CN211238805U - Laser tunable device - Google Patents

Laser tunable device Download PDF

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CN211238805U
CN211238805U CN201922128897.7U CN201922128897U CN211238805U CN 211238805 U CN211238805 U CN 211238805U CN 201922128897 U CN201922128897 U CN 201922128897U CN 211238805 U CN211238805 U CN 211238805U
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laser
mirror
double
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sided
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李康
奈杰尔·约瑟夫·科伯内尔
朱久源
乔敦
张博
曹辉
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Henan Baihe Special Optical Research Institute Co ltd
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Foshan Huikang Photoelectric Technology Co ltd
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Abstract

The utility model provides a laser tunable device, include: the light source module is used for emitting incident laser; a cavity mode selector disposed in an optical path of the laser light, including a frequency response of the mode selection mode, enabling frequency alignment of a frequency in the cavity mode selector with one of the plurality of cavity modes for exciting the optical path labeled as lasing of the selected cavity mode over the other cavity modes and altering the optical path of the laser light; the double-sided reflector is arranged on a light path of the laser and used for reflecting the incident laser to change the reflection angle of the laser when rotating, and when the double-sided reflector rotates by an angle theta, the incident angle of the laser which is reflected by the double-sided reflector and then enters the cavity film selector rotates by 2 theta; the first lens group and the second lens group are respectively arranged at two sides of the double-sided reflector and are used for reflecting the laser reflected by the double-sided reflector for multiple times so as to enable the emergent laser to be parallel to the incident laser; the end mirror is arranged on an output path of the emergent laser and used for receiving and outputting the laser. The utility model discloses can realize not having mode hopping harmonious.

Description

Laser tunable device
Technical Field
The utility model relates to a laser light source, concretely relates to laser tunable device.
Background
Tunable external cavity lasers are favored in many fields because of their narrow linewidth, high stability, continuous tuning without mode hopping, etc. Such as metrology, spectroscopy, laser measurement, laser cooling, etc.
The tunable external cavity laser light source on the market at present is a tuning scheme formed based on diffraction gratings (mainly evolved based on the Littrow method and the Littman-Metcalf method). The tuning schemes realize the synchronization of the wavelength/frequency change of the external cavity longitudinal mode and the wavelength/frequency of diffraction light of the grating by rotating the grating and simultaneously moving the spatial position of the grating, thereby realizing the tuning of laser without mode hopping continuously. These lasers have been developed remarkably in recent years, and in particular, they have been used in Micro-Electro-Mechanical systems (MEMS) technology to achieve substantial progress in size reduction, speed increase, precision increase, and the like. However, there are also unsolved difficulties with such schemes, for example, mode-hopping-free tuning can only be performed within a certain range (λ/4, λ being the laser wavelength), and once this range is exceeded, the laser mode hops from one running longitudinal mode to another adjacent longitudinal mode. Laser instability occurs for a period of time during mode hopping, new laser modes require a period of time to re-resonate, and continuous wavelength/frequency changes are broken. In mechanical design, since the angle and spatial position of the grating need to be changed simultaneously, these mechanical movements require a stable and powerful fulcrum to support the movement of the grating or mirror. For lasers that require long periods of rapid operation, the fulcrum of this mechanical movement is usually the first to be damaged and the lifetime is extremely short compared to other devices or optical equipment. Often damage to the fulcrum means the entire laser is scrapped because of the expense and difficulty of repair and maintenance.
Some non-mechanically tuned mode lasers avoid the above disadvantages by using electro-optic crystals (KTN) or optical wave crystals (AOM) instead of mechanical means, using electric current or acoustic waves to change the angle of light in the crystal and thus the position at which the light impinges on the grating and thus the wavelength/frequency. Compared with mechanical tuning, the tuning mode has obvious advantages of saving space and ensuring that the tuning speed is not in an order of magnitude at all (GHz can be achieved, and the rotation speed of the mechanical galvanometer can only reach KHz). This advantage makes such lasers particularly attractive for the OCT (optical coherence tomography) field. However, such a tuning method has drawbacks that the wavelength/frequency change of the external cavity and the diffraction wavelength/frequency of the grating cannot be synchronized, so that the mode of the laser in the cavity is frequently skipped, and the position of the grating and the crystal is fixed, so that the laser is difficult to operate in a single mode.
