JPH0563014B2 - - Google Patents

Info

Publication number
JPH0563014B2
JPH0563014B2 JP62127172A JP12717287A JPH0563014B2 JP H0563014 B2 JPH0563014 B2 JP H0563014B2 JP 62127172 A JP62127172 A JP 62127172A JP 12717287 A JP12717287 A JP 12717287A JP H0563014 B2 JPH0563014 B2 JP H0563014B2
Authority
JP
Japan
Prior art keywords
chemical
pipe
liquid
reservoir
chemical liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62127172A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63292634A (ja
Inventor
Naoki Yoshida
Hideo Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kusumoto Chemicals Ltd
Original Assignee
Kusumoto Chemicals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kusumoto Chemicals Ltd filed Critical Kusumoto Chemicals Ltd
Priority to JP12717287A priority Critical patent/JPS63292634A/ja
Priority to US07/198,230 priority patent/US4822441A/en
Publication of JPS63292634A publication Critical patent/JPS63292634A/ja
Publication of JPH0563014B2 publication Critical patent/JPH0563014B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP12717287A 1987-05-26 1987-05-26 プラスチックモ−ルド開封装置 Granted JPS63292634A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12717287A JPS63292634A (ja) 1987-05-26 1987-05-26 プラスチックモ−ルド開封装置
US07/198,230 US4822441A (en) 1987-05-26 1988-05-25 Plastic mold decapsuling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12717287A JPS63292634A (ja) 1987-05-26 1987-05-26 プラスチックモ−ルド開封装置

Publications (2)

Publication Number Publication Date
JPS63292634A JPS63292634A (ja) 1988-11-29
JPH0563014B2 true JPH0563014B2 (cg-RX-API-DMAC10.html) 1993-09-09

Family

ID=14953446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12717287A Granted JPS63292634A (ja) 1987-05-26 1987-05-26 プラスチックモ−ルド開封装置

Country Status (1)

Country Link
JP (1) JPS63292634A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017208430A (ja) * 2016-05-18 2017-11-24 三菱電機株式会社 パッケージ樹脂開封装置および開封用治具

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6278677B2 (ja) * 2013-12-03 2018-02-14 日本サイエンティフィック株式会社 プラスチックモールドされた半導体集積回路パッケージの開封装置及びプラスチックモールドされた半導体集積回路パッケージの開封方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61237070A (ja) * 1985-04-12 1986-10-22 Matsushita Electric Works Ltd 半導体等の故障解析に用いる試料調整装置
JPS6262531A (ja) * 1985-09-12 1987-03-19 Mitsubishi Electric Corp モ−ルド樹脂エツチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017208430A (ja) * 2016-05-18 2017-11-24 三菱電機株式会社 パッケージ樹脂開封装置および開封用治具

Also Published As

Publication number Publication date
JPS63292634A (ja) 1988-11-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees