JP2705737B2 - Robot hand mechanism - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot which is attached to the tip of an arm portion of a robot, and which is capable of performing a predetermined elemental movement independently of each other and can be combined with each other. The present invention relates to a robot hand mechanism configured to perform a desired element movement by appropriately combining the above, and particularly to a robot hand mechanism having a shift module.

[0002]

2. Description of the Related Art Conventionally, a hand mechanism of a robot, which is interposed between a finger portion and an arm portion of a robot and causes the finger portion to perform a predetermined posture changing operation, includes a reversing operation, a shift operation, a turning operation, A configuration in which the posture changing operation of the finger portion is performed in a state in which the element movements of the cushioning operation and the compliance operation are arbitrarily combined is generally adopted. However, in such a conventional hand mechanism, since a configuration is adopted in which one finger mechanism performs a unique one posture changing operation in one hand mechanism, the finger unit performs another posture changing operation. Whenever it becomes necessary, the design is performed and the hand mechanism is replaced as a whole.

For example, when inserting the same pin into the same hole, specifically, when the hole is formed in a horizontal plane and when the hole is formed in an inclined surface, the configuration of the finger portion is different. Are the same, but the configuration of the hand mechanism must be designed and manufactured in a unique state. As described above, in the conventional hand mechanism, every time the posture changing operation in the finger portion is different, the design is changed, and the hand must be manufactured with a configuration unique to the posture changing operation. For this reason, it is pointed out that it takes a long time to change the design or the like, and the mechanism for each posture changing operation is not shared, which causes a problem from the viewpoint of economy.

To solve this problem, a prior application filed by the same applicant as the present applicant has been filed as Japanese Patent Application No. 1-1314.
No. 02 and Japanese Patent Application No. 1-131403. The hand mechanisms disclosed in these prior applications are interposed between a finger portion and an arm portion of a robot, and cause the finger portion to perform a predetermined posture changing operation, and perform a reversing operation, a shift operation, a turning operation, Modules for performing the elementary movements of the cushioning operation and the compliance operation are provided independently and can be combined with each other, and by combining any of these modules, a predetermined posture changing operation is performed on the finger portion. It is characterized by having

In the hand mechanism according to the prior application, the mounting surfaces of the modules, the mounting surface of the hand portion, and the mounting surface of the finger portion have mounting holes spaced at a predetermined pitch, respectively. It is characterized in that it is formed and a position regulating means for attaching the modules to each other in a predetermined attachment state is provided. In the robot hand mechanism configured as described above, the modules for performing each of the element movements of the inversion operation, the shift operation, the turning operation, the cushion operation, and the compliance operation are provided in an independent state and can be combined with each other. Therefore, by simply combining the modules responsible for each element movement required for the posture change operation in the finger part, the required posture change operation in the finger part can be achieved without any design change of the hand mechanism. Can be done.

[0006]

In the hand mechanism according to the prior application configured as described above, since a plurality of modules are combined, the dimensional error, weight, and height of each module are stacked. Become. As a result, if the modules are combined so as to satisfy the predetermined function, the weight, the height dimension, the mounting accuracy, and the like may exceed the allowable values, and such a hand mechanism may not be practically used. There is. For this reason, in a hand mechanism composed of a combination of a plurality of modules, it is required that each module be reduced in weight, accuracy, and size. SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-described problems, and an object of the present invention is to provide a robot hand mechanism having a shift module capable of achieving weight reduction, high accuracy, and downsizing.

[0007]

Means for Solving the Problems The above-mentioned problems are solved,
In order to achieve the object, a robot hand mechanism according to the present invention is attached to a tip of an arm portion of a robot, and includes modules for executing a predetermined elemental motion that can be combined with each other in an independent state. In a hand mechanism configured to perform a desired element movement by appropriately combining arbitrary modules in the upper mounting plate, the upper mounting plate is disposed in parallel with the upper mounting plate, and is arranged along a central axis of the upper mounting plate. A lower mounting plate movably disposed; a moving drive means integrally mounted on the upper mounting plate for moving the lower mounting plate toward and away from the upper mounting plate; and an upper mounting plate. And a lower mounting plate, wherein the shift module includes an intermediate member that is moved in a telescopic manner.