There are also non-external cavity tunable lasers that are also used in areas such as vertical emission tunable lasers (VCSELs). The laser can make the laser cavity very small, so that only one longitudinal mode runs in the whole laser cavity, and mode interference or mode hopping does not exist. Tuning of the laser wavelength/frequency can be achieved by changing the cavity refractive index or by slightly changing the cavity length. The cost of such lasers is generally high, and the defects in the coherence length corresponding to the short cavity also affect the applications of such lasers.
Disclosure of Invention
In order to overcome the technical defect, the utility model provides a laser tunable device, it can realize not having mode hopping harmonious.
In order to solve the above problem, the utility model discloses realize according to following technical scheme:
a laser tunable device, comprising:
a light source module for emitting incident laser light;
a cavity mode selector disposed in an optical path of the laser light, the cavity mode selector including a frequency response having a mode selection pattern that enables a frequency in the cavity mode selector to be frequency aligned with one of the cavity modes for exciting an optical path labeled as lasing of the selected cavity mode over the other cavity modes and altering the laser light;
the double-sided reflector is arranged on a light path of laser, and is used for reflecting the incident laser to change the reflection angle of the laser when rotating, and when the double-sided reflector rotates by an angle theta, the incident angle of the laser which is reflected by the double-sided reflector and then enters the cavity film selector rotates by 2 theta;
the first lens group and the second lens group are respectively arranged at two sides of the double-sided reflector and are used for reflecting the laser reflected by the double-sided reflector for multiple times so as to enable the emergent laser to be parallel to the incident laser;
and the end mirror is arranged on an output path of the emergent laser and is used for receiving and outputting the laser.
Compared with the prior art, the laser tunable device has the following beneficial effects: in a laser cavity formed among a light source module, a mirror group and a laser output element, when the double-sided reflector rotates by an angle theta, the optical path of laser in the laser cavity is changed into an expression only related to cos2 theta, and the incident angle of the laser incident to the cavity film selector after the double-sided reflector reflects rotates by 2 theta, namely, the optical path change has no relation with the placing positions of the light source module and the double-sided reflector, even the rotating fulcrum of the double-sided reflector, so that the installation of the light source module and the reflector has a large fault-tolerant error, the synchronous change of a cavity mode (double-sided reflector) and a mode selection mode (incidence of the cavity film selector) is realized, and the perfect tuning is realized.
As a further improvement of the present invention, the cavity mode selector comprises: an etalon has opposing partially reflective surfaces defining a plurality of etalon modes for altering an optical path of the laser.
As a further improvement of the present invention, the cavity mode selector further comprises: a filter coated on the etalon to form the filter, the filter for frequency aligning the mode selection modes selected by the cavity mode selector and aligned with the cavity modes, the aligned frequency response combining with the frequency response of the cavity mode selector to produce a combined frequency response that excites the selected cavity modes to lase in preference to the other cavity modes.
As a further improvement of the present invention, the first lens group includes: first mirror surface, second mirror surface, the second mirror group includes: the first mirror surface and the third mirror surface are parallel, and the second mirror surface and the fourth mirror surface are parallel.
As a further improvement of the present invention, the cavity mode selector is disposed between the first mirror group and the double-sided reflecting mirror, or the cavity mode selector is disposed between the second mirror group and the double-sided reflecting mirror.
As a further improvement of the present invention, the present invention further comprises a first driving rotation component for driving the double-sided reflecting mirror to the first mirror group the second mirror group the cavity mode selector the light source module rotates.
As a further improvement of the present invention, the present invention further comprises a second driving rotation component for driving the first lens set, the second lens set, the cavity mode selector, the light source module relative to the double-sided reflecting mirror rotates.
As a further improvement of the present invention, the cavity mode selector is disposed between the light source module and the double-sided reflector, when the double-sided reflector rotates by a θ angle, the cavity mode selector rotates by a 2 θ angle.
As a further improvement of the utility model, the first mirror group is the second mirror group is right angle plane reflecting mirror or right angle triple prism.
As a further improvement of the utility model, the end mirror is the holophote, makes output laser return along former light path the light source module passes through in proper order lens, laser instrument in the light source module, and one side output that the laser instrument did not plate the antireflection coating.
