JPH0563102A - Carbon jig for manufacture eprom package - Google Patents

Abstract

PURPOSE:To provide a carbon jig, glass transparency of which with incomplete degassing is not lowered and from which powder is not separated and a flaw is not generated, for manufacturing an EPROM package by selectively using a glassy carbon material having proper air permeability and harness, which is not high extremely, as the quality of material of the jig. CONSTITUTION:A carbon jig is composed of a glassy carbon material having the characteristics of a means pore diameter of 20mum or less, the quantity of a gas transmitted of 0.01-20ml/hr. cm. mmAq and Shore hardness of 30-110. The glassy carbon material can be aquired by carbonizing and treating a molded form, in which cellulose fibers are impregnated with a thermo-setting resin liquid, within a temperature range of 1000-2700 deg.C.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carbon jig for manufacturing an EPROM package, and more particularly to a carbon jig used for fusion-fixing a glass for introducing ultraviolet rays to an EPROM ceramic package.

[0002]

2. Description of the Related Art EPROM is a type of ROM characterized by being able to erase all stored information by irradiating it with ultraviolet rays from a glass window attached to the upper surface of a package, and is widely used as a component of various electronic devices. ing. In this device, the glass window plays an important role in addition to the IC chip. For example, when a phenomenon such as opaque glass or stain on the glass surface occurs, the effect of ultraviolet irradiation cannot be obtained.

The EPROM package is shown in FIG. 1 (plan view).
Also, as shown in FIG. 2 (cross-sectional view), the glass disk 2 is fixed to the central hole of the ceramic plate 1 to form a window, but conventionally, in order to fix the glass window to the ceramic plate, The following process is adopted. That is,
As shown in FIG. 3, EPROM is placed on the underlaying carbon jig 3.
A ceramic plate 1 provided with a central hole serving as a frame of the package is placed, and a glass disc 2 is fitted into the central hole. An upper carbon jig 4 having an opening having the same size as the central hole of the ceramic plate 1 is superposed on the upper portion thereof, and then a weight carbon jig 5 is fitted into the opening. In this set state, heat treatment in an inert gas atmosphere such as nitrogen or argon,
The glass disk 2 is melted and fused to the ceramic plate 1 to be fixed as a glass window.

[0004] For each carbon jig used in the above process, a graphite material, which is a heat-resistant material having good workability, was initially useful. However, since the graphite structure is flexible, graphite powder is used from the surface during the use process. The glass window was detached to stain the glass window, and scratches generated on the jig surface were directly transferred to the glass surface to impair transparency and smoothness. In order to solve such a problem, an EPR in which a carbon material is made of hard and substantially gas-impermeable glassy carbon
A jig for manufacturing an OM package has been developed and put into practical use (Japanese Patent Publication No. 3-42509).

[0005]

The jig made of the glassy carbon material does not suffer from such a phenomenon that the glass is contaminated due to powder generation and the jig surface is not scratched. Stable use becomes possible. However, since the jig material is too dense and has gas impermeability, outgassing during glass fusion becomes incomplete, which sometimes causes a decrease in glass transparency. Moreover, because of its high hardness, it was extremely difficult to process it into a jig shape.

An object of the present invention is to select a glassy carbon material having a proper air permeability for tissues and a property that is not extremely hard as a jig material, so that there is a risk of a decrease in glass transparency due to insufficient gas release during package formation. It is an object of the present invention to provide a carbon jig for manufacturing an EPROM package which is free from troubles such as powder detachment and scratch formation.

[0007]

A carbon jig for manufacturing an EPROM package according to the present invention for achieving the above object has an average pore diameter of 20 μm or less and a gas permeation amount of 0.01 to 20 ml.
The structural feature is that it is made of a glassy carbon material having characteristics of /hr.cm.mmAq and Shore hardness of 30 to 110. The gas permeation amount mentioned above refers to the permeation gas amount when nitrogen gas is permeated through a glassy carbon test piece having a diameter of 50 mm and a thickness of 3 mm under a pressure of 200 mmAq at room temperature.

