JPH0562855A - Laminated porcelain capacitor - Google Patents

Laminated porcelain capacitor

Info

Publication number
JPH0562855A
JPH0562855A JP3245075A JP24507591A JPH0562855A JP H0562855 A JPH0562855 A JP H0562855A JP 3245075 A JP3245075 A JP 3245075A JP 24507591 A JP24507591 A JP 24507591A JP H0562855 A JPH0562855 A JP H0562855A
Authority
JP
Japan
Prior art keywords
porcelain
layer
electrode layer
particle size
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3245075A
Other languages
Japanese (ja)
Other versions
JP2872838B2 (en
Inventor
Koichi Chazono
広一 茶園
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • H01G4/08Inorganic dielectrics
    • H01G4/12Ceramic dielectrics

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Ceramic Capacitors (AREA)

Abstract

PURPOSE:To obtain the title capacitor wherein its resistivity and its reliability are ensured and its capacity can be made large by a method wherein the average particle size of crystal particles in a region close to an electrode layer of a dielectric porcelain layer is made smaller than the particle size of crystal particles in the intermediate region of the electrode layer. CONSTITUTION:The title capacitor is provided with the following: a dielectric porcelain layer; a first electrode layer arranged on one side of the porcelain layer; and a second electrode layer arranged on the other side of the porcelain layer. In such a laminated porcelain capacitor, the average particle size of crystal particles in a region close to the electrode layer of the dielectric porcelain layer is made smaller than the particle size of crystal particles in the intermediate region of the electrode layer. For example, when a porcelain material in which Nd2O3 and MnO in very small quantities have been added to a main component composed of BaTiO3 and BaZrO3 is used as a dielectric, the average particle size of crystal particles of porcelain layers 1a;, 1b' in the center between electrode layers 3', 3a', 3b' is set at 5 to 6mum, and the average particle size of crystal particles of porcelain layers 4', 2a', 4a', 2b' on their both sides is set at 0.2 to 0.4mum.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は信頼性の高い積層磁器コ
ンデンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a highly reliable laminated ceramic capacitor.

【0002】[0002]

【従来の技術】複数の誘電体磁器層と各磁器層の相互間
に配設した内部電極層とから成る積層磁器コンデンサは
種々の分野で使用されている。
2. Description of the Related Art A laminated ceramic capacitor composed of a plurality of dielectric porcelain layers and internal electrode layers arranged between the porcelain layers is used in various fields.

【0003】[0003]

【発明が解決しようとする課題】ところで、積層磁器コ
ンデンサの小型化又は大容量化を図るためには誘電体磁
器層の厚みを減少させ且つ結晶粒子の粒径をある程度大
きくすることが必要になる。しかし、磁器コンデンサに
おいて粒径を大きくすると、一対の電極間の厚み方向に
配置される粒子の数が少なくなり、極端の場合には1個
になる。この結果、比抵抗(抵抗率)の低下、信頼性の
低下、tan δの低下を招く。
By the way, in order to reduce the size or increase the capacity of the laminated ceramic capacitor, it is necessary to reduce the thickness of the dielectric ceramic layer and increase the crystal grain size to some extent. .. However, when the particle size is increased in the porcelain capacitor, the number of particles arranged in the thickness direction between the pair of electrodes is reduced, and in the extreme case, the number is one. As a result, the specific resistance (resistivity) is lowered, the reliability is lowered, and the tan δ is lowered.

【0004】そこで、本発明の目的は、比抵抗及び信頼
性を確保しつつ大容量化を図ることが可能な積層磁器コ
ンデンサを提供することにある。
Therefore, an object of the present invention is to provide a laminated ceramic capacitor capable of achieving a large capacity while ensuring the specific resistance and reliability.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
の本発明は、誘電体磁器層と前記磁器層の一方の側に配
置された第1の電極層と前記磁器層の他方の側に配置さ
れた第2の電極層とを備えた積層磁器コンデンサにおい
て、前記誘電体磁器層の前記第1及び第2の電極層に近
い領域の結晶粒子の平均粒径が前記第1及び第2の電極
層の中間領域の結晶粒子の粒径よりも小さいことを特徴
とする積層磁器コンデンサに係わるものである。
The present invention for achieving the above object provides a dielectric porcelain layer and a first electrode layer disposed on one side of the porcelain layer and the other side of the porcelain layer. In the laminated ceramic capacitor including the arranged second electrode layer, the average particle size of the crystal particles in the region of the dielectric ceramic layer close to the first and second electrode layers is the first and the second. The present invention relates to a laminated ceramic capacitor characterized by being smaller than the grain size of crystal grains in the intermediate region of the electrode layer.

