JPH0563033B2 - - Google Patents
Info
- Publication number
- JPH0563033B2 JPH0563033B2 JP62002551A JP255187A JPH0563033B2 JP H0563033 B2 JPH0563033 B2 JP H0563033B2 JP 62002551 A JP62002551 A JP 62002551A JP 255187 A JP255187 A JP 255187A JP H0563033 B2 JPH0563033 B2 JP H0563033B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- crystal
- lenses
- diameter
- incident
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 claims description 42
- 230000003287 optical effect Effects 0.000 claims description 25
- 238000012544 monitoring process Methods 0.000 claims description 6
- 230000000052 comparative effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 7
- 230000010355 oscillation Effects 0.000 description 5
- 230000005284 excitation Effects 0.000 description 3
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000004202 carbamide Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、非線形光学結晶面に対する入射レー
ザビームの入射角度を変えることにより、異なる
波長のレーザビームを射出せしめるようにした装
置において、前記結晶に入射するレーザビームの
ビーム径を任意の倍率で調整でき、かつ、調整後
に外的要因で射出ビームの平行度が変化しても常
時平行に制御できるようにした波長可変レーザ装
置に関するものである。Detailed Description of the Invention "Field of Industrial Application" The present invention provides an apparatus for emitting laser beams of different wavelengths by changing the angle of incidence of an incident laser beam with respect to a nonlinear optical crystal surface. This invention relates to a wavelength tunable laser device in which the beam diameter of a laser beam incident on the laser beam can be adjusted at any magnification, and even if the parallelism of the emitted beam changes due to external factors after adjustment, it can always be controlled to be parallel. .
「従来の技術」
一般に、波長可変レーザ装置は、第５図に示す
ように、光パラメトリツク発振部１と第２高調波
発生部２とを具備し、このうち、光パラメトリツ
ク発振部１はパワー密度を上げるためのコリメー
タ部３と、所定の帯域幅の反射率を有する入力ミ
ラー４および出力ミラー５と、回転可能な非線形
光学結晶６とからなり、また、前記第２高調波発
生部２はパワー密度を上げるためのレンズ７，８
と、第２高調波を得るための回転可能な結晶９と
からなるものである。"Prior Art" In general, a wavelength tunable laser device includes an optical parametric oscillation section 1 and a second harmonic generation section 2, as shown in FIG. It consists of a collimator section 3 for increasing power density, an input mirror 4 and an output mirror 5 having reflectance of a predetermined bandwidth, and a rotatable nonlinear optical crystal 6, and the second harmonic generation section 2 are lenses 7 and 8 for increasing power density.
and a rotatable crystal 9 for obtaining the second harmonic.
このような構成において、波長連続可変のレー
ザ光を得るため、励起光としてNd−YAGレーザ
の第３高調波の355nｍまたはエキシマレーザの
308nｍのレーザ光が用いられる。光パラメトリ
ツク発振部１に内蔵されているニオブ酸リチウ
ム、尿素結晶などからなる前記結晶６は結晶面へ
の入射角θにより波長の異なる光を発生する。具
体的には、Nd−YAGレーザの355nｍで励起し、
また尿素結晶を用いた場合、結晶６の回転により
500〜1200nｍのコヒーレント光が得られる。結
晶６から射出したレーザ光は入出力ミラー４，５
間で発振し出力する。第２高調波発生部２を組合
せた場合、結晶９の回転により、さらに広帯域の
250〜1200nｍの発振光が得られる。 In such a configuration, in order to obtain a continuously variable wavelength laser beam, the third harmonic of 355 nm of an Nd-YAG laser or an excimer laser is used as the excitation light.
A 308 nm laser beam is used. The crystal 6 made of lithium niobate, urea crystal, etc. built into the optical parametric oscillator 1 generates light of different wavelengths depending on the angle of incidence θ on the crystal plane. Specifically, we excited it with a 355nm Nd-YAG laser,
In addition, when using a urea crystal, the rotation of the crystal 6
Coherent light of 500 to 1200 nm can be obtained. The laser beam emitted from the crystal 6 is sent to the input/output mirrors 4 and 5.
It oscillates and outputs between. When the second harmonic generator 2 is combined, the rotation of the crystal 9 allows for an even wider band.
Oscillation light of 250 to 1200 nm can be obtained.