In the robot hand mechanism according to the present invention, the intermediate member is guided by the upper mounting plate so as to be movable along a central axis of the upper mounting plate. The intermediate member is guided so as to be movable along its central axis, the rising end position of the intermediate member with respect to the upper mounting plate is regulated, and the lower end position of the lower mounting plate with respect to the intermediate member is regulated. .
Further, in the robot hand mechanism according to the present invention, the lower mounting plate is provided with a pair of objects to be detected for indicating a rising end position and a lowering end position with respect to the upper mounting plate, and the upper mounting plate is attached to the lower mounting plate. In addition, a pair of sensors for detecting a rising end position and a falling end position of the lower mounting plate by detecting each object to be detected are attached. Further, in the robot hand mechanism according to the present invention, each of the detected objects may be constituted by a magnet, and the sensor may be constituted by a non-contact type magnetic sensor which is turned on when the corresponding magnet approaches. Features.

[0009]

In the robot hand mechanism constructed as described above, an upper mounting plate and a lower mounting member which is disposed in parallel with the upper mounting plate and movably disposed along the center axis of the upper mounting plate. A plate, a moving drive means integrally attached to the upper mounting plate, and a driving means for driving the lower mounting plate to move toward and away from the upper mounting plate; and an interposition between the upper mounting plate and the lower mounting plate. In addition, since both are configured to have the shift module including the intermediate member that is moved in a telescopic manner, the above-described requirement can be satisfied.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The construction of an embodiment of a robot hand mechanism according to the present invention will be described below in detail with reference to the accompanying drawings. (Schematic Configuration of Hand Mechanism) Hand mechanism 1 of this embodiment
0 is the robot 12 (FIG. 5) as shown in FIGS.
Are mounted on the distal end of the z-axis arm 14 as an arm unit of the above-mentioned type, and modules for executing predetermined element movements are provided so as to be able to be combined with each other in an independent state, and arbitrary modules among these modules are appropriately combined. Thus, it is configured to perform a desired element movement. That is, the hand mechanism 10 is attached to the lower end of the z-axis arm 14 and allows a holder module M that allows various modules described below to be attached to the Z-axis arm 14.
1, a reversing module M2 for performing a reversing operation, a revolving module M3 for performing a revolving operation, a cushion module M4 for performing a cushion operation, and a compliance module M5 for performing a compliance operation.
And a shift module M6 for executing a shift operation and a clamp module M7 for executing an article clamping operation in an arbitrary combination. Are used to transfer seven types of modules M1 to M7 from a z-axis arm 14 (described later) of a robot 12 to which the hand mechanism 10 is attached.
It is provided in a state of being arranged in the order described above toward the tip.

Here, the inversion operation in the above-described inversion module M2 means a rotation operation around the rotation support axis RL set so as to be orthogonal to the center axis CL of itself as shown in FIGS. The turning operation in the turning module M3 means a rotating operation around the axis along its own central axis CL, the shifting operation in the shift module M6 means a moving operation along its own central axis CL, and the clamping module M3 The clamping operation in M7 means a gripping operation for gripping an article from both sides. As will be described in detail later, these operations are configured to function as so-called active modules that are driven by driving mechanisms provided in the corresponding modules M2, M3, M6, and M7. . Further, the cushioning operation of the cushion module M4 means an absorbing operation of an abnormal force acting along its own central axis, and the compliance operation of the compliance module M5 is a position perpendicular to its own central axis. Shifts and angular shifts, and these operations are performed without having a driving source in each of the corresponding modules M4 and M5.
It is configured to function as a so-called passive module that operates with the force of the other party.

Note that these seven types of modules M1 to M7
The holder module M1 is always attached directly to the lower end of the z-axis arm 14, and the clamp module M7 is attached to the most distal end, as will be described later in detail with respect to the optimality of the sequence setting. If the minimum number of combinations is used, there are two combinations of the holder module M1 and the cushion module M7, and the reversing module M2, the turning module M3, the cushion module M4, the compliance module Whether or not the module M5 and the shift module M6 are mounted and the arrangement order thereof are arbitrarily set from the viewpoint of achieving the posture changing operation of the clamp module M7.

