JPH0557650A - Hand mechanism for robot - Google Patents

Abstract

PURPOSE:To prevent excessive force from acting upon each module and a robot by providing a cushion module in hand mechanism with an elastic supporting means for buffering the movement of a movable lower fitting plate disposed parallel to an upper fitting plate, and a buffer force adjusting means. CONSTITUTION:A vertical pair of fitting plates 180, 182 are fitted in the state of being relatively movable along the centerline of a cushion module M4 in hand mechanism, and a coil spring 206 is interposed between both fitting plates 180, 182 so as to energize them in the mutually separating state. The lower end of this coil spring 206 is locked to the outer periphery of a locking member 202, and the upper end of the coil spring 206 is locked to the lower face of a lid member 210 fitted through a C-ring 208. The C-ring 208 sets the lid member 210 to the optional height in relation to the lower fitting plate 182. The setting length of the coil spring 206 is thus adjusted to regulate elastic energizing force.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is equipped with modules for attaching a distal end of an arm portion in a robot, which are capable of performing predetermined element movements and can be independently combined with each other. The present invention relates to a robot hand mechanism configured to perform a desired element movement by appropriately combining the above, and more particularly to a robot hand mechanism including a cushion module.

[0002]

2. Description of the Related Art Conventionally, a robot hand mechanism, which is interposed between a finger portion and an arm portion in a robot and causes the finger portion to perform a predetermined posture changing operation, has a reversing operation, a shifting operation, a turning operation, A configuration in which the posture changing operation of the finger portion is performed in a state in which each element motion of the cushion motion and the compliance motion is arbitrarily combined is usually adopted. However, in such a conventional hand mechanism, since one finger mechanism has a configuration in which the finger part performs one unique posture changing operation, the finger part is caused to perform another posture changing operation. When the need arises, the design is carried out and the hand mechanism is replaced as a whole.

For example, specifically, when inserting the same pin into the same hole, the structure of the finger portion is formed depending on whether the hole is formed on a horizontal plane or on an inclined surface. However, the configurations of the hand mechanisms must be designed and manufactured in a unique state. As described above, in the conventional hand mechanism, the design is changed every time when the posture changing operation in the finger portion is changed, and the posture changing operation is changed because the hand changing mechanism has to be manufactured with a structure unique to the posture changing operation. Therefore, it is pointed out that there is a problem that it takes a long time to change the design and the like, and the mechanism is not shared for each posture changing operation, which is a problem from the economical point of view.

As a solution to this problem, Japanese Patent Application No. 1-1314 is filed as a prior application by the same applicant as the present applicant.
No. 02 and Japanese Patent Application No. 1-131403. The hand mechanism disclosed in these prior applications is provided between the finger portion and the arm portion in the robot, and causes the finger portion to perform a predetermined posture changing operation, and includes a reversing operation, a shift operation, a turning operation, It is equipped with modules for performing each element motion of the cushion motion and the compliance motion independently of each other, and by combining any of these modules, a predetermined posture change motion is performed on the finger part. It is characterized by making it.

Further, in the hand mechanism according to this prior application, the mounting surface of each of the modules, the mounting surface of the hand portion, and the mounting surface of the finger portion have mounting holes spaced at a predetermined pitch. In addition to being formed, it is characterized in that a position regulating means is provided for attaching each module to each other in a predetermined attachment state. In the robot hand mechanism configured as described above, the modules for performing each element motion of the reversing operation, the shifting operation, the turning operation, the cushioning operation, and the compliance operation are independently provided and can be combined with each other. Therefore, by simply combining the modules in charge of each element movement required for the posture changing operation in the finger part, the desired posture changing operation in the finger part can be achieved without any design change of the hand mechanism. Can be done.

[0006]

In the hand mechanism according to the prior application constructed as described above, since a plurality of modules are combined, the dimensional error, weight and height of each module are stacked. Become. As a result, if modules are combined so as to satisfy a predetermined function, the weight, the height dimension, the mounting accuracy, etc. may exceed an allowable value, and such a hand mechanism may not be practically used. There is. Therefore, in a hand mechanism composed of a combination of a plurality of modules, each module is required to be lightweight, highly accurate, and compact. The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a robot hand mechanism including a cushion module that achieves weight reduction, high accuracy, and size reduction.

[0007]

[Means for Solving the Problems]
In order to achieve the object, the robot hand mechanism according to the present invention is attached to the tip of an arm portion of the robot, and is equipped with modules for executing predetermined element movements which can be independently combined with each other. In a hand mechanism configured to perform a desired element motion by appropriately combining any of the above modules, the upper mounting plate and the upper mounting plate are arranged in parallel with each other and along the central axis of the upper mounting plate. A movably arranged lower mounting plate, elastic supporting means for buffering the movement of the lower mounting plate toward the upper mounting plate, and cushioning force adjusting means for adjusting the buffering force of the elastic supporting means. It is characterized by having a cushion module equipped with. Also,
In the robot hand mechanism according to the present invention, the elastic supporting means includes a coil spring which is interposed between the upper mounting plate and the lower mounting plate and exerts an elastic biasing force in a direction in which the upper mounting plate and the lower mounting plate are separated from each other. The cushioning force adjusting means includes a locking member whose mounting position along the center axis of the upper mounting plate or the lower mounting plate is changed, and one end of the coil spring is locked to the locking member. Is characterized by.

Further, in the robot hand mechanism according to the present invention, the cushioning force adjusting means is provided with a through hole formed in the upper mounting plate or the lower mounting plate and a central axis line on the inner peripheral surface of the through hole. Having a plurality of circumferential grooves formed along the
The locking member includes a locking ring that is selectively fitted into one of the plurality of circumferential grooves, and by selecting the plurality of circumferential grooves formed, one end is engaged with the locking ring. Change the set length of the stopped coil spring,
It is characterized by adjusting its elastic biasing force. Further, in the robot hand mechanism according to the present invention,
The buffer force adjusting means has a through hole formed in the center of the upper mounting plate or the lower mounting plate and a thread groove formed on the inner peripheral surface of the through hole, and the locking member is A screw member is provided that is screwed into the screw groove and is mounted so as to be able to move back and forth along the central axis line. The set length of the coil spring is changed to adjust the elastic biasing force of the coil spring. In addition, the robot hand mechanism according to the present invention is characterized by further including an intermediate member disposed in a telescopic shape between the upper mounting plate and the lower mounting plate.

[0009]

In the robot hand mechanism constructed as described above, the upper mounting plate and the lower mounting unit arranged in parallel with the upper mounting plate and movable along the central axis of the upper mounting plate. The cushion module is provided with a plate, elastic supporting means for buffering the movement of the lower mounting plate toward the upper mounting plate, and buffering force adjusting means for adjusting the buffering force in the elastic supporting means. Since it is configured as described above, it is possible to satisfy the above-mentioned requirements.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The construction of an embodiment of a robot hand mechanism according to the present invention will be described in detail below with reference to the accompanying drawings. (Schematic Configuration of Hand Mechanism) Hand mechanism 1 of this embodiment
0 indicates the robot 12 (see FIG. 5) as shown in FIGS.
Attached to the tip of the z-axis arm 14 as an arm part (shown in FIG. 4), and modules for executing predetermined element movements are provided so that they can be combined with each other in an independent state, and any modules among these modules are appropriately combined. By doing so, it is configured to perform a desired element movement. That is, the hand mechanism 10 is attached to the lower end of the z-axis arm 14, and is a holder module M that allows the attachment of various modules described below to the Z-axis arm 14.
1, a reversing module M2 for performing a reversing operation, a revolving module M3 for performing a revolving operation, a movement module M4 for performing a cushioning operation, and a compliance module M5 for performing a compliance movement.
A shift module M6 for performing a shift operation, and a clamp module M7 for performing a clamp operation of an article are provided in an arbitrary combination, and in the configuration of one embodiment shown in the drawings, Includes seven types of modules M1 to M7 from a z-axis arm 14 (described later) of the robot 12 to which the hand mechanism 10 is attached,
It is provided in a state of being arranged in the above-described order toward the tip.

Here, the reversing operation in the reversing module M2 described above means a rotating operation around the rotation support axis RL set so as to be orthogonal to the central axis line CL of itself, as shown in FIGS. 3 and 4. The turning operation in the turning module M3 means a rotating operation about an axis along the center axis CL of the player, and the shift operation in the shift module M6 means a moving operation along the center axis CL of the player. The clamp operation in M7 means a grip operation for gripping the article from both sides. As will be described in detail later, these operations are configured to function as a so-called active module which is driven by a drive mechanism provided in each of the corresponding modules M2, M3, M6 and M7. . In addition, the cushion motion in the cushion module M4 means an absorbing action of an abnormal force acting along the center axis of the cushion module M4, and the compliance motion in the compliance module M5 is a position in the direction orthogonal to the barrel axis. This means an absorption operation of the deviation and the angular deviation, and these operations do not have a drive source in the corresponding modules M4 and M5, respectively.
It is configured to function as a so-called passive module that operates by the force of the other party.

Incidentally, these seven types of modules M1 to M7
As will be described later in detail with respect to the optimality of setting the order of the holder module, the holder module M1 is always attached directly to the lower end of the z-axis arm 14, and the clamp module M7 is attached to the most tip portion. As far as the minimum number of combinations is concerned, there are two combinations of the holder module M1 and the cushion module M7, the reversing module M2, the turning module M3, the cushion module M4, and the compliance module. Whether or not the modules M5 and M6 are mounted and the arrangement order thereof are arbitrarily set from the viewpoint of how to achieve the posture changing operation of the clamp module M7.

Further, these seven types of modules M1 to M
The operation mode of the hand mechanism 10 based on the above-mentioned arrangement order after including all 7 in combination will be described in detail later, but as shown in FIG. 6, a clamp module attached to the tip of the hand mechanism 10 is shown. Horizontal plane S by M7
_The gear member G, which is placed with the central axis thereof standing upright on ₁ , is gripped by the gear member G, and the gear member G is rotated at a predetermined angle α with respect to the horizontal plane S1 (for example, 45 in this embodiment).
The angle is rotated (inverted) from the central axis CL of the z-axis arm 14 by an angle α so as to be aligned with the hole H2 formed on the inclined surface portion S2, and the predetermined angle θ is provided around the central axis of the gear member G. It is set to execute the operation of inserting into the hole H in a state of being rotated (turned) by (90 degrees in this embodiment).

Here, as shown in FIG. 6, the gear G as an article to be gripped by the hand mechanism 10 has a gear body G1 and a gear body G1 which is coaxially and integrally formed on the upper surface of the gear body G1 in the figure. 1 and a second shaft portion G, which is formed coaxially and integrally with the lower surface of the gear body G1 as shown in FIG.
3 and 3. As is apparent from FIG. 6, a pair of flat surface portions G4 are formed on the peripheral surface of the first shaft portion G2 so as to face each other so that the clamp operation by the clamp module M7 can be performed reliably. Has been done.
In the state before the gear G is gripped by the hand mechanism 10, as shown in FIG. 1, the second shaft portion G3 is inserted into the first hole H1 formed in the horizontal surface portion S1. In this state, the second shaft portion is placed on the horizontal plane portion S1 and is held by the hand mechanism 10 in the second hole H2 formed in the inclined surface portion S2 as described above. It is set so that it is moved so as to be placed on this inclined surface portion S2 as G3 is inserted.

(Schematic Structure of Robot) Here, the robot 12 to which the hand mechanism 10 is applied has an x-axis arm 16 and an x-axis arm 16 in a state orthogonal to the x-axis arm 16 as shown in FIG. A y-axis arm 18 movably attached to the y-axis arm 18, and a y-axis movement block 20 movably attached to the y-axis arm 18 along the y-axis direction,
The z-axis arm 14 which is attached so as to pass through the y-axis moving block 20 in the vertical direction and is supported so as to be vertically movable.
It consists of and. The hand mechanism 10 is attached to the lower end of the z-axis arm 14, and more specifically, the following modules are set so as to be attached via the above-mentioned holder module M1.
In addition, these y-axis arm 18 and y-axis moving block 20
And the z-axis arm 14 include the drive motors 22, 24, 26.
Are set so that they are respectively driven to move.

(Description of Each Module) Next, the configuration of each module M1 to M7 will be described. [Description of Holder Module M1] The holder module M1 for attaching various modules of the hand mechanism 10 to the z-axis arm 14 of the robot apparatus 12 is shown in FIGS.
It is configured as shown in FIG. That is, as shown in FIGS. 7 and 8, the holder module M1 mainly includes a fixing member 28 fixed to the lower end of the z-axis arm 14, a mounting plate 30 to which an arbitrary module is mounted on the lower surface, and a fixing member. A connecting mechanism 32 for connecting the member 28 and the mounting plate 30 to each other.
It is roughly composed of and. It should be noted that the outer peripheral surface of the lower end of the z-axis arm 14 has a long groove extending in the axial direction in order to prohibit rotation of the holder module M1 attached thereto about the central axis surface. 14a is formed with a predetermined depth.

More specifically, the fixing member 28 is the mounting plate 3
A main body 34 that is placed on the upper surface of 0, and has a through hole 34a through which the z-axis arm 14 is inserted and that penetrates along the center thereof;
A groove 36 having a semicircular cross section, which integrally stands up from the outer periphery of the main body 34 corresponding to the semicircular portion of the through hole 34a, and communicates with the semicircular portion of the through hole 34a on one side surface 36a formed of a flat surface.
a semi-cylindrical receiving portion 36 in which b is formed, and the receiving portion 3
6 has a side surface 38a formed of a flat surface that is in contact with one side surface of the receiving portion 36, and has a semicircular cross section that communicates with the remaining semicircular portion of the through hole 34a. And a semi-cylindrical holding portion 38 in which the groove 38b is formed. That is, the pressing portion 38 is connected to the receiving portion 36 so that the one side surfaces 36a, 38a of the pressing portion 38 are in contact with each other, so that the through hole (36b, 38b) through which the z-axis arm 14 is inserted is formed at the center of the connecting body. Will be formed in a state of extending along.

Here, in a state where the z-axis arm 14 is inserted into the through hole formed by the grooves 36b and 38b having a semicircular cross section, the one side surface 36a of the receiving portion 36 and the one side surface 38a of the pressing portion 38 are mutually arranged. It is set to be separated. Then, the receiving portion 36 and the pressing portion 38 form a pair of bolts 40a, 4a.
0b, and the side surfaces 36a and 38a of each other are tightened so as to be close to each other. In this way, the receiving portion 36
The z-axis arm 14 is fixed between the press-fitting portion 38 and the press-fitting portion 38.

The holding portion 38 is formed with an insertion hole 38c through which the pin 42 is inserted while penetrating along the radial direction of the holding portion 38. By fitting the tip of the pin 42 into the long groove 14a described above, the relative rotation between the z-axis arm 14 and the fixing member 28 is prohibited, and the fixed state of both is more reliably achieved. . Further, as shown in FIG. 9, the mounting plate 30 is formed with mounting through holes 30a for mounting various modules of the hand mechanism 10 penetrating along the vertical direction at four corners thereof. . Diameter and disposed pitch of through holes 30a are respectively set to a constant value d ₁ and distance D _1.
Further, on the lower surface of the mounting plate 30, in order to precisely define the mounting position of the modules M2~M7 attached thereto, a pair of positioning pins 30b at a predetermined diameter d ₂ and the predetermined distance D ₂ is lower It is fixed in a protruding state.

On the other hand, the connecting mechanism 32 for connecting the mounting plate 30 and the fixing member 28 to each other is provided with a center ring 44 for aligning the central axis of the z-axis arm 14 and the central axis of the mounting plate 30 with each other. This centering 44 is
It is formed in the shape of a sleeve, and the z-axis arm 1 is provided at the upper end opening.
4 with the lower end fitted and the lower end fitted into the positioning hole 30c formed in the center of the mounting plate 30, z
The central axis of the shaft arm 14 and the central axis of the mounting plate 30 are set to be aligned with each other.

Here, the centering 44 is in a direction orthogonal to the central axis of the centering 44 so as to function as a hysteresis member (that is, a direction in which the fixing member 28 and the mounting plate 30 are deviated from each other at the mounting surfaces). When a shearing force along
It is formed so as to cause a predetermined deformation. A strain sensor 45 is attached to the outer peripheral surface of the centering 44 so that the magnitude of the shearing force acting on the centering 44 can be detected. The strain sensor 45 is connected to a control device (not shown) and constantly outputs the detection result. This controller is
Based on the detection result output from the strain sensor 45,
When the amount of distortion exceeds the allowable value, an alarm is issued.

That is, the hand mechanism 10 is provided with at least one other type of module attached below the holder module M1 and the hand mechanism 10 is unexpectedly damaged while the robot 12 is performing a predetermined assembling operation. If the object is lightly abutted and shocked, the hand mechanism 10
Due to the rigidity of the device itself, the error (the amount of deviation of the central axes of the z-axis arm 14 and the mounting plate 30) caused by this contact is suppressed to a small extent, and even if the assembly operation is continued thereafter, there is no problem. However, if such light abutment is repeated many times, errors generated by such abutment may be accumulated, and accurate assembling operation may not be performed. Therefore, the control device constantly monitors the detection result output from the strain sensor 45, and when the accumulated value and / or each detected value exceeds a predetermined allowable value, the z-axis of the holder module M1 is detected. An alarm will be issued in order to re-execute the center alignment between the arm 14 and the mounting plate 30.

In this embodiment, the impact applied to the hand mechanism 10 is described to be detected by using the strain sensor 45, but the present invention is not limited to such a configuration, and the present invention is not limited thereto. A configuration that does not use the strain sensor 45 can also be adopted. That is, even when the strain sensor 45 is not provided, the impact applied to the hand mechanism 10 remains as a permanent deformation of the center ring 44 that functions as the hysteresis ring. Therefore, for example, when the hand mechanism 10 is disassembled and cleaned in a periodic inspection or the like, the centering 44
By taking out and inspecting for deformation, it is determined whether or not a shock is applied to the hand mechanism 10,
If it is determined that there is a shock, a corresponding inspection will be required.

Further, the first mounting holes 3 are formed at the four corners of the main body 34 of the fixing member 28 so as to penetrate in the thickness direction.
4c are formed, and these first mounting holes 34c are formed.
The mounting plate 30 is formed with a screw hole 30d in a state corresponding to the above. The above-described coupling mechanism 32 includes the shear pin bolt 46 which is inserted through each mounting hole 34c and whose tip is screwed into the corresponding screw hole 30d. Here, each shear pin bolt 46 attaches the fixing member 28 and the attachment plate 30 to each other with a predetermined attachment strength, and each of them is at a substantially central portion in the longitudinal direction, that is, the attachment member 28 and the attachment plate 30. Has a notch as a fragile portion at the mounting boundary surface, and because of this notch, when an impact force above the predetermined mounting strength acts on the hand mechanism 10, each shear pin bolt 4
6 will be destroyed by the corresponding notches and will be divided into upper and lower parts.