As a further improvement of the utility model, the holophote is close to be provided with little spherical array speculum in the one side of two-sided speculum.
As a further improvement of the utility model, the holophote is a curved surface reflector.
As a further improvement of the utility model, the holophote is close to be provided with the cylindrical mirror in the one side of two-sided speculum.
As a further improvement of the utility model, the holophote is a triangular prism.
As a further improvement of the utility model, the holophote is close to be provided with the grating reflector in the one side of two-sided speculum.
As a further improvement of the utility model, the holophote is kept away from be provided with reflection grating in the one side of double-sided reflection mirror.
As a further improvement of the utility model, the double-sided reflector is a plane double-sided reflector, the plane double-sided reflector is a vibrating mirror or a miniature electric control silicon glass.
Drawings
Fig. 1 is an overall schematic diagram of a laser tunable device according to an embodiment;
FIG. 2 is a schematic diagram of the etalon and the filter according to one embodiment;
FIG. 3 is a general schematic diagram of a laser tunable device according to an embodiment;
FIG. 4 is a general schematic diagram of a laser tunable device according to an embodiment;
FIG. 5 is a schematic diagram illustrating optical path calculation of the laser tunable device according to an embodiment;
FIG. 6 is a schematic diagram of an overall laser tunable device according to an embodiment;
FIG. 7 is a general schematic diagram of a laser tunable device according to an embodiment;
FIG. 8 is a general schematic diagram of a laser tunable device according to an embodiment;
FIG. 9 is a general schematic diagram of a laser tunable device according to an embodiment;
FIG. 10 is a general schematic diagram of a laser tunable device according to an embodiment;
FIG. 11 is a graph of wavelength tunability range of laser (1550nm) limited by an etalon cavity to within + -3 deg. and initial angle of the etalon;
FIG. 12 is a tuning and mode hopping schematic diagram of a cavity mode and a cavity mode selector mode of the laser tunable device according to one embodiment;
fig. 13 is an overall schematic view of a laser tunable device according to the second embodiment;
fig. 14 is an overall schematic diagram of a laser tunable device according to the third embodiment;
FIG. 15 is a schematic view of an end mirror design according to the fourth embodiment;
FIG. 16 is a schematic view of an end mirror design according to the fourth embodiment;
FIG. 17 is a schematic view of an end mirror design according to the fourth embodiment;
FIG. 18 is a schematic view of an end mirror design according to the fourth embodiment;
FIG. 19 is a schematic view of an end mirror design according to the fourth embodiment;
FIG. 20 is a schematic view of an end mirror design according to the fourth embodiment;
FIG. 21 is a schematic view of an end mirror design according to the fourth embodiment;
description of the labeling: 1-a light source module; 11-a lens; 12-a laser; 121-the side of the laser not coated with the antireflection film; 122-one side of the laser coated with antireflection coating; 2-cavity mode selector; 21-an etalon; 22-a filter; 3-a double-sided mirror; 41-first lens group; 411-first mirror; 412-a second mirror; 42-a second lens group; 421-third mirror; 422-fourth mirror; 5-a laser output element; 51-end mirror; 52-micro sphere area array mirror; 53-cylindrical mirror; 54-triangular prism; 55-a grating mirror; 56-reflection grating; 6-a first driving rotation member; 7-second driving rotation member.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that the preferred embodiments described herein are merely for purposes of illustration and explanation, and are not intended to limit the invention.
Example one
The embodiment discloses a laser tunable device, as shown in fig. 1, including: the laser cavity comprises a light source module 1, a cavity mode selector 2, a double-sided reflecting mirror 3, a first mirror group 41, a second mirror group 42 and an end mirror 5, wherein the light source module 1 is used for emitting incident laser; a cavity mode selector 2 is disposed in the optical path of the laser light, the cavity mode selector 2 including a frequency response having a mode selection pattern that enables a frequency in the cavity mode selector to be frequency aligned with one of the plurality of cavity modes for exciting an optical path labeled as lasing and altering the laser light for the selected cavity mode in preference to the other cavity modes; the double-sided reflecting mirror 3 is arranged on a light path of laser, the double-sided reflecting mirror 3 is used for reflecting incident laser to change a reflection angle of the laser when rotating, and when the double-sided reflecting mirror 3 rotates an angle theta, the incident angle of the laser which is reflected by the double-sided reflecting mirror 3 and then enters the cavity film selector 2 rotates 2 theta; the first lens group 41 and the second lens group 42 are respectively arranged at two sides of the double-sided reflecting mirror 3 and are used for reflecting the laser light reflected by the double-sided reflecting mirror 3 for multiple times so as to enable the emergent laser light to be parallel to the incident laser light; and the end mirror 5 is arranged on an output path of the emergent laser and is used for receiving and outputting the laser.