「発明が解決しようとする問題点」
パラメトリツク発振が最大効率を得て、しかも
結晶に損傷を与えないためには、結晶に入射する
レーザのパワー密度を最適値に制御する必要があ
る。しかし、第５図に示す従来の装置では結晶に
入射するビーム径が一定のため、最適値に制御す
ることが不可能であるという問題があつた。``Problems to be Solved by the Invention'' In order for parametric oscillation to achieve maximum efficiency and not damage the crystal, it is necessary to control the power density of the laser incident on the crystal to an optimal value. However, in the conventional apparatus shown in FIG. 5, the diameter of the beam incident on the crystal is constant, so there was a problem in that it was impossible to control it to an optimum value.
また、結晶へのレーザの入射角によつて、結晶
から出力するレーザの波長が異なつてくるので、
結晶に入射するレーザの平行度はきわめて重要で
ある。しかるに、パラメトリツク発振を起すため
には、Nd−YAGレーザやエキシマレーザを光源
として用いるが、レーザの機種、固体差、経時変
化などによつて出力ビーム径、パワー、パルス幅
などのパラメータが変化する。たとえば、励起光
を発生するレーザ発生装置は、内部のランプの温
度が上昇してくると、ビーム径が小さくなり、パ
ワー密度が大になつて結晶に損傷を与えるだけで
なく、レンズ系の焦点が変化して結晶からの出力
が理論上の波長と異なつてくるという問題があつ
た。 Also, the wavelength of the laser output from the crystal varies depending on the angle of incidence of the laser on the crystal.
The parallelism of the laser incident on the crystal is extremely important. However, to generate parametric oscillation, an Nd-YAG laser or excimer laser is used as a light source, but parameters such as output beam diameter, power, and pulse width vary depending on the laser model, individual differences, and changes over time. do. For example, in a laser generator that generates excitation light, as the temperature of the internal lamp increases, the beam diameter becomes smaller and the power density increases, which not only damages the crystal but also damages the focal point of the lens system. There was a problem that the output from the crystal would differ from the theoretical wavelength due to changes in the wavelength.
本発明は、出力ビームの径を、簡単に、しかも
正確に、任意の倍率に調整でき、かつ平行なビー
ムとして出力でき、また、出力ビームの径の調整
や経時変化に対する微調整を自動的に行い、正確
な波長のビームを得るとともに、結晶に損傷を与
えないようなものを得ることを目的とする。 The present invention allows the diameter of the output beam to be easily and accurately adjusted to any magnification, outputs the beam as a parallel beam, and automatically adjusts the diameter of the output beam and finely adjusts it against changes over time. The aim is to obtain a beam with an accurate wavelength and one that does not damage the crystal.
「問題点を解決するための手段」
本発明は、非線形光学結晶面に対する入射レー
ザビームの入射角度を変えることにより異なる波
長のレーザビームを射出せしめるようにした装置
において、前記非線形光学結晶面の入射測光軸上
に、ビーム形状、パワー密度を調整するための複
数個のレンズを設置し、これら複数個のレンズ
は、少なくとも入射レーザビーム径を拡大する第
１のレンズと、第１のレンズの射出ビームを所定
径に縮小する第２のレンズと、この所定径のビー
ムを平行にして前記非線形光学結晶に入射せしめ
るための第３のレンズとを具備し、これらのレン
ズのいくつかに、レンズの位置を調整して任意の
倍率でビーム径を縮小、拡大するためのレンズ駆
動装置を設け、前記第３のレンズと前記非線形光
学結晶との間に、互いに所定間隔をもつて２つの
ハーフミラーを設け、これらのハーフミラーの反
射光軸上にそれぞれビーム形状のモニタ用検出器
を設け、これらのモニタ用検出器の出力側に、比
較出力によりレンズの位置を調整し、射出ビーム
を常時平行にするための比較器、CPUおよび駆
動回路を設け、この駆動回路を前記レンズ駆動装
置に結合してなることを特徴とする波長可変レー
ザ装置である。"Means for Solving the Problems" The present invention provides an apparatus for emitting laser beams of different wavelengths by changing the angle of incidence of an incident laser beam on a nonlinear optical crystal surface. A plurality of lenses are installed on the photometry axis to adjust the beam shape and power density, and these lenses include at least a first lens that expands the incident laser beam diameter and an exit lens of the first lens. It is equipped with a second lens that reduces the beam to a predetermined diameter, and a third lens that makes the beam of the predetermined diameter parallel and enters the nonlinear optical crystal. A lens driving device is provided to adjust the position to reduce or enlarge the beam diameter at an arbitrary magnification, and two half mirrors are provided at a predetermined distance between the third lens and the nonlinear optical crystal. A beam-shaped monitoring detector is installed on each of the reflection optical axes of these half mirrors, and the position of the lens is adjusted based on the comparative output on the output side of these monitoring detectors, so that the emitted beam is always parallel. This wavelength tunable laser device is characterized in that it is provided with a comparator, a CPU, and a drive circuit for the purpose of controlling the lens, and the drive circuit is coupled to the lens drive device.
「作用」
結晶の入射側光軸上に、少なくとも第１、第
２、第３の３個のレンズを設置し、このうち第
１、第２の２個のレンズを駆動装置で位置調整す
ると、任意の倍率でビーム径が変化する。また、
このとき第１のレンズと第２のレンズとを、略同
時に移動して、射出ビームの異常な発散、収束を
防止し、結晶の損傷を防止する。さらに、これら
のレンズと結晶との間にビーム形状とパワー密度
の検出器を設置して、その出力をレンズの駆動装
置に自動的にフイードバツクすることにより、常
に正確な平行度が得られるとともに、ビーム径が
制御される。"Operation" At least three lenses, first, second, and third, are installed on the optical axis on the incident side of the crystal, and when the positions of the first and second two lenses are adjusted using a drive device, Beam diameter changes with arbitrary magnification. Also,
At this time, the first lens and the second lens are moved substantially simultaneously to prevent abnormal divergence and convergence of the emitted beam and to prevent damage to the crystal. Furthermore, by installing a beam shape and power density detector between these lenses and the crystal, and automatically feeding back the output to the lens driving device, accurate parallelism can be obtained at all times. Beam diameter is controlled.
「実施例」
以下、本発明の一実施例を図面に基づき説明す
る。“Example” An example of the present invention will be described below based on the drawings.
第１図において、１０は、非線形光学結晶の入
射側光軸で、この光軸１０上には、複数個のレン
ズ、具体的には下記のようなパラメータ（屈折率
ｎ、曲率半径ｒ、厚さｔ）の特性の第１、第２、
第３の３個のレンズ１１，１２，１３が設置され
る。 In FIG. 1, 10 is the optical axis on the incident side of the nonlinear optical crystal. On this optical axis 10, there are a plurality of lenses, specifically the following parameters (refractive index n, radius of curvature r, thickness The first, second, and second characteristics of
A third three lenses 11, 12, 13 are installed.
屈折率：1.476
曲率半径：第１の平凹レンズ１１がr1＝46mm
第２の両凸レンズ１２がr2＝64.4mm
第３の平凹レンズ１３がr3＝23mm
レンズ中心での厚さ：第１のレンズ１１がt1＝
２mm
第２のレンズ１２がt2＝５
mm
第３のレンズ１３がt3＝２
mm
また、前記第１、第２、第３の３個のレンズ１
１，１２，１３のうち、第１、第２のレンズ１
１，１２は位置移動するためのレンズ駆動装置１
４，１５をそれぞれ備えている。これらのレンズ
駆動装置１４，１５により光軸１０と同一方向に
0.1mm以下で制御がなされ、また光軸１０と直角
な面内では数μｍ程度の制御がなされることが要
求される。 Refractive index: 1.476 Radius of curvature: First plano-concave lens 11: r 1 = 46 mm Second biconvex lens 12: r 2 = 64.4 mm Third plano-concave lens 13: r 3 = 23 mm Thickness at lens center: 1st The lens 11 of is t 1 =
2mm Second lens 12 is t 2 =5
mm The third lens 13 is t 3 =2
mm Also, the first, second, and third three lenses 1
1, 12, and 13, the first and second lenses 1
1 and 12 are lens drive devices 1 for position movement;
4 and 15, respectively. These lens drive devices 14 and 15 cause the lens to move in the same direction as the optical axis 10.
It is required that the control be performed within 0.1 mm or less, and that the control be performed within a range of several μm in a plane perpendicular to the optical axis 10.
