JPH0560065A - Method for discharging hydrogen by hydrogen storage alloy and device thereof - Google Patents

Abstract

PURPOSE:To enable continuous operation while maintaining sufficient hydrogen discharging performance through a process of discharging hydrogen by means of hydrogen storage alloy. CONSTITUTION:Storing chambers 22, 22' are provided in plural positions on the side surface is an exhausted chamber 21 though gate valves 23, 23'. Hydrogen storage alloy elements 2, 2' are constituted movably in the exhausted chamber 21 and the storing chamber 22, 22' by straight leading mechanisms 24, 24' in the storing chambers 22, 22'. and a device is constituted by operating mutually such process that hydrogen is stored in the exhausted chamber 21, and hydrogen is discharged is the storing chamber 22, 22'. The side surface of the storing chamber 22 is formed in a bellows instead of the straight leading mechanism 24, so that straight leading function may be applied to the storing chamber 22 itself.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for evacuating hydrogen using a hydrogen storage alloy in the case of achieving an ultrahigh vacuum or an ultrahigh vacuum in a turbo molecular pump or the like, and an exhaust device therefor.

[0002]

2. Description of the Related Art Conventionally, a hydrogen storage alloy has been used in combination with a vacuum pump such as a turbo molecular pump as a method for obtaining an ultrahigh vacuum or an ultrahigh vacuum. This utilizes the property that the hydrogen storage alloy reversibly stores and releases hydrogen.

FIG. 7 is a block diagram of an example of a conventional hydrogen exhaust device using a hydrogen storage alloy. In this example, the hydrogen storage alloy element 2 having the heating mechanism 3 is directly fixed in the exhaust chamber 1, and an ultrahigh vacuum pump 5 is provided as an exhaust device via a gate valve 4. When the hydrogen storage alloy element 2 stores hydrogen up to the allowable hydrogen storage amount, the heating mechanism 3 deteriorates the hydrogen exhaust performance thereafter. Therefore, the heating mechanism 3 is heated to release the stored hydrogen to release the hydrogen exhaust performance. It is for recovery.

FIG. 8 is a block diagram of another example of a conventional hydrogen exhaust device using a hydrogen storage alloy. In this example, a storage chamber 13 isolated by a gate valve 12 is provided on the side surface of the exhaust chamber 11, and a hydrogen storage alloy element 2 having a heating mechanism 3 is fixed in the storage chamber 13.

[0005]

In the example of FIG. 7, since the hydrogen storage alloy element 2 is directly introduced and fixed in the exhaust chamber 1, the hydrogen storage alloy element 2 and the hydrogen in the exhaust chamber 1 are separated from each other. There is nothing that hinders contact, and the hydrogen exhaust performance of the hydrogen storage alloy element 2 can be fully utilized.

However, when the hydrogen storage alloy element 2 stores hydrogen up to its own allowable hydrogen storage amount, the hydrogen storage alloy element 2
In order to regenerate the hydrogen storage alloy element 2, the hydrogen storage alloy element 2 must be heated by the heating mechanism 3 to release the hydrogen stored in the hydrogen storage alloy element 2, and continuous exhaust cannot be performed.

When the exhaust chamber 1 is opened and the atmosphere is introduced, the hydrogen storage alloy element 2 adsorbs gas other than hydrogen,
By repeatedly opening the exhausted chamber 1 to the atmosphere, a gas other than hydrogen is accumulated in the hydrogen storage alloy element 2, which causes deterioration of the hydrogen exhaust performance of the hydrogen storage alloy element 2.

In the example of FIG. 8, since the hydrogen storage alloy element 2 is fixed in the storage chamber 13 connected to the exhausted chamber 11 via the gate valve 12, the gate valve 12 is opened when hydrogen is exhausted. The hydrogen in the exhaust chamber 11 reaches the hydrogen storage alloy element 2 through the opening of the gate valve 12.

For this reason, when the exhaust chamber 11 is opened and the atmosphere is introduced as described above, the hydrogen storage alloy element 2 is not exposed to the atmosphere by closing the gate valve 12, so that the hydrogen storage alloy element 2 is not stored. It is possible to prevent the hydrogen exhaust performance of the alloy element 2 from decreasing.

However, the number of hydrogen molecules reaching the hydrogen storage alloy element 2 through the opening of the gate valve 12 is limited by the gas passage probability in the opening of the gate valve 12, and the hydrogen of the hydrogen storage alloy element 2 is limited. Exhaust performance is not fully available.

An object of the present invention is to solve the above problems and provide a hydrogen exhausting method and apparatus capable of continuous exhausting and sufficiently utilizing the hydrogen exhausting performance of the hydrogen storage alloy element 2.