【0006】[0006]

【作用】結晶粒子の平均粒径が小さい電極層の近傍領域
は、比抵抗の向上に寄与する。電極層近傍の粒径の小さ
い粒子は容量の点で不利になるが、電極層近傍では、等
価的に粒径の小さい結晶に基づく微小コンデンサの並列
接続回路が構成されるので、容量の大幅の低下は生じな
い。
The region near the electrode layer in which the average grain size of the crystal grains is small contributes to the improvement of the specific resistance. Particles with a small particle size in the vicinity of the electrode layer are disadvantageous in terms of capacity, but in the vicinity of the electrode layer, a parallel connection circuit of microcapacitors based on a crystal with a small particle size is equivalently formed, so No decrease occurs.

【0007】[0007]

【第1の実施例】まず、BaTiO3 (チタン酸バリウ
ム)78モル%とBaZrO3 (ジルコン酸バリウム)
22モル%から成る主成分にNd2 3 (酸化ネオジ
ム)とMnO(酸化マンガン)を微量添加した第1の磁
器材料を用意した。なお、この第1の磁器材料は仮焼し
たものであって平均粒径0.3〜0.6μmを有する粉
末である。また、BaTiO3 78モル%とBaZrO
3 22モル%とZrO2 (酸化ジルコニウム)1.5モ
ル%とから成る主成分にNd2 3 とMnOを微量添加
した第2の磁器材料を用意した。この第2の磁器材料は
仮焼したものであって平均粒径0.1〜0.2μmを有
する粉末である。
First Example First, 78 mol% of BaTiO 3 (barium titanate) and BaZrO 3 (barium zirconate) were used.
A first porcelain material prepared by adding a small amount of Nd 2 O 3 (neodymium oxide) and MnO (manganese oxide) to the main component composed of 22 mol% was prepared. The first porcelain material was calcined and was a powder having an average particle size of 0.3 to 0.6 μm. In addition, BaTiO 3 78 mol% and BaZrO
A second porcelain material was prepared in which a slight amount of Nd 2 O 3 and MnO was added to the main component composed of 32 mol% of ZrO 2 (zirconium oxide) and 1.5 mol% of ZrO 2 . This second porcelain material is a powder that has been calcined and has an average particle size of 0.1 to 0.2 μm.

【0008】次に、第1の磁器材料を使用してスラリー
を作製し、このスラリーによって図1に示す厚さ約8μ
mの誘電体磁器生シート(グリーンシート)1を作っ
た。
Next, a slurry is prepared using the first porcelain material, and the slurry has a thickness of about 8 μ shown in FIG.
Dielectric porcelain raw sheet (green sheet) 1 of m was made.

【0009】次に、上述の第2の磁器材料を使用してス
ラリー又はペーストを作成し、これを印刷法によって磁
器生シート1上に塗布して図1に示す厚さ1〜2μmの
微粒子磁器層2を形成した。
Next, a slurry or paste is prepared by using the above-mentioned second porcelain material, and the slurry or paste is applied onto the porcelain green sheet 1 by a printing method to form a fine particle porcelain having a thickness of 1 to 2 μm shown in FIG. Layer 2 was formed.

【0010】次に、図1に示すものを乾燥させた後に、
微粒子磁器層2の上にPd(パラジウム)ペーストを所
定パターンに塗布して乾燥して図2に示す電極層3を1
〜3μmの厚みに形成した。
Next, after drying the one shown in FIG. 1,
The Pd (palladium) paste is applied on the fine particle porcelain layer 2 in a predetermined pattern and dried to form the electrode layer 3 shown in FIG.
It was formed to a thickness of ˜3 μm.

【0011】次に、電極層3の上に第2の磁器材料のペ
ーストを印刷法で塗布して乾燥して図3に示す微粒子磁
器層4を1〜2μmの厚みに形成した。
Next, the paste of the second porcelain material was applied onto the electrode layer 3 by a printing method and dried to form the fine particle porcelain layer 4 shown in FIG. 3 in a thickness of 1 to 2 μm.