The seven types of modules M1 to M
7, the operation mode of the hand mechanism 10 based on the above-described arrangement order will be described in detail later. However, as shown in FIG. 6, the clamp module attached to the tip of the hand mechanism 10 The horizontal plane S
₁ , a gear member G placed on a state in which its central axis is erected is gripped, and the gear member G is held at a predetermined angle α with respect to a horizontal plane S1 (for example, 45 in this embodiment).
Degree) The z-axis arm 14 is rotated (reversed) by an angle α from the center axis CL of the z-axis arm 14 so as to align with the hole H2 formed on the inclined surface S2, and a predetermined angle θ around the center axis of the gear member G. It is set so that the operation of inserting into the hole H is performed in a state of being rotated (turned) by (for example, 90 degrees in this embodiment).

Here, as shown in FIG. 6, a gear G as an article to be gripped by the hand mechanism 10 includes a gear body G1 and a gear G integrally formed coaxially on the upper surface of the gear body G1 in the drawing. 1 and a second shaft portion G formed coaxially and integrally with the lower surface of the gear body G1 as shown in FIG.
3 are schematically constituted. As shown in FIG. 6, a pair of flat portions G4 is formed on opposite sides of the peripheral surface of the first shaft portion G2 so that the clamping operation by the clamp module M7 can be reliably performed. Have been.
In a state before the gear G is gripped by the hand mechanism 10, the second shaft portion G3 is inserted into a first hole H1 formed in the horizontal surface portion S1 as shown in FIG. In this state, the second shaft portion is placed on the horizontal surface portion S1 and held by the hand mechanism 10 in the second hole H2 formed in the inclined surface portion S2 as described above. It is set so that G3 is inserted and moved so as to be placed on the inclined surface portion S2.

(Schematic Configuration of Robot) Here, a robot 12 to which the hand mechanism 10 is applied is, as shown in FIG. 5, an x-axis arm 16 and an x-axis A y-axis arm 18 movably attached along the axis, a y-axis movement block 20 movably attached to the y-axis arm 18 along the y-axis direction,
The z-axis arm 14 is mounted so as to penetrate the y-axis moving block 20 in the vertical direction, and is supported to be vertically movable.
It is composed of The hand mechanism 10 is attached to the lower end of the z-axis arm 14, and in detail, the following modules are set via the holder module M1 described above.
The y-axis arm 18 and the y-axis movement block 20
And the z-axis arm 14, the drive motors 22, 24, 26
Are set so as to be respectively moved and driven.

(Description of Each Module) Next, the configuration of each of the modules M1 to M7 will be described. [Explanation of Holder Module M1] A holder module M1 for attaching various modules of the hand mechanism 10 to the z-axis arm 14 of the robot device 12 is shown in FIGS.
It is configured as shown in FIG. That is, as shown in FIGS. 7 and 8, the holder module M1 mainly includes a fixing member 28 fixed to the lower end of the z-axis arm 14, a mounting plate 30 to which an arbitrary module is mounted on the lower surface, and a fixing module 28. A connection mechanism 32 for connecting the member 28 and the mounting plate 30 to each other
It is schematically composed of In order to prevent the holder module M1 attached to the z-axis arm 14 from rotating around the central axis surface, the z-axis arm 14 has a long groove formed on the outer peripheral surface thereof along the axial direction. 14a is formed at a predetermined depth.

Specifically, the fixing member 28 is attached to the mounting plate 3.
A main body 34 which is mounted on the upper surface of the main body 0 and has a through hole 34a through which the z-axis arm 14 is inserted and formed along the center;
A groove 36 having a semicircular cross section communicating with the semicircular portion of the through hole 34a is provided on one side surface 36a of a flat surface, which stands integrally from the outer periphery of the main body 34 corresponding to the semicircular portion of the through hole 34a.
b formed with a semi-cylindrical receiving portion 36,
6, and has a flat side surface 38a which is in contact with one side surface of the receiving portion 36, and has a semicircular cross section communicating with the remaining semicircular portion of the through hole 34a. And a semi-cylindrical holding portion 38 in which a groove 38b is formed. That is, when the pressing portion 38 is connected to the receiving portion 36 such that the one side surfaces 36a, 38a are in contact with each other, the through holes (36b, 38b) through which the z-axis arm 14 is inserted are located at the center of the connecting body. Is formed so as to extend along the line.

Here, in a state where the z-axis arm 14 is inserted into the through hole formed by the grooves 36b and 38b having a semicircular cross section, one side surface 36a of the receiving portion 36 and one side surface 38a of the pressing portion 38 are mutually connected. It is set to be separated. The receiving portion 36 and the holding portion 38 are formed by a pair of bolts 40a, 4
The two side surfaces 36a and 38a are fastened to each other via Ob. Thus, the receiving portion 36
The z-axis arm 14 is firmly fixed between the holding member 38 and the holding portion 38.

