannot be used effectively.
This causes the inconvenience of reducing efficiency.
この発明はレーザロツドの熱歪み効果によるレ
ンズ作用の不均一を修正して、軸対称なパターン
形状のレーザ光を得ることができるようにした固
体レーザ装置を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a solid-state laser device that can correct the non-uniformity of the lens action caused by the thermal distortion effect of the laser rod and obtain laser light with an axially symmetrical pattern.
レーザロツドと、このレーザロツドの軸線に対
して平行に配置され上記レーザロツドをその径方
向から光励起する励起ランプと、上記レーザロツ
ドの両端面にそれぞれ対向した配置された一対の
共振器ミラーと、上記レーザロツドの端面もしく
はこの端面に対向する部位に設けられ上記レーザ
ロツドが光励起される励起方向に沿つてその励起
による熱歪みで生じる集束度合の変化を補正する
よう湾曲し上記励起方向と交差する方向において
湾曲していないシリンドリカル状の曲面に形成さ
れた光学手段とを具備したことを特徴とする。
A laser rod, an excitation lamp arranged parallel to the axis of the laser rod and for optically exciting the laser rod from its radial direction, a pair of resonator mirrors arranged opposite to each other on both end faces of the laser rod, and an end face of the laser rod. Alternatively, it is provided at a portion facing this end face and is curved along the excitation direction in which the laser rod is optically excited so as to correct a change in the degree of focusing caused by thermal distortion due to the excitation, and is not curved in a direction intersecting the excitation direction. It is characterized by comprising an optical means formed in a cylindrical curved surface.
以下、この発明の第１の実施例を第２図乃至第
５図を参照して説明する。第２図に示す固体レー
ザ装置は本体１を備えている。この本体１は２つ
のブロツク３を接合固定してなり、その接合部分
には断面が楕円形の収容部４が形成されている。
この収容部４の内周面には集光反射面５が形成さ
れている。また、収容部４内にはその一方の焦点
位置に断面円形のレーザロツド６、他方の焦点位
置に内部両端に電極７ａを有する励起ランプ７が
上記収容部４の軸線方向に沿つて互いに平行に配
置されている。これらレーザロツド６と励起ラン
プ７との両端部は、それぞれ筒状のホルダ８の一
端部にＯリング９を介して液密に嵌合保持されて
いる。上記各ホルダ８の他端部は上記本体１の軸
方向両端部分に穿設された取付孔１０に液密に嵌
合されている。
A first embodiment of the present invention will be described below with reference to FIGS. 2 to 5. The solid-state laser device shown in FIG. 2 includes a main body 1. The solid-state laser device shown in FIG. This main body 1 is made by joining and fixing two blocks 3, and a housing portion 4 having an elliptical cross section is formed at the joint portion.
A condensing and reflecting surface 5 is formed on the inner peripheral surface of the accommodating portion 4 . Further, inside the housing part 4, a laser rod 6 having a circular cross section is disposed at one focal position, and an excitation lamp 7 having electrodes 7a at both internal ends is arranged parallel to each other along the axial direction of the housing part 4 at the other focal position. has been done. Both ends of the laser rod 6 and excitation lamp 7 are fluid-tightly fitted and held in one end of a cylindrical holder 8 via an O-ring 9, respectively. The other end of each of the holders 8 is fluid-tightly fitted into mounting holes 10 formed in both axial end portions of the main body 1.
上記レーザロツド６の軸方向両端面は、このレ
ーザロツド６が励起ランプ７によつて光励起され
る方向を第３図に示すようにＸ方向とすると、こ
のＸ方向に沿つて湾曲した光学手段としての凸面
１１に形成されている。すなわち、この凸面１１
は上記Ｘ方向に沿つてだけ湾曲し、このＸ方向と
直交しかつレーザロツド６の軸線と直交するＹ方
向に対しては湾曲していない形状、つまりＹ方向
に沿う軸をもつ形状となつている。このレーザロ
ツド６の両端凸面１１と対向する位置には一対の
共振器ミラー１２が互いに平行に配置されてい
る。一方の共振器ミラー１２は他方の共振器ミラ
ー１２に比べて反射率が低く形成されている。し
たがつて、レーザロツド６が励起ランプ７によつ
て光励起されると、レーザ光Ｌは一対の共振器ミ
ラー１２間で増幅されて反射率の低い共振器ミラ
ー１２側から出力される。 If the direction in which this laser rod 6 is optically excited by the excitation lamp 7 is the X direction as shown in FIG. 11. That is, this convex surface 11
is curved only along the X direction, and is not curved in the Y direction, which is perpendicular to the X direction and perpendicular to the axis of the laser rod 6, that is, has a shape with an axis along the Y direction. . A pair of resonator mirrors 12 are arranged parallel to each other at positions facing the convex surfaces 11 at both ends of the laser rod 6. One resonator mirror 12 is formed to have a lower reflectance than the other resonator mirror 12. Therefore, when the laser rod 6 is optically excited by the excitation lamp 7, the laser beam L is amplified between the pair of resonator mirrors 12 and output from the side of the resonator mirror 12 having a low reflectance.