That is, in the holder module M1, there is no problem in carrying out the normal assembling operation by having the predetermined mounting strength, but tentatively, the hand mechanism 10 is assembled. During the
When a strong impact is applied to a fixed object, the shear pin bolt 46 is first broken to release the connection between the z-axis arm 14 and the mounting plate 30, and this impact is applied to the robot 12.
The robot 12 is prevented from being damaged by being transmitted to the side.

On the other hand, a second mounting hole 34d is formed in a part of the main body 34 of the above-mentioned fixing member 28 so as to penetrate in the thickness direction, and this second mounting hole 34d is also formed.
The mounting hole 30e is formed in the mounting plate 30 so as to penetrate in the thickness direction. Then, the connecting mechanism 32 described above has the mounting holes 34d, 30
A drop prevention pin 48 is attached in a state of penetrating both e. The fall prevention pin 48 is formed to have a length longer than the total thickness of the main body 34 of the fixing member 28 and the thickness of the mounting plate 30, and the upper end thereof has an upper end.
The upper surface of the main body 34 can be locked, and the lower end thereof can be locked to the lower surface of the mounting plate 30. The diameter of the drop prevention pin 48 is set to be smaller than the diameter of both the mounting holes 30d and 30e. That is, the presence of the fall prevention pin 48 causes the eccentric pin 50 for angle adjustment described later.
The angle adjustment operation is not spoiled.

In this way, as described above, when the strong shock acts on the hand mechanism 10 to destroy the shear pin bolt 46 and release the connection between the fixing member 28 and the mounting plate 30, The attachment plate 30 is suspended from the fixing member 28 by the fall prevention pin 48. As a result, even if the connection state between the fixing member 28 and the mounting plate 30 is released, various modules M2 to M7 mounted below the mounting plate 30 fall on the floor surface, and these It will be surely prevented from being damaged.

Further, a part of the main body 34 of the fixing member 28 is provided with a third mounting hole 3 in a state of penetrating in the thickness direction.
4e is formed, and a long groove 30f extending in the radial direction is formed on the upper surface of the mounting plate 30 in a state corresponding to the third mounting hole 34e. Then, the above-mentioned coupling mechanism 32 has the third mounting holes 34e.
Eccentric pin 50 for adjusting the mounting angle in a state where the lower end is fitted into the long groove 30f. The eccentric pin 50 is integrally attached to a pin main body 50a penetrating the third mounting hole 34e and a lower end of the pin main body 50a in an eccentric state by an eccentric amount Δx, and is fitted into the long groove 30f described above. It is composed of a plate 50b. The diameter of the eccentric disc 50b is equal to that of the long groove 30f.
It is set so as to approximately match the width of. Also, this third
The mounting hole 34e is formed at a position deviated from the center position of the fixing member 28 by a radius r.

In this way, by rotating the eccentric pin 50 about the center axis of the eccentric pin within the third mounting hole 34e, the z-axis arm 14 can be moved within the maximum tan ^-1 (Δx / r) range. The angle of the mounting angle of the mounting plate 30 with respect to is adjusted. Further, a mounting piece 52 is formed on the side of the receiving portion 36 of the above-described fixing member 28 in a state where the mounting piece 52 extends integrally and substantially horizontally therefrom. A first plate for detecting that the mounting plate 30 is normally mounted on the fixing member 28 is provided on the lower surface of the mounting piece 52.
Sensor 54 is attached. Where this first
In order not to interfere with the detection operation of the sensor 54 of the main body 34 located immediately below the first sensor 54.
The concave portion 34f is formed in the portion of
The first sensor 54 is attached to the mounting plate 30 in the state of looking at 4f.
It is designed to be able to directly detect the upper surface of the.

Here, in this embodiment, the first sensor 54 is composed of a proximity sensor and the mounting plate 30.
When the upper surface of the fixing member 28 is at a preset predetermined distance, no detection signal is generated, and as described above, the shear pin bolt 46 is broken to release the connection state between the fixing member 28 and the mounting plate 30. When the mounting plate 30 is suspended from the fixing member 28 by the fall prevention pin 48 in this state, the upper surface of the mounting plate 30 is separated from the first sensor 54. The sensor 54 outputs a predetermined first detection signal to the control device to notify that the attachment state of the attachment plate 30 to the fixing member 28 has been released.

[Explanation of Inversion Module M2] The inversion module M2 for performing the above-described inversion operation is constructed as shown as an embodiment in FIGS. 14 to 23.
That is, as shown mainly in FIGS. 14 and 15, the reversing module M2 is a rotation axis set so as to be orthogonal to the central axis of the reversing module M2 (that is, the central axis CL of the z-axis arm 14). A pair of upper and lower mounting plates 62 and 64 mounted so as to be rotatable relative to each other around 60 are provided. Here, a vane type pneumatically actuated rotary drive mechanism 65 for reversing the lower mounting plate 64 with respect to the upper mounting plate 62 is integrally mounted on the lower surface of the upper mounting plate 62. That is, the rotary drive mechanism 65 includes a main body block 66 which is formed integrally with the lower surface of the upper mounting plate 62 so as to extend downward. This body block 66
A vane chamber 68 having a circular cross section is formed therein.
The central axis of the vane chamber 68 is set to coincide with the central axis of the rotating shaft 60 described above.

That is, the rotating shaft 60 is axially supported by the main body block 66 through a pair of bearings 70a and 70b in a state of penetrating coaxially with the main body block 66. Then, in the portion of the rotating shaft 60 located in the vane chamber 68, the vane body 7 extending along the radial direction over the entire axial length.
2 is attached. With this vane body 72, the vane chamber 68 is divided into two vane branch chambers 6 as shown in FIG.
It will be divided into 8a and 68b. Further, in order to selectively introduce compressed air as a working fluid into the vane compartments 68a and 68b and to selectively discharge the compressed air from the vane compartments 68a and 68b, the upper mounting plate 62 has a structure shown in FIG. Also, as shown in FIG. 15, a pair of air ports 74a and 74b are attached.

On the other hand, as shown in FIG. 22, in the vane chamber 68, a first connection port 76a for introducing / exhausting compressed air to / from the first vane branch chamber 68a is also provided. Adjacent to the clockwise side of the connection port 76a of the second
The second connection ports 76b for introducing and discharging the compressed air to and from the vane compartments 68b are respectively provided.
The first and second connection ports 76a and 76b are communicated with each other via communication passages 78a and 78b formed through the upper mounting plate 62 and the main body block 66, respectively. In addition, these first and second connection ports 76a, 7
The outer surface of 6b is formed so that the outer surfaces of the vane bodies 72 that have rotated so as to come in close proximity to each other can contact each other. That is, in the rotary shaft 60 to which the vane body 72 is attached, the counterclockwise end surface is changed from the position where the clockwise end surface of the vane body 72 abuts the counterclockwise outer surface of the first connection port 76a. The second connection port 76b can be freely rotated up to a position where it comes into contact with the outer surface of the second connection port 76b in the clockwise direction.

Here, a pneumatic pressure source 82 is connected to the above-mentioned first and second air ports 74a and 74b via a first switching valve 80 composed of an electromagnetic solenoid valve described later.
It is connected to the. This first switching valve 80 has a first
In the state in which the switching mode is set, compressed air is introduced into the first vane compartment 68a via the first air port 74a and compressed from the second vane compartment 68b via the second air port 74b. By setting the switching so as to discharge the air, while the second switching mode is set, the compressed air is discharged from the inside of the first vane compartment 68a via the first air port 74a, and the second switching mode is set. It is configured to be switched and set so as to introduce compressed air into the second vane compartment 68b via the air port 74b.

As described above, by setting the first switching mode in the first switching valve 80, as shown in FIG.
In, the rotating shaft 60 is driven to rotate in the counterclockwise direction, and the lower mounting plate 64 is reversely driven from a standby position parallel to the upper mounting plate 62 to a reversing position which is reversed by 90 degrees. Further, by setting the second switching mode in the first switching valve 80, the rotating shaft 60 is rotationally driven by 90 degrees in the clockwise direction from the reverse position and returns to the standby position shown in FIG. Will be done.

Side arms 84 and 86 are attached to both ends of the rotary shaft 60 projecting from the main block 66, and the lower mounting plate 64 is attached to the lower ends of the side arms 84 and 86. Are integrally connected. Here, the left end of the rotating shaft 60 in FIG. Further, the left side arm 84 is formed in a substantially circular shape as shown in the drawing, and a large number of stopper pin insertion holes 90 are formed on the outer circumference of the left side arm 84 in the thickness direction. Formed at intervals. Any two of these stopper pin insertion holes 90 are provided with stopper pins 9 for regulating the reversal angle α.
2a and 92b are inserted and fixed.

On the other hand, as shown in FIG. 17 and FIG. 23, the main body block 6 is in a state of being adjacent to the inside of the side arm 84.
6, one stop pin 92 is provided on the left side in FIG.
a is selectively abutted, and the first shock absorber 94a for defining the first stop position for achieving the standby state with respect to the upper mounting plate 62 of the lower mounting plate 64 and the stopper pin 92b on the other side selectively. A second shock absorber 94b for defining a second stop position in which the lower mounting plate 64 comes into contact with the upper mounting plate 62 and is in a reversed state is juxtaposed. That is, the above-described reversal angle α is defined by the rotation angle between the first and second stop positions. Note that this first stop position is shown by the lower mounting plate 64 shown by the solid line in FIG.
The stop position of is indicated by the lower mounting plate 64 shown by the chain double-dashed line in FIG.

Here, in the state shown in FIG. 23, the reversal angle α is set to 90 degrees, which is 1 degree to 1 degree by arbitrarily setting the arrangement positions of the pair of stopper pins 92a and 92b. It can be set to an arbitrary angle within a range of 180 degrees. The first and second shock absorbers 94a, 94b are set such that the center-to-center distances thereof are separated by a distance corresponding to the diameter of the circumference on which the stopper pins 92a, 92b are arranged. At the lower end, the corresponding stopper pins 92a, 92b
Is configured to be able to receive the contact state in a buffered state. Also, each shock absorber 94
Reference characters a and 94b are positions at which the corresponding stopper pins 92a and 92 have been buffered and received, and their respective stop positions are defined.

Although not shown, the stopper pin 92
Dummy pins are inserted into all the remaining stopper pin insertion holes 90 to which a and 92b are not attached, and each dummy pin is formed to have a length that does not contact the shock absorbers 94a and 94b. In this way, all the stopper pin insertion holes 90 have a pair of stopper pins 92a,
By inserting 92b and the dummy pin, the inner space of the left side arm 84, that is, the space in which the pair of shock absorbers 94a, 94b are arranged is substantially sealed. ..

A disc-shaped plate 96 for attaching the sensor dog is fixed to the inside of the right side arm 86 in FIG. On the other hand, as shown in FIG.
On the left and right outer surfaces of the main block 66, the plate 9
At the position facing the outer periphery of 6, the sensor mounting groove 6
6a and 66b are formed respectively, and these grooves 66a and 66b
66b includes a second sensor 9 and a third sensor 9 for detecting a return state and a reverse state of the reverse module M2, respectively.
8a and 98b are stored respectively. Further, the lower mounting plate 64 is provided at a predetermined rotation position on the outer periphery of the plate 96 described above.
23 is in the return state (or standby state) as shown by the solid line in FIG. 23, the first detection dog 100a detected by the second sensor 98a and the inversion as shown by the chain double-dashed line in FIG. The second detection dog 10 detected by the third sensor 98b when in the state
0b and 0b are attached and fixed.

Here, the second and third sensors 98
a and 98b are corresponding first and second detection dogs 100.
a and 100b are configured to include proximity sensors that are turned on when they approach each other, and both are connected to the control device described above.
The detection result is output to this. The detection dog may have a built-in magnet for a magnetic sensor, and the motion detection may be performed by the magnetic sensor. That is, this control device switches and sets the first switching valve 80 to the first switching mode, and rotates the drive shaft 60 from the standby state shown in FIG. 23 counterclockwise in the drawing, A second shock absorber 9 corresponding to the second stopper pin 92b.
In a state where the drive control is performed so that the lower mounting plate 64 is brought into contact with 4b, even if a predetermined time has elapsed, if the third sensor 100b does not output the ON signal, the lower mounting plate 64 is moved from the standby state by the desired reversal angle α. It is assumed that an abnormal state is assumed in which it is stopped halfway without rotating, and an alarm operation is executed, and an ON signal is output from the third sensor 100b within a predetermined time, so that the subsequent control procedure is executed. ing.

In addition, the control device switches the first switching valve 80 to the second switching mode and sets the drive shaft 60 from the reverse state to the clockwise direction in the drawing to rotate the first shaft. Even when a predetermined time has elapsed in the state where the drive control is performed so that the stopper pin 92a of the above is brought into contact with the corresponding first shock absorber 94a, the second sensor 9 still remains.
When the ON signal is not output from 8a, the lower mounting plate 64
The alarm operation is executed assuming that is an abnormal state in which it was stopped halfway without returning from the inversion state by the desired inversion angle α,
By outputting an ON signal from the second sensor 98a within a predetermined time, the subsequent control procedure is executed.

Here, at the four corners of the upper mounting plate 62, as shown in FIG. 17, mounting screw holes 62a having a diameter d ₁ are formed in a state of being separated from each other by the above-mentioned fixed pitch D. Further, at the four corners of the lower mounting plate 64, as shown in FIG. 18, mounting through holes 64a are respectively formed in the same state.
In addition, a positioning hole 6 into which a pair of positioning pins commonly formed on the bottom surface of each of the modules M1 to M6 are respectively inserted in the central portions of the two sides of the upper mounting plate 62 that face each other.
2b and a positioning groove 62c are formed. And
The lower mounting plate 64 has a diameter d2 at the center of two opposite sides of the lower mounting plate 64, which are respectively inserted into the positioning holes and the positioning grooves formed in the upper mounting plates of the other modules M2 to M7. , A pair of positioning pins 64b separated by a predetermined distance D2 are integrally attached in a state of protruding downward.

In this way, this inversion module M2
Other modules M2 to M7 are selectively attached to the lower part of the above, and other modules M2 to M7 are attached to the upper part thereof.
Any one of 1 to M6 will be selectively attached.
Needless to say, the reversing module M2 is not limited to the configuration of the above-described embodiment and can be variously modified without departing from the scope of the invention. For example, in the above-described embodiment, a pair of stopper pins 92a and 92b are used to make the first and second lower mounting plates 64.
However, the present invention is not limited to this configuration, and for example, only one stopper pin may be provided. By disposing one stopper pin 92 in this way, the reversal angle α of the lower mounting plate 64 is set to 180 degrees. Further, this inversion module may be configured as an inversion module M2b of another embodiment shown in FIGS. 24 and 25. Inversion module M2 in such an alternative embodiment
b is especially configured to be optimal for use in a clean room.

The structure of the inversion module M2b in another embodiment will be described below, but in the following description,
The same parts as those of the inversion module M2 of the above-described embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Only the points different from the inversion module of the above-described embodiment will be described. That is, in this other embodiment, as shown in FIG.
As shown in FIG. 4 and FIG. 25, the main body block 66 has a pair of bearings 70a and 70b and a pair of shock absorbers 94a and 94b disposed therein, which reach a space where the pair of bearings 70a and 70b and the shock absorbers 94a and 94b are disposed. Bakuyumu Port 102
a and 102b are attached. Further, each stopper pin insertion hole 90 is completely closed by inserting the dummy pin 104.

Here, in this space, all the insertion holes 90 have a pair of stopper pins 92a and 92b and the dummy pin 10.
By being closed by 4, it is formed as a substantially sealed space as already described in the above-mentioned embodiment. As a result, when this space is evacuated through the pair of vacuum ports 102a and 102b, dust generated in the pivoting operation of the pair of bearings 70a and 70b and the first and second stopper pins 92a and 92b are removed. The dust generated in the positioning operation which collides with the corresponding first and second shock absorbers 94a and 94b and is positioned is the reversing module M.
Instead of being discharged to the outside of 2b, dust is collected in a cleaner (not shown) and the surroundings are kept clean. In this way, even if the reversing module M2b according to the other embodiment is used in a clean room, a predetermined cleanliness is maintained and it is optimal for use in this clean room.

[Explanation of Turning Module M3] One embodiment of the turning module M3 for performing the turning operation described above is constructed as shown in FIGS. That is, as shown mainly in FIGS. 26 and 27, the turning module M3 is a pair of upper and lower members mounted rotatably relative to each other around a turning support shaft 110 set along the central axis of the turning module M3. The mounting plates 112 and 114 of FIG. Here, the lower mounting plate 11 is provided below the upper mounting plate 112.
A rotation driving mechanism 116 for driving the 4 to rotate around the central axis of the turning module M3 is integrally attached to the upper mounting plate 112. That is, the rotary drive mechanism 116 includes a main body block 118 integrally formed in the central portion of the lower surface of the upper mounting plate 112 so as to project downward. A through hole 120 is formed in a central portion of the main body block 118 so as to extend vertically along the central axis.

The above-described rotary support shaft 110 vertically penetrates through the through hole 120, and a pair of bearings 122.
It is rotatably supported around the central axis of the turning module M3 via a and 122b. Also, this rotation support shaft 1
The upper surface of the lower mounting plate 114 is fixed to the lower end of the unit 10 so as to rotate integrally. That is, as shown in FIG. 34, a fitting portion 110b having a substantially square cross section is integrally formed at the lower end of the rotary support shaft 110, while the lower mounting plate 114 has a central portion at the center thereof. A square fitting hole 114a is formed so that the fitting portion 110b at the lower end of the rotary support shaft 110 is complementarily fitted. By fitting the lower end of the rotation support shaft 110 into the lower mounting plate 114 in this manner, the lower mounting plate 114 rotates integrally with the rotation of the rotation support shaft 110.

A pinion gear 124 is coaxially attached to the outer periphery of the central portion of the rotary support shaft 110 so as to rotate integrally therewith. On the other hand, the rotary drive mechanism 116 described above is composed of a pneumatically operated cylinder mechanism. That is, the main body block 118 of the rotary drive mechanism 116 extends along a direction orthogonal to the rotation support shaft 110, and is parallel to each other with the rotation support shaft 110 interposed therebetween. The cylinder bodies 126 and 128 are integrally provided as a drive cylinder body and a driven cylinder body.
6, 128 have first and second cylinder chambers 130, 132 extending along a direction orthogonal to the rotation support shaft 110.
Are formed as a drive cylinder chamber and a driven cylinder chamber, respectively.

