JPH055941Y2 - - Google Patents
Info
- Publication number
- JPH055941Y2 JPH055941Y2 JP17870487U JP17870487U JPH055941Y2 JP H055941 Y2 JPH055941 Y2 JP H055941Y2 JP 17870487 U JP17870487 U JP 17870487U JP 17870487 U JP17870487 U JP 17870487U JP H055941 Y2 JPH055941 Y2 JP H055941Y2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- temperature
- heating plate
- chamber
- flow meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002994 raw material Substances 0.000 claims description 42
- 238000010438 heat treatment Methods 0.000 claims description 25
- 230000008016 vaporization Effects 0.000 claims description 16
- 238000009834 vaporization Methods 0.000 claims description 15
- 239000007789 gas Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17870487U JPH055941Y2 (enrdf_load_stackoverflow) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17870487U JPH055941Y2 (enrdf_load_stackoverflow) | 1987-11-24 | 1987-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0183432U JPH0183432U (enrdf_load_stackoverflow) | 1989-06-02 |
| JPH055941Y2 true JPH055941Y2 (enrdf_load_stackoverflow) | 1993-02-16 |
Family
ID=31470311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17870487U Expired - Lifetime JPH055941Y2 (enrdf_load_stackoverflow) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH055941Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-11-24 JP JP17870487U patent/JPH055941Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0183432U (enrdf_load_stackoverflow) | 1989-06-02 |
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