また、上記本体１には収容部４に連通する供給
管１３と排出管１４が接続されている。上記供給
管１３は図示しない冷却水の供給源に連通してい
る。したがつて、冷却水が上記供給管１３から収
容部４に供給されて排出管１４から排出されるこ
とにより、レーザロツド６と励起ランプ７とが冷
却される。また、収容部４にはレーザロツド６と
励起ランプ７との間に光学的に透明な材料で作ら
れた仕切板１５が設けられ、この仕切板１５によ
つて収容部４内における冷却水の流れ方向を第２
図に矢印で示すように規制している。 Furthermore, a supply pipe 13 and a discharge pipe 14 communicating with the housing section 4 are connected to the main body 1 . The supply pipe 13 communicates with a cooling water supply source (not shown). Therefore, the laser rod 6 and the excitation lamp 7 are cooled by supplying the cooling water from the supply pipe 13 to the housing section 4 and discharging it from the discharge pipe 14. Furthermore, a partition plate 15 made of an optically transparent material is provided between the laser rod 6 and the excitation lamp 7 in the housing part 4, and this partition plate 15 allows the cooling water to flow inside the housing part 4. second direction
The regulations are as shown by the arrows in the figure.
このような構成の固体レーザ装置において、レ
ーザロツド６がその径方向側方のＸ方向から励起
ランプ７によつて光励起されると、このレーザロ
ツド６の熱歪み効果によるレンズ作用が上記Ｘ方
向と、このＸ方向およびレーザロツド６の軸線に
直交するＹ方向とで異なる。つまり、レーザロツ
ド６がＸ方向からだけ加熱されるため、上述のご
とくＸ方向の焦点距離がＹ方向の焦点距離よりも
大きくなろうとする。しかしながら、レーザロツ
ド６の端面は、Ｘ方向に沿つて湾曲した凸面１１
に形成されているから、レーザロツド６の端面か
ら出力されるレーザ光Ｌは上記凸面１１によつて
Ｘ方向の焦点距離が短かく修正される。したがつ
て、記凸面１１の曲率の設定状態により、上記Ｘ
方向とＹ方向との焦点距離をほぼ等しくできるか
ら、反射率の低い一方の共振器ミラー１２から出
力されるレーザ光Ｌのパターン形状はレーザロツ
ド６の軸線に対して対称な形状、すなわち円形と
なる。そのため、このレーザ光Ｌを図示せぬレン
ズで集束して被加工物の切断加工を行なうような
場合、レーザ光Ｌの走査方向が異なつても一定の
切断幅で切断することができる。 In the solid-state laser device having such a configuration, when the laser rod 6 is optically excited by the excitation lamp 7 from the X direction on the radial side, the lens action due to the thermal distortion effect of the laser rod 6 is caused to move in the X direction and this direction. It is different in the X direction and in the Y direction perpendicular to the axis of the laser rod 6. In other words, since the laser rod 6 is heated only from the X direction, the focal length in the X direction tends to be larger than the focal length in the Y direction, as described above. However, the end surface of the laser rod 6 has a convex surface 11 curved along the X direction.
Therefore, the focal length of the laser beam L outputted from the end face of the laser rod 6 in the X direction is shortened by the convex surface 11. Therefore, depending on the setting state of the curvature of the convex surface 11, the above-mentioned
Since the focal lengths in the Y direction and the Y direction can be made almost equal, the pattern shape of the laser beam L output from one of the resonator mirrors 12 with a low reflectance is symmetrical with respect to the axis of the laser rod 6, that is, circular. . Therefore, when cutting a workpiece by focusing this laser light L with a lens (not shown), cutting can be performed with a constant cutting width even if the scanning direction of the laser light L is different.