Here, in FIG. 32 and FIG. 33, the first piston 134 as a drive piston is slidable in the first cylinder chamber 130 arranged on the right side in the drawings while maintaining an airtight state. The second piston 136 is accommodated in the second cylinder chamber 132 arranged on the left side of the drawing.
Is slidably fitted as a driven piston in a non-airtight state. Further, both cylinder chambers 130 and 132 are opened at their central portions so as to communicate with the through hole 120, and both pistons 134 and 136 are provided on both sides of the pinion gear 124 through the respective openings. The racks 138 and 140 meshing with each other are formed as a driving rack and a driven rack, respectively. And the first piston 1
32, one cylinder branch chamber 130a is defined by the portion of the cylinder chamber 130 located below in FIG. 32, and the other cylinder branch chamber is defined by the portion of the cylinder chamber 130 located above this first piston 134 in the figure. 130
b is specified. Compressed air introduction passages 142a, 142b for introducing working compressed air are formed and connected to the first cylinder body 126 at the outer ends of the one and the other cylinder compartments 130a, 130b, respectively. The compressed air introduction passages 142a, 142
b is the first attached to the outer surface of the one cylinder body 126.
And the second air ports 144a and 144b, respectively.

Here, the above-mentioned air pressure source 82 is connected to the above-mentioned first and second air ports 144a and 144b through a second switching valve 146 composed of an electromagnetic solenoid valve described later. .. The second switching valve 146 introduces compressed air into one of the cylinder branch chambers 130a through the first air port 144a in the state where the first switching mode is set, and the second air port 144b is opened. The setting is switched so that air is discharged from the other cylinder branch chamber 130b via the other side, while the second switching mode is set, so that air is discharged from the inside of the one cylinder branch chamber 130a via the first air port 144a. It is configured to be switched and set so as to discharge and introduce the compressed air into the other cylinder compartment 130b through the second air port 144b. As described above, by setting the first switching mode in the second switching valve 146, the rotary support shaft 110 is rotationally driven in the counterclockwise direction in FIG. 27, and the second switching mode is also set. Is set, the rotation is driven along the clockwise direction.

On the other hand, as is apparent from FIG. 30, the lower mounting plate 114 is formed with a plurality of turning amount regulating holes 142 concentrically around the rotation support shaft 110 at 45 degree intervals. Then, the stopper pins 150a and 150b as two rotating amount regulating members are provided in these rotating amount regulating holes 142.
However, as shown in FIG. 36, through the locking screws 151,
It is inserted so that its mounting position can be exchanged. Also,
A pair of stopper bolts 152a and 152b are screwed to the main body block 118 of the upper mounting plate 112 so that the positions thereof can be adjusted forward and backward. here,
The first and second stopper bolts 152a and 152b are
The center-to-center distances are set to be separated from each other by a distance corresponding to the diameter of the circumference on which the stopper pins 150a and 150b are arranged, and the corresponding stopper pins 150a and 150b are received in contact with each other at their tips. It is installed so that Further, the respective stopper bolts 152a and 152b are connected to the corresponding stopper pins 150.
The turning stop positions are defined at the positions where a and 150b contact each other.

As shown in FIG. 32, shock absorbers 154a and 154b are attached to both ends of the second cylinder chamber 132 located on the left side of the drawing. That is, as described above, the second switching mode is set in the second switching valve 146, so that the lower mounting plate 114 moves clockwise relative to the upper mounting plate 112 in FIG. 27 (that is, in FIGS. 30 and 30). 35, a second rack 140 having a second rack 140 that meshes with the pinion gear 124 of the rotary support shaft 110 when driven to rotate in the counterclockwise direction.
The piston 136 of is synchronized with the first piston 134 and moves in the opposite direction. Then, immediately before the first stopper pin 150a comes into contact with the tip of the corresponding first stopper bolt 152a, as shown in FIG. 32, the upper end of the second piston 136 located on the left side in the figure corresponds to First shock absorber 154a is contacted with the first shock absorber 154a, and the contact state is buffered by the first shock absorber 154a.
It abuts on the tip of 52a, and the turning stop position thereof is accurately defined. On the other hand, the second switching valve 14
When the lower mounting plate 114 is driven to rotate counterclockwise in FIG. 27 (that is, clockwise in FIGS. 30 and 35) with respect to the upper mounting plate 112 by setting the first switching mode in FIG. Just before the second stopper pin 150b comes into contact with the tip of the corresponding second stopper bolt 152b, the lower end of the second piston 136 in FIG. 32 comes into contact with the corresponding second shock absorber 154b. After the contact state is buffered, the second stopper pins 150b come into contact with the tips of the corresponding second stopper bolts 152b, and the turning stop position thereof is accurately defined.

Here, as shown in FIG. 32, at the end of the second piston 136 which comes into contact with the first shock absorber 154a, in order to reduce the impact and the contact sound at the time of contact with the first shock absorber 154a, A contact pin 156 having a rubber contact piece 156a attached to its head is attached. Meanwhile, the second
Second shock absorber 154b of the piston 136 of the
In order to reduce the impact and the contact noise at the time of contact with the end, the contact part 158a made of rubber is attached to the head.
The contact pin 158 to which is attached is attached.

Further, as shown in FIG. 32, on the side surface of the first piston 134 located on the right side in the figure toward the outside, a dog for confirming the turning state is positioned at both ends along the axial direction. As the first and second magnets 160a, 16
0b is attached. On the other hand, the main block 118
On the side surface on the right side of FIG.
And fifth sensors 162, 164 are attached. Here, in the fourth sensor 162, the lower mounting plate 114 is pivotally driven in the clockwise direction in FIG. 27, and the first stopper bolts 152 corresponding to the first stopper pins 150a.
The contact position is defined so that the first magnet 160a is turned on while the turning stop position is accurately defined by contacting a, and the non-contact type magnetic sensor is provided. ing. That is, this fourth sensor 1
Reference numeral 62 is adapted to detect that the lower mounting plate 114 is in a standby state in which it is vertically aligned with the upper mounting plate 112. On the other hand, in the fifth sensor 164, the lower mounting plate 114 is driven to rotate counterclockwise in FIG. 27, and the second stopper bolt 150 corresponding to the second stopper pin 150b is moved.
The second magnet 160b comes into contact with the 2b, and the turning stop position thereof is accurately defined, so that the second magnet 160b is turned on so that the arrangement position thereof is defined and the non-contact type magnetic sensor is used. There is. That is, this fifth sensor 1
The reference numeral 64 is adapted to detect that the lower mounting plate 114 is in a swivel position in which the lower mounting plate 114 swivels about the central axis line CL by a predetermined angle θ.

Here, the fourth and fifth sensors 16
The reference numerals 2 and 164 are connected to the above-described control device and output the detection result. That is, this control device switches the setting of the above-mentioned second switching valve 146 to the second switching mode to set the rotary support shaft 110 to the position shown in FIG.
After a predetermined time elapses in a drive control state in which the second stopper pin 150b is brought into contact with the corresponding second stopper bolt 152b by rotating counterclockwise in the drawing from the first turning stop position shown in FIG. However, when the ON signal is not output from the fifth sensor 164, the lower mounting plate 1
Assuming that 14 is in an abnormal state in which it has stopped halfway without turning the desired turning angle θ from the first turning stop position, an alarm operation is executed, and an ON signal is output from the fifth sensor 164 within a predetermined time. By being output, the subsequent control procedure is executed. Further, this control device switches and sets the above-mentioned second switching valve 146 to the first switching mode to rotate the rotation support shaft 110 from the second turning stop position in the clockwise direction in the figure. , When the ON signal is not output from the fourth sensor 162 even after a lapse of a predetermined time in a state where the drive control is performed so that the first stopper pin 150a is brought into contact with the corresponding first stopper bolt 152a, If the mounting plate 114 does not return from the second turning stop position by the desired turning angle θ and is in an abnormal state in which it is stopped halfway, an alarm operation is executed, and an ON signal is output from the fourth sensor 162 within a predetermined time. Is output, the subsequent control procedure is executed.

Incidentally, as shown in FIGS. 26 and 33, the through hole 120 opened in the upper mounting plate 112 is covered with a lid member 166. It should be noted that this lid member 166 has a structure shown in FIG.
As shown in FIG. 7, a screw 168 for applying a pressure to the bearing 122a is attached, so that the outer race of the bearing 122a is pressed. In this way, the spacer adjustment process is reduced,
The turning module M3 is designed to be thin and low in cost.

As described above, since the swirl module M3 is configured, as shown in FIG. 32, compressed air is introduced into the upper cylinder compartment 130b in the drawing, and the first piston 134 is enabled in the drawing. In the biased state, the second piston 136 connected via the pinion gear 124 is biased upward in the drawing, and as shown in the drawing, the first contact pin 156 is attached to the corresponding first shock absorber 154a. First received in buffered condition
When the stopper pins 150a of the above contact the corresponding first stopper bolts 152a, the rotation amount thereof is restricted, that is, the stopper pin 150a is stopped at the first turning stop position.

On the other hand, in the turning module M3, when the second switching valve 146 is switched from the state shown in FIG. 32 to set the first switching mode, the cylinder compartment 130a at the lower side in the figure is compressed. Since the air is introduced and the first piston 134 is pushed upward in the figure, the pinion gear 12 that meshes with the first piston 134 is pushed up.
4 rotates in the counterclockwise direction, and accordingly, the lower mounting plate 114, which rotates integrally with this, also rotates in the counterclockwise direction. Then, while the second contact pins 158 are received in a state of being buffered by the corresponding second shock absorbers 154b, the second stopper pins 150b contact the corresponding second stopper bolts 152b,
The turning amount is restricted, that is, the turning amount is stopped at the second turning stop position.

Here, at the four corners of the upper mounting plate 112,
In the state where they are separated from each other by the fixed pitch D described above,
The mounting screw hole 112a having the diameter d ₁ is also used for the lower mounting plate 1
In four corners of 14, in the same state, mounting through holes 114b
Are formed respectively. In addition, the modules M1,
Positioning holes 112b and positioning grooves 112c into which a pair of commonly formed positioning pins are respectively inserted are formed on the bottom surfaces of M2, M4 to M6. Further, the lower surface of the lower mounting plate 114 has a diameter d2 at a central portion of two opposite sides, which are respectively inserted into the positioning holes and the positioning grooves formed in the other modules M2, M4 to M7. ,
A pair of positioning pins 114c separated by a predetermined distance D2
Are integrally attached in a state of protruding downward.

In this way, this turning module M3
One of the other modules M2, M4 to M7 is selectively attached to the lower part of the above, and one of the other modules M1, M2, M4 to M6 is selectively attached to the upper part thereof. become. The turning module M3 is not limited to the configuration of the above-described embodiment and can be variously modified without departing from the scope of the present invention. For example, in the above-described embodiment, a pair of stopper pins 150a and 150b are used to form the lower mounting plate 1
Although it has been described that the first and second turning stop positions of 14 are defined respectively, the present invention is not limited to this configuration, and for example, only one stopper pin may be provided.
By disposing one stopper pin 150 in this manner, the turning angle θ of the lower mounting plate 114 is set to 180 degrees. Further, this turning module may be configured as a turning module M3b of another embodiment shown in FIGS. 38 and 39. The turning module M3b in such another embodiment is configured to be most suitable for use in a clean room.

The structure of the turning module M3b in another embodiment will be described below, but in the following description,
The same parts as those of the turning module M3 of the above-described embodiment are designated by the same reference numerals, the description thereof will be omitted, and only the points different from the turning module of the above-described embodiment will be described. That is, in this other embodiment, as shown in FIG.
8 and FIG. 39, one side of the main body block 118 has a pair of bearings 122 disposed therein.
A vacuum port 170 is attached to a position where it reaches the through hole 120 in which a and 122b are arranged.

Here, this through hole 120 is formed as a substantially sealed space by being closed by the above-mentioned lid member 166. As a result, this through hole 12
By vacuuming 0 through the vacuum port 170, dust generated in the pivotal support operation of the pair of bearings 122a and 122b is generated by the turning module M3.
Instead of being discharged to the outside of b, dust is collected in a cleaner (not shown) and the surroundings are kept clean. In addition, dust from the stopper will also be generated through the through hole 170b.
70 is sucked. In this way, even if the turning module M3b according to the other embodiment is used in a clean room, a predetermined cleanliness is maintained and it is optimal for use in this clean room.

[Explanation of the cushion module M4] The cushion module M4 for performing the cushion operation described above is a central axis C0 of the cushion module M4, as shown as an embodiment in FIGS. A pair of upper and lower mounting plates 180 and 182 are mounted parallel to each other so as to be movable relative to each other. Here, on the lower mounting plate 182, the lower mounting plate 182 is moved along the central axis C0 at positions symmetrical with respect to each other with the central axis line therebetween, that is, with respect to the upper mounting plate 180. A pair of guide pins 1 for guiding them so that they approach and separate
84a and 184b are fixed in an upright state.

Here, as shown in FIG. 41, the center axis C1 of the first guide pin 184a is located to the left of the center axis C0 of the cushion module M4 in the front view of the cushion module M4. At the distance L1 and also in FIG.
As shown in FIG. 4, in the state where the cushion module M4 is viewed from the right side, the cushion module M4 is set to a position deviated from the central axis C0 of the cushion module M4 to the right in the figure by a distance L2. As described above, both guide pins 18
Since 4a and 184b have a point-symmetrical relationship, the central axis C2 of the second guide pin 184b is not shown,
In the rear view of the cushion module M4, the cushion module M4 is viewed from the left side by a distance L1 to the left of the center axis C0 of the cushion module M4 in the figure, and not shown. , A distance L2 to the left of the figure from the central axis of the cushion module M4,
Each is set in a biased position.

On the other hand, a mounting block 186 is integrally formed on the lower surface of the central portion of the upper mounting plate 180.
Then, with the upper mounting plate 180 and the mounting block 186 penetrating in the thickness direction, these guide pins 184 a, 1
The first and second through holes 18 are provided at the positions facing 84b, respectively.
8a and 188b are formed. Here, the upper portion of each guide pin 184a, 184b has a corresponding through hole 188.
slide bearings 190a mounted on a, 188b,
190b slidably penetrates through each of them. In addition, the lower mounting plate 182 moves along with the cushion operation, and the upper mounting plate 180
Each guide pin 1
The upper ends of 84a and 184b have corresponding through holes 188a and 1
Each length is set so that it does not project outward from the upper opening of 88b but is housed inside each.

Further, on the lower mounting plate 182, a pair of stopper pins 192a, 192a and 192b is fixed in an upright state. Here, the central axis C3 of the first stopper pin 192a is, as shown in FIG.
In the front view of FIG. 4, a distance L3 to the right in the figure from the central axis C0 of the cushion module M4, and FIG.
As shown in, the central axis C of the cushion module M4 in the right side view of the cushion module M4.
The distances L4 are set to the left of the figure by a distance L4, respectively. As described above, both stopper pins 19
Since 2a and 192b have a point-symmetrical relationship, the central axis C4 of the second stopper pin 192b is not shown in the drawing, but in the rear view of the cushion module M4, it is more than the central axis C0 of the cushion module M4. A distance L3 to the right in the figure, or a distance L to the right in the figure from the central axis C0 of the cushion module M4 in the left side view of the cushion module M4 (not shown).
Only 4 are set in the respective biased positions.

On the other hand, in the upper mounting plate 180, these stopper pins 192a, 192b are penetrated in the thickness direction.
The third and fourth through holes 194a, 194a,
194b is formed. Further, the thickness of the portion of the above-mentioned mounting block 186 through which these stopper pins 192a, 192b are inserted is set to be thin, so that a predetermined space is defined between the lower surface of the upper mounting plate 180 and the thin wall. Portions 186a and 186b are formed. The thin stoppers 186a, 186b also penetrate the corresponding stopper pins 192a, 192b in a state of penetrating in the respective thickness directions.
The second and third through holes 196 are provided at positions respectively facing 2b.
a, 196b are formed. Here, the upper ends of these stopper pins 192a and 192b respectively penetrate the corresponding fourth and fifth through holes 196a and 196b to project upward, and the upper ends of the stopper pins 192a and 192b respectively correspond to the corresponding fourth and fifth holes. Heads 198a and 198b formed to have a diameter larger than the diameters of the through holes 196a and 196b are integrally attached.

In this way, in the cushion module M4, the cushioning material 20 is provided on the upper surfaces of the thin portions 186a, 186b to which the bottoms of the heads 198a, 198b correspond.
The lower mounting plate 182 is suspended from the upper mounting plate 180 by abutting on each other through 0a and 200b. Here, a locking member 202 formed in a substantially columnar shape is fixed on the central portion of the lower mounting plate 182, and the upper mounting plate 180.
A central through-hole 204 is formed in the central portion of the so as to penetrate the same in the thickness direction. And both mounting plates 18
Between 0 and 182, along the central axis of this,
The coil spring 206 is interposed. The coil spring 206 has an urging force that urges the two mounting plates 180 and 182 in a direction in which they are separated from each other. More specifically, the lower end of the coil spring 206 is locked to the outer periphery of the locking member 202 described above, and the upper end of the coil spring 206 is attached via a C ring 208 so as to close the central through hole 204. It is locked to the lower surface of the member 210.

As shown in detail in FIG. 46, the C ring 208 is formed in one circumferential groove of a plurality of circumferential grooves 212 formed along the axial direction on the inner circumferential surface of the central through hole 204. By fitting, the lid member 210 is attached to the lower attachment plate 182 in a state of being set at an arbitrary height position. As described above, by arbitrarily setting the height position of the lid member 210 with respect to the lower mounting plate 182, the set length of the coil spring 206 can be adjusted and the elastic biasing force exerted by the set length can be adjusted. is there.

On the other hand, a magnet 214 as a non-detection portion is attached to the outer periphery of the upper end of the locking member 202 described above. On the outer peripheral surface of the above-mentioned central through hole 204, on the side where the magnet 214 is disposed, the magnet 214 comes close to the upper mounting plate 180 of the lower mounting plate 182 as the magnet 214 approaches. 6th turned on
Sensor 216 is provided. Here, in this embodiment, the sixth sensor 216 is configured as a magnetic sensor as a non-contact type sensor. still,
The sixth sensor 216 is attached to a position which is turned on when the lower mounting plate 182 approaches the uppermost mounting plate 180 to the closest position allowed. At this closest position, the pair of guide pins 184a, 184a
84b and a pair of stopper pins 192a, 192b respectively correspond to the through holes 188 formed in the upper mounting plate 180.
a, 188b; 194a, 194b, the respective lengths are set so that they are not projected upward but are housed in the respective a.

The sixth sensor 216 is connected to the above-mentioned control device. Here, the control device is the sixth
Since the ON signal is output from the sensor 216 of, the cushion function exerted in the cushion module M4 exceeds the allowable amount in accordance with the operation of the shift module M6, which will be described later, and the cushion function is further exerted. It is configured to issue a predetermined alarm operation when it is determined that it is impossible. In the cushion module M4 configured as described above, in the non-cushion mode state, the lower mounting plate 182 is urged by the coil spring 206 so that the heads 19 of the stopper pins 192a and 192b can be prevented.
8a and 198b are corresponding cushioning materials 200a and 20 respectively.
It will be separated from the upper mounting plate 180 until it comes into contact with the upper surfaces of the thin portions 186a and 186b via 0b.