【0012】次に、図3の最も下の磁器生シート1と同
一の磁器生シートを微粒子磁器層4の上に配置してこれ
等を軽く圧着して相互間の密着性を良くした。
Next, the same porcelain green sheet as the lowermost porcelain green sheet 1 in FIG. 3 was placed on the fine grain porcelain layer 4 and these were lightly pressure-bonded to improve mutual adhesion.

【0012】次に、第1の磁器材料から成る大粒子磁器
層1aの上に図4に示すように、微粒子磁器層2、電極
層3、微粒子磁器層4と実質的に同一の微粒子磁器層2
a、電極層3a、微粒子磁器層4aを順次に形成し、更
に大粒子磁器層1b、微粒子磁器層2b、電極層3b、
微粒子磁器層4bを繰返して形成し、最後に上下に第1
の磁器材料から成る厚み約150μmのカバーシート
5、6を重ね、圧着した。
Next, as shown in FIG. 4, on the large particle porcelain layer 1a made of the first porcelain material, the fine particle porcelain layer 2, the electrode layer 3, and the fine particle porcelain layer 4 which are substantially the same as the fine particle porcelain layer 2 are formed. Two
a, the electrode layer 3a, and the fine particle porcelain layer 4a are sequentially formed, and further, the large particle porcelain layer 1b, the fine particle porcelain layer 2b, the electrode layer 3b,
The fine particle porcelain layer 4b is repeatedly formed, and finally the first and second layers are formed.
The cover sheets 5 and 6 made of porcelain material having a thickness of about 150 μm were stacked and pressure-bonded.

【0013】次に、積層体を大気中、1320℃で焼成
して焼結体を得た。図5は焼結体を説明的に示すもので
あり、図4の各原料磁器層1、1a、1b、2、2a、
2b、4、4a、4b、5、6に対応して焼結後の磁器
層1′、1a′、1b′、2′、2a′、2b′、
4′、4a′、4b′、5′、6′が生じている。ま
た、電極層3、3a、3bに対応して内部電極層3′、
3a′、3b′が生じている。図5では説明の都合上、
焼結体を各磁器層に分離して示したが実際には一体化さ
れている。電極層3′、3a′、3b′の相互間の中央
の磁器層1a′、1b′の結晶粒子の平均粒径は5〜6
μmであり、この両側の磁器層4′、2a′、4a′、
2b′の結晶粒子の平均粒径は0.2〜0.4μmであ
る。図4の微粒子磁器層2、4、2a、4a、2b、4
bはZrO2 を過剰に含むので、焼成時に大粒径の結晶
が生じにくい。なお、焼結後の内部電極層3′、3
a′、3b′の相互間の磁器層の厚みは約7μmであ
る。
Next, the laminate was fired at 1320 ° C. in the atmosphere to obtain a sintered body. FIG. 5 is an explanatory view of a sintered body, and each raw material porcelain layer 1, 1a, 1b, 2, 2a of FIG.
2b, 4, 4a, 4b, 5, 6 corresponding to the sintered ceramic layers 1 ', 1a', 1b ', 2', 2a ', 2b',
4 ', 4a', 4b ', 5', 6'occur. Also, the internal electrode layers 3 ', corresponding to the electrode layers 3, 3a, 3b,
3a 'and 3b' are generated. In FIG. 5, for convenience of explanation,
Although the sintered body is shown separately for each porcelain layer, they are actually integrated. The average grain size of the crystal grains of the central porcelain layers 1a 'and 1b' between the electrode layers 3 ', 3a' and 3b 'is 5 to 6
μm, and the porcelain layers 4 ′, 2 a ′, 4 a ′ on both sides of this are
The average particle size of the 2b ′ crystal particles is 0.2 to 0.4 μm. The fine particle porcelain layers 2, 4, 2a, 4a, 2b, 4 of FIG.
Since b contains ZrO 2 in an excessive amount, it is difficult to generate crystals with a large grain size during firing. The internal electrode layers 3 ', 3 after sintering
The thickness of the porcelain layer between a'and 3b 'is about 7 μm.

【0014】次に、図5の焼結体の側面にAgペースト
を塗布して焼付けて一対の外部電極7、8を形成する。
Next, Ag paste is applied to the side surfaces of the sintered body shown in FIG. 5 and baked to form a pair of external electrodes 7 and 8.