第６図と第７図はこの発明の第２の実施例を示
す。この実施例はレーザ光Ｌのパターン形状を修
正する光学手段として一対の共振器ミラー１２の
レーザロツド６の端面と対向する面を凹面２０に
形成した。この凹面２０はレーザロツド６が励起
ランプ７によつて光励起されるＸ方向だけが湾曲
し、このＸ方向と直交するＹ方向は湾曲していな
い。このような構成によれば、上記凹面２０のレ
ンズ作用によつてレーザ光Ｌのパターン形状を修
正することができる。 6 and 7 show a second embodiment of the invention. In this embodiment, as an optical means for modifying the pattern shape of the laser beam L, the surfaces of a pair of resonator mirrors 12 facing the end surfaces of the laser rods 6 are formed into concave surfaces 20. This concave surface 20 is curved only in the X direction in which the laser rod 6 is optically excited by the excitation lamp 7, and is not curved in the Y direction perpendicular to the X direction. According to such a configuration, the pattern shape of the laser beam L can be corrected by the lens action of the concave surface 20.
第８図と第９図はこの発明の第３の実施例を示
す。この実施例は光学手段としてレーザロツド６
の一方の端面と、この端面に対向した共振器ミラ
ー１２との間にレンズ２５を設けた。このレンズ
２５は、レーザロツド６が光励起されるＸ方向だ
けが湾曲し、このＸ方向と直交するＹ方向は湾曲
されていない。したがつて、このような構成にお
いても、上記レンズ２５の集束作用によつてレー
ザ光Ｌのパターン形状を修正することができる。 8 and 9 show a third embodiment of the invention. This embodiment uses a laser rod 6 as an optical means.
A lens 25 was provided between one end surface of the resonator mirror 12 and the resonator mirror 12 facing this end surface. This lens 25 is curved only in the X direction in which the laser rod 6 is optically excited, and is not curved in the Y direction perpendicular to the X direction. Therefore, even in such a configuration, the pattern shape of the laser beam L can be corrected by the focusing action of the lens 25.
以上述べたようにこの発明は、レーザロツドの
端面もしくはこの端面に対向する部分に、上記レ
ーザロツドが励起ランプによつて光励起される励
起方向に沿つてその励起による熱歪みで生じる集
束度合の変化を補正するよう湾曲し上記励起方向
と交差する方向において湾曲していないシリンド
リカル状の曲面に形成された光学手段を設けた。
したがつて、レーザロツドが光励起されて熱歪み
効果によるレンズ作用が生じても、上記光学手段
によつてレーザ光のパターン形状をレーザロツド
の軸線に対称な形状に維持できる。そのため、上
記レーザ光によりたとえば切断加工などを行なう
場合、レーザ光の走査方向によつて切断幅が異な
ることがない。
As described above, the present invention corrects the change in the degree of focusing caused by thermal distortion caused by the excitation along the excitation direction in which the laser rod is optically excited by the excitation lamp on the end face of the laser rod or the portion facing the end face. An optical means was provided, which was formed into a cylindrical curved surface that was curved so as to be curved so that the excitation direction was not curved in the direction crossing the excitation direction.
Therefore, even if the laser rod is optically excited and a lens effect occurs due to the thermal distortion effect, the optical means can maintain the pattern shape of the laser beam in a shape symmetrical to the axis of the laser rod. Therefore, when cutting is performed using the laser beam, the cutting width does not vary depending on the scanning direction of the laser beam.
第１図はレーザロツドの熱歪み効果によつて生
じるレーザ光の焦点距離と励起ランプに印加する
電力との関係図、第２図はこの発明の第１の実施
例を示す全体の断面図、第３図は同じく第２図
−線に沿う断面図、第４図は同じく第２図−
線に沿う方向から見たレーザロツドの平面図、
第５図は同じく第４図−線に沿う方向から見
たレーザロツドの側面図、第６図はこの発明の第
２の実施例を示すレーザロツドと共振器ミラーと
の配置関係の平面図、第７図は同じく第６図−
線に沿う方向から見た側面図、第８図はこの発
明の第３の実施例を示すレーザロツドと共振器ミ
ラーとの配置関係の平面図、第９図は同じく第８
図−線に沿う側面図である。
６……レーザロツド、７……励起ランプ、１１
……凸面（光学手段）、１２……共振器ミラー、
２０……凹面（光学手段）、２５……レンズ（光
学手段）。
FIG. 1 is a diagram showing the relationship between the focal length of the laser beam caused by the thermal distortion effect of the laser rod and the power applied to the excitation lamp. FIG. 2 is an overall sectional view showing the first embodiment of the present invention. Figure 3 is also a sectional view along the line of Figure 2, and Figure 4 is also a cross-sectional view along the line of Figure 2.