The glassy carbon material forming the jig of the present invention is characterized by a material structure having an appropriate air permeability in which fine pores are uniformly distributed and a hardness characteristic which is not extremely high, and is specified by the above constitution. The intended purpose is effectively achieved when the average pore size, gas permeation amount and hardness range are satisfied.

That is, the characteristic range of the average pore diameter of 20 μm and the gas permeation amount of 0.01 to 20 ml / hr.cm.mmAq, which indicates that the glassy carbon structure has an appropriate air permeability, is such that the degassing during glass melting is smooth. It becomes an important requirement for fusion fixing of transparent glass without product trouble. If the size of the intervening average pore diameter exceeds 20 μm, fine irregularities appear on the surface, resulting in deterioration of the surface smoothness of the glass. Also, when the gas permeation rate is less than 0.01 ml / hr.cm.mm Aq, the gas release becomes insufficient and the transparency of the fused glass is impaired, while on the other hand, the gas permeation rate exceeds 20 ml / hr.cm.mm Aq. If this happens, oxidation consumption based on residual oxygen will progress during the use stage, and the life of the jig will be greatly reduced.

Material hardness is also important, with a Shore hardness of 30
The requirement is to be in the range of ~ 110. Shore hardness
If it is less than 30, particle detachment due to deterioration of the structure during use occurs and the transparency of the glass is impaired, and if it exceeds 110, material processing becomes extremely difficult.

The glassy carbon material having the above-mentioned structural characteristics is difficult to obtain by a method of carbonizing a thermosetting resin molding, which has been a typical manufacturing means in the past. However, when a method of carbonizing a molded body obtained by impregnating a cellulose resin with a thermosetting resin liquid in a temperature range of 1000 to 2700 ° C., a glassy carbon material satisfying the characteristic range of the present invention is easily produced. be able to.

The process for producing a preferable glassy carbon material by this method will be specifically described as follows. First, short fibers (thickness 3 to 10 denier, length 5 to 10 mm) containing 90% or more of α-cellulose such as pulp or rayon pulp are dispersed in water together with a binder component such as polyvinyl alcohol to form a papermaking sheet. .. After the papermaking sheet is dried, it is immersed in a thermosetting resin solution having a residual carbon rate of 40% or more to impregnate it, and is semi-cured. The residual carbon ratio of the thermosetting resin means that the resin is 800% in a non-oxidizing atmosphere.
Indicates the weight of carbon content remaining when fired at a temperature of ℃,
Examples of such resins containing a residual carbon ratio of 40% or more include phenol resins, furan resins, and polyimide resins. The organic solvent used for the solution of the thermosetting resin is selected depending on the type of resin, but it is usually an organic solvent with low viscosity such as methanol, ethanol, acetone, and methyl ethyl ketone, which has high permeability and easily volatilizes heat. It is selected from the solvents.

Next, the required number of semi-cured sheets are laminated, and the entire surface is uniformly compressed to form a laminate. Subsequently, the molded body is fired in a temperature range of 1000 to 2700 ° C. in a non-oxidizing atmosphere to volatilize the heat-volatile component and carbonize the thermosetting resin component to convert it into a glassy carbon material.
It is important to set the temperature range during this carbonization process.
If the temperature is less than ℃, the material will be easily oxidized, and the temperature will be 2700 ℃.
When it exceeds, the graphitization proceeds and the fine pieces come off.

By using the above manufacturing process and appropriately adjusting the papermaking conditions of the cellulose fiber raw material, the amount of the impregnated resin, the conditions of laminate molding, etc., the average pore diameter is 20 μm or less, and the gas permeation amount is 0.01 to 20 ml / hr.cm. .mmAq texture and Shore hardness
A glassy carbon material having a material property of 30 to 110 can be manufactured. The carbon jig for manufacturing the EPROM package of the present invention is manufactured by processing the glassy carbon material.

