JPH056005A - Automatic exposing device - Google Patents

Abstract

PURPOSE:To execute exposure printing with high accuracy, to constitute an entire device to be miniaturized and further to release vacuum in a moment. CONSTITUTION:A vacuum stage 11 is constituted like a box, and many holes are constituted on the upper surface of the stage 11, furthermore, an aligning pawl 13 which moves in an XY-axis directions on the stage 11 is provided. Meanwhile, a mask holder 21 is supported so as to move up and down with respect to the stage 11, and the gap between the stage 11 including the box part of the stage 11 and the mask holder 21 is made vacuum, and the exposure printing is performed.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to improvements in automatic exposure apparatuses.

[0002]

2. Description of the Related Art A conventional automatic exposure apparatus, for example, as shown in FIG. 4, conveys a temporarily positioned substrate 1 to a vacuum stage 3 by a suction mechanism 2 and then moves the suction mechanism 2 to the outside of the vacuum stage 3. On the other hand, the substrate 1 and the photomask film set on the mask holder 4 on the upper side of the substrate 1 are aligned by the alignment mechanism 5, and a vacuum state is further established between the vacuum stage 3 and the mask holder 4. ,
Exposure and printing are performed by a light source 6 arranged on the upper surface of the mask holder 4. As shown in the figure, the vacuum stage 3 is composed of a single plate body, and a convex portion is formed around the lower surface of the mask holder 4 formed on the upper surface of the plate body. A vacuum is provided between the mask holder 3 and the mask holder 4.

[0003]

According to the above automatic exposure apparatus, the space between the vacuum stage 3 and the mask holder 4 is
By the convex portion formed around the lower surface of the mask holder 4,
Since a vacuum is obtained, the degree of the vacuum is naturally limited. In addition, since the substrate is aligned by the alignment mechanism 1, the substrate is conveyed to the vacuum stage 3 and the substrate and the photomask film are aligned, so that the alignment accuracy of the substrate and the photomask film is improved. However, it is difficult to perform high-resolution printing. In addition, since the positioning mechanism and the vacuum stage are configured separately and the substrate is transported by a conveyor between the two,
There is a drawback that the device becomes bulky.

The present invention has been made in view of the above points and is capable of performing highly accurate exposure printing, making it possible to make the entire apparatus compact, and immediately releasing the vacuum. It is an object of the present invention to provide an automatic exposure apparatus that can be used.

[0005]

The present invention has the following constitution in order to solve the above problems. That is, in claim 1, the substrate supported by the vacuum stage and the photomask film supported by the mask holder are exposed and baked by a light source in a vacuum state. The vacuum stage is formed in a box shape, a large number of holes are formed on the upper surface of the vacuum stage, and positioning claws movable in the XY axis directions are provided. On the other hand, the mask holder is supported so as to move up and down with respect to the vacuum stage, and the space between the vacuum stage including the box portion of the vacuum stage and the mask holder is in a vacuum state.

According to a second aspect of the present invention, the box-shaped vacuum stage is provided with a plurality of vacuum releasing lids at equal intervals on the outer surface thereof.

[0007]

According to the automatic exposure apparatus of the above-mentioned claim 1, the vacuum condition is formed between the vacuum stage including the box portion of the vacuum stage and the mask holder, and the substrate and the photomask film are exposed. Can be in a state,
Highly accurate exposure printing can be performed. In addition, a vacuum stage having a box shape is provided with temporary positioning claws that can move in the XY axis directions, and the temporary positioning and exposure of the substrate are performed by one vacuum stage. The alignment of the film becomes reliable, exposure baking can be performed with high accuracy, and the entire apparatus can be made compact.

According to the second aspect of the present invention, since the outer surface of the box-shaped vacuum stage has a plurality of vacuum releasing lids arranged at equal intervals, the vacuum can be released immediately and the workability is improved. .

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to FIGS. In the figure, reference numeral 11 denotes a box-shaped vacuum stage having a large number of holes 12 on its upper surface. Reference numeral 13 is a temporary positioning claw that is movable in the XY axis directions of the vacuum stage 11, and is configured so as to project, for example, two pairs in the vertical direction and two pairs in the horizontal direction. The claw 13 is stored in the computer so that its position can be specified according to the size of the substrate. Reference numeral 14 denotes a plurality of vacuum release lids provided on the outer surface of the vacuum stage 11, which are arranged at equal intervals on the four sides of the vacuum stage 11.

Reference numeral 15 denotes an XYQ stage, which adjusts the angle of the horizontal plane of the vacuum stage 11 and the position of the claw 13. 1
6 is a motor for moving the XYQ stage 15, and 17 is a conveyor arranged in the conveying direction of the vacuum stage 11, which is configured to move up and down with respect to the vacuum stage 11. 18 is a transfer conveyer arranged at one end of the vacuum stage 11, 19 is a conveyer conveyer arranged at the other end of the vacuum stage 11, and 21 is a mask holder for moving up and down with respect to the vacuum stage 11. A vacuum state is formed between the vacuum stage including the box body of the stage and the mask holder. 20 is a mask holder 21
Is a light source device provided on the upper part of.

[0011]

According to the automatic exposure apparatus of the first aspect of the present invention, the space between the vacuum stage including the box portion of the vacuum stage and the mask holder is vacuumed to expose the substrate and the photomask film. A vacuum state can be surely achieved, and exposure baking can be performed with high accuracy. In addition, since the temporary alignment claws are provided on the vacuum stage configured in a box shape and the substrate is aligned and exposed and baked by one vacuum stage, the alignment between the substrate and the photomask film is ensured, and the accuracy is improved. High exposure printing can be performed, and further, there is a unique effect that the entire apparatus can be made small.

According to the second aspect of the present invention, since a plurality of vacuum releasing lids are arranged at equal intervals on the outer surface of the box-shaped vacuum stage, the vacuum can be immediately released as a whole and workability is improved. Has a unique effect.

[Brief description of drawings]

FIG. 1 is a perspective view of an automatic exposure apparatus of the present invention.

FIG. 2 is an enlarged perspective view of a main part of FIG.

FIG. 3 is an enlarged perspective view of a main part of FIG.

FIG. 4 is a front view of a conventional automatic exposure apparatus.

[Explanation of symbols]

11 vacuum stage 12 holes 13 Temporary position jaw 14 Vacuum release lid 15 XYQ stage 17 Conveyor

Claims (2)

[Claims] 1. An automatic exposure apparatus for exposing and baking a substrate supported on a vacuum stage and a photomask film supported on a mask holder by a light source in a vacuum state, wherein the vacuum stage is configured in a box shape, Moreover, a large number of holes are formed on the upper surface of the vacuum stage, and a positioning claw that moves in the XY axis directions is provided. On the other hand, the mask holder is supported so as to move up and down with respect to the vacuum stage, and An automatic exposure apparatus, characterized in that a space between a vacuum stage including the mask holder and a mask holder is configured to be in a vacuum state and exposed and baked. 2. The automatic exposure apparatus according to claim 1, wherein a plurality of vacuum releasing lids are provided on the outer surface of the box-shaped vacuum stage at equal intervals.