A plan view of the laser rod seen from the direction along the line,
FIG. 5 is a side view of the laser rod seen from the direction along the line of FIG. The figure is also Figure 6-
FIG. 8 is a side view as seen from the direction along the line, FIG.
Figure 3 is a side view taken along the line; 6... Laser rod, 7... Excitation lamp, 11
... Convex surface (optical means), 12 ... Resonator mirror,
20... Concave surface (optical means), 25... Lens (optical means).
Claims (1)
対して平行に配置され上記レーザロツドをその径
方向から光励起する励起ランプと、上記レーザロ
ツドの両端面にそれぞれ対向して配置された一対
の共振器ミラーと、上記レーザロツドの端面もし
くはこの端面に対向する部位に設けられ上記レー
ザロツドが光励起される励起方向に沿つてその励
起による熱歪みで生じる集束度合の変化を補正す
るよう湾曲し上記励起方向と交差する方向におい
て湾曲していないシリンドリカル状の曲面に形成
された光学手段とを具備したことを特徴とする固
体レーザ装置。 ２ 上記光学手段の曲面はレーザロツドの端面に
形成されていることを特徴とする固体レーザ装
置。 ３ 上記光学手段の曲面は上記共振器ミラーに形
成されていることを特徴とする固体レーザ装置。 ４ 上記光学手段の曲面は上記共振器ミラーと上
記レーザロツドの端面との間に設けられたレンズ
に形成されていることを特徴とする固体レーザ装
置。[Scope of Claims] 1. A laser rod, an excitation lamp that is arranged parallel to the axis of the laser rod and that optically excites the laser rod from its radial direction, and a pair of resonators that are arranged opposite to each other on both end faces of the laser rod. The laser rod is curved along the excitation direction in which the laser rod is optically excited so as to correct a change in the degree of focusing caused by thermal distortion caused by the excitation, and is provided on the end face of the laser rod or a portion opposite to the end face. 1. A solid-state laser device comprising: an optical means formed in a cylindrical curved surface that is not curved in intersecting directions. 2. A solid-state laser device characterized in that the curved surface of the optical means is formed on an end face of a laser rod. 3. A solid-state laser device, wherein the curved surface of the optical means is formed on the resonator mirror. 4. A solid-state laser device, wherein the curved surface of the optical means is formed on a lens provided between the resonator mirror and the end face of the laser rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8196583A JPS59207677A (en) | 1983-05-11 | 1983-05-11 | Solid laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8196583A JPS59207677A (en) | 1983-05-11 | 1983-05-11 | Solid laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59207677A JPS59207677A (en) | 1984-11-24 |
| JPH056356B2 true JPH056356B2 (en) | 1993-01-26 |
Family
ID=13761212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8196583A Granted JPS59207677A (en) | 1983-05-11 | 1983-05-11 | Solid laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59207677A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4715040A (en) * | 1985-04-11 | 1987-12-22 | Amada Engineering & Service Co., Inc. | Laser system |
| JP4613272B2 (en) * | 2000-05-10 | 2011-01-12 | 独立行政法人理化学研究所 | Laser resonator and adjustment method thereof |
| JP2007523499A (en) * | 2004-02-23 | 2007-08-16 | パワーレイズ・リミテッド | Laser equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4511941Y1 (en) * | 1965-06-15 | 1970-05-27 | ||
| JPS472155U (en) * | 1971-01-25 | 1972-08-24 | ||
| JPS5580383A (en) * | 1978-12-13 | 1980-06-17 | Nippon Telegr & Teleph Corp <Ntt> | Solid laser device |
| JPS57109390A (en) * | 1980-12-26 | 1982-07-07 | Matsushita Electric Ind Co Ltd | Wave guide type carbon oxide gas laser oscillator |
-
1983
- 1983-05-11 JP JP8196583A patent/JPS59207677A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4511941Y1 (en) * | 1965-06-15 | 1970-05-27 | ||
| JPS472155U (en) * | 1971-01-25 | 1972-08-24 | ||
| JPS5580383A (en) * | 1978-12-13 | 1980-06-17 | Nippon Telegr & Teleph Corp <Ntt> | Solid laser device |
| JPS57109390A (en) * | 1980-12-26 | 1982-07-07 | Matsushita Electric Ind Co Ltd | Wave guide type carbon oxide gas laser oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59207677A (en) | 1984-11-24 |
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