[0015]

The carbon jig for manufacturing the EPROM package according to the present invention has an average pore diameter of 20 μm or less and a gas permeation amount of 0.01 to 2
It possesses an appropriate air permeability consisting of 0ml / hr.cm.mmAq structure, and this structure property is effective for allowing gas escape during glass fusion to proceed smoothly and for maintaining normal transparency of glass at all times. Perform a positive action. Moreover, since the porous structure does not cause unevenness on the surface of the material, glass molding with excellent surface smoothness is possible, and even when used for a long period of time, oxidative consumption is caused to cause practical problems. There is no such thing.

Since the material hardness is in the range of 30 to 110 as the Shore hardness, it is possible to secure a relatively good material processability, and the other material structure is excellent in the skeleton structure which does not have the original powder separation of glassy carbon. Since it has excellent surface smoothness and mechanical strength, it is possible to efficiently manufacture an EPROM package without causing operational troubles.

[0017]

[Examples] Examples 1 to 8 and Comparative Examples 1 to 5 Cellulose fibers containing 90% of α-cellulose were used in a papermaking method using polyvinyl alcohol as a binder to measure 10 in length and width.
It is molded into a sheet with a thickness of 00 mm and a thickness of 0.1 mm, and this is a 30% acetone solution of phenol resin [Sumitomo Dures Co., Ltd., “PR94
After dipping in 0 "] and drying, stack the sheets
A molded product was obtained by hot pressing under heating at ℃. Then, the molded body was placed in an electric furnace, and the surroundings were covered with coke powder.
Carbonization was carried out by raising the temperature to 1000 to 2700 ° C at a rate of ° C / hr. At this time, the paper-making conditions, the amount of impregnated resin, the molding pressure and the carbonization temperature were controlled to produce glassy carbon materials having different average pore diameters, gas permeation amounts, Shore hardness and the like.

Each glassy carbon material obtained was processed into a jig shape and transferred to an electric furnace at 900 ° C. held in a nitrogen atmosphere in the set form shown in FIG. 3 to carry out an EPROM package manufacturing test. Product yield of each jig (50 manufactured)
Table 1 shows the product appearance, oxidation loss, etc. in comparison with the material characteristics. As reference example 1, a dense graphite material [“G347” manufactured by Tokai Carbon Co., Ltd.], and as reference example 2, a substantially gas-impermeable glassy carbon material manufactured by carbonizing a phenol resin molded body [Tokai carbon Co., Ltd. "GC2
0 ″] is also used to test a jig formed by
The results are also shown in Table 1. In addition, the jig weight is 100
The degree of thickness reduction (mm) after repeated use is shown.

[0019]

[Table 1]

From the results shown in Table 1, by using the carbon jig of the present invention, the ultraviolet irradiation glass window of the EPROM package can be attached with a good yield while maintaining good glass transparency. In addition, the workability of the jig is good and the usage life is long.

[0021]

As described above, according to the present invention, a glassy carbon material having a structure having an appropriate air permeability and a hardness that is not extremely high is selected and used as a jig material, so that the transparency is always good. It is possible to efficiently manufacture an EPROM package having a fixed glass window. Therefore, the productivity of the EPROM package can be improved as compared with a conventional carbon jig made of a graphite material or a glassy carbon material having a dense structure.

[Brief description of drawings]

FIG. 1 is a plan view showing an EPROM package.

FIG. 2 is a cross-sectional view showing an EPROM package.

FIG. 3 is a cross-sectional view showing a set state of a carbon jig when manufacturing an EPROM package.

[Explanation of symbols]

 1 Ceramic Plate 2 Glass Disc 3 Underlay Carbon Jig 4 Overhead Carbon Jig 5 Carbon Jig for Weight

Claims (2)

[Claims] 1. An average pore diameter of 20 μm or less and a gas permeation amount of 0.01
A carbon jig for manufacturing an EPROM package, which is made of a glassy carbon material having characteristics of -20 ml / hr.cm.mmAq and Shore hardness of 30-110. 2. The EPROM package according to claim 1, wherein the glassy carbon material is obtained by carbonizing a molded product obtained by impregnating cellulose fibers with a thermosetting resin liquid in a temperature range of 1000 to 2700 ° C. Carbon jig for manufacturing.