[0012]

In order to solve the above problems, in a hydrogen exhaust method using a hydrogen storage alloy, a straight advancing mechanism provided in a storage chamber 22 separated from an exhaust chamber 21 and a gate valve 23. The chamber 21 to be evacuated by 24
The hydrogen storage alloy element 2 configured to be able to be transferred between the inside and the storage chamber 22 is configured to store hydrogen in the exhaust chamber 21 and heat and regenerate in the storage chamber 22.

Further, as an apparatus for this, the exhaust chamber 21
And a storage chamber 22 separated by a gate valve 23, a straight advancing mechanism 24 provided on the bottom of the storage chamber 22 so that the tip of the accommodating chamber 22 projects into the exhausted chamber 21, and a tip of the rectilinear introducing mechanism 24. The provided hydrogen storage alloy element 2 is provided.

Incidentally, the storage chamber 2 is used as a straight-ahead introduction mechanism.
There is also one in which the side surface 2 is constituted by a bellows 22b and the hydrogen storage alloy element 2 is fixedly provided on the bottom surface of the storage chamber 22.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram of an embodiment of a hydrogen exhaust system using a hydrogen storage alloy of the present invention. Two storage chambers 22 and 22 'are provided on the side surface of the exhausted chamber 21 respectively for the gate valve 2
It is provided via 3, 23 '. This storage room 22,
Inside the 22 ', straight-moving introduction mechanisms 24, 24' are provided on the bottom surfaces 22a, 22a ', penetrating the bottom surfaces 22a, 22a'.

The hydrogen adsorbing alloy elements 2, 2'are fixed to the tip ends of the linear advancing mechanisms 24, 24 ', and when the advancing advancing mechanisms 24, 24' are fully advanced, the hydrogen adsorbing alloy element 2 at the tip ends. 2'is configured to be completely located in the exhaust chamber 21, and in the fully retracted position, the hydrogen storage alloy elements 2, 2'are configured to be completely located in the storage chambers 22 and 22 '. ing.

Further, the hydrogen storage alloy elements 2, 2'are heated by externally supplying electric power as heating mechanisms 3, 3 '.
It is configured to release the stored hydrogen.
Further, in order to exhaust the hydrogen released from the hydrogen storage alloy elements 2, 2 ', a common vacuum pump 6 capable of individually exhausting the storage chambers 22, 22' is provided.

The exhaust chamber 21 is also provided with an exhaust device including the gate valve 4 and the ultra-high vacuum pump 5, as in the above-described conventional examples.

FIG. 2 shows an example of a method for fixing the rectilinear introduction mechanism 24 to the bottom surface 22a of the storage chamber 22. A bellows 22b is provided inside the bottom surface 22a to install the rectilinear introduction mechanism 24 to the bellows 22b. The guide bush 22c is provided at a portion fixed to the tip end of the straight advance introducing mechanism 24 and penetrating the bottom surface 22a.

The movable length of the bellows 22b is such a length that the hydrogen storage alloy element 2 can be completely moved in the exhaust chamber 21 and the storage chamber 22.

Further, the lead wire of the heating mechanism 3 penetrates the bottom surface 22a as shown in FIG.

The bellows 22b shown in FIG. 2 is shown in FIG.
Is provided outside the bottom surface 22a. Others are the same as in the case of FIG. 2, and thus the description is omitted.

4 is similar to the case of FIG. 2, but the lead wire of the heating mechanism 3 is connected from the inside to the outside along the center line of the straight advancing introduction mechanism 24, and the bottom surface 22 is shown.
It does not directly penetrate a.

FIG. 6 is a block diagram of the one using the movable storage chamber 32. In this example, the movable storage chamber 32
Is formed of a bellows 32b, and the hydrogen storage alloy element 2 is fixed to the bottom surface 32a of the movable storage chamber 32.

Further, the bottom surface 32a is provided with a guide rail 32.
It is regulated to move straight ahead by c.

The movable range of the bellows 32b is such that the hydrogen storage alloy element 2 fixed to the bottom surface 32a is completely positioned in the exhaust chamber 21 when contracted, and the hydrogen storage alloy element 2 is completely expanded when expanded. In addition, it is necessary to be configured to be located in the movable storage chamber 32.

Next, the operation of the hydrogen exhaust device of FIG. 1 will be described.

First, the rectilinear introduction mechanisms 24, 24 'are retracted to close the gate valves 23, 23', and the hydrogen storage alloy elements 2, 2 are stored in the storage chambers 22, 22 'which have been evacuated by the vacuum pump 6 in advance. Let's wait.

Next, the gate valve 4 is opened, and the inside of the chamber to be evacuated 21 is evacuated to a pressure at which the ultra-high vacuum pump 5 can be operated through the ultra-high vacuum pump 5 by a roughing vacuum pump (not shown).

Then, the ultra-high vacuum pump 5 is operated to evacuate the inside of the exhaust chamber 21 to a pressure at which the hydrogen storage alloy elements 2, 2'can efficiently exhaust hydrogen.