【0015】図5の積層磁器コンデンサの電気的特性を
測定したところ、20℃におけるみかけの比誘電率εは
18600、20℃における誘電体損失tanδは4.2
%、150℃における比抵抗は7.1×1012Ωcm、破
壊電圧VBDは680Vであった。比較のために、図4の
磁器層2、4、2a、4a、2b、4bを磁器層1、1
a、1bと同一の第1の磁器材料とした他は実施例と同
一の積層磁器コンデンサを作り、電気的特性を同様に測
定したところ、εは19300、tan δは6.3%、比
抵抗は5.2×1011 Ωcm、VBDは410Vであっ
た。
When the electrical characteristics of the laminated ceramic capacitor of FIG. 5 were measured, the apparent relative permittivity ε at 20 ° C. was 18600, and the dielectric loss tan δ at 20 ° C. was 4.2.
%, The specific resistance at 150 ° C. was 7.1 × 10 12 Ωcm, and the breakdown voltage V BD was 680V. For comparison, the porcelain layers 2, 4, 2a, 4a, 2b, 4b of FIG.
A laminated porcelain capacitor the same as that of the example except that the same first porcelain material as a and 1b was used and the electrical characteristics were measured in the same manner. ε was 19300, tan δ was 6.3%, and the specific resistance was 6.3%. Was 5.2 × 10 11 Ωcm and V BD was 410V.

【0016】上記の比較から明らかなように、本実施例
のように構成することによってみかけの比誘電率は僅か
に低下するが、tan δ、比抵抗、VBDは改善される。こ
れは、内部電極層3′、3a′、3b′の近くに粒径の
小さい磁器層4′、2a′、4a′、2b′が存在し、
絶縁性が向上するためである。
As is apparent from the above comparison, although the apparent relative permittivity is slightly lowered by the structure of this embodiment, tan δ, specific resistance and V BD are improved. This is because there are porcelain layers 4 ', 2a', 4a ', 2b' having a small grain size near the internal electrode layers 3 ', 3a', 3b '.
This is because the insulating property is improved.

【0017】[0017]

【第2の実施例】第1図の実施例における磁器生シート
1と同一の組成の磁器生シート11に平均粒径0.1〜
0.2μm程度のZrO2 (酸化ジルコニウム)の微粒
子を含有するPd(パラジウム)ペーストを塗布して電
極層12を形成し、これ等を図6のように積層した。
[Second Embodiment] A porcelain raw sheet 11 having the same composition as the porcelain raw sheet 1 in the embodiment of FIG.
An electrode layer 12 was formed by applying a Pd (palladium) paste containing fine particles of ZrO 2 (zirconium oxide) of about 0.2 μm, and these were laminated as shown in FIG.

【0018】次に、図6に示す積層体を大気中、132
0℃で焼成することによって図7に示す焼結体13を得
た。焼結体13は、対の電極層12′間に平均粒径5〜
6μm程度の大粒子の磁器層11aと平均粒径0.2〜
0.4μm程度の微粒子の磁器層11b、11cを有す
る。次に、外部電極14、15を形成して積層磁器コン
デンサを完成させた。
Next, the laminated body shown in FIG.
By firing at 0 ° C., a sintered body 13 shown in FIG. 7 was obtained. The sintered body 13 has an average particle size of 5 to 5 between the pair of electrode layers 12 '.
Large particle porcelain layer 11a of about 6 μm and average particle size of 0.2 to
It has fine porcelain layers 11b and 11c of about 0.4 μm. Next, the external electrodes 14 and 15 were formed to complete the laminated ceramic capacitor.

【0019】この積層磁器コンデンサの電気的特性を測
定したところ、20℃のみかけの比誘電率εは1800
0、20℃の誘電体損失tan δは4.1%、150℃の
比抵抗は4.1×1012 Ωcm、破壊電圧VBDは710
Vであった。
When the electrical characteristics of this laminated ceramic capacitor were measured, the apparent relative permittivity ε at 20 ° C. was 1800.
The dielectric loss tan δ at 0 and 20 ° C. is 4.1%, the specific resistance at 150 ° C. is 4.1 × 10 12 Ωcm, and the breakdown voltage V BD is 710.
It was V.