このような制御をするための前記レンズ駆動装
置１４，１５として具体的には第３図に示すよう
な構造のものが用いられる。この第３図におい
て、１６はリニアステツピングモータ、サーボモ
ータなどのモータで、このモータ１６の駆動軸１
７には軸受１８，１９で回転自在に支持されたボ
ールねじ２０がカツプリング２１により結合され
ている。また、前記ボールねじ２０にはナツト２
２が螺合され、このナツト２２には進退自在スラ
イダ２３が固着され、このスライダ２３には前記
第１のレンズ１１がレンズホルダ２４で固着され
ている。第２のレンズ１２の駆動装置１５につい
ても同様の構成である。 Specifically, a structure as shown in FIG. 3 is used as the lens drive devices 14 and 15 for performing such control. In FIG. 3, 16 is a motor such as a linear stepping motor or a servo motor, and the drive shaft 1 of this motor 16 is
A ball screw 20 rotatably supported by bearings 18 and 19 is coupled to 7 by a coupling ring 21. Further, the ball screw 20 has a nut 2.
2 are screwed together, and a retractable slider 23 is fixed to this nut 22, and the first lens 11 is fixed to this slider 23 by a lens holder 24. The drive device 15 for the second lens 12 also has a similar configuration.
以上のような構成において、所定の倍率
（AMP）を得るためにレンズ駆動装置１４，１５
によつて第１、第２のレンズ１１，１２をどのよ
うに移動せしめるかについて説明する。 In the above configuration, lens driving devices 14 and 15 are used to obtain a predetermined magnification (AMP).
Now, how to move the first and second lenses 11 and 12 will be explained.
第１図において、第１のレンズ１１の後面から
第２のレンズ１２の前面までをL1、第２のレン
ズ１２の後面から第３のレンズ１３の後面までを
L2とする。 In FIG. 1, L 1 is from the rear surface of the first lens 11 to the front surface of the second lens 12, and L 1 is from the rear surface of the second lens 12 to the rear surface of the third lens 13.
Let it be L 2 .
第１、第２のレンズ１１，１２の少なくともい
ずれか一方の移動によつて倍率を変えることがで
きるが、第３のレンズ１３からの射出ビームが発
散したり、収束したり、結晶に損傷を与えたりし
ないようにするには、L1とL2の間が第２図に示
すような特性図の関係をもつて同時に移動するこ
とが必要である。例えば、倍率（AMP）を0.7と
するためには、第２図における倍率（AMP）0.7
を通る水平な線ａを引いて倍率（AMP）につい
ての特性線Ａとの交点ｂを求め、この交点ｂから
垂直線を下し、L1とL2の関係を示す２次曲線Ｂ
との交点ｃを求め、この交点ｃにおけるL1とL2
の値、具体的にはL1＝65mm、L2＝65mmを求め、
これらの値となるようにレンズ駆動装置１４，１
５を制御して位置調整する。倍率（AMP）を0.5
とするためには、倍率0.5を通る水平な線ｄを引
いて特性線Ａとの交点ｅを求め、この交点ｅから
垂直線を立たせ、２次曲線Ｂとの交点ｆを求め、
この交点ｆにおけるL1＝37mm、L2＝37mmを求め、
これらの値となるようにレンズ駆動装置１４，１
５で第１、第２のレンズ１１，１２の位置を調整
する。 The magnification can be changed by moving at least one of the first and second lenses 11 and 12, but the beam emitted from the third lens 13 may diverge, converge, or damage the crystal. In order to prevent this from occurring, it is necessary that L 1 and L 2 move simultaneously with the relationship shown in the characteristic diagram shown in FIG. For example, to set the magnification (AMP) to 0.7, the magnification (AMP) in Figure 2 is 0.7.
Draw a horizontal line a passing through , find the intersection point b with the characteristic line A for magnification (AMP), and draw a vertical line from this intersection b to obtain a quadratic curve B showing the relationship between L 1 and L 2
Find the intersection c with L 1 and L 2 at this intersection c
Find the values of L 1 = 65 mm, L 2 = 65 mm,
The lens driving devices 14, 1 are adjusted so that these values are achieved.