In the above embodiment, as shown in fig. 2, the cavity mode selector 2 includes: an etalon 21 having opposing partially reflective surfaces defining a plurality of etalon modes for altering the optical path of the laser.
In the above embodiment, the cavity mode selector further includes: a filter 22, the etalon being coated to form a filter for frequency alignment with a mode selection mode selected by the cavity mode selector 2 and aligned with a cavity mode, the aligned frequency response being combined with the frequency response of the cavity mode selector to produce a combined frequency response that excites the selected said cavity mode to lase in preference to the other cavity modes.
In the above embodiment, as shown in fig. 1, the first lens group 41 includes: a first mirror 411 and a second mirror 412, and the second mirror group 42 includes: the third mirror 421, the fourth mirror 422, the first mirror 411 and the third mirror 421 are parallel, and the second mirror 412 and the fourth mirror 422 are parallel.
In the above embodiment, the cavity mode selector 2 is disposed between the first lens group 41 and the double-sided reflecting mirror 3, or the cavity mode selector 2 is disposed between the second lens group 42 and the double-sided reflecting mirror 3, please refer to fig. 1, that is, the cavity mode selector 2 can be disposed at any position shown in 109, 117, 118, 120, 121.
In the above embodiment, as shown in fig. 3, the double-sided mirror 3 is fixed on the first driving rotation component 6, and the first driving rotation component 6 is used to drive the double-sided mirror 4 to rotate relative to the first lens set 41, the second lens set 42 and the cavity mode selector 2, that is, the first lens set 41, the second lens set 42, the cavity mode selector 2 and the light source module 1 are fixed.
In the above embodiment, the first lens group 41 and the second lens group 42 are both rectangular plane mirrors or rectangular triangular prisms, that is, the first mirror surface 411 and the second mirror surface 412 are perpendicular to each other, and the third mirror surface 421 and the fourth mirror surface 422 are perpendicular to each other.
In the above embodiment, the double-sided reflecting mirror 3 is a galvanometer or micro electrically controlled silica glass.
The present embodiment is further explained with reference to the specific implementation process, as follows:
laser is emitted from the light source module 1, reflected by the double-sided reflector 3 and then enters the cavity mode selector 2, an optical path of the laser changes in the cavity mode selector 2 and then sequentially enters the first mirror surface 411 and the second mirror surface 412, at the moment, when the double-sided reflector 3 rotates by an angle theta, an exit angle of the laser after passing through the cavity mode selector 2 rotates by 2 theta, then the laser is reflected on the second mirror surface 412 and then sequentially enters the third mirror surface 421, the fourth mirror surface 422 and the double-sided reflector 3, and finally enters the end mirror 5 to be output.
As shown in fig. 2, the optical path difference of light passing through the etalon 21 can be written as:
Δ=n(CD+DE+EF)-(nCD+n′DJ)=n(DE+EF)-n′DJ (1)
where n is the index of refraction of the medium inside etalon 212 and n' is the index of refraction of the medium outside etalon 21, with an index of refraction of 1 in air.
DE=EF=t/cosα (2)
Where α is the internal angle of the light incident etalon and t is the thickness of the etalon.
DJ=DF sinγ=2t·tanα·sinγ (3)
Where gamma is the angle of incidence of the light outside the etalon 21.