The holding portion 38 has an insertion hole 38c through which the pin 42 is inserted so as to penetrate the holding portion 38 along the radial direction. By fitting the tip of the pin 42 into the above-described long groove 14a, the relative rotation between the z-axis arm 14 and the fixing member 28 is prohibited, and the fixing state of both is more reliably achieved. . As shown in FIG. 9, the mounting plate 30 is formed at the four corners thereof with mounting through holes 30a for mounting various modules of the hand mechanism 10 penetrating along the vertical direction. . The diameter and the arrangement pitch of these through holes 30a are set to a fixed value d ₁ and a distance D ₁ respectively.
Further, on the lower surface of the mounting plate 30, in order to precisely define the mounting position of the modules M2~M7 attached thereto, a pair of positioning pins 30b at a predetermined diameter d ₂ and the predetermined distance D ₂ is lower It is fixed in a protruding state.

On the other hand, the connecting mechanism 32 for connecting the mounting plate 30 and the fixing member 28 to each other has a centering 44 for aligning the center axis of the z-axis arm 14 and the center axis of the mounting plate 30 with each other. This centering 44
A z-axis arm 1 is formed at the upper end opening of the sleeve.
4 is fitted into the positioning hole 30c formed in the center of the mounting plate 30, and z
The center axis of the shaft arm 14 and the center axis of the mounting plate 30 are set so as to be aligned with each other.

Here, the centering 44 functions so as to function as a hysteresis member, in a direction perpendicular to the center axis of the centering member 44 (ie, a direction in which the fixing member 28 and the mounting plate 30 are shifted with respect to each other's mounting surfaces). When the shear force along
It is formed so as to cause a predetermined deformation. A strain sensor 45 is attached to the outer peripheral surface of the centering 44 so that the magnitude of the shearing force acting on the centering 44 can be detected. The distortion sensor 45 is connected to a control device (not shown) and constantly outputs a detection result. This controller is
Based on the detection result output from the distortion sensor 45,
When the amount of distortion exceeds an allowable value, an alarm is issued.

That is, with the provision of at least one other module mounted below the holder module M1, the hand mechanism 10 may have an unexpected failure while the robot 12 is performing a predetermined assembling operation. If the object touches the object lightly and receives an impact, the hand mechanism 10
Due to its own rigidity, an error (a deviation amount of the center axis between the z-axis arm 14 and the mounting plate 30) caused by this contact is suppressed very small. Although not provided, if such light contact is repeated many times, errors generated by such contact are accumulated, and there is a possibility that an accurate assembling operation cannot be performed. For this reason, the control device constantly monitors the detection result output from the strain sensor 45, and when the accumulated value and / or each detected value exceeds a predetermined allowable value, the z-axis in the holder module M1. An alarm is issued to re-execute the center alignment between the arm 14 and the mounting plate 30.

In this embodiment, the shock applied to the hand mechanism 10 has been described as being detected by using the strain sensor 45. However, the present invention is not limited to such a configuration. A configuration that does not use the strain sensor 45 can also be adopted. That is, even when the distortion sensor 45 is not provided, the impact acting on the hand mechanism 10 remains as permanent deformation of the center ring 44 functioning as the history ring. For this reason, for example, when the hand mechanism 10 is disassembled and cleaned in a periodic inspection, the centering 44 is used.
Is taken out and inspected for the presence or absence of deformation to determine whether or not an impact has acted on the hand mechanism 10.
When it is determined that an impact has occurred, an inspection corresponding to the impact is required.

The four corners of the main body 34 of the fixing member 28 are respectively provided with first mounting holes 3 through the main body 34 in the thickness direction.
4c are formed, and these first mounting holes 34c are formed.
The mounting plate 30 has a screw hole 30d in a state corresponding to the above. The connection mechanism 32 described above includes a shear pin bolt 46 that is inserted through each mounting hole 34c and whose distal end is screwed into the corresponding screw hole 30d. Here, each of the shear pin bolts 46 is for attaching the fixing member 28 and the mounting plate 30 to each other with a predetermined mounting strength, but each is located at a substantially central portion in the longitudinal direction, that is, each of the fixing member 28 and the mounting plate 30. Has a notch as a fragile portion at the mounting boundary surface, and when the impact force having the predetermined mounting strength or more acts on the hand mechanism 10 due to the notch, each shear pin bolt 4
6 is destroyed by the corresponding cut, and will be bisected up and down.