【0020】この第2の実施例では図6の電極層12の
中のZrO2 が焼成時に電極層12の近傍の磁器の中に
拡散する。この結果、電極層12の近傍における結晶粒
子の成長が抑制され、図7に模式的に示すように電極層
12′の近傍に粒径の小さい粒子から成る磁器層11
b、11cが生じ、第1の実施例と同様に特性が改善さ
れる。
In this second embodiment, ZrO 2 in the electrode layer 12 of FIG. 6 diffuses into the porcelain near the electrode layer 12 during firing. As a result, the growth of crystal grains in the vicinity of the electrode layer 12 is suppressed, and as shown schematically in FIG. 7, the porcelain layer 11 made of particles having a small grain size is disposed in the vicinity of the electrode layer 12 '.
b and 11c occur, and the characteristics are improved as in the first embodiment.

【0021】[0021]

【変形例】本発明は上述の実施例に限定されるものでな
く、例えば次の変形が可能なものである。 (1) 磁器の組成は実施例に限定されるものでなく、
別の種々の磁器組成にすることができる。 (2) 図4の磁器層2、4bを省くことができる。
MODIFICATION The present invention is not limited to the above-described embodiments, and the following modifications are possible, for example. (1) The composition of the porcelain is not limited to the examples,
Other various porcelain compositions can be used. (2) The porcelain layers 2 and 4b of FIG. 4 can be omitted.

【0022】[0022]

【発明の効果】上述から明らかなように本発明によれ
ば、比抵抗、破壊電圧、誘電体損失の悪化を伴なわない
で、小型化及び大容量化を達成することができる。
As is apparent from the above, according to the present invention, miniaturization and large capacity can be achieved without deterioration of specific resistance, breakdown voltage and dielectric loss.

【図面の簡単な説明】[Brief description of drawings]

【図1】第1の実施例の積層磁器コンデンサの製造方法
を説明するための磁器生シートと微粒子磁器層を示す断
面図である。
FIG. 1 is a cross-sectional view showing a porcelain green sheet and a fine particle porcelain layer for explaining a method for manufacturing a laminated porcelain capacitor of a first embodiment.

【図2】図1の磁器層上に電極層を形成した状態を示す
断面図である。
FIG. 2 is a cross-sectional view showing a state in which an electrode layer is formed on the porcelain layer of FIG.

【図3】図2の電極層の上に微粒子磁器層を形成した状
態を示す断面図である。
3 is a cross-sectional view showing a state in which a fine particle porcelain layer is formed on the electrode layer of FIG.

【図4】積層体を示す断面図である。FIG. 4 is a cross-sectional view showing a laminated body.

【図5】積層磁器コンデンサを模式的に示す断面図であ
る。
FIG. 5 is a sectional view schematically showing a laminated ceramic capacitor.

【図6】第2の実施例の積層体を示す断面図である。FIG. 6 is a cross-sectional view showing a laminated body of a second embodiment.

【図7】第2の実施例の積層磁器コンデンサの一部を模
式的に示す断面図である。
FIG. 7 is a sectional view schematically showing a part of a laminated ceramic capacitor of a second embodiment.

【符号の説明】[Explanation of symbols]

1a′、1b′ 大粒子磁器層 4′、2a′、4a′、2b′ 小粒子磁器層 3′、3a′、3b′ 内部電極層 1a ', 1b' Large particle porcelain layer 4 ', 2a', 4a ', 2b' Small particle porcelain layer 3 ', 3a', 3b 'Internal electrode layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 誘電体磁器層と前記磁器層の一方の側に
配置された第1の電極層と前記磁器層の他方の側に配置
された第2の電極層とを備えた積層磁器コンデンサにお
いて、 前記誘電体磁器層の前記第1及び第2の電極層に近い領
域の結晶粒子の平均粒径が前記第1及び第2の電極層の
中間領域の結晶粒子の粒径よりも小さいことを特徴とす
る積層磁器コンデンサ。
1. A laminated ceramic capacitor comprising a dielectric porcelain layer, a first electrode layer arranged on one side of the porcelain layer, and a second electrode layer arranged on the other side of the porcelain layer. In, the average grain size of the crystal grains in the region of the dielectric porcelain layer close to the first and second electrode layers is smaller than the grain size of the crystal grains in the intermediate region of the first and second electrode layers. Laminated porcelain capacitor characterized by.
JP3245075A 1991-08-30 1991-08-30 Multilayer ceramic capacitor and method of manufacturing the same Expired - Fee Related JP2872838B2 (en)

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JPH0562855A true JPH0562855A (en) 1993-03-12
JP2872838B2 JP2872838B2 (en) 1999-03-24

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Cited By (11)