Δ=2nt/cosα-2n′t·tanα·sinγ (4)
By snell's law:
n′sinγ=nsinα (5)
substituting equation (5) into equation (4) we get:
Δ=2nt cosα=mλ=2Le(6)
where m is an integer, λ is the wavelength in vacuum, we call Le the cavity length of the etalon, and the formula is:
Le=nt cosα (7)
in fig. 4, it is found that when the double-sided mirror 3 rotates by an angle θ, the angle change of the laser light incident on the etalon 21 is 2 θ, and a coordinate system is established, as shown in fig. 5, by using the rotation fulcrum of the double-sided mirror 3 as the origin of coordinates, we obtain:
αb=H1(8)
wherein H1Is the z-coordinate distance of the light source.
bc=(-A+B1)sec 2β (9)
Wherein A, B1Is the x and y coordinate distance of the edge of one lens group 4, and β is the initial angle of the double-sided reflecting mirror 3 (the initial angle is 45 degrees, and the specific installation angle depends on the product design and installation condition).
cd=2Asec 2β(10)
de=(-2A+B1+B2)sec 2β (11)
Wherein, B2Is the y-coordinate distance of the other mirror group 4.
ef=2A sec 2β (12)
fg=[-A+B2+(B1+B2)sin 2β]sec 2β (13)
gp=H2-2(B1+B2)(cosβ+sinβ)sin 2β(cosβ-sinβ) (14)
Wherein H2Is the z-coordinate distance of the end mirror 5.
As shown in fig. 4, H ═ H1+H2,B=B1+B2Substituting equation (8) into (14) adds to the equation we find the laser cavity length equation as:
L=ab+bc+cd+de+ef+fg+gp=H+2B cos 2β (15)
the derivative of (15) yields the laser cavity optical path change, which is also an expression related to cos2 θ only, matching the optical path change of the etalon 21. Meanwhile, it can be found that the optical path in the formula (15) is only related to the relative position of the lens group 4 and the distance from the light source module 1 to the end mirror 51, and has no relation with the placement position of the light source module 1 or the double-sided reflecting mirror 3, even the rotation pivot of the double-sided reflecting mirror 3, that is, a very large fault-tolerant error exists in the installation of the light source module 1 and the double-sided reflecting mirror 3.
As shown in fig. 6, it is a schematic view of the double-sided mirror 3 in another rotation direction, and the principle is the same as that in fig. 4, which is not repeated here.
Further, the embodiment changes the position of the light source module 1 in the coordinate system and re-calculates, although the optical path length of each single optical path is different, the result of the final addition remains unchanged. Changing the pivot point of rotation of the double-sided mirror 3 as shown in fig. 7 to 10 also has no influence on the optical path length of the system.
Fig. 7 and 8 illustrate the working optical path tuned by the rotation at the positive angle after the rotation fulcrum of the present embodiment is changed from the point O to the point G. Laser light is emitted from a laser 12, penetrates through one side 122 of the laser coated with an antireflection film, is collimated by a lens 11 and impinges on a point P of a double-sided reflector 3, the double-sided reflector 3 rotates around a point G to a new position forming an included angle theta with an initial position (a dotted line), incident light 106 is reflected by a cavity mode selector 2 and enters a first lens group 41, enters a second lens group 42 after being reflected by a first mirror surface 411 and a second mirror surface 412, is reflected again to a point Q of the other reflecting surface of the double-sided reflector 3 after passing through a third mirror surface 421 and a fourth mirror surface 422, is reflected again, emergent light 113 impinges on an end mirror 5, and returns to a light source module 100 through the original path to form the laser light. When the end mirror is replaced by a total reflection mirror, the output light is output 105 from the other side 121 of the laser.
Fig. 9 and 10 illustrate the operation of the present embodiment in which the tuned optical path is turned at a negative angle after the pivot point of rotation is changed from point O to point G. Laser light is emitted from the laser 12, penetrates through one side 122 of the laser coated with the antireflection film, is collimated by the lens 11 and impinges on a point P of the double-sided reflector 3, the double-sided reflector 3 rotates around a point G to a new position forming an included angle theta with an initial position (a dotted line), incident light 106 is reflected and penetrates through the cavity mode selector 2 to enter the first group 41, enters the second group 42 through reflection of the first mirror 411 and the second mirror 412, is reflected again to a point Q of the other reflecting surface of the double-sided reflector 3 through the third mirror 421 and the fourth mirror 422, is reflected again, emergent light 113 impinges on the end mirror 5, and returns to the light source module 100 through the original path to form laser light. When the end mirror is replaced by a total reflection mirror, the output light is output 105 from the other side 121 of the laser.
When using the air cavity etalon, can realize high-precision tuning, but the cost is too high, and when we use glass as the etalon, the optical path difference of the etalon becomes:
Figure BDA0002297161030000081
this destroys the high precision tuning. Although the difference in the angle of incidence between the outside and the inside of the etalon is small, the synchronization between the cavity mode and the etalon mode is affected.