5 to adjust the position. Magnification (AMP) 0.5
In order to do this, draw a horizontal line d passing through a magnification of 0.5, find the intersection e with the characteristic line A, draw a vertical line from this intersection e, find the intersection f with the quadratic curve B,
Find L 1 = 37 mm and L 2 = 37 mm at this intersection f,
The lens driving devices 14, 1 are adjusted so that these values are achieved.
In step 5, the positions of the first and second lenses 11 and 12 are adjusted.
つぎに、第４図はビーム形状、パワー密度のモ
ニタとしての検出装置を具備した構成図で、前記
第３のレンズ１３の後段に、２個のハーフミラー
２５，２６を所定間隔をもつて配置し、これらの
ハーフミラー２５，２６の反射光軸にはビーム形
状の検出器２７，２８を設ける。これらの検出器
２７，２８は必要に応じて比較器２９、CPU３
０、駆動回路３１，３２を経て前記レンズ駆動装
置１４，１５のモータ１６，１６に結合される。 Next, FIG. 4 is a block diagram that is equipped with a detection device as a monitor of the beam shape and power density, and two half mirrors 25 and 26 are arranged at a predetermined interval after the third lens 13. However, beam-shaped detectors 27 and 28 are provided on the reflection optical axes of these half mirrors 25 and 26. These detectors 27 and 28 are connected to a comparator 29 and a CPU 3 as necessary.
0, and is coupled to the motors 16, 16 of the lens drive devices 14, 15 via drive circuits 31, 32.
このような構成において、第３のレンズ１３を
経たビームはハーフミラー２５，２６で出力光の
一部を取り出し、検出器２７，２８で検出し、ビ
ーム形状、パワー密度のモニタを行う。比較器２
９で比較して、ビーム形状が一致すればビームが
平行になつていることが確認できる。比較器２９
で比較して、もしビーム形状に違いがあると、
CPU３０を介してフイードバツクして駆動回路
３１，３２へ信号を送り、正確な平行度やビーム
径の制御ができる。また、パワー密度を常時モニ
タして高密度のレーザパワーの入力に対してビー
ム径を広げたり、ビームを発散させるように第
１、第２のレンズ１１，１２を駆動して結晶の損
傷を防止できる。 In such a configuration, a part of the output light of the beam passing through the third lens 13 is taken out by the half mirrors 25 and 26, and detected by the detectors 27 and 28, and the beam shape and power density are monitored. Comparator 2
9, if the beam shapes match, it can be confirmed that the beams are parallel. Comparator 29
If there is a difference in beam shape,
Feedback signals are sent to drive circuits 31 and 32 via the CPU 30, allowing accurate control of parallelism and beam diameter. In addition, the power density is constantly monitored to widen the beam diameter in response to high-density laser power input, and the first and second lenses 11 and 12 are driven to diverge the beam to prevent damage to the crystal. can.
「発明の効果」
(1) レンズ駆動装置によりレンズの位置を調整し
て、ビーム径の倍率を任意に制御できる。"Effects of the Invention" (1) The magnification of the beam diameter can be controlled arbitrarily by adjusting the position of the lens using the lens driving device.
(2) レーザの機種、固体差、経時変化等で出力ビ
ーム径、パワー密度、パルス幅等が変化しても
最適状態に容易に調整できる。(2) Even if the output beam diameter, power density, pulse width, etc. change due to laser model, individual differences, changes over time, etc., it can be easily adjusted to the optimal state.
(3) パラメトリツク発振部は、パワー密度によつ
て効率が決定するが、このパワー密度の調整が
できるので、結晶に損傷を与えない状態で最大
効率が得られる。(3) The efficiency of the parametric oscillator is determined by the power density, and since this power density can be adjusted, maximum efficiency can be obtained without damaging the crystal.
(4) 第３のレンズと結晶との間に、互いに所定間
隔をもつて２つのハーフミラーを設け、これら
の反射光軸上にそれぞれビーム形状のモニタ用
検出器を設け、これらの出力側に、比較器、
CPUおよび駆動回路を設けてレンズ駆動装置
を制御するようにしたので、レンズ駆動装置で
大まかに調整しても、また、調整後に狂いが生
じたりしても、比較器の出力によりレンズの位
置を自動的に微調整し、射出ビームを常時平行
にすることができる。(4) Two half mirrors are provided between the third lens and the crystal at a predetermined distance from each other, and a beam-shaped monitoring detector is provided on each of the reflected optical axes, and on the output side of these two half mirrors are provided. , comparator,
Since a CPU and a drive circuit are installed to control the lens drive device, even if the lens drive device makes a rough adjustment, or even if a deviation occurs after adjustment, the lens position can be determined by the output of the comparator. Automatic fine adjustment allows the exit beam to be parallel at all times.