On the other hand, when the gear G gripped by the clamp module M7 described later is inserted into the hole H2 shown in FIG. 6, the lower surface of the second shaft portion G3 of the gear G contacts the bottom surface of the hole H2. In this case, the cushion operation is passively performed in the cushion module M4. That is, when the lower surface of the second shaft portion G3 of the gear G is in contact with the bottom surface of the hole H2 and the shift operation in the shift module M6, that is, the inserting operation of the gear G is continued, the clamp is performed. Lower mounting plate 18 connected to module M7
2 is a pair of guide pins 184 so as to approach the upper mounting plate 180 against the urging force of the coil spring 206.
It will move along the central axis C0 via a and 184b.

In this way, if the cushion module M4 is incorporated in the hand mechanism 10, for example,
When the gear G is inserted, the shock along the central axis C0 due to the interference between the gear G and the hole H2 is absorbed, and the built-in modules such as the clamp module M7 and the robot 12 are excessively large. The effective force is effectively prevented.

Here, at the four corners of the upper mounting plate 180,
In the state where they are separated from each other by the fixed pitch D described above,
The mounting screw hole 180a having the diameter d ₁ is also used for the lower mounting plate 1
At the four corners of 82, in the same state, through holes 182a for mounting are attached.
Are formed respectively. In addition, each of the modules M1 to
A positioning hole 180b and a positioning groove 180c into which a pair of commonly formed positioning pins are respectively inserted are formed on the bottom surfaces of M3, M5, and M6. And the lower mounting plate 1
The lower surface of 82 has a diameter d ₂ at the center of two opposite sides, and has a diameter d _{2 at} which it is formed in the other modules M2, M3, M5 to M7 and inserted into the positioning holes and the positioning grooves, respectively, at a predetermined distance. A pair of positioning pins 18 separated by D ₂
2b is integrally attached in a state of protruding downward.

In this way, the other modules M2, M3, M5 to the lower part of the cushion module M4 are
Any one of M7 is selectively attached, and any of the other modules M1 to M3, M5, M6 is selectively attached to the upper part of the M7. It is needless to say that the cushion module M4 is not limited to the configuration of the above-described embodiment and can be variously modified without departing from the scope of the invention. For example, this cushion module may be constructed as a cushion module M4b of another embodiment shown in FIGS. 47 to 52. The cushion module Mb in such another embodiment is constructed to be optimal for setting a long cushion stroke.

The configuration of the cushion module Mb4 in another embodiment will be described below. In the following description, the same parts as those of the cushion module M of the above-described embodiment are designated by the same reference numerals. However, the description thereof will be omitted, and only the points different from the above-described cushion module of one embodiment will be described. That is, in this other embodiment, as shown mainly in FIGS. 50 to 52, the cushion module M4b of the other embodiment has a main structure in addition to the upper mounting plate 180 and the lower mounting plate 182. As an element, the intermediate member 218 arranged between the two is provided.

First, the upper mounting plate 180 is integrally provided with a sleeve 220 extending downward along the central axis C0 at the center of its lower surface. The inner surface of this sleeve 220 is
The thread groove is cut, and the thread member 222 is provided in this thread groove.
Is screwed along the central axis C0 so as to move back and forth. still,
An upper end of a coil spring 206 that biases the lower mounting plate 182 in a direction separating from the upper mounting plate 180 is locked to the lower surface of the screw member 222. In this way, like the cushion module M4 of the above-described embodiment, by rotating this screw member 222 and driving it back and forth along the central axis C0, the elastic biasing force of the coil spring 206 is increased. It will be possible to adjust.

On the other hand, the intermediate member 218 described above includes a main body portion 224 which is a flat plate formed with a through hole 224a into which the sleeve 220 is loosely fitted and which penetrates through the central portion in the thickness direction, and the main body portion 224. Of the first and second sleeves 226, which are arranged so as to be opposed to each other with the center axis of each of them being located on the same diameter, and have respective center axes parallel to the center axis of the main body portion 224.
a, 226b and the central axis of the main body portion 224, the first and second sleeves 226a, 226b are arranged on the circumference of the circumference and are arranged at substantially equal intervals. Third and fourth sleeves 2 provided and each having a central axis parallel to the central axis of the body portion 224.
26c and 226d. Where these first
Through the fourth sleeves 226a-226d,
It is attached so as to vertically pass through 24.

As is apparent from FIGS. 48 and 50, the lower surface of the upper mounting plate 180 extends toward the first and second sleeves 226a and 226b, respectively, and the lower ends correspond to the corresponding sleeves 226a and 226b. First inserted into 226b respectively
Also, the second guide pins 228a and 228b are fixed in a lowered state. The lower ends of the first and second guide pins 228a and 228b are slidably supported along the axial direction by slide bearings 230a and 230b attached to the inner circumferences of the first and second sleeves 226a and 226b, respectively. Has been done. On the other hand, the lower mounting plate 182
On the upper surface of the third and fourth sleeves 226c, 226
sleeves 226 extending toward the respective d and having corresponding upper ends
The third and fourth guide pins 228c and 228d, which are respectively inserted into c and 226d, are fixed in an upright state. These third and fourth guide pins 228a, 228
The upper end of b has the third and fourth sleeves 226c, 226.
Slide bearings 23 attached to the inner circumference of d
It is slidably supported along the axial direction by 0c and 230d. Thus, in this embodiment, the four guide pins 228a-22 are arranged at equal intervals.
The lower mounting plate 182 is supported by the upper mounting plate 180 via 8d so that the lower mounting plate 182 can move toward and away from the upper mounting plate 180.

On the other hand, as shown in FIGS. 48 and 51, in this embodiment, the first stopper pin 192a has its upper end fixed to the lower surface of the upper mounting plate 180 and its lower end to the main body of the intermediate member 218. It is attached to the upper mounting plate 180 so as to be taken out below the main body portion 224 through a through hole 232a formed so as to penetrate the portion 224 in the thickness direction. On the other hand, the second stopper pin 192b
Is fixed to the upper surface of the mounting plate 182 having the lower end thereof, and the upper end of the main body portion 224 is provided through a through hole 232b formed so that the upper end thereof penetrates the main body portion 224 of the intermediate member 218 in the thickness direction. Lower mounting plate 1 so that
It is attached to 82.

At the lower end of the first stopper pin 192a, a head 234a having a diameter larger than the diameter of the through hole 232a through which the first stopper pin 192a is inserted is integrally attached.
The upper surface of 34a has a main body portion 224 through a cushioning material 236a.
The intermediate member 218 is suspended from the upper mounting plate 180 by abutting the lower surface of the intermediate member 218. Further, the upper end of the second stopper pin 192b has a through hole 232b through which the pin is inserted.
A head portion 234a having a diameter larger than the diameter of the head portion 234b is integrally attached, and the lower surface of the head portion 234b abuts on the upper surface of the main body portion 224 via the cushioning material 236b.
82 is suspended from the intermediate member 218. Thus, in this embodiment, the lower mounting plate 182 is suspended by the upper mounting plate 180 via the intermediate member 218.

In the cushion module M4b of another embodiment constructed as described above, the cushion stroke S is the movable distance S1 along the axial direction between the upper mounting plate 180 and the intermediate member 218. It is defined as the total value of the movable distance S2 along the axial direction between the lower mounting plate 182 and the intermediate member 218, and in this way, it is made longer than the cushion stroke in the above-described embodiment. In addition to achieving a large stroke in this embodiment, at the same time, in this embodiment, four guide pins 228a to 228d are used to hold the load attached to the bottom of the module. The rigidity is superior to that of the above-described embodiment.

As shown in FIG. 52, the magnet 214
Is attached to a mounting piece 182c that integrally projects upward from the lower mounting plate 182. Here, the attachment piece 182c is, as shown in the drawing, the intermediate member 21.
It is set so that it is located directly outside 8. The sixth sensor 216, which is turned on by the magnet 214, is attached to a mounting piece 180d that integrally projects downward from the upper mounting plate 180. Here, this attachment piece 180d is the attachment piece 1 described above.
It is set to be located directly outside the 82c. In this way, by mounting the magnet 214 and the sixth sensor 216 to the mounting pieces 182c and 180d integrally formed on the lower mounting plate 182 and the upper mounting plate 180, respectively, the same detection result as in the above-described embodiment is obtained. Will be able to obtain. In the above-described embodiments, the C-ring 208 and the screw member 222 as means for adjusting the elastic biasing force of the coil spring 206 are both attached to the upper attachment plate 180. Is not limited to this, and may be configured to be attached to the lower attachment plate 182. The point is that the coil spring 206 may have any configuration that allows the set length to be adjusted.

[Description of Compliance Module M5] The compliance module M5 for performing the above-described compliance operation is configured as shown in FIG. 53 to FIG. 62 as one embodiment. That is, the compliance module M5 includes a pair of upper and lower mounting plates 240 and 242, which are relatively movable along a direction orthogonal to the central axis of the compliance module M5, which are parallel to each other with a predetermined interval. There is. Here, these mounting plates 24
As shown in FIGS. 57 and 60, a compliance mechanism 244 is interposed between 0 and 242, and the hand mechanism 10 is moved and driven by the compliance mechanism 244 based on the operation of the robot 12. Accordingly, a lock mechanism 246 is provided in order to lock the upper and lower mounting plates 240 and 242 and fix the aligned state with each other to shorten the operation standby time immediately after the movement of the hand mechanism 10 is stopped. There is.

Here, the compliance mechanism 244 is
Mainly, as shown in FIGS. 57 to 60, the first and second alignment members 250, which are both formed into a substantially disk shape and are coaxially arranged with each other, and in which a bearing 248 is interposed therebetween, 252 is provided. The first aligning member 250 is provided with a bolt 2 at the center of the upper surface of the lower mounting plate 242.
Central portion 250 secured via 54 (shown in FIG. 57)
a, a sleeve portion 250b standing upright from the outer circumference of the central portion 250a, and an outer flange portion 250c extending outward from the upper end edge of the sleeve portion 250b. Here, the upper surface of the outer flange portion 250c is located directly below the lower surface outer peripheral portion of the upper mounting plate 240 and is opposed thereto. Further, as shown in FIG. 60, in order to fix an upper mounting plate 240 and a second alignment member 252, which will be described later, to a part of the outer flange portion 250c, a lower surface of the upper mounting plate 240 is lowered. A through hole 250d, through which the attachment boss 240a that integrally projects toward, is inserted, is formed in a state of penetrating in the thickness direction.

On the other hand, as shown in FIG. 60, the second aligning member 252 has a central through hole 252a, through which the central portion 250a of the first aligning member 250 is inserted, in the central portion thereof in the thickness direction. The outer peripheral portion 252b is formed so as to be positioned immediately below the outer flange portion 250c of the first alignment member 250. Then, the second matching member 252
The outer peripheral portion 252b and the mounting boss portion 240a which penetrates through the above-described through hole 250d and is taken out to the lower side of the outer flange portion 250c are integrally mounted to each other via bolts 256. In other words, this bolt 256
The second alignment member 252 is fixed to the upper mounting plate 240 via the.

Further, the first and second matching members 250, 2
The bearing 248 interposed between the two 52 is a bearing race 248 made of a substantially disc-shaped thin plate located between the two.
a, a plurality of through holes 248b formed on the same circumference on the outer circumference of the bearing race 248a, and each through hole 2
And a bearing ball 248c housed in 48b. Since the bearing 248 is configured as described above, the first and second alignment members 250 and 252 are formed.
Are supported in a mutually movable state in a plane (hereinafter referred to as a cross section) orthogonal to the central axis.
That is, these first and second alignment members 250, 252
Are fixed to the lower mounting plate 242 and the upper mounting plate 240, respectively.
In the plane orthogonal to the central axis, the central axes can be displaced from each other.

Here, the compliance mechanism 244
In order to elastically hold the state in which the central axes of the upper and lower mounting plates 240 and 242 are aligned with each other, the biasing mechanism 2
It is equipped with 58. That is, this compliance mechanism 2
44, by the biasing mechanism 258, in the normal state, if anything such as an external force to the lower attaching plate 242 is not acting, the center axis C ₁ of the upper mounting plate 240, the central axis C ₂ of the lower mounting plate 242 Are elastically maintained in a state of being aligned with each other along the central axis of the compliance module M5, and when an external force within the cross section acts on the lower mounting plate 242, a predetermined value is determined in accordance with the external force. Within the range, it is possible to allow a soft deviation in this cross section.

Before explaining the biasing mechanism 258, the first and second aligning members 25 related to the biasing mechanism 258 are described.
A specific shape of 0,252 will be described first. That is, the first and second alignment members 250 and 252 are formed in the same shape so as to completely match each other in a state where they are vertically stacked. Then, each matching member 250, 252
On the outer peripheral surface of the concave portions 260a to 260d, which are formed in a substantially V shape in a plan view, at four places set at equal intervals to each other;
262a to 262d are formed respectively. Circumferential grooves 264 and 266 are formed on the outer peripheral surface of each of the matching members 250 and 252 along the respective circumferential direction over the entire circumference.

The biasing mechanism 258 for biasing the thus formed first and second aligning members 250 and 252 in a state of being aligned with each other includes a pair of upper and lower recesses 260a and 262.
a; 260b, 262b; 260c, 262c; 260
A total of four support pins 268 provided for each d and 262d
And a ring-shaped first biasing member 270 that elastically collectively biases the upper ends of the support pins 268 to the outer periphery of the first alignment member 250, and the lower ends of the support pins 268 are second aligned. A ring-shaped second biasing member 272 that elastically collectively biases the member 252 is provided. Here, the diameter of each of the support pins 268 is the same as the diameter of each of the upper and lower recesses 2 to which the support pin 268 corresponds.
60a, 262a; 260b, 262b; 260c, 2
62c; 260d and 262d are housed in such a manner that their outer portions in the radial direction are set to project outward in the radial direction from the outer peripheral surfaces of the first and second alignment members 250 and 252. There is.

In detail, each support pin 268 has annular cut grooves 268a and 268b formed at the upper end and the lower end, respectively. Then, the pair of upper and lower recesses 260a, 262a; 260b, 26 to which these support pins 268 correspond.
2b; 260c, 262c; 260d, 262d accommodated in the upper kerf 268a of the first alignment member 25.
0 so as to communicate with the circumferential groove 264 formed on the outer circumferential surface along the circumferential direction, and the lower cutting groove 268b and the circumferential groove 266 formed on the outer circumferential surface of the second alignment member 252 in the circumferential direction. They are set so that they can communicate with each other. In this stored state, the four support pins 268 are inserted into the circumferential groove 264 of the first alignment member 250 and the first biasing member 27 is inserted.
The second urging member 2 is fitted in the respective upper cutting grooves 268a and fitted in the circumferential groove 266 of the second aligning member 252.
72 is fitted into each lower kerf 268b,
Correspondingly, upper and lower pairs of recesses 260a, 262a; 2
60b, 262b; 260c, 262c; 260d, 2
The outer peripheral surface of 62d elastically abuts. In this way, the first and second aligning members 250 and 252 are elastically held in a state where their central axes are aligned with each other. In this embodiment, the biasing member 27
0 and 272 are formed by finely wound ring-shaped coil springs. Further, the locking mechanism 246 described above prevents the lower mounting plate 242 from being laterally biased with respect to the upper mounting plate 240 due to its inertia when the z-axis arm 14 of the robot 12 moves laterally at high speed. It is provided to do so.

Here, this locking mechanism 246 is provided on the lower surface of the above-mentioned upper mounting plate 240, as shown in FIG. 58, so as to extend between each pair of left and right support pins 268. As shown in FIG. 57, the body 274 is integrally provided so as to have a central axis line parallel to the central axis line of the compliance module M5. Each cylinder body 274
Has a cylinder chamber 27 extending along its own central axis.
6 is formed to be open at the lower end. A piston 278 functioning as a lock pin is accommodated in the cylinder chamber 276 so as to be slidable along the axial direction.
A conical lock hole 278a for receiving a locking ball 280, which will be described later, is formed on the lower end surface of the piston 278.

On the other hand, as shown in FIG. 57, each cylinder body 274 is formed on the outer peripheral surfaces of the first and second alignment members 250 and 252 so as to avoid the recesses 282 and 28.
The lower end surface of the lower mounting plate 242 extends close to the upper surface of the lower mounting plate 242 and faces the lower mounting plate 242. On the other hand, on the upper surface of the lower mounting plate 242 facing the lower end surface of each cylinder body 274, a recess 242a for accommodating and fixing the locking ball 280 described above is formed. Here, the ball 280 is formed into the corresponding concave portion 2 by the driving process.
It is stored in 42 and is fixed.

A communication passage 286 communicating with the upper portion of each cylinder chamber 276 is formed in the upper mounting plate 240 described above.
An air port 288 attached to the outer surface of 40 is commonly communicated. The air port 288 is connected to the pneumatic pressure source 82 described above via a first opening / closing valve 290 described later. Here, the first opening / closing valve 290 is configured to be opened / closed by the above-described control device, and this control device is operated while the robot 12 is driving the z-axis arm 14 for movement. Only the first on-off valve 2
90 is set to the connection mode, the air pressure source 82 is connected to each cylinder chamber 276 through the air port 288, and the control operation is performed so that compressed air is introduced into each cylinder chamber 276 through the air port 288. Further, in other states, the first on-off valve 290 is set to the open mode to open each cylinder chamber 276 to the atmosphere through the air port 288, and the compressed air is released from each cylinder chamber 276 to the atmosphere. The control operation is performed so that it is discharged to. As a result, the first on-off valve 2
When 90 is connected and driven, each piston 278 is driven to project from the corresponding cylinder chamber 276, and the lower mounting plate 242 is inserted into the lock hole 278a formed in the lower end surface of the piston 278.
The ball 280 fixed to the base plate 280 is brought into a lock position where the ball 280 is fitted, and as a result, the upper mounting plate 240 and the lower mounting plate 242 are locked with respect to each other in the lateral direction and integrally move laterally.

Here, as shown in FIGS. 57 and 60, between the central portion of the lower surface of the upper mounting plate 240 and the central portion of the upper surface of the first alignment member 250 fixed to the lower mounting plate 242, A coil spring 292 is provided, and the biasing force of the coil spring 292 biases the coil springs 292 in a direction in which they are separated from each other along the axial direction. As a result, the outer flange portion 250c of the first aligning member 250 elastically abuts on the outer peripheral portion 252b of the second aligning member 252, and their extending surfaces (that is, the surfaces orthogonal to the central axis). When they are deviated so as to form a predetermined angle, the angle deviation is allowed, and when the force that causes this angle deviation is removed, the two will return to a close contact state. . That is, by providing the coil spring 292, the compliance module M5 can absorb the deviation in the plane orthogonal to the vertical axis and also the angular deviation between the planes orthogonal to the vertical axis. It will be a matter. In addition, this compliance module M5
Is a state where it has fallen from the outer peripheral edge of the upper mounting plate 240,
A cover 294 on the sleeve is provided to substantially close the compliance mechanism 244 and locking mechanism 246 disposed therein.