The laser light is represented on a graph by a plurality of continuous wavelength envelopes in the form of wavelength and light intensity, and the central wavelength of the envelope is the wavelength of the laser light generally. There are typically multiple lasers of different wavelengths/frequencies in the laser device, which we refer to as cavity modes. The cavity mode is defined by twice the cavity length, i.e., the optical path length to and from the complete round trip within the cavity, which is equal to an integer multiple of the vacuum wavelength,
2n0L=mλ (17)
wherein n is0Is the refractive index in the cavity, m is an integer, and λ is the wavelength in vacuum.
From the mathematical relationship of wavelength and frequency we can derive the frequency separation between adjacent cavity modes as:
Δυ=c/2n0L (18)
where c is the propagation speed of light in vacuum.
The same relationship exists for the cavity mode selector 2, i.e., the etalon. It is apparent that since the cavity length of the etalon 21 is much smaller than the cavity length of the entire laser tunable device, the mode spacing in the etalon 21 will be much larger than the spacing of the cavity modes. And a plurality of cavity modes can compete with each other in the envelope of one etalon mode, the cavity mode closest to the center frequency of the etalon mode has absolute advantage, so that the frequency of the emitted laser light is the most advantageous cavity mode frequency. The filter 22 ensures that only one etalon mode is excited at a time, and only one cavity mode is lasing at that time, i.e., a single longitudinal mode.
When the laser tunable device changes the cavity length, the frequency of each cavity mode changes, and similarly, changing the cavity length of the etalon 21 also changes the frequency of the etalon 21 mode, which is represented in a coordinate diagram as a mode envelope or a frequency moving left and right on the horizontal axis. As shown in FIG. 12, we assume a cavity, mode upsilonqAnd etalon mode vfWhen the lasers are brought into operation, they overlap, so that both modes move in the same direction while the laser 12 is operating, and the other cavity modes move together. When the cavity mode changes are not synchronized with the etalon 21 mode changes, one will appear to move faster and the other slower, and all the cavity modes will move at the same speed. Some time later when the difference between the cavity mode and the etalon 21 mode is at a longitudinal mode spacing Δ ν of 1/2, the other adjacent cavity modes (ν)q-1Or upsilonq+1) Competition is generated for the cavity mode which emits laser light, and the cavity mode which emits laser light with own frequency is overcome, and the mode hopping is called. So the tuning without mode-hopping needs to satisfy:
|υ′q-υ′f|<Δυ/2 (19)
wherein upsilon isq' and upsilonf' are respectively originally coincidedThe cavity mode and the etalon mode at the tuned frequencies.
The relationship between the two frequencies and the wavelength is substituted into the above formula, and the following formula can be obtained through calculation:
Figure BDA0002297161030000091
i.e., mode hopping occurs when the rate of change of the cavity length differs from the rate of change of the etalon by less than the ratio of the wavelength to the quadruple of the cavity length. From this formula the tuning range can be calculated in a specific design.
In addition to the tuning range being affected by the above, the tuning range of the etalon itself is also affected by cos α. Since the cosine function is itself mathematically scoped, it has been found by calculation that the effect of the etalon 21 itself on the tuning scope is related to the initial angle at which the etalon is placed, and that the wavelength variation at which the etalon 21 is tuned is related to the etalon cavity length variation,
Figure BDA0002297161030000092
where Δ λ is the wavelength tunable range and d α is the etalon internal angle tunable range.
To LeThe derivation yields:
Δλ=-λtanα·dα (22)
the derivation of equation (5) yields:
Figure BDA0002297161030000093
by substituting equations (23) and (5) into equation (22), the variation of the tunable range at a specific wavelength within the angle tuning range of a specific d γ depending on the initial angle γ of the etalon can be solved.
In fig. 11 is the limited tuning range of the 1550nm laser versus the initial etalon angle over a range of ± 3 ° of rotation of the double-sided mirror 3. As can be seen from the figure, the tuning range is larger as the initial angle is larger. However, in practical applications, the initial angle of the etalon is not too large, and the specific initial angle is balanced according to the specific design because the round trip length of the complete optical spot in the etalon is affected.