After that, the gate valve 23 is opened, and the hydrogen storage alloy element 2 in the storage chamber 22 is inserted into the exhaust chamber 21 by the rectilinear introduction mechanism 24 until it completely projects.

In this state, the hydrogen storage alloy element 2 efficiently stores hydrogen and exhausts hydrogen sufficiently.

However, if the hydrogen storage alloy element 2 stores hydrogen up to the permissible hydrogen storage amount, the hydrogen exhaust performance will deteriorate thereafter. Therefore, in order to continuously operate while maintaining sufficient hydrogen exhaust performance, two hydrogen storage alloy elements 2,
2'may be used to alternately occlude and release.

Therefore, two sets of hydrogen storage mechanisms are provided, and the gate valve 23 of one hydrogen storage mechanism is opened,
The hydrogen storage alloy element 2 is projected into the exhaust chamber 21 to exhaust hydrogen. During this period, the hydrogen storage alloy element 2'of the other hydrogen storage mechanism is housed in the storage chamber 22 'and the gate valve 2
By closing 3 ′ and supplying electric power to the heating mechanism 3 ′ to heat the hydrogen storage alloy element 2 ′, the stored hydrogen is released, so the vacuum pump 6 releases the hydrogen in the storage chamber 22 ′. Evacuate the generated hydrogen.

By alternately performing this operation, it is possible to continuously perform hydrogen exhaust while maintaining sufficient hydrogen exhaust performance. In this embodiment, two sets of hydrogen storage mechanisms are provided, but it is also possible to provide two or more sets of hydrogen storage mechanisms.

In the case of the hydrogen exhaust device of FIG. 6, the storage chamber 22
Since the movable storage chamber 32 itself can be expanded and contracted by the bellows 32b instead of the straight advancement introduction mechanism 24 in the inside, the hydrogen storage alloy element 2 is taken in and out of the exhausted chamber 21 by this expansion and contraction operation. Since it is the same as, the detailed description will be omitted.

[0037]

As described above, since a plurality of hydrogen storage alloy elements can alternately perform storage operation and release operation, hydrogen in the exhaust chamber 21 can be continuously supplied while maintaining sufficient hydrogen exhaust performance. It is possible to exhaust.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of a hydrogen exhaust device using a hydrogen storage alloy of the present invention.

FIG. 2 is a configuration diagram of a first method of fixing the straight advancement mechanism to the storage chamber.

FIG. 3 is a configuration diagram of a second method for fixing the straight advancement mechanism to the storage chamber.

FIG. 4 is a configuration diagram of a third method of fixing the straight advancement mechanism to the storage chamber.

FIG. 5 is a configuration diagram of a fourth method of fixing the straight advancement mechanism to the storage chamber.

FIG. 6 is a configuration diagram when a movable storage chamber is used in another embodiment of the hydrogen evacuation device using the hydrogen storage alloy of the present invention.

FIG. 7 is a configuration diagram of an example of a conventional hydrogen exhaust device using a hydrogen storage alloy.

FIG. 8 is a configuration diagram of another example of a conventional hydrogen exhaust device using a hydrogen storage alloy.

[Explanation of Codes] 1 Exhaust chamber 2, 2'Hydrogen storage alloy element 3, 3'Heating mechanism 4 Gate valve 5 Ultra-high vacuum pump 6 Vacuum pump 11 Exhaust chamber 12 Gate valve 13 Storage chamber 21 Exhaust chamber 22, 22 'Storage chamber 22a, 22a' Bottom 22b Bellows 22c Guide bush 23, 23 'Gate valve 24, 24' Straight advance introduction mechanism 32 Movable storage chamber 32a Bottom 32b Bellows 32c Guide rail

Claims (3)

[Claims] 1. A method of exhausting hydrogen using a hydrogen storage alloy, wherein a straight advancing mechanism provided in a storage chamber separated from the exhausted side by an opening / closing means is configured to be transferable between the exhausted side and the storage chamber. A method for exhausting hydrogen by a hydrogen storage alloy, wherein the hydrogen storage alloy element stores hydrogen on the exhaust side and is heated and regenerated in the storage chamber. 2. A hydrogen exhaust device using a hydrogen storage alloy, a storage chamber separated from an exhaust side by an opening / closing means, and a straight introduction provided on a bottom surface of the storage chamber so that a tip of the storage chamber is projected to the exhaust side. A hydrogen evacuation device using a hydrogen storage alloy, comprising a mechanism and a hydrogen storage alloy element provided at the tip of the straight-ahead introduction mechanism. 3. The hydrogen storage device according to claim 2, wherein a side surface of the storage chamber is constituted by a bellows as a straight-advance introduction mechanism, and the hydrogen storage alloy element is fixedly provided on a bottom surface of the storage chamber. Hydrogen exhaust system with alloy.