The centering operation of the compliance module M5 configured as described above will be described below. As will be apparent from the above description, this centering operation can be executed only when the first opening / closing valve 290 of the lock mechanism 246 is driven to be closed and the locked state is released. .. First, as shown in FIG. 6, one gear G held by the clamp module M7.
When the third shaft part G3 of is fitted into the hole H2,
The position information of the hole H2 on the xy 'plane and the three-dimensional position of the z-axis arm 14 of the robot 12, that is, the position information of the gear G to be fitted are input in advance. The movement control 14 is performed by the control operation of the control device based on these position information.

By the movement control of the z-axis arm 14, the first opening / closing valve 290 is opened and the communication passage is opened in the state of moving along the horizontal direction, that is, in the xy 'plane. 286 through the respective cylinder chambers 276
Compressed air will be supplied inside. In this way, each piston 278 is pushed downward and biased to the lock position. In this way, the locking mechanism 246 is activated to enter the locking operation state, each piston 278 is brought to the locking position, and is fitted into the lock hole 278a, so that the pair of upper and lower mounting plates 240 and 242 are separated from each other. It is locked in the lateral direction and moves laterally as a unit.

On the other hand, by controlling the movement of the z-axis arm 14, it is possible to move along the vertical direction, that is, x-z 'or y'-.
In the state of moving in the z'plane, the first opening / closing valve is driven to be closed, and compressed air is not supplied into each cylinder chamber 276. In this way, each piston 27
8 is released from the lock position. In this way, the locking mechanism 246 is unlocked and the upper and lower mounting plates 240,
242 will be brought into relative freedom of movement relative to each other in the lateral direction.

If the position information is accurate, the z-axis arm 14 is moved and driven according to the control contents of the control mechanism, and the hole H2 is positioned according to the set value, this The gear G is moved to a position immediately above the hole H2 based on the above-described movement control operation, and then moved vertically downward, so that the third shaft portion G3 of the gear G can be properly moved into the hole H2. Will be inserted. However, the positioning of the hole H2 is not accurate, the position of the z-axis arm 14 is slightly deviated from the set value in the xy 'plane, and the position of the z-axis arm 14 is controlled by an error in the drive system, such as a backlash in the gear. May cause a slight deviation from the specified position.

When such a deviation occurs, z
The lower end edge of the third shaft portion G3 of the gear G, which has been lowered vertically downward due to the lowering of the shaft arm 14, comes into contact with the tapered surface formed at the opening end edge of the hole H2. And
As the z-axis arm 14 further descends, the lower end edge of the gear G receives a component force along the xy 'plane along the tapered surface. Here, as described above, when the z-axis arm 14 moves along the vertical direction, both locking mechanisms 246 are in the inoperative state. Therefore, the pair of upper and lower mounting plates 240 and 242 can be laterally displaced relative to each other. As a result, when the gear G receives the component force along the xy ′ plane described above, this component force acts on the compliance mechanism 244 via the lower mounting plate 242.

Therefore, when the component force is applied, the pair of upper and lower biasing members 270, 272 causes
From the state where the central axes of the first and second alignment members 250 and 252 are elastically aligned with each other, as shown in FIG. 61, against the biasing forces of these biasing members 270 and 272,
The support pin 268 is tilted obliquely to allow the lower mounting plate 24
2 moves with respect to the upper mounting plate 240 so as to shift along a plane orthogonal to the central axis. In the case of this shift movement, as shown in FIG. 61, the lower mounting plate 242 moves in a state in which the gear G is supported so as to extend vertically without tilting its posture.
Therefore, the subsequent fitting operation can be performed very easily.

In this way, the third shaft portion G3 of the gear G is
And the hole H2 are elastically absorbed by the displacement of the first and second alignment members 250 and 252 in each compliance mechanism 244, and the gear G and the hole H2 are aligned with each other in the vertical direction. As the z-axis arm 14 descends, the third shaft portion G3 of the gear G has a hole H2.
It will fit well inside. Then, after the fitting operation of the gear G into the hole H2 is completed, the clamp module M
When the grip of the gear G by 7 is released and the z-axis arm 14 is driven to move upward, the clamp module M7 independently moves up with the gear G separated. Then, when the gear G is completely separated from the clamp module M7, the above-mentioned component force does not act on the lower mounting plate 242. As a result, the component force acting on the lower mounting plate 242 in the compliance mechanism 244 is canceled, and the urging force of the pair of upper and lower urging members 270 and 272 causes the both mounting plates 24 to move.
0 and 242 are well returned from the misaligned state shown in FIG. 61 to the aligned state shown in FIG. 57.

In this way, the centering operation in the compliance module M5, in other words, the elastic biasing / restoring operation in the compliance mechanism 244 is completed. On the other hand, the centering operation in the compliance mechanism 244 not only absorbs the above-described in-plane deviation orthogonal to the central axis, but also absorbs the in-plane deviation orthogonal to the central axis as shown in FIG. At the same time, the centering operation can be executed while absorbing the inclination of the central axis of the lower mounting plate 242 with respect to the central axis of the upper mounting plate 240.

Here, at the four corners of the upper mounting plate 240,
As shown in FIG. 55, the mounting screw holes 240b having the diameter d ₁ are separated from each other by the above-mentioned fixed arrangement pitch D.
However, at the four corners of the lower mounting plate 242, mounting through holes 242b are respectively formed in the same state as shown in FIG. In addition, a positioning hole 240c and a positioning groove into which a pair of positioning pins commonly formed on the bottom surface of each of the modules M1 to M4 and M6 are respectively inserted in the central portions of the two opposite sides of the upper surface of the upper mounting plate 240. 240d is formed. Further, other modules M2 to M are provided at the central portions of the two sides of the lower surface of the lower mounting plate 242 which face each other.
4, M6 and M7 have a diameter d ₂ and a predetermined distance D _{2 at which} they are respectively inserted into the positioning holes and the positioning grooves.
A pair of positioning pins 242c spaced apart from each other are integrally attached in a state of protruding downward. In this way, at the bottom of this compliance module M5,
The other modules M2 to M4, M6, M7 are selectively attached, and the other modules M are provided on the top of the other modules.
1 to M4 and M6 can be selectively attached.

[Explanation of Shift Module M6] The shift modules M6 for performing the above-mentioned shift operation are mutually arranged along the central axis of the shift module M6, as shown as one embodiment in FIGS. 63 to 70. A pair of upper and lower mounting plates 300, 302 mounted so as to be relatively movable,
An intermediate member 304 is provided between the upper and lower attachment plates 300 and 302 and is telescopically interposed. Here, a movement drive mechanism 306 for moving the lower mounting plate 302 toward and away from the upper mounting plate 300 in the axial direction is integrally mounted at the central portion of the lower surface of the upper mounting plate 300. There is. The movement drive mechanism 306 is configured as a pneumatic cylinder mechanism in this embodiment.

First, on the lower surface of the above-mentioned upper mounting plate 300, a pair of first first members, which are located on the same diameter and are separated from each other by the same distance from the central axis, extend downward.
The guide rod 308 is fixed. A sleeve-shaped first cover 310 is formed on the outer periphery of the lower surface of the upper mounting plate 300 so as to surround the pair of first guide rods 308 as described above. On the other hand, on the upper surface of the lower mounting plate 302 described above, the first guide rod 30 is located on the diameter orthogonal to the diameter in which the first guide rod 308 is arranged.
A pair of second extending upwards at a position separated from the central axis by the same distance as the separation distance from the suspension axis of 8.
The guide rod 312 is fixed. Further, on the outer circumference of the upper surface of the lower mounting plate 302, the first cover 3 described above is provided.
The second cover 314 is formed in an integrally erected state in a state of being aligned with 10.

On the other hand, the above-mentioned intermediate member 304 is located inside the first and second covers 310 and 314, and is arranged so as to be surrounded by them. That is, the intermediate member 304 is provided at the center with the above-described movement drive mechanism 30.
6 and a pair of sleeves 318 in which the pair of first guide rods 308 described above are respectively inserted from above on the outer circumference of the disc-shaped body 316 in which a central through hole 316a is formed. And a pair of second guide rods 312 are integrally formed from a pair of sleeves 320 inserted respectively from below. The first and second guide rods 308 and 312 are slidably supported in the corresponding sleeves 318 and 320 by slide bearings 322 and 324 housed in the inner circumferences of the sleeves 318 and 320, respectively.

On the other hand, as shown in FIGS. 64 and 68, the diameter at which the above-mentioned first pair of guide rods 308 is arranged and the diameter at which the above-mentioned second pair of guide rods 312 are arranged are The intermediate member 30 is located on different diameters and on the same circumference as the circumference where they are arranged.
On the upper surface of the main body 316 of No. 4, a first pair of stopper pins 326 for restricting the rising end position of the shift module M6 are fixed in an upright state. A first head 328 defining the rising end of the intermediate member 304 is attached to the upper end of each first stopper pin 326 by abutting against the lower surface of the upper mounting plate 300.
Reference numeral 8 is adapted to abut on the lower surface of the upper mounting plate 300 via the first cushioning material 330.

A screw groove is formed over the entire length of the outer circumference of the first stopper pin 326, and the above-mentioned first stopper pin 326 is formed.
The head portion 328 of the is screwed into this thread groove. As a result, the first head 328 is attached to the first stopper pin 32.
It is movable along the axial direction of 6. That is, by moving the first head 328 along the axial direction of the first stopper pin 326, it is possible to change and adjust the shift stroke amount of the intermediate member 304 to the upper mounting plate 300.

The diameter in which the first pair of guide rods 308 are arranged, the diameter in which the above-mentioned second pair of guide rods 312 are arranged, and the diameter in which the first pair of stopper pins 326 are arranged. And a shift module M6 on the upper surface of the lower mounting plate 302 in a state in which the shift module M6 is located on a diameter different from that of the
The second pair of stopper pins 332 for restricting the descending end position in the are fixed in a lowered state.
The upper ends of the second stopper pins 332 are taken out above the main body 316 through side through holes 316b formed in the main body 316 of the intermediate member 304 in a state of penetrating in the thickness direction. A second head 334 having a diameter larger than that of the side through hole 316 is attached to the upper end of each second stopper pin 332. Here, the lower surface of the second head portion 334 abuts on the upper surface of the main body portion 316 of the intermediate member 304 via the second cushioning material 336, so that the intermediate member 30 of the lower mounting plate 302 is formed.
The descending end position for 4 will be defined.

As shown in FIG. 68, the second head 334 attached to the upper end of each second stopper pin 332 has the head 328 of the first stopper pin 326 via the first cushioning material 330. Contact the lower surface of the upper mounting plate 300,
It is designed to be inserted into the through hole 300a formed in the upper mounting plate 300 in a state where the rising end position is defined.
A thread groove is formed on the outer circumference of the second stopper pin 332 over the entire length, and the second head 334 described above is formed.
Is screwed into this thread groove. As a result, the second head 334 is movable along the axial direction of the second stopper pin 332. That is, this second head 3
By moving 34 along the axial direction of the second stopper pin 332, the shift stroke amount of the lower mounting plate 302 to the intermediate member 304 can be changed and adjusted.

Thus, the upper mounting plate 300 and the lower mounting plate 3
The intermediate member 30 that is provided in a telescopic manner with respect to 02.
4, the upper mounting plate 300 and the lower mounting plate 302 are guided so as to come close to and separate from each other along their central axes, so that a sufficient shift stroke can be obtained with a small height dimension. By combining the modules, a more compact structure can be achieved.
Further, since the load is resisted by the four guide rods of the first pair of guide rods 308 and the second pair of guide rods 312, the structure is superior in rigidity. Also,
The movement drive mechanism 306 described above includes a cylinder body 338 that is integrally mounted in a state of being erected at a lower surface center portion of the upper mounting plate 300, and a shift module in a cylinder chamber 340 formed inside the cylinder body 338. Piston 34 housed so as to be able to slide back and forth along the central axis of Yule M6
2 and integrally connected to the lower surface of the piston 342,
The piston rod 344 is formed so as to penetrate downward through the lower portion of the cylinder body 338 and project downward, and the lower end thereof is connected to the central portion of the upper surface of the lower mounting plate 302 described above.

Here, the first cylinder sub-chamber 340a is defined by the portion of the cylinder chamber 340 located below the piston 342, while the second cylinder sub-chamber is defined by the portion of the cylinder chamber 340 located above the piston 342. 340b is defined. Then, as is apparent from FIG. 70, with the upper mounting plate 300 and the peripheral wall of the cylinder body 338 passing through together, the first cylinder sub-chamber 340
A first communication passage 346a, one end of which is connected to a, is formed. The first communication passage 346a is provided in the upper mounting plate 3
First air port 34 attached to the outer surface of 00
8a. On the other hand, in the state of being juxtaposed with the first air port 348a, the second air port 34
8b is attached to the outer surface of the upper attachment plate 300.
Here, although not shown, the second air port 348b is provided with a second cylinder branch chamber 340 via a second communication passage formed so as to penetrate through the upper mounting plate 300.
It communicates with b.

Incidentally, these first and second air ports 3
48a and 348b are connected to the above-described pneumatic pressure source 82 via a third switching valve 350 which is an electromagnetic solenoid valve described later. This third switching valve 350
In the state where the first switching mode is set, the first cylinder branch chamber 34 is transferred through the first air port 348a.
Introduce compressed air to 0a, 2nd air port 348b
Is set so as to discharge air from the second cylinder sub-chamber 340b via the first cylinder sub-chamber 340a via the first air port 348a in the state where the second switching mode is set. It is configured to be switched and set so that air is discharged and compressed air is introduced into the second cylinder sub-chamber 340b through the second air port 348b. Thus, the third switching valve 350
In the above, by setting the first switching mode, the lower mounting plate 302 is driven close to the upper mounting plate 300,
By setting the second switching mode, the lower mounting plate 302 is driven away from the upper mounting plate 300.

Further, as shown in FIGS. 63 and 69, a sensor mounting stay 352 is attached to one outer surface of the upper mounting plate 300 in a state of being lowered. Further, a dog attaching stay 354 is attached to one outer surface of the attaching plate 302 so as to stand upright from the inner surface of the sensor attaching stay 352 so as to stand upright. A first dog 356a that defines the lower end position of the lower mounting plate 302 is attached to the upper end of the dog mounting stay 354, and the lower mounting plate 3 is attached to the lower end of the first dog 356a.
A second dog 356b defining the rising end position of 02 is attached. Here, these first and second dogs 3
56a and 356b are composed of magnets.
Also, these first and second dogs 356a, 356b
Are arranged at positions spaced from each other along the circumferential direction.

On the other hand, the above-mentioned sensor mounting stay 35.
2 shows a seventh sensor 358 that is turned on by the first dog 356a in a state where the lower mounting plate 302 is lowered to the lower end position, and a state where the lower mounting plate 302 is raised to the upper end position. 8th which is turned on by the dog 356b of 2nd
Sensor 360 is attached. Here, the seventh and eighth sensors 358 and 360 are both non-contact type magnetic sensors that are turned on when the magnets approach each other.

Here, the seventh and eighth sensors 35
8, 360 are connected to the above-described control device and output the detection result. That is, this control device switches the third switching valve 350 described above to the first switching mode and sets the lower mounting plate 302 away from the upper mounting plate 300.
When the ON signal is not output from the seventh sensor 358 after a predetermined time has elapsed, the lower mounting plate 302 is stopped during the lowering operation, or an alarm indicating that the lower mounting plate 302 is in an abnormal state in which the lowering operation is not performed is issued. By executing the operation and outputting the ON signal from the seventh sensor 358 within a predetermined time, the subsequent control procedure is executed. In addition, this control device switches the third switching valve 350 to the second switching mode and sets the lower mounting plate 302 so that the lower mounting plate 302 is close to the upper mounting plate 300. However, if the ON signal is not output from the eighth sensor 360, the lower mounting plate 302 is stopped during the ascending operation, or the alarm operation is performed as an abnormal state in which the ascending operation is not executed. However, the ON signal is output from the eighth sensor 360 within a predetermined time, so that the subsequent control procedure is executed.

Since the shift module M6 is configured as described above, the first switching mode is set in the third switching valve 350, and the first cylinder branch chamber is set via the first air port 348a. Compressed air is introduced into 340a and air is discharged from the second cylinder sub-chamber 340b through the second air port 348b, whereby the lower mounting plate 302 is driven close to the upper mounting plate 300,
In addition, the second switching mode is set in the third switching valve 350, compressed air is introduced into the second cylinder sub-chamber 340b via the second air port 348b,
The air is discharged from the first cylinder sub-chamber 340a through the first air port 348b, so that the lower mounting plate 3
02 is driven away from the upper mounting plate.

Here, at the four corners of the upper mounting plate 300,
The fixed pitch D ₁ having the constant diameter d ₁ described above.
The mounting screw holes 300b are formed in a state of being separated from each other, and the mounting through holes 302a are formed in four corners of the lower mounting plate 302 in the same state. In addition, a positioning hole 300c and a positioning groove 300d into which a pair of positioning pins commonly formed on the bottom surface of each of the modules M1 to M5 are inserted are formed at the central portions of the two sides of the upper surface of the upper mounting plate 300 that face each other. Has been formed.

The other modules M2 to M5 are provided at the central portions of the two sides of the lower mounting plate 302 which face each other.
A pair of positioning pins 302b, which are respectively inserted into the positioning holes and the positioning grooves formed in M7, have a predetermined diameter d ₁
And are attached integrally in a state of being separated by a predetermined distance D2 and protruding downward. In this way, the other modules M2 and M2 are provided below the shift module M6.
M5 and M7 are selectively attached, and any of the other modules M1 to M5 is selectively attached to the upper part of the M5 and M7.

[Explanation of Clamp Module M7]
A clamp module M7 attached to the lower part of the hand mechanism 10 for gripping components is shown in FIGS.
8 is configured as shown as the first embodiment. That is, this clamp module M7 is pneumatically driven, that is,
It is configured to be driven by working compressed air, and is provided with a mounting plate 370 mounted on the lower surface of the lower mounting plate of another module (mounting plate for the holder module M1). Around the mounting plate 370, a frame member 372 is integrally mounted so as to surround the mounting plate 370 in a standing state. That is, the frame member 372 corresponds to the four pieces of the mounting plate 370, and
It is composed of one frame piece 372a to 372d. As shown in FIGS. 72 and 74, one guide rail 374 extending along the center line of the mounting plate 370 is fixed to the lower surface of the mounting plate 370. This guide rail 37
4, a pair of slide blocks 376 and 378 are slidably guided through slide guides 380 and 382, respectively. Incidentally, these slide guides 380, 38
2 is supported by a guide rail 374 so as not to fall off.