Example two
The present embodiment discloses another laser tunable device, as shown in fig. 13, which is different from the first embodiment in that: the first lens group 41, the second lens group 42 and the cavity mode selector 2 are fixed on the second driving rotation component 7, and the second driving rotation component 7 is used for driving the first lens group 41, the second lens group 42, the cavity mode selector 2 and the light source module 1 to rotate relative to the double-sided reflecting mirror 3.
The laser emitted from the light source module 1 is reflected by the double-sided reflector 3 and then sequentially enters the first mirror 311 and the second mirror 412, at this time, the double-sided reflector 3 rotates by an angle θ, the cavity mode selector 2 rotates by an angle 2 θ, then the laser enters the cavity mode selector 2, sequentially enters the third mirror 421, the fourth mirror 422 and the double-sided reflector 3, and finally enters the laser output element 5 for output.
EXAMPLE III
The present embodiment discloses another laser tunable device, as shown in fig. 14, which is different from the first embodiment in that: the cavity mode selector 2 is arranged between the light source module 1 and the double-sided reflector 3, when the double-sided reflector 3 rotates by an angle theta, the cavity mode selector 3 rotates by an angle 2 theta, and similarly, the double-sided reflector 3 and the cavity mode selector 2 can also be controlled to rotate by adopting a driving rotating component, namely, the light source module 1, the first lens group 41, the second lens group 42 and the end mirror 5 are all kept still.
The laser light is emitted from the light source module 1, enters the cavity mode selector 2, then sequentially enters the double-sided reflector 3, the first mirror 411, the second mirror 412, the third mirror 421, the fourth mirror 422 and the double-sided reflector 4, and finally enters the laser output element 5 for output.
Example four
The present embodiment discloses another laser tunable device, as shown in fig. 15, which is different from the first embodiment in that: the end mirror 5 is a total reflection mirror, so that the output laser returns to the light source module 1 along the original light path and is output at the side 121 of the laser which is not coated with the antireflection film, and the total reflection mirror is economical and practical.
For the gaussian beam with a certain divergence angle of the reflected light, as shown in fig. 16, the total reflection mirror is a planar total reflection mirror, and a micro-spherical array reflection mirror 52 is disposed on one surface of the total reflection mirror close to the double-sided reflection mirror, so as to maximally compress the divergence of the gaussian beam 204 in each direction and return the beam to 203.
As shown in fig. 17, the total reflection mirror is a curved mirror, and the reflection surface of the total reflection mirror has a certain radian, so that the divergence 204 of the gaussian beam can be compressed in one axial direction.
As shown in fig. 18, the total reflection mirror is a planar total reflection mirror, and a cylindrical mirror 53 is disposed on one surface of the total reflection mirror close to the double-sided mirror, and the combination of the two makes the light beam pass through the cylindrical mirror 53 to longitudinally focus the light beam, and then the light beam passes through the cylindrical mirror 53 by the total reflection mirror 51 disposed at the focal point thereof, and becomes a parallel light beam 206 to return.
As shown in fig. 19, the total reflection mirror is a planar total reflection mirror, the total reflection mirror is a triangular prism 54, the light-facing surface is coated with an anti-reflection film to allow light to pass through the prism, and the other two surfaces are coated with a total reflection film to allow the incident light beam 208 to be reflected in the prism for multiple times to concentrate the divergent light beam 207.
As shown in fig. 20, the total reflection mirror is a planar total reflection mirror, and a grating reflection mirror 55 is disposed on one surface of the total reflection mirror close to the double-sided reflection mirror, and the grating reflection mirror reflects multiple times 209 using the sawteeth thereon to achieve the purpose of concentrating the divergent light beam 210.
As shown in fig. 21, the total reflection mirror is a planar total reflection mirror, a reflection grating 55 is disposed on a surface of the total reflection mirror away from the near-double-sided reflection mirror, and the purpose of concentrating the divergent light beam 212 is achieved by using a sawtooth on the grating 55 to reflect 211 multiple times.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, so that any modification, equivalent change and modification made by the technical spirit of the present invention to the above embodiments do not depart from the technical solution of the present invention, and still fall within the scope of the technical solution of the present invention.