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JP2002299145A (en) * 2001-03-29 2002-10-11 Kyocera Corp Ceramic laminate and method of manufacturing the same
CN1097833C (en) * 1996-03-08 2003-01-01 株式会社村田制作所 Dielectric ceramic and monolithic ceramic electronic part using the same
US6785121B2 (en) 2000-05-30 2004-08-31 Tdk Corporation Multilayer ceramic capacitor and production method thereof
US6930876B1 (en) * 2004-01-30 2005-08-16 Tdk Corporation Multilayer ceramic capacitor
US6975502B2 (en) 2004-03-31 2005-12-13 Tdk Corporation Multilayer ceramic capacitor
US6987662B2 (en) 2004-01-30 2006-01-17 Tdk Corporation Multilayer ceramic capacitor
US7046502B2 (en) 2004-03-31 2006-05-16 Tdk Corporation Multilayer ceramic capacitor
EP1347476A3 (en) * 2002-03-07 2006-08-23 TDK Corporation Ceramic electronic device and method of production of same
JP2007123480A (en) * 2005-10-27 2007-05-17 Kyocera Corp Laminated ceramic capacitor and its manufacturing method
US20140071586A1 (en) * 2012-09-10 2014-03-13 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic electronic component and method of manufacturing the same
WO2024190066A1 (en) * 2023-03-13 2024-09-19 株式会社村田製作所 Multilayer ceramic capacitor

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JPS5936919A (en) * 1982-08-25 1984-02-29 三菱鉱業セメント株式会社 Porcelain condenser
JPH02155211A (en) * 1988-12-07 1990-06-14 Matsushita Electric Ind Co Ltd Green sheet for laminated porcelain capacitor
JPH03133114A (en) * 1989-10-18 1991-06-06 Tdk Corp Multilayer ceramic chip capacitor and manufacture thereof
JPH03133115A (en) * 1989-10-18 1991-06-06 Tdk Corp Multilayer ceramic chip capacitor and manufacture thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5936919A (en) * 1982-08-25 1984-02-29 三菱鉱業セメント株式会社 Porcelain condenser
JPH02155211A (en) * 1988-12-07 1990-06-14 Matsushita Electric Ind Co Ltd Green sheet for laminated porcelain capacitor
JPH03133114A (en) * 1989-10-18 1991-06-06 Tdk Corp Multilayer ceramic chip capacitor and manufacture thereof
JPH03133115A (en) * 1989-10-18 1991-06-06 Tdk Corp Multilayer ceramic chip capacitor and manufacture thereof

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1097833C (en) * 1996-03-08 2003-01-01 株式会社村田制作所 Dielectric ceramic and monolithic ceramic electronic part using the same
US6785121B2 (en) 2000-05-30 2004-08-31 Tdk Corporation Multilayer ceramic capacitor and production method thereof
US7335329B2 (en) 2000-05-30 2008-02-26 Tdk Corporation Method of making a multilayer ceramic capacitor
JP2002299145A (en) * 2001-03-29 2002-10-11 Kyocera Corp Ceramic laminate and method of manufacturing the same
EP1347476A3 (en) * 2002-03-07 2006-08-23 TDK Corporation Ceramic electronic device and method of production of same
US6930876B1 (en) * 2004-01-30 2005-08-16 Tdk Corporation Multilayer ceramic capacitor
USRE40665E1 (en) 2004-01-30 2009-03-17 Tdk Corporation Multilayer ceramic capacitor
US6987662B2 (en) 2004-01-30 2006-01-17 Tdk Corporation Multilayer ceramic capacitor
US7046502B2 (en) 2004-03-31 2006-05-16 Tdk Corporation Multilayer ceramic capacitor
KR100608218B1 (en) * 2004-03-31 2006-08-02 티디케이가부시기가이샤 Stacked ceramic condensor
US6975502B2 (en) 2004-03-31 2005-12-13 Tdk Corporation Multilayer ceramic capacitor
JP2007123480A (en) * 2005-10-27 2007-05-17 Kyocera Corp Laminated ceramic capacitor and its manufacturing method
US20140071586A1 (en) * 2012-09-10 2014-03-13 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic electronic component and method of manufacturing the same
JP2014053584A (en) * 2012-09-10 2014-03-20 Samsung Electro-Mechanics Co Ltd Multilayer ceramic electronic component and manufacturing method therefor
WO2024190066A1 (en) * 2023-03-13 2024-09-19 株式会社村田製作所 Multilayer ceramic capacitor

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