That is, these slide blocks 376, 3
As shown in FIG. 77, 78 is slidable below a mounting plate 370 in a space surrounded by frame members 372 between a pair of frame pieces 372a and 372c facing each other. In detail, these slide blocks 376, 378 have corresponding frame pieces 372.
An unclamping position (that is, a maximum separation position) in which the outer surfaces of the unclamping amount adjusting stopper bolts 384 and 386 attached to the a and 372c are in contact with the tip end surfaces thereof.
And the clamp amount adjusting stopper bolts 388 and 3 attached to the opposite frame pieces 372c and 372a, respectively.
Each of them is independently slidable between a clamp position (that is, a maximum proximity position) where each inner surface abuts on the tip surface of 90.

The stopper bolts 384 and 386 for adjusting the unclamping amount are independently attached to the corresponding frame pieces 372a and 372c so that they can be moved back and forth. That is, the maximum separation amount) is set arbitrarily.
On the other hand, both clamp amount adjusting stopper bolts 388, 39
In No. 0, through the through holes 378a and 376a formed so as to penetrate through the opposing slide blocks 378 and 376, the tip ends extend to near the central portion. And
Both clamp amount adjusting stopper bolts 388 and 390 are
Each of them is independently attached to the frame pieces 372c, 372a on the opposite side so as to be movable back and forth, and by moving them back and forth, the clamp position (that is, the minimum distance) is arbitrarily set.

Here, the first slide block 376 located on the left side in FIG. 76 has its base end wound around the outer circumference of the corresponding clamp amount adjusting stopper bolt 388.
Through hole 378 formed in the second slide block 378
The first coil spring 392, which penetrates a and has its tip locked to the inner surface, is constantly urged to the unclamp position. In addition, the second position on the right side in FIG.
Slide block 378 has a base end wound around the outer circumference of a corresponding clamp amount adjusting stopper bolt 390, and a through hole 376 a formed in the first slide block 376.
Is constantly urged to the unclamped position by a second coil spring 394 which penetrates through and has its tip locked to the inner surface. That is, these slide blocks 376, 37
8 is always elastically held in an unclamped state as long as no external force acts on them.

On the other hand, these slide blocks 376,3
A moving drive mechanism 396 is provided for moving the 78 to the clamp position against the biasing force of the corresponding coil springs 392 and 394. This movement drive mechanism 3
In this embodiment, 96 is composed of air cylinder mechanisms 396a and 396b attached to the slide blocks 376 and 378, respectively. Here, since the air cylinder mechanisms 396a and 396b are similarly configured, the air cylinder mechanism 396a for moving and driving the first slide block 376 is represented by a reference numeral "a". The air cylinder mechanism 396b for moving and driving the second slide block 378 will be described with the same reference numeral as "b".
The description is omitted.

That is, this air cylinder mechanism 396a
On the outer surface of the first slide block 376,
A recess 398 having a circular cross-section with an extension axis aligned with a corresponding stopper amount adjusting stopper bolt 388.
a is formed, and the tip end portion of the piston 400a is loosely inserted into the recess 398a through the opening. The base end of the piston 400a is fixed to the corresponding frame piece 372a. A cylinder body 402a, which is formed of a thin steel plate and has a closed tip, is slidably fitted in an airtight state on the outer periphery of the tip of the piston 400a. Here, the cylinder body 402a is fixed to the first slide block 376 by fixing the tip thereof to the end surface of the recess 398a. As a result, the cylinder chamber 404a is defined by the internal space of the cylinder body 402a, which is located in front of the tip surface of the piston 400a.

On the other hand, in the piston 400a, a communication passage 406a is formed which communicates with one end for introducing compressed air into the above-mentioned cylinder chamber 404a, and the other end of the communication passage 406a is connected to the piston 400a. It is connected to the air port 408a attached to the base end portion protruding outward from the corresponding frame piece 372a. Here, the air ports 408a and 408b provided in both air cylinder mechanisms 396a and 396b are connected to the above-described pneumatic pressure source 82 via a second opening / closing valve 410 described later. The second opening / closing valve 410 is in the state where the connection mode is set by the control device, and the above-described pneumatic pressure source 8 is provided via the first air ports 408a and 408b, respectively.
2 is connected to the first and second air ports 408a and 408b, and the first and second cylinder chambers 404a and 404b are connected.
The compressed air is introduced into the first air port 40 while the open mode is set.
8a, 408b through the first and second cylinders 4 respectively
04a and 404b are opened to the atmosphere and are switched and set so as to discharge air from them.

By setting the connection mode in the second on-off valve 410 in this way, the first and second slide blocks 376 and 378 move from the unclamp position to the clamp position, and the respective coil springs 392 are moved. , 3
The first and second slide blocks 37 are moved by being driven against the biasing force of 94 and the opening mode is set.
6, 378 are moved back from the clamp position to the unclamp position by the urging force of the coil springs 392, 394. Incidentally, these first and second
On the lower surfaces of the slide blocks 376 and 378, the yaw 412 and 414 for holding the parts from both sides are attached. Therefore, the connection mode is set in the second opening / closing valve 410, so that these joo 4
The gear G as a component is gripped from both sides by 12,414. Here, positioning grooves 412a and 414a are formed in the central portions of the lower surfaces of the respective jaws 412 and 414. Each positioning groove 412a, 414a is formed so as to be compatible with all the yo-yos so that when the corresponding yo-yos 412, 414 are damaged, the positioning grooves 412a, 414a serve as a reference when removing the new yo-yos 412, 414. Has been done.

Here, in this embodiment, the cylinder chamber 404a in the first air cylinder mechanism 396a.
Is larger than the diameter of the cylinder chamber 404b in the second air cylinder mechanism 396b. As a result, the movement driving force in the first air cylinder mechanism 396a is the same as that in the second air cylinder mechanism 396b.
It is set to be larger than the movement driving force in.
Therefore, in the state where the component is specifically gripped, the first slide block 376 which is moved by a large driving force is used.
Is always in contact with the corresponding clamp amount adjusting stopper bolt 388, the clamp position is defined. In this way, even if the mounting position of the component is deviated from the predetermined position, the clamping position of the mounting plate 3 is clamped by the two jaws 412 and 414.
It is always set at a constant position with respect to 70.

Further, as shown in FIGS. 75 and 78, first grooves 416 and 418 for attachment are provided on the lower ends of the pair of frame pieces 372b and 372d of the frame member 372 which oppose each other. Each is formed in a state of extending along the direction. Also, these frame pieces 37
Second grooves 420 and 422, into which the detection dogs 376b and 378b integrally attached to the opposite outer surfaces of the slide blocks 376 and 378 are inserted, are formed on the inner surfaces of the 2b and 372d that face each other, respectively. There is. On the other hand, the second formed on the inner surface of the frame piece 372d
The first slide block 376 is brought into the clamp position in the groove 422 of the corresponding detection dog 3
The ninth sensor 424, which is turned on by 76b, is housed, and the second slide block 3 is inserted in the second groove 420 formed on the inner surface of the frame piece 372b.
The tenth sensor 4 which is turned on by the corresponding detection dog 378b by bringing 78 into the clamp position.
26 is stored. Here, these 9th and 10th
Both sensors 424, 426 of the corresponding dog 376
It is composed of a non-contact type proximity sensor that is turned on when b and 378b approach each other.

Here, the ninth and tenth sensors 4
24 and 426 are connected to the above-mentioned control device and output the detection result to them. That is, this control device switches and sets the second on-off valve 410 to the connection mode and drives and controls both slide blocks 376 and 378 so as to move from the unclamp position to the clamp position. Even if a predetermined time has passed,
When the ON signals are not output from both the ninth and tenth sensors 424 and 426, both slide blocks 37
6, 378 is stopped during the movement operation or is in an abnormal state in which the movement operation is not executed, an alarm operation is executed, and the ninth and tenth sensors 4 within a predetermined time.
Since the ON signals are output from both 24 and 426,
It is designed to execute the subsequent control procedure.

Further, this control device controls the drive so that the above-mentioned second opening / closing valve 410 is switched to the open mode and both slide blocks 376 and 378 are moved from the unclamp position toward the clamp position. In this state, even if a predetermined time has elapsed, if the ON signals are still output from the ninth and tenth sensors 424, 426, both slide blocks 376, 378 remain in the clamped position. Assuming the locked abnormal state, an alarm operation is executed, and the ON signal is not output from the ninth and tenth sensors 424 and 426 within a predetermined time, so that the subsequent control procedure is executed. There is.

On the other hand, the above-mentioned slide pieces 372b, 37
On the outer surface of 2d, a pair of upper and lower mounting grooves 428a, 4a on which auxiliary machinery is optionally mounted are attached.
28b; 430a and 430b are formed in a substantially T-shaped cross section. Incidentally, in this embodiment, the slide piece 372 is
a pair of upper and lower mounting grooves 428a,
As an auxiliary machine attached via 428b, as shown in FIG. 1, an aiming unit 440 for accurately detecting the relative position of the hand mechanism 10 to the gear mounting surface S1 is prepared. Slide piece 37
It is detachably attached to the outer surface of 2b. Since this aiming unit 440 does not define any features of the present invention, a detailed description thereof will be omitted, but an eleventh sensor for detecting a reference mark (not shown) defined on the mounting surface S1. 442, and this eleventh sensor 442
By detecting the reference mark via the hand mechanism 1
The origin position of 0 is calibrated. The eleventh sensor 442 is an optical sensor in this embodiment, and is specifically a reflective photocoupler.

In the clamp module M7 configured as described above, the connection mode is set in the second opening / closing valve 410, and the first and second air ports 408 are set.
By introducing compressed air into the first and second cylinder chambers via a and 408b, both jaws 412 and 414 are driven close to each other, and the flat surfaces formed on both sides of the first shaft portion G2 of the gear G are flattened. The surface G4 will be clamped from both sides. Further, the open mode is set in the second opening / closing valve 410, and the compressed air is discharged from the first and second cylinder chambers via the first and second air ports 408a and 408b. , 414 are driven away from each other and brought to an unclamped state.

Here, at the four corners of the upper surface of the mounting plate 370, the mounting screw holes 370a are formed in the state of having the above-mentioned constant diameter d ₁ and being separated from each other by the fixed pitch D _1. Has been done. The diameter d ₁ and the arrangement pitch D ₁ are set to common values for the above-mentioned 6 types of modules M1 to M6. Also, the mounting plate 37
A pair of positioning pins formed in the central portion of the two pieces facing each other on the upper surface of 0 have a common diameter d2 on the bottom surface of each of the modules M1 to M6 described above and are separated by a common separation distance D2. Positioning holes 370b into which
Also, a positioning groove 370c is formed. The positioning holes 370b and the positioning groove 370c are the same as the positioning groove 412 in each of the jaws 412 and 414 described above.
a and 414a are positioned accurately. As a result, the structure is compatible with the attachment of the positioning pin for positioning to each of the jaws 412 and 414.

The positioning hole 370b and the positioning groove 370c are provided in each module M1 as described above.
.. to M6 are commonly set, the clamp module M7 can be attached to any of the lower parts of the modules M1 to M6 in the same state. Here, for example, this clamp module M
When 7 is directly attached to the mounting plate 30 of the holder module M1, the screw portion formed at the lower end of the mounting screw (not shown) inserted through the mounting through hole 30a of the mounting plate 30 from above is It will be screwed into the mounting screw hole 370a.

Needless to say, the clamp module M7 is not limited to the configuration of the first embodiment described above, but can be variously modified without departing from the scope of the present invention. For example, this clamp module is shown in FIG.
85 to 85 can be configured as a second embodiment. That is, in the above-described first embodiment, both unclamp positions of the first and second jaws 412 and 414 are set in the frame member 372,
Therefore, the maximum distance between the two yaw 412 and 414 is limited. Therefore, there is a limit to the size of the component to be clamped by this, which must be smaller than the frame member 372. On the other hand, in the clamp module M7b of the second embodiment, there is virtually no limit to the size of the parts to be clamped,
It is designed to be able to clamp parts of any size.

The clamp module M7b of the second embodiment will be described below. The same parts as those of the clamp module M7 of the first embodiment described above are designated by the same reference numerals, and the description thereof will be omitted. Omit it. In detail, in this second embodiment, the mounting plate 450 of the clamp module M7b is used.
Is composed of a long plate body adapted to be selectively attached to the other modules M1 to M6 at its central portion. The first and second slide blocks 376 and 378 are arranged at both ends of the elongated mounting plate 450 in an independent state. That is,
The guide rail 374 described above is divided into a pair of left and right guide rails 374a and 374b, and the first and second slide blocks 376 and 378 are the guide rails 374.
a and 374b are separately and independently guided. Regarding the first slide block 376, in the first embodiment, the corresponding clamp amount adjusting stopper bolt 388 has the opposite frame piece 382c.
However, in this embodiment, the first auxiliary mounting piece 452 is fixed to the lower surface of the mounting plate 450 in order to mount and support it. On the other hand, regarding the first slide block 378, in the first embodiment, the corresponding clamp amount adjusting stopper bolt 390 has the opposite frame piece 382a.
However, in this embodiment, the second auxiliary mounting piece 454 is fixed to the lower surface of the mounting plate 450 in order to mount and support it.

On the other hand, in the above-mentioned first embodiment,
The movement of the first and second slide blocks 376 and 378 from the clamp position to the unclamp position is configured to be based on the biasing force of the corresponding coil springs 392 and 394. In order to drive the first slide block 376 from the clamp position to the unclamp position, a third air cylinder mechanism 396c configured substantially the same as the second air cylinder mechanism 396b is provided. Block 3
It is attached to 76. Further, in order to drive the second slide block 378 from the clamp position toward the unclamp position, the first air cylinder mechanism 396
A fourth air cylinder mechanism 396d configured substantially the same as a is attached to the second slide block 378.

However, in the second embodiment, the first
Since the pneumatic operating force is used for the reciprocating movement of the second slide block 376 and the second slide block 378, respectively, the first to fourth
Although not shown, the air cylinder mechanisms 396a and 396d are connected to the air pressure source 82 via a fourth switching valve. Here, the fourth switching valve is set to the first switching mode by the control device,
First and second air cylinder mechanisms 396a, 396b
Are connected to the air pressure source 82, and the third and fourth air cylinder mechanisms 396c and 396d are switched and set to open to the atmosphere, respectively, and the second switching mode is set to set the first and the second air cylinder mechanisms 396c and 396d. Second air cylinder mechanism 39
6a and 396b are opened to the atmosphere, and the third and fourth air cylinder mechanisms 396c and 396d are connected to the air pressure source 82 so that they are switched and set.

As described above, since the clamp module M7b of the second embodiment is constructed, the fourth switching valve is switched from the second switching mode to the first switching mode, and the first and the second switching modes are set. Compressed air is introduced into the first and second cylinder chambers 404a and 404b via the second air ports 348a and 348b, respectively, and the third and fourth compressed air is introduced into the third and fourth air ports 348c and 348d, respectively. By discharging the air from the four cylinder compartments 404c and 404d, the first and second slide blocks 376 and 378 are moved from the unclamp position to the clamp position, and are driven close to each other. In the fourth switching valve, the first switching mode is switched to the second switching mode,
Compressed air is introduced into the third and fourth cylinder chambers 404c and 404d via the third and fourth air ports 348c and 348d, respectively, and the first and second air ports 34
Air is exhausted from the first and second cylinder chambers 404a and 404b via 8a and 348b, respectively, so that the first and second slide blocks 376 and 378 are moved from the clamp position to the unclamp position. , Will be driven away from each other.

In this way, both the movement of the first and second slide blocks 376 and 378 from the unclamp position to the clamp position and the movement from the clamp position to the unclamp position are driven by pneumatic control. Since it is configured as described above, the ninth and the ninth parts for detecting that the first and second slide blocks 376 and 378 provided in the first embodiment are brought to the clamp position, respectively. In addition to the ten sensors 424, 426, there are further provided eleventh and twelfth sensors 456, 258 for detecting that they have been brought to the unclamped position, respectively.
As described above, by configuring the clamp module M7b as shown in the second embodiment, it is possible to clamp a component of any size.

In this second embodiment, the mounting plate 450
As shown in FIG. 86, a configuration in which a compliance module M5b is separately attached to the lower surface central part of the device can be considered. Although the compliance module M5b has the same configuration as the above-described compliance module M5, the positioning of the work W to be clamped by the clamp module M7b is performed on the lower surface of the lower mounting plate 242 of the compliance module M5b. A pair of positioning pins 296a and 296b for performing the above are attached so as to project downward. Further, on the upper surface of the work W, there are formed positioning holes Wa and Wb into which the pair of positioning pins 296a and 296b are respectively inserted and positioned.

In such a structure, when the hand mechanism 10 descends to clamp the work W via the clamp module M7b, the pins 296a, 296 are provided.
b is inserted into the positioning holes Wa and Wb of the work W from above, respectively. Here, even if the work W is misaligned in the horizontal plane, the locking mechanism 246 is set to the unlocked state, and as shown in FIG. , 296b are corresponding positioning holes W
It will be inserted in each of a and Wb. In this state, the center of the work W and the center of the compliance module M5b are displaced from each other in the horizontal direction. Then, after that, the locking mechanism 246 is brought into the locking state, so that
As shown in FIG. 8, the center of the work W and the center of the compliance module M5b are aligned with each other. As a result, the work W brought to the predetermined center position (that is, the center of the work W is matched with the center of the hand mechanism 10) is reliably clamped by the clamp module M7b.

Further, it goes without saying that the clamp module M7 is not limited to the configurations of the above-described first and second embodiments, and can be variously modified without departing from the gist of the present invention. There is no. For example, this clamp module can be constructed as shown as a third embodiment in FIGS. 89 to 92. That is, in the above-described second embodiment, the maximum separation distance between both jaws 412 and 414 is extended so that a component of any size can be clamped. However, an elongated component is clamped at both ends. It is difficult to do. On the other hand, in the clamp module M7c of the third embodiment, it is possible to reliably clamp an elongated component.

The clamp module M7c of the third embodiment will be described below. The same parts as those of the clamp modules M7, M7b of the first and second embodiments described above are designated by the same reference numerals. And its description is omitted. In detail, the clamp module M7c of the third embodiment is
A long base 460 that is selectively attached to the other modules M1 to M6 is provided at the center thereof. On the lower surfaces of both ends of the elongated base 460, the mounting positions of the first and second clamp units 462 and 464, which have the same structure as the clamp module M7 of the first embodiment, are changed. It is installed when possible. Here, the first and second clamp units 462, 464
Are set such that the respective clamping directions (that is, the extending directions of the guide rails 394) are orthogonal to the longitudinal axis direction of the elongated base 460. By configuring the clamp module M7c in this manner, the elongated component is clamped at both ends by the first and second clamp units 462 and 264, respectively, and thus the third embodiment is performed. By way of example, this elongated part will be reliably clamped.