Claims (17)

1. A laser tunable device, comprising:
a light source module for emitting incident laser light;
a cavity mode selector disposed in an optical path of the laser light, the cavity mode selector including a frequency response having a mode selection pattern that enables a frequency in the cavity mode selector to be frequency aligned with one of the cavity modes for exciting an optical path labeled as lasing of the selected cavity mode over the other cavity modes and altering the laser light;
the double-sided reflector is arranged on a light path of laser, and is used for reflecting the incident laser to change the reflection angle of the laser when rotating, and when the double-sided reflector rotates by an angle theta, the incident angle of the laser which is reflected by the double-sided reflector and then enters the cavity mode selector rotates by 2 theta;
the first lens group and the second lens group are respectively arranged at two sides of the double-sided reflector and are used for reflecting the laser reflected by the double-sided reflector for multiple times so as to enable the emergent laser to be parallel to the incident laser;
and the end mirror is arranged on an output path of the emergent laser and is used for receiving and outputting the laser.
2. The laser tunable device of claim 1, wherein the cavity mode selector comprises: an etalon has opposing partially reflective surfaces defining a plurality of etalon modes for altering an optical path of the laser.
3. The laser tunable device of claim 2, wherein the cavity mode selector further comprises: a filter coated on the etalon to form the filter, the filter for frequency aligning the mode selection modes selected by the cavity mode selector and aligned with the cavity modes, the aligned frequency response combining with the frequency response of the cavity mode selector to produce a combined frequency response that excites the selected cavity modes to lase in preference to the other cavity modes.
4. The laser tunable device of claim 1, wherein the first mirror group comprises: first mirror surface, second mirror surface, the second mirror group includes: the first mirror surface and the third mirror surface are parallel, and the second mirror surface and the fourth mirror surface are parallel.
5. The laser tunable device of claim 4, wherein the cavity mode selector is disposed between the first mirror set and the double-sided mirror or the cavity mode selector is disposed between the second mirror set and the double-sided mirror.
6. The laser tunable device of claim 5, further comprising a first driving rotation component for driving the double-sided mirror to rotate relative to the first mirror group, the second mirror group, the cavity mode selector, and the light source module.
7. The laser tunable device of claim 5, further comprising a second driving rotation component for driving the first mirror set, the second mirror set, the cavity mode selector, and the light source module to rotate relative to the double-sided mirror.
8. The laser tunable device according to claim 4, wherein the cavity mode selector is disposed between the light source module and the double-sided mirror, and when the double-sided mirror is rotated by an angle θ, the cavity mode selector is rotated by an angle 2 θ.
9. The laser tunable device of any one of claims 4 to 8, wherein the first and second mirror groups are each a right-angle plane mirror or a right-angle triangular prism.
10. The laser tunable device according to claim 1, wherein the end mirror is a total reflection mirror, so that the output laser returns to the light source module along a primary optical path, sequentially passes through a lens and a laser in the light source module, and is output on a side of the laser not coated with an antireflection film.
11. The laser tunable device of claim 10, wherein a micro-sphere array mirror is disposed on one surface of the total reflection mirror close to the double-sided reflection mirror.
12. The laser tunable device of claim 10, wherein the total reflection mirror is a curved mirror.
13. The laser tunable device of claim 10, wherein a cylindrical mirror is disposed on one side of the total reflection mirror close to the double-sided mirror.
14. The laser tunable device of claim 10, wherein the total reflection mirror is a triangular prism.
15. The laser tunable device of claim 10, wherein a grating mirror is disposed on a side of the total reflection mirror close to the double-sided mirror.
16. The laser tunable device of claim 10, wherein a reflection grating is disposed on a side of the total reflection mirror away from the double-sided mirror.
17. The laser tunable device of claim 1, wherein the double-sided mirror is a planar double-sided mirror, and the planar double-sided mirror is a galvanometer or micro electrically controlled silica glass.
CN201922128897.7U 2019-11-29 2019-11-29 Laser tunable device Active CN211238805U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113300778A (en) * 2021-05-24 2021-08-24 成都金诺信高科技有限公司 Free space frequency transmission system and method based on optical path compensator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113300778A (en) * 2021-05-24 2021-08-24 成都金诺信高科技有限公司 Free space frequency transmission system and method based on optical path compensator

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Effective date of registration: 20221221

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Patentee before: FOSHAN HUIKANG PHOTOELECTRIC TECHNOLOGY Co.,Ltd.