(5) 結晶に入射するレーザの波長が経時的に変化
したり、人為的に変えたりすると、レンズ系の
焦点が変化して結晶からの出力が理論上の波長
と異なつてくるが、これはレンズ駆動装置だけ
では調整しきれない。これをハーフミラー、モ
ニタ用検出器、比較器、CPUおよび駆動回路
からなるモニタ装置で微調整し、第３のレンズ
からの射出ビームを常時平行に調整するので、
非線形光学結晶へ入射する入射角度が常に正確
で、したがつて、パラメトリツク発振部の発振
光の波長純度が極めてすぐれ、理論上の波長と
正確に一致させることができる。(5) If the wavelength of the laser incident on the crystal changes over time or is changed artificially, the focal point of the lens system will change and the output from the crystal will differ from the theoretical wavelength. It is not possible to make adjustments using only the lens drive device. This is finely adjusted by a monitoring device consisting of a half mirror, a monitoring detector, a comparator, a CPU, and a drive circuit, and the beam emitted from the third lens is always adjusted to be parallel.
The angle of incidence on the nonlinear optical crystal is always accurate, so the wavelength purity of the oscillated light from the parametric oscillator is extremely high and can be made to exactly match the theoretical wavelength.
(6) 励起光を発生するレーザ発生装置は、内部の
ランプの温度が上昇してくると、ビーム径が小
さくなり、パワー密度が大になつて結晶に損傷
を与えるおそれがあるが、射出ビームを常時平
行に自動的に調整することによつて、結晶に損
傷を与えるという問題を解決できる。(6) When the temperature of the internal lamp of a laser generator that generates excitation light increases, the beam diameter becomes smaller and the power density increases, which may damage the crystal. The problem of damaging the crystal can be solved by automatically adjusting the parallelism at all times.
(7) 入射レーザビーム径を拡大する第１のレンズ
と、第１のレンズの射出ビームを所定径に縮小
する第２のレンズを、略同時に移動することに
より、第３のレンズからの射出ビームの異常な
発散、収束を防止し、結晶の損傷を防止でき
る。(7) By moving substantially simultaneously the first lens that expands the incident laser beam diameter and the second lens that reduces the exit beam of the first lens to a predetermined diameter, the exit beam from the third lens is It can prevent abnormal divergence and convergence of , and prevent damage to the crystal.
第１図は本発明による波長可変レーザ装置の第
１実施例を示す説明図、第２図はレンズ間距離と
倍率の関係を示す特性図、第３図はレンズ駆動装
置の具体的な機構図、第４図は本発明の他の実施
例の説明図、第５図は一般的な波長可変レーザ装
置の説明図である。
１……光パラメトリツク発振部、２……第２高
調波発生部、３……コリメータ部、４，５……ミ
ラー、６……結晶、７，８……レンズ、９……結
晶、１０……光軸、１１，１２，１３……レン
ズ、１４，１５……レンズ駆動装置、１６……モ
ータ、２０……ボールねじ、２１……カツプリン
グ、２２……ナツト、２３……スライダ、２５，
２６……ハーフミラー、２７，２８……検出器、
２９……比較器、３０……CPU、３１，３２…
…駆動回路。
FIG. 1 is an explanatory diagram showing the first embodiment of the wavelength tunable laser device according to the present invention, FIG. 2 is a characteristic diagram showing the relationship between the distance between lenses and magnification, and FIG. 3 is a detailed mechanical diagram of the lens driving device. , FIG. 4 is an explanatory diagram of another embodiment of the present invention, and FIG. 5 is an explanatory diagram of a general wavelength tunable laser device. DESCRIPTION OF SYMBOLS 1... Optical parametric oscillation part, 2... Second harmonic generation part, 3... Collimator part, 4, 5... Mirror, 6... Crystal, 7, 8... Lens, 9... Crystal, 10 ... Optical axis, 11, 12, 13 ... Lens, 14, 15 ... Lens drive device, 16 ... Motor, 20 ... Ball screw, 21 ... Coupling, 22 ... Nut, 23 ... Slider, 25 ，
26... Half mirror, 27, 28... Detector,
29... Comparator, 30... CPU, 31, 32...