(Explanation of Operation of Hand Mechanism 10 Equipped with All Seven Types of Modules M1 to M7) Next, in the hand mechanism 10, as shown in FIG. 6, the hand mechanism 10 is inserted into the hole H1 formed in the horizontal plane S1. The mounted gear G is clamped by a clamp module M7 attached to the lower part of the hand mechanism 10, and the gear G is rotated about its own central axis by a predetermined angle θ,
For example, an operation of rotating the actuator 90 degrees and inserting it into the hole H2 formed in the inclined surface portion S2 inclined with respect to the horizontal surface portion by the predetermined angle α will be described with reference to FIGS. 93 to 95. That is, in this embodiment, the hand mechanism 10 performs the gripping / inserting operation described above,
The seven types of modules M1 to M7 are set to be arranged downward from the z-axis arm 14 of the robot 12 in the order described above.

In FIG. 93, the inclined surface portion S2 is inclined at an inclination angle θ (45 degrees in this embodiment) with respect to the horizontal surface portion S1 as in the case shown in FIG. 6 described above. It is set. Further, FIG. 94 schematically shows a connection mode of sensors and valves necessary for the operation of the hand mechanism 10. Although these have been described in detail in the description of the modules M1 to M7, the holder module M1 has the first sensor 54 attached thereto, and the first sensor 54 has the attachment plate. It is set to be turned on when 30 is dropped and the connection state with the fixing member 28 is released. Further, a first switching valve 80 is connected to the reversing module M2, and the first switching valve 80 is set to the first switching mode, so that the rotary shaft 60 is attached to the lower mounting plate 64. The rotation shaft 60 is rotationally driven from a standby position parallel to the upper mounting plate 62 to an inversion position which is inverted around the rotation axis RL by the angle α, and the second switching mode is set, whereby the rotation shaft 60 is rotated.
Is rotationally driven from the reverse position to the standby position. The reversing module M2 has a second sensor 9 for detecting that the lower mounting plate 64 is at the standby position.
8 and a third sensor 100 that detects that it is in the reverse position
And are provided. On the other hand, the turning module M3
The second switching valve 146 is connected, and the second switching valve 146 is set in the first switching mode so that the lower support plate 114 is attached to the rotary support shaft 110 with respect to the upper support plate 62. The rotation supporting shaft 110 from the turning position to the waiting position by rotationally driving the turning support shaft 110 from the turning position to the turning position rotated about the central axis CL by the angle θ and setting the second switching mode. It is configured to be driven to rotate up to. In addition, a fourth mounting plate 114 for detecting that the lower mounting plate 114 is in the standby position is provided on the turning module M3.
Sensor 162 and a fifth sensor 164 for detecting that the vehicle is in the turning position.

The cushion module M4 has a sixth sensor 21 for detecting that the lower mounting plate 182 has approached the upper mounting plate 180 by an allowable cushion amount.
6 is provided. Further, a first opening / closing valve 290 is connected to the compliance module M5, and the connection mode of the first opening / closing valve 290 is set to set the lock mechanism 246 to the locked state and open mode. Is set to an unlocked state. Further, a third switching valve 350 is connected to the shift module M6, and the third switching valve 350 sets the lower mounting plate 302 to the upper mounting plate by setting the first switching mode. The lower mounting plate 302 is configured to be driven away from the upper mounting plate 300 by driving the lower mounting plate 302 closer to 300 and setting the second switching mode. Further, the shift module M6 is provided with a seventh sensor 358 for detecting that the lower mounting plate 302 is at the lower end position and an eighth sensor 360 for detecting that the lower mounting plate 302 is at the upper end position. There is. Finally, the clamp module M7 has a second opening / closing valve 410
The second open / close valve 410 is set in the connection mode, thereby driving both gyoyos 412 and 414 close to each other to clamp the component (gear G) and set the open mode. By doing so, the components (gear G) are unclamped by driving them apart from each other.
In addition, both clamps 41
Ninth and tenth sensors 424, 426 are provided to detect that the 2, 2 and 414 are in a clamped state.

The pick-and-place operation of the component (gear G) in the hand mechanism 10 thus constructed will be described with reference to the timing chart shown in FIG. First, the central axis of each of the modules M1 to M7 is, as shown in FIG. 1, the extension axis of the z-axis arm 14,
That is, in the state where the z-axis arm 14 is aligned with the vertical axis, first, the z-axis arm 14 is positioned in the horizontal plane portion (that is, x-) until the extension axis of the z-axis arm 14 is aligned with the central axis of the gear G as shown in FIG. Move in the y-plane). After this, the z-axis arm 14
Through the shift module M6, and is brought close to a height h ₀ where the gear G can be clamped by the clamp module M7. From this state, the operations of the modules M1 to M7 in the hand mechanism 10 are started.

That is, first, it is judged through the sighting unit 440 attached to the clamp module M7 whether the hand mechanism 10 has a predetermined relative positional relationship with the reference point of the horizontal plane portion S1, and within a predetermined time. If it is not determined that the predetermined relative positional relationship is established, the aiming unit 440 outputs an NG signal to the control device and the following control procedure is stopped. Further, if it is determined that the predetermined relative positional relationship is established within the predetermined time, an OK signal is output and this O
With the output of the K signal, the shift operation is started in the shift module M6. That is, this shift module M
The third switching valve 350 in 6 is set to switch from the first switching mode to the second switching mode. As a result, the lower mounting plate 302 is replaced by the upper mounting plate 30.
A shift operation starting from 0 is started, and the clamp module M7 brings the gear G into a clampable state with this shift operation. That is, the clamp module M
7 of the gears 412 and 414 are the first shaft portion G2 of the gear G.
Are located on both sides of a pair of flat surface portions G4 formed so as to face each other.

Then, in the shift module M6,
If the seventh sensor 358 does not output an ON signal within a predetermined time after the first switching mode is switched and set in the third switching valve 350, it is determined that an abnormal situation has occurred, and the following control procedure is performed. It is stopped and an alarm is issued. On the other hand, when the seventh sensor 358 outputs an ON signal within a predetermined time, it is detected that the lower mounting plate 302 has descended to the lower end position. Therefore, along with the output of this ON signal, the clamp module M7 At, the clamp operation is started. That is, the second opening / closing valve 410 in the clamp module M7 is set to be switched from the open mode to the connection mode. As a result, both Giyo 412, 41
4 grips the plane portion G4 of the gear G from both sides.

Here, in the ninth and tenth sensors 424 and 426 of the clamp module M7, it is determined that an abnormal situation has occurred unless both ON signals are output within a predetermined time after the connection mode is switched and set. Then, the following control procedure is stopped and an alarm is issued. On the other hand, when the 9th and 10th sensors 424 and 426 both output ON signals within a predetermined time, it is determined that the gear G has been clamped by both jaws 412 and 414. Then, in the shift module M6, the pulling operation is started.

That is, in the shift module M6, the third switching valve 350 is switched from the second switching mode to the first switching mode in accordance with the output of the ON signals from both the sensors 424 and 426. .. As a result, the pulling-up operation for raising the lower mounting plate 302 toward the upper mounting plate 300 is started, and with this pulling-up operation, the clamp module M7 is raised while the gear G is still clamped, and the gear G is coded. Lift to the position indicated by Ga. Here, in this shift module M6,
If the ON signal is not output from the eighth sensor 360 within a predetermined time after the first switching mode is switched and set in the third switching valve 350, it is determined that an abnormal situation has occurred, and the following control procedure is performed. Is stopped and an alarm is issued. On the other hand, when the eighth sensor 360 outputs an ON signal within a predetermined time, it is determined that the predetermined shift operation is completed. Then, the turning operation is started in the turning module M3.

That is, in the turning module M3, with the output of the ON signal from the eighth sensor 360,
The second switching valve 146 is set to switch from the second switching mode to the first switching mode. As a result,
The lower mounting plate 114 is rotated around the central axis with respect to the upper mounting plate 112 by a predetermined angle θ, that is, by 90 degrees. Here, in this turning module M3,
If the ON signal is not output from the fifth sensor 164 within the predetermined time after the first switching mode is switched and set in the second switching valve 146, it is determined that an abnormal situation has occurred, and the following control procedure is performed. Is stopped and an alarm is issued. On the other hand, when the ON signal is output from the fifth sensor 164 within the predetermined time, it is determined that the predetermined turning operation is completed. Then, the reversing operation is started in the reversing module M2.

That is, in the inversion module M2, with the output of the ON signal from the fifth sensor 164,
The first switching valve 80 moves from the second switching mode to the first switching valve.
Is set to the switching mode of. As a result, the lower mounting plate 62 is driven to rotate about the rotating shaft 60 with respect to the upper mounting plate 60 by a predetermined angle α, that is, 45 degrees. Here, in this inversion module M2, the first
Of the third sensor 100 within a predetermined time after the first switching mode is switched and set in the switching valve 80 of
If the ON signal is not output from, it is determined that an abnormal situation has occurred, the following control operation is stopped, and an alarm is issued. On the other hand, when the third sensor 100 outputs the ON signal within the predetermined time, it is determined that the predetermined reversing operation is completed, and the following control procedure is executed.

On the other hand, with the output of the ON signal from the fifth sensor 164 described above, in parallel with the above-described inversion operation,
In the robot 12, the z-axis arm 14 is moved along the y-axis direction by a predetermined distance k ₀ so that the gear G is directly above the inclined surface portion S2 of the hole H2 (that is, the hole G2) as indicated by the reference symbol Gc. H2 and gear G are aligned with each other). Here, the predetermined distance k ₀ is calculated from the following equation. That is, k ₀ = k ₁ − (h ₁ + h ₀ −h _H ) tan α, where k ₁ : the distance on the horizontal plane S 1 from the center point of the gear G at the installation position to the center point of the hole H 2 h 1: times Distance from the central axis of the moving shaft 60 to the bottom surface of the gear body G1 of the gripped gear G While the z-axis arm 14 of the robot 12 is moving, the first opening / closing valve 290 of the compliance module M5 is opened. The mode is switched to the connection mode, and the lock mechanism 246 executes the lock operation. As a result, the centering operation of the compliance module M5 is prohibited while the z-axis arm 14 is moving.

On the other hand, as described above, with the gear G brought into alignment with the hole H2, the movement of the z-axis arm 14 is stopped and a stop signal is output. Then, according to the output of this stop signal, the compliance module M5
The first opening / closing valve 290 is set to switch from the connection mode to the opening mode, the lock operation of the lock mechanism 246 is prohibited, the alignment operation of the compliance module M5 is restarted, and the shift operation of the shift module M6 is performed. Be started. That is, the third switching valve 350 in this shift module M6
However, the switching mode is set again from the first switching mode to the second switching mode. As a result, the shift operation of lowering the lower mounting plate 302 from the upper mounting plate 300 is started, and the clamp module M7 inserts the clamped gear G into the hole H2 along with the shift operation.

That is, when the shift module M6 is activated, the clamp module M7 is pushed down along the central axis of the shift module M6 (in other words, along the axis inclined by the inclination angle α from the vertical line). , The gear G is
It will be inserted into the corresponding hole H2. Here, in this insertion operation, as described above, in the compliance module M5, the centering operation is automatically and passively performed, and the cushion module M4 is also used.
At, the buffering operation of the shock at the time of the interference is executed in a passive manner.

Then, in the shift module M6,
If the seventh sensor 358 does not output an ON signal within a predetermined time after the first switching mode is switched and set in the third switching valve 350, it is determined that an abnormal situation has occurred, and the following control procedure is performed. It is stopped and an alarm is issued. On the other hand, when the seventh sensor 358 outputs an ON signal within a predetermined time, it is detected that the lower mounting plate 302 has descended to the lower end position. Therefore, along with the output of this ON signal, the clamp module M7 At, the unclamp operation is started. That is, this clamp module M7
The second on-off valve 410 in is switched from the connection mode to the open mode and is set. As a result, both Jyo 412
414 is separated from the plane portion G4 of the gear G on both sides, and the gear G is unclamped from the clamp module M7.

Here, in the ninth and tenth sensors 424, 426 of the clamp module M7, if the ON signals are still output even if a predetermined time has elapsed after the open mode was switched and set, it is abnormal. When it is determined that a situation has occurred, the following control procedure is stopped and an alarm is issued. On the other hand, the ninth and tenth sensors 424, 4
When the output of the ON signals is stopped from within 26 within a predetermined time, it is determined that the gear G is separated from the two yaw 412 and 414 and unclamped. Then, in the shift module M6, the pulling operation is started again.

That is, in this shift module M6, the third switching valve 350 is set to switch from the second switching mode to the first switching mode as the output of the ON signals from both the sensors 424 and 426 is stopped. It As a result, a pulling operation for raising the lower mounting plate 302 toward the upper mounting plate 300 is started, and with this pulling operation, the clamp module M7 is raised while the gear G is unclamped, and the gear G has a hole H2. It will be left inside. Here, in the shift module M6, the eighth sensor 3 is operated within a predetermined time after the first switching mode is switched and set by the third switching valve 350.
If the ON signal is not output from 60, it is determined that an abnormal situation has occurred, the following control procedure is stopped, and an alarm is issued. On the other hand, when the eighth sensor 360 outputs an ON signal within a predetermined time, it is determined that the predetermined shift operation is completed, and the predetermined standby state is brought about.

Then, in the robot 12, an operation of returning the z-axis arm 14 along the y-axis direction by a predetermined distance k _{0 and} returning it to the original position is executed. Also in the movement operation of the z-axis arm 14, the first opening / closing valve 290 in the compliance module M5 is set to be switched from the open mode to the connection mode, and the lock mechanism 246 performs the lock operation, as in the above-described movement operation. It will be executed. As a result, during the movement of the z-axis arm 14,
The alignment operation in the compliance module M5 will be prohibited.

When the return movement of the z-axis arm 14 by the robot 12 is completed, a return movement end signal is output. With the output of the return movement end signal, the reversing module M2 and the turning module M3 respectively,
The return operation to the standby position is started. That is, in the reversing module M2, the first switching valve 80 is switched from the first switching mode to the second switching mode in accordance with the output of the return movement end signal. As a result, the lower mounting plate 62 is returned and rotated around the rotation shaft 60 toward the standby position by a predetermined angle α, that is, 45 degrees with respect to the upper mounting plate 60. Here, in the reversing module M2, the second switching valve 80
If the ON signal is not output from the second sensor 98 within a predetermined time after the switching mode is switched and set,
When it is determined that an abnormal situation has occurred, the following control operation is stopped and an alarm is issued. On the other hand, this second sensor 9
When the ON signal is output from 8 within a predetermined time, it is determined that the predetermined return operation is completed, and the predetermined standby state is set.

On the other hand, in the turning module M3, the second switching valve 146 is set to be switched from the first switching mode to the second switching mode in accordance with the output of the return movement completion signal described above. As a result, the lower mounting plate 114
Is rotated about the central axis with respect to the upper mounting plate 112 by a predetermined angle θ, that is, 90 degrees toward the standby position. Here, in the turning module M3, an abnormal situation occurs unless an ON signal is output from the fourth sensor 162 within a predetermined time after the second switching mode is switched and set by the second switching valve 146. When it is judged that it has been done, the following control procedure is stopped and an alarm is issued. On the other hand, when the ON signal is output from the fourth sensor 162 within the predetermined time, it is determined that the predetermined turning operation is completed, and the predetermined standby state is set.

In the entire range of the control procedure described above,
An ON signal is output from the first sensor 54 in the holder module M1, the mounting plate 30 falls, and the fixing member 2
When it is determined that the connection state with 8 is released, the control procedure is immediately stopped and an alarm action is issued no matter which control step is being executed. Further, while the shift operation in the shift module M6 is being executed, an ON signal is output from the sixth sensor 216 in the cushion module M4, and the lower mounting plate 182 with respect to the upper mounting plate 180, If it is judged that the allowable cushion amount is close,
The control procedure of the shift operation is immediately stopped and an alarm is issued.

In this way, in this embodiment, when the gear G is inserted into the hole H2 arranged in parallel on the inclined surface portion along the axis different from the mounted state, the robot 12
On the side, it is only necessary to move independently along the x-axis, y-axis, and z-axis directions, and the descending operation for clamping the gear G and the inserting operation along the inclined axis are directly performed. Specifically, it is achieved by driving the shift module M6. That is, if the shift module M6 is not provided, the clamp module M7 is moved in the y-axis and z-axis directions in the robot 12 with the gear G held in the inclined posture as described above. Along with this, it is necessary to execute a control for moving them at the same time and in a state where their moving speeds are accurately defined with each other, which complicates the control content. However, in this one embodiment, as described above, the hand mechanism 10
Since the shift module M6 is provided on the robot 12, the robot 12 only has to move independently along the y-axis and z-axis directions, and it is not necessary to directly execute the inserting operation. The control contents in the robot 12 will be simplified.

Particularly, in the hand mechanism 10 of this embodiment, the posture changing operation of the clamp module M7 is modularized for each element, and is executed independently for each module. There is. As a result, product changes and design changes occur, and the clamp module M7
Even if it is necessary to change the posture change motion in the above, it is sufficient to change the setting or change the design of the movement amount only for the module in charge of the changed posture change element. There is no need to do it. In this way, it is possible to respond to changes in the posture changing motion within a short time, and
Other modules that do not require setting changes can be used as they are, so that the hand mechanism 10 having a very high economical efficiency is provided.

(Explanation of Optimality of Arrangement Order of Seven Types of Modules M1 to M7) Next, seven types of modules M1 when the operation in the hand mechanism 10 described above is executed.
The optimality of the arrangement order of M7 will be described. That is, in order to attach any one of the modules 2 to M7 to the z-axis arm 14, the holder module M1 is indispensable in the uppermost position, and in order to clamp the gear G, the clamp module M1 is required. M7 is also indispensable when it is located at the bottom. Therefore, when the five types of modules M2 to M6 placed between them are grouped, the holder module M
The arrangement order from 1 to the clamp module M7 becomes a problem.

First, the first condition is that the reversing module M1 is located closest to the mounting plate 22 in this group. In other words, the other modules M2, M3
M4 and M5 are located closer to the clamp module M7 than M1. Next, as the second condition, the shift module M6 and the turning module M3 are located closer to the holder module M1 than the cushion module M4 and the compliance module M5. As a third condition, the order of the shift module M6 and the turning module M3 can be interchanged, and the cushion module M4 and the compliance module M3 can be interchanged.
It is also possible to interchange the order with 5.

As a result, in the above-described embodiment,
From the holder module M1 to the clamp module M7, (1) the modules are arranged in the order of M1 → M2 → M3 → M4 → M5 → M6 → M7, but this is not the only option. However, the following three types of arrangement orders are optimal for executing the above-described insertion operation. (2) M1 → M2 → M3 → M5 → M4 → M6 → M7 (3) M1 → M3 → M2 → M4 → M5 → M6 → M7 (4) M1 → M3 → M2 → M5 → M4 → M6 → M7 That is, If the shift module M6 under the first condition is arranged on the holder module M1 side, disregarding that the shift module M6 is located closer to the clamp module M7 side than the reversing module M1, the shift direction achieved by this shift module M6. The (movement direction) is limited to the vertical axis direction, and as a result, the operation of inserting the pin into the hole formed in the inclined surface portion S2 cannot be performed by the shift module M6. .. In this way, the shift module M6 must be positioned closer to the clamp module M7 than the reverse module M1.

