JPH05619Y2 - - Google Patents
Info
- Publication number
- JPH05619Y2 JPH05619Y2 JP5175288U JP5175288U JPH05619Y2 JP H05619 Y2 JPH05619 Y2 JP H05619Y2 JP 5175288 U JP5175288 U JP 5175288U JP 5175288 U JP5175288 U JP 5175288U JP H05619 Y2 JPH05619 Y2 JP H05619Y2
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- substrate
- diaphragm
- mesa portion
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 42
- 239000012530 fluid Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5175288U JPH05619Y2 (fr) | 1988-04-18 | 1988-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5175288U JPH05619Y2 (fr) | 1988-04-18 | 1988-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01154460U JPH01154460U (fr) | 1989-10-24 |
| JPH05619Y2 true JPH05619Y2 (fr) | 1993-01-08 |
Family
ID=31277768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5175288U Expired - Lifetime JPH05619Y2 (fr) | 1988-04-18 | 1988-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05619Y2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005003200A (ja) * | 2003-06-11 | 2005-01-06 | Lg Electron Inc | マイクロアクチュエータ及びその製造方法並びにマイクロ作動バルブ |
-
1988
- 1988-04-18 JP JP5175288U patent/JPH05619Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01154460U (fr) | 1989-10-24 |
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