That is, in the holder module M1, there is no problem in performing the normal assembling operation by having the predetermined mounting strength. During the
When a strong impact is applied to the fixed object, the shear pin bolt 46 is first broken and the connection between the z-axis arm 14 and the mounting plate 30 is released.
To prevent the robot 12 from being damaged.

On the other hand, a second mounting hole 34d is formed in a part of the main body 34 of the fixing member 28 so as to penetrate in the thickness direction, and the second mounting hole 34d is formed.
In the state corresponding to the above, a mounting hole 30e is formed in the mounting plate 30 so as to penetrate in the thickness direction. The connection mechanism 32 described above is connected to these mounting holes 34d, 30d.
e, the fall prevention pin 48 is attached thereto. The fall prevention pin 48 is formed to have a length longer than the sum of the thickness of the main body 34 of the fixing member 28 and the thickness of the mounting plate 30, and the upper end thereof is
The lower end of the main body 34 can be engaged with the lower surface of the mounting plate 30. The diameter of the fall prevention pin 48 is set smaller than the diameters of both the mounting holes 30d and 30e. That is, the existence of the fall prevention pin 48 is determined by the presence of the eccentric pin
The angle adjustment operation is not impaired.

In this manner, as described above, when the strong impact acts on the hand mechanism 10, the shear pin bolt 46 is broken, and the connection state between the fixing member 28 and the mounting plate 30 is released. The mounting plate 30 is hung on the fixing member 28 by the fall prevention pin 48. As a result, even if the connection state between the fixing member 28 and the mounting plate 30 is released, the various modules M2 to M7 mounted below the mounting plate 30 drop onto the floor surface, and Damage can be reliably prevented.

A part of the main body 34 of the fixing member 28 has a third mounting hole 3 penetrating in the thickness direction.
A long groove 30f extending in the radial direction is formed on the upper surface of the mounting plate 30 in a state corresponding to the third mounting hole 34e. The connection mechanism 32 described above is connected to the third mounting holes 34e.
And an eccentric pin 50 for adjusting the mounting angle is provided with the lower end fitted in the long groove 30f. The eccentric pin 50 is integrally attached to a lower end of the pin main body 50a through the third mounting hole 34e in an eccentric manner by an eccentric amount Δx, and is eccentrically fitted into the long groove 30f described above. And a plate 50b. The eccentric disk 50b has a diameter of 30 f
Is set to approximately match the width of. Also, this third
The mounting hole 34e is formed at a position deviated by a radius r from the center position of the fixing member 28.

In this manner, by rotating the eccentric pin 50 around its own central axis in the third mounting hole 34e, the z-axis arm 14 can be moved within the range of the maximum tan ^-1 (Δx / r). The angle adjustment of the mounting angle of the mounting plate 30 with respect to is performed. A mounting piece 52 is formed on the side of the receiving portion 36 of the fixing member 28 so as to extend substantially horizontally therefrom integrally. On the lower surface of the attachment piece 52, a first plate for detecting that the attachment plate 30 is attached to the fixing member 28 in a normal state.
Are mounted. Here, this first
In order not to hinder the detection operation of the first sensor 54, the main body 34 located immediately below the first sensor 54
Is formed with a concave portion 34f.
4f, the first sensor 54 is attached to the mounting plate 30.
The upper surface of the device can be directly detected.

Here, in this embodiment, the first sensor 54 is constituted by a proximity sensor,
When the upper surface is at a predetermined distance set in advance, no detection signal is generated, and as described above, the connection state between the fixing member 28 and the mounting plate 30 is released by breaking the shear pin bolt 46. When the mounting plate 30 is hung on the fixing member 28 by the fall prevention pin 48 in the state in which the mounting plate 30 is in the The sensor 54 outputs a predetermined first detection signal to the control device to notify that the attachment state of the attachment plate 30 to the fixing member 28 has been released.