...Drive circuit.
Claims (1)
の入射角度を変えることにより異なる波長のレー
ザビームを射出せしめるようにした装置におい
て、前記非線形光学結晶面の入射側光軸上に、ビ
ーム形状、パワー密度を調整するための複数個の
レンズを設置し、これら複数個のレンズは、少な
くとも入射レーザビーム径を拡大する第１のレン
ズと、第１のレンズの射出ビームを所定径に縮小
する第２のレンズと、この所定径のビームを平行
にして前記非線形光学結晶に入射せしめるための
第３のレンズとを具備し、これらのレンズのいく
つかに、レンズの位置を調整して任意の倍率でビ
ーム径を縮小、拡大するためのレンズ駆動装置を
設け、前記第３のレンズと前記非線形光学結晶と
の間に、互いに所定間隔をもつて２つのハーフミ
ラーを設け、これらのハーフミラーの反射光軸上
にそれぞれビーム形状のモニタ用検出器を設け、
これらのモニタ用検出器の出力側に、比較出力に
よりレンズの位置を調整し、射出ビームを常時平
行にするための比較器、CPUおよび駆動回路を
設け、この駆動回路を前記レンズ駆動装置に結合
してなることを特徴とする波長可変レーザ装置。1. In a device configured to emit laser beams of different wavelengths by changing the angle of incidence of an incident laser beam with respect to a nonlinear optical crystal surface, the beam shape and power density are adjusted on the optical axis on the incident side of the nonlinear optical crystal surface. A plurality of lenses are installed for the purpose of the present invention, and these plurality of lenses include at least a first lens that expands the diameter of the incident laser beam, and a second lens that reduces the emitted beam of the first lens to a predetermined diameter. , and a third lens for collimating the beam of a predetermined diameter and making it incident on the nonlinear optical crystal, and some of these lenses are provided with a beam diameter that can be adjusted to any magnification by adjusting the position of the lens. A lens driving device for reduction and enlargement is provided, two half mirrors are provided at a predetermined distance from each other between the third lens and the nonlinear optical crystal, and a mirror is provided on the reflection optical axis of these half mirrors. A beam-shaped monitoring detector is installed for each,
On the output side of these monitoring detectors, a comparator, a CPU, and a drive circuit are provided to adjust the lens position using the comparative output and to make the emitted beam parallel at all times, and this drive circuit is coupled to the lens drive device. A wavelength tunable laser device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP255187A JPS63170982A (en) | 1987-01-08 | 1987-01-08 | Wavelength variable laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP255187A JPS63170982A (en) | 1987-01-08 | 1987-01-08 | Wavelength variable laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170982A JPS63170982A (en) | 1988-07-14 |
| JPH0563033B2 true JPH0563033B2 (en) | 1993-09-09 |
Family
ID=11532519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP255187A Granted JPS63170982A (en) | 1987-01-08 | 1987-01-08 | Wavelength variable laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170982A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003046213A (en) * | 2001-07-31 | 2003-02-14 | Optrex Corp | Flexible wiring board for liquid crystal panel |
| JP2006093674A (en) * | 2004-08-23 | 2006-04-06 | Furukawa Co Ltd | Laser apparatus |
| JP2008078341A (en) * | 2006-09-21 | 2008-04-03 | Casio Comput Co Ltd | Solder-bonding structure of wiring board |
| JP2021089383A (en) * | 2019-12-05 | 2021-06-10 | 株式会社ディスコ | Laser beam adjustment mechanism and laser processing apparatus |
| JP7485015B2 (en) * | 2020-04-16 | 2024-05-16 | 日本電信電話株式会社 | Electro-optical device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57141618A (en) * | 1981-02-26 | 1982-09-02 | Nec Corp | Multiwavelength laser oscillator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6181620U (en) * | 1984-11-05 | 1986-05-30 |
-
1987
- 1987-01-08 JP JP255187A patent/JPS63170982A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57141618A (en) * | 1981-02-26 | 1982-09-02 | Nec Corp | Multiwavelength laser oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63170982A (en) | 1988-07-14 |
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