On the other hand, if the turning module M3 under the above-mentioned first condition is arranged on the holder module M1 side ignoring that it is located on the clamp module M7 side rather than the reversing module M1, the turning module M3 turns. Along with the operation, the turning shaft 60 of the reversing module M1 also turns to a state along the y-axis. As a result, in the reversing operation executed after the turning operation, the clamp module M
The gear G gripped by 7 is rotated around the y-axis, and these gears G never face the hole H2, respectively. In this way, it is essential that the turning module M3 is located closer to the clamp module M7 than the reversing module M1.

Next, the shift module M6 and the turning module M3 under the second condition are located on the side of the clamp module M7, ignoring that they are located on the holder module M1 side rather than the cushion module M4. And let
If there is a displacement between the pin P and the hole H along the direction orthogonal to the inclined surface S2, the shock due to the interference due to this displacement is absorbed by the cushion module M4. Before it will act directly on the shift module M6 or the turn module M3.
For this reason, the shift module M6 and the turning module M3
In order to protect them from the impact due to interference, it is indispensable to position them on the holder module M1 side rather than the cushion module M4.

On the other hand, the shift module under the second condition
Compliance module M3 and turning module M3
Located closer to the holder module M1 than the module M5
Ignore that, and position it on the side of the clamp module M7.
Then, provisionally, along the inclined surface portion S2 between the pin P and the hole H.
If misalignment has occurred, it is based on this misalignment.
Division force F₀ Is compensated by the compliance module M5
Shift module M6 or cushion
It will act directly on the Jule M4. For this reason,
Shift module M6 and turning module M3, no position
Component force due to this ₀ These to protect against the action of
The compliance module is better than the compliance module M5.
It must be located on the Yule M1 side.

Incidentally, the shift module M6 which is the third condition
Regarding the interchangeability of the arrangement order of the turning module M3 and the turning module M3, the shift direction in the shift module M6 is restricted to the direction along the center axis of itself, and the turning axis in the turning module M3 is in the direction along the center axis of itself. However, even if the order of arrangement of the two is changed, no problem will occur. Regarding the interchangeability of the arrangement order of the cushion module M4 and the compliance module M5, which is the third condition, both of them operate passively, so that it is not possible to give priority to them. However, even if the arrangement order of both is exchanged, only the same situation can be achieved. It goes without saying that the present invention is not limited to the configuration of the above-described embodiment and can be variously modified without departing from the scope of the present invention.

For example, in the above-described embodiment, the hand mechanism 10 has been described as including all seven types of modules M1 to M7. However, as described above, the hand mechanism 10 is mounted on the horizontal plane S1. This is a configuration necessary for performing the operation of gripping the gear G being held at one time by the clamp module M7 attached to the lower part of the hand mechanism 10 and inserting it into the hole H2 formed on the inclined surface portion S2. However, the present invention is not limited to such a configuration, and in the case of performing other motions, the motion elements essential for realizing the necessary posture changing motion in the clamp module M7 are Kind of module M
It may be achieved in a state in which 2 to 6 are arbitrarily combined.

Further, in the above-mentioned embodiment, when the seven types of modules M1 to M7 are grouped, it is explained that the hand mechanism 10 is composed only of these groups of modules M1 to M7. The invention is not limited to such a configuration, and for example, the turning module M3 may be provided further on the holder module M1 side than this group. By further providing the turning module M3 in this way, it is not necessary to adopt a structure for turning the z-axis arm 22 around its own central axis (that is, a vertical axis) on the robot 12 side, and the entire structure of the robot 12 is eliminated. It is possible to simplify.

[0179]

As described in detail above, the robot hand mechanism according to the present invention is attached to the tip of the arm portion of the robot, and the modules for executing the predetermined element movements can be independently combined with each other. In a hand mechanism that is configured to perform a desired element movement by appropriately combining any of these modules, the upper mounting plate and the upper mounting plate are arranged in parallel with each other. The lower mounting plate movably arranged along the central axis of the, the elastic supporting means for buffering the movement of the lower mounting plate toward the upper mounting plate, and the buffering force in the elastic supporting means are adjusted. It is characterized by comprising a cushioning module having a buffering force adjusting means for controlling.

Further, in the robot hand mechanism according to the present invention, the elastic supporting means is interposed between the upper mounting plate and the lower mounting plate and exerts an elastic biasing force in a direction in which they are separated from each other. A spring is provided, and the buffer force adjusting means is provided on the upper mounting plate or the lower mounting plate with a locking member whose mounting position along the central axis thereof is changed.
It is characterized in that one end of the coil spring is locked to this locking member. Further, in the robot hand mechanism according to the present invention, the cushioning force adjusting means includes a through hole formed in the upper mounting plate or the lower mounting plate and a plurality of holes along the central axis line on the inner peripheral surface of the through hole. A plurality of circumferential grooves are formed, the locking member includes a locking ring selectively fitted into one of the plurality of circumferential grooves, and the plurality of circumferential grooves are selected. This is characterized in that the set length of the coil spring whose one end is locked by the locking ring is changed to adjust the elastic biasing force of the coil spring.

In the robot hand mechanism according to the present invention, the cushioning force adjusting means is formed on the through hole formed in the center of the upper mounting plate or the lower mounting plate and on the inner peripheral surface of the through hole. The locking member includes a screw member that is screwed into the screw groove and is mounted so as to be able to reciprocate along the center axis, and the screw member is provided around the center axis of the screw member. By rotationally driving, the set length of the coil spring whose one end is locked by the screw member is changed to adjust the elastic biasing force of the coil spring. In addition, the robot hand mechanism according to the present invention is characterized by further including an intermediate member disposed in a telescopic shape between the upper mounting plate and the lower mounting plate. Therefore, according to the present invention, it is possible to provide a robot hand mechanism provided with a cushion module which can achieve weight reduction, high precision, and miniaturization.

[Brief description of drawings]

FIG. 1 is a front view showing the configuration of an embodiment of a hand mechanism according to the present invention.

FIG. 2 is a perspective view showing a configuration of an embodiment of a hand mechanism according to the present invention.

FIG. 3 shows the hand mechanism shown in FIG. 1 inverted by an angle α,
It is a front view shown in the state shown in the state turned only 90 degrees.

FIG. 4 shows the hand mechanism shown in FIG. 2 inverted by an angle α,
It is a perspective view shown in the state shown in the state turned only 90 degrees.

FIG. 5 is a perspective view schematically showing the configuration of a robot to which the hand mechanism according to the present invention is applied.

6 is a perspective view for explaining an operation of transferring an article clamped by the hand mechanism shown in FIG.

7 is a perspective view specifically showing a configuration of a holder module included in the hand mechanism shown in FIG.

FIG. 8 is an exploded perspective view specifically showing the configuration of the holder module shown in FIG.

9 is a top view showing the structure of the holder module shown in FIG. 7. FIG.

FIG. 10 is a vertical cross-sectional view showing the holder module shown in FIG. 9 taken along the line aa.

FIG. 11 is a right side view showing the right side surface shape of the holder module shown in FIG. 9.

FIG. 12 is a left side view showing a left side shape of the holder module shown in FIG.

FIG. 13 is a front view showing the front shape of the holder module shown in FIG. 9.

14 is a perspective view specifically showing a configuration of an embodiment of a reversing module included in the hand mechanism shown in FIG.

FIG. 15 is an exploded perspective view showing the internal structure of the inversion module shown in FIG. 14 in a divided manner.

16 is a front view showing the front shape of the reversing module shown in FIG.

FIG. 17 is a top view showing the top surface shape of the inversion module shown in FIG.

FIG. 18 is a bottom view showing the bottom surface shape of the reversing module shown in FIG. 14.

FIG. 19 is a left side view showing the left side shape of the reversing module shown in FIG.

FIG. 20 is a rear view showing the rear surface shape of the inversion module shown in FIG.

FIG. 21 is a cross-sectional view showing the inversion module shown in FIG. 16 taken along the line aa.

FIG. 22 is a cross-sectional view showing the inversion module shown in FIG. 21 in a state of being cut along the line bb.

FIG. 23 is a cross-sectional view showing the inversion module shown in FIG. 21 in a state of being cut along the line cc.

FIG. 24 is a left side view showing the reversing module provided in the hand mechanism shown in FIG. 1 as a configuration of another embodiment.

FIG. 25 is a front view showing the front shape of the reversing module of another embodiment shown in FIG. 24.

FIG. 26 is a perspective view specifically showing a configuration of a turning module provided in the hand mechanism shown in FIG.

FIG. 27 is an exploded perspective view showing the internal structure of the turning module shown in FIG. 26 in a divided manner.

28 is a front view showing the front shape of the turning module shown in FIG. 26. FIG.

FIG. 29 is a top view showing the top surface shape of the turning module shown in FIG. 26.

30 is a bottom view showing the bottom surface shape of the turning module shown in FIG. 26. FIG.

31 is a left side view showing a right side surface shape of the turning module shown in FIG. 26. FIG.

32 is a sectional view showing the turning module shown in FIG. 28 in a state of being cut along line aa. FIG.

FIG. 33 is a sectional view showing the turning module shown in FIG. 21 in a state of being cut along the line bb.

FIG. 34 is a cross-sectional view showing the turning module shown in FIG. 33 in a state of being cut along the line cc.

FIG. 35 is a cross-sectional view showing the turning module shown in FIG. 31 in a state of being cut along the line d-d.

FIG. 36 is a sectional view showing the turning module shown in FIG. 30 in a state of being cut along the line ee.

FIG. 37 is a cross-sectional view showing the turning module shown in FIG. 29 in a state of being cut along the line ff.

FIG. 38 is a front view showing the turning module shown in FIGS. 26 to 37 as a configuration of another embodiment.

FIG. 39 is a top view showing the top surface shape of a turning module of another embodiment shown in FIG. 38.

40 is a perspective view specifically showing a configuration of an embodiment of the cushion module provided in the hand mechanism shown in FIG. 1. FIG.

41 is a front view showing the front shape of the cushion module shown in FIG. 40. FIG.

42 is a top view showing a top surface shape of the cushion module shown in FIG. 40. FIG.

43 is a bottom view showing the bottom shape of the cushion module shown in FIG. 40. FIG.

44 is a right side view showing a state in which the right side shape of the cushion module shown in FIG. 40 is partially determined.

FIG. 45 is a diagram showing that the cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the a line.

FIG. 46 is a cross-sectional view showing a state of formation of a circumferential groove formed on the inner peripheral surface of the central through hole shown in FIG. 45.

47 is a front view showing the cushion module provided in the hand mechanism shown in FIG. 1 as a configuration of another embodiment. FIG.

48 is a top view showing the top shape of the cushion module of another embodiment shown in FIG. 47. FIG.

49 is a left side view showing the left side shape of the cushion module of another embodiment shown in FIG. 47. FIG.

50 is a cross-sectional view showing the cushion module of another embodiment shown in FIG. 48, taken along the line aa. FIG.

51 is a cross-sectional view showing the cushion module of another embodiment shown in FIG. 48, taken along the line bb.

52 is a cross-sectional view showing the cushion module of another embodiment shown in FIG. 48, taken along the line cc.

53 is a perspective view specifically showing a configuration of a cushion module provided in the hand mechanism shown in FIG. 1. FIG.

54 is a front view showing the front shape of the cushion module shown in FIG. 53. FIG.

55 is a top view showing the top surface shape of the cushion module shown in FIG. 53. FIG.

56 is a bottom view showing the bottom surface shape of the cushion module shown in FIG. 53. FIG.

FIG. 57 is a schematic view showing the cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along d line.

FIG. 58 is a drawing of the cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the a line.

FIG. 59 is a cross-sectional view of the cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along c line.

FIG. 60 is a block diagram showing the cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along line b.

61 is a cross-sectional view showing the execution state of the compliance operation of the cushion module shown in FIG. 52 in a plane orthogonal to the central axis.

62 is a cross-sectional view showing the execution state of the compliance operation of the cushion module shown in FIG. 52 in the plane orthogonal to the central axis and in the inclination with respect to the central axis.

63 is a front view showing a front shape of a shift module included in the hand mechanism shown in FIG. 1. FIG.

64 is a top view showing the top surface shape of the shift module shown in FIG. 63. FIG.

65 is a bottom view showing the bottom surface shape of the shift module shown in FIG. 63. FIG.

66 is a left side view showing the left side shape of the shift module shown in FIG. 63. FIG.

67 is a cross-sectional view showing the inversion module shown in FIG. 64 in a state of being cut along the line aa.

68 is a cross-sectional view showing the inversion module shown in FIG. 64 in a state of being cut along the line bb.

69 is a cross-sectional view showing the inversion module shown in FIG. 64 in a state of being cut along the line cc.

FIG. 70 is a cross-sectional view showing in detail the formation state of the first communication passage shown in FIG. 69.

71 is a perspective view specifically showing the configuration of the first embodiment of the clamp module provided in the hand mechanism shown in FIG. 1. FIG.

72 is a front view showing the front shape of the clamp module shown in FIG. 71. FIG.

73 is a top view showing the top surface shape of the clamp module shown in FIG. 71. FIG.

FIG. 74 is a bottom view showing the bottom surface shape of the clamp module shown in FIG. 71.

75 is a right side view showing the right side shape of the clamp module shown in FIG. 71. FIG.

76 is a sectional view of the clamp module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along a line.

77 is a sectional view of the clamp module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along a line.

78 is a sectional view of the clamp module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along a line.

79 is a perspective view showing a clamp module provided in the hand mechanism shown in FIG. 1 as a configuration of a second embodiment. FIG.

80 is a front view showing the front shape of the clamp module of the second embodiment shown in FIG. 79. FIG.

81 is a top view showing the top surface shape of the clamp module of the second embodiment shown in FIG. 79. FIG.

82 is a bottom view showing the bottom surface shape of the clamp module of the second embodiment shown in FIG. 79. FIG.

83 is a right side view showing the right side surface shape of the clamp module of the second embodiment shown in FIG. 79. FIG.

84 is a cross-sectional view showing the clamp module of the second embodiment shown in FIG. 80, taken along the line aa. FIG.

85 is a cross-sectional view showing the clamp module according to the second embodiment shown in FIG. 83, taken along the line bb.

86 is a front view showing a mode in which the compliance module is attached to the center of the lower surface of the attachment plate of the clamp module of the second embodiment shown in FIG. 83.

FIG. 87 is a front view showing a state in which the positioning pin is inserted into the work piece whose position is displaced in the mode shown in FIG. 86;

88 is a front view showing the state in which the locking mechanism of the compliance module is locked from the state shown in FIG. 87 to align the center of the work with the center of the clamp module. FIG.

89 is a perspective view showing a clamp module provided in the hand mechanism shown in FIG. 1 as a configuration of a third embodiment. FIG.

90 is a front view showing the front shape of the clamp module of the third embodiment shown in FIG. 89. FIG.

91 is a top view showing the top shape of the clamp module of the third embodiment shown in FIG. 89. FIG.

92 is a right side view showing the right side surface shape of the clamp module of the third embodiment shown in FIG. 89. FIG.

FIG. 93 is a diagram for explaining a pick and place operation of gears by the hand mechanism in the embodiment.

FIG. 94 is a view showing a connection mode of sensors and valves provided in the hand mechanism in this embodiment.

FIG. 95 is a timing chart for executing a gear pick-and-place operation by the hand mechanism in the embodiment.

[Explanation of symbols]

 M1 holder module, M2 reversing module, M3 turning module, M4 cushion module, M5 compliance module, M6 shift module, M7 clamp module, CL z-axis arm axis line, RL reversing module S axis of rotation, S Horizontal surface portion, S2 inclined surface portion, H1 first hole, H2 second hole, α reversal angle, θ turning angle G gear (article), G1 gear body, G2 first shaft portion, G3 second shaft portion, G4 plane part, 10 hand mechanism, 12 robot, 14 z-axis arm, 14a long groove, 16 x-axis arm, 18 y-axis arm, 20 y-axis moving block, 22; 24; 26 drive motor, 28 fixing member, 30 mounting plate , 30a mounting through hole, 30b positioning pin, 30c positioning hole, 30d screw hole, 0e mounting hole, 30f long groove, 32 coupling mechanism, 34 main body, 34a through hole, 34c first mounting hole, 34d second mounting hole, 34e third mounting hole, 34f recess, 36 receiving portion, 36a one side surface, 36b groove, 38 pressing portion, 38a one side, 38b groove, 38c insertion hole, 40a; 40b bolt, 42 pin, 44 centering (history member), 45 strain sensor, 46 shear pin bolt, 48 fall prevention pin, 50 eccentric pin, 50a pin main body, 50b eccentric disc, 52 mounting piece, 54 first sensor.

Claims (5)

[Claims] 1. A robot attached to a tip of an arm portion of a robot and capable of independently combining modules for executing a predetermined element movement, and by appropriately combining arbitrary modules among these modules, In a hand mechanism configured to perform a desired element movement, an upper mounting plate and a lower mounting plate disposed parallel to the upper mounting plate and movable along the central axis of the upper mounting plate. And a cushion module including elastic supporting means for buffering the movement of the lower mounting plate toward the upper mounting plate, and buffering force adjusting means for adjusting the buffering force of the elastic supporting means. Robot hand mechanism characterized by. 2. The elastic support means includes a coil spring that is interposed between the upper mounting plate and the lower mounting plate and exerts an elastic biasing force in a direction in which the upper mounting plate and the lower mounting plate are separated from each other. The upper mounting plate or the lower mounting plate is provided with a locking member whose mounting position along the central axis thereof is changed, and one end of the coil spring is locked to the locking member. Item 2. The robot hand mechanism according to Item 1. 3. The cushioning force adjusting means includes a through hole formed in the upper mounting plate or the lower mounting plate, and a plurality of circumferential grooves formed on an inner peripheral surface of the through hole along a central axis. The locking member includes a locking ring that is selectively fitted into one of the plurality of circumferential grooves, and by selecting the plurality of circumferential grooves formed, the locking ring is formed. 3. The robot hand mechanism according to claim 2, wherein a set length of the coil spring whose one end is locked to is changed to adjust an elastic biasing force of the coil spring. 4. The cushioning force adjusting means has a through hole formed in the center of the upper mounting plate or the lower mounting plate, and a thread groove formed on the inner peripheral surface of the through hole. The stop member is provided with a screw member that is screwed into the thread groove and is attached so as to be able to reciprocate along the central axis, and the screw member is rotatably driven around its own central axis so that the screw member 3. The robot hand mechanism according to claim 2, wherein the set length of the coil spring whose one end is locked is changed to adjust the elastic biasing force of the coil spring. 5. The robot hand mechanism according to claim 1, further comprising an intermediate member disposed in a telescopic shape between the upper mounting plate and the lower mounting plate.