[Explanation of Inversion Module M2] The inversion module M2 for performing the above-described inversion operation is configured as shown in FIGS. 14 to 23 as an embodiment.
That is, as shown mainly in FIGS. 14 and 15, the reversing module M2 has a rotation axis set to be orthogonal to the center axis of the reversing module M2 (that is, the center axis CL of the z-axis arm 14). A pair of upper and lower mounting plates 62 and 64 are provided so as to be rotatable relative to each other around 60. Here, on the lower surface of the upper mounting plate 62, a vane type pneumatically operated rotary drive mechanism 65 for invertingly driving the lower mounting plate 64 with respect to the upper mounting plate 62 is integrally mounted. That is, the rotation drive mechanism 65 includes a main body block 66 which is formed integrally with the lower surface of the upper mounting plate 62 so as to fall downward. This body block 66
Inside, a vane chamber 68 having a circular cross section is formed.
The center axis of the vane chamber 68 is set so as to coincide with the center axis of the rotation shaft 60 described above.

That is, the rotating shaft 60 is axially supported by the main body block 66 via a pair of bearings 70a and 70b so as to penetrate coaxially with the main body block 66. A portion of the rotating shaft 60 located in the vane chamber 68 has a vane body 7 extending along the radial direction over the entire length in the axial direction.
2 are installed. By the vane body 72, the vane chamber 68 is divided into two vane compartments 6 as shown in FIG.
8a and 68b. In order to selectively introduce compressed air as a working fluid into these vane compartments 68a and 68b, and to selectively discharge compressed air from these vane compartments 68a and 68b, the upper mounting plate 62 is provided with a structure shown in FIG. As shown in FIG. 15, a pair of air ports 74a and 74b are attached.

On the other hand, as shown in FIG. 22, inside the vane chamber 68, a first connection port 76a for introducing and discharging compressed air to and from the first vane branch chamber 68a is provided. Adjacent to the clockwise side of the connection port 76a of
A second connection port 76b for introducing and discharging compressed air to and from the vane compartment 68b is provided.
These first and second connection ports 76a, 76b are communicated with each other through communication passages 78a, 78b formed through the upper mounting plate 62 and the main body block 66, respectively. In addition, the first and second connection ports 76a, 76a
The outer surface of 6b is formed so that the outer surface of the vane body 72 which has turned so as to approach each can contact each other. That is, the rotation shaft 60 to which the vane body 72 is attached is moved from the position where the clockwise end face of the vane body 72 comes into contact with the counterclockwise outer face of the first connection port 76a. The second connection port 76b is rotatable until it comes into contact with the clockwise outer surface of the second connection port 76b.

Here, a pneumatic pressure source 82 is connected to the first and second air ports 74a and 74b through a first switching valve 80 comprising an electromagnetic solenoid valve described later.
It is connected to the. This first switching valve 80 is
In the state where the switching mode is set, compressed air is introduced into the first vane compartment 68a via the first air port 74a, and compressed from the second vane compartment 68b via the second air port 74b. Switching is set to discharge air, while the second switching mode is set, thereby discharging compressed air from the first vane compartment 68a through the first air port 74a, and setting the second switching mode. It is configured to be switched to introduce compressed air into the second vane compartment 68b via the air port 74b.

As described above, by setting the first switching mode in the first switching valve 80, FIG.
, The rotating shaft 60 is driven to rotate in the counterclockwise direction, and the lower mounting plate 64 is driven to reverse from a standby position parallel to the upper mounting plate 62 to a reversing position that is reversed by 90 degrees. Further, by setting the second switching mode in the first switching valve 80, the rotating shaft 60 is driven to rotate by 90 degrees clockwise from the reverse position and returns to the standby position shown in FIG. Will be done.

Side arms 84 and 86 are attached to both ends of the rotating shaft 60 projecting from the main block 66, and the lower mounting plate 64 is attached to lower ends of the side arms 84 and 86. Are integrally connected. Here, the left end of the rotating shaft 60 in FIG. 15 and the side arm 84 located on the left are connected via a key 88 so as to rotate integrally. The left side arm 84 is formed in a substantially circular shape as shown in the figure, and a number of stop pin insertion holes 90 are respectively formed on the outer periphery of the left side arm 84 in the thickness direction. It is formed at intervals. Any two of these stopper pin insertion holes 90 have stopper pins 9 for regulating the reversal angle α.
2a and 92b are inserted and fixed.

On the other hand, as shown in FIG. 17 and FIG.
6, one stop pin 92 is on the left side in FIG.
a selectively comes into contact with each other, and a first shock absorber 94a for defining a first stop position for achieving a standby state with respect to the upper mounting plate 62 with respect to the lower mounting plate 64, and the other stop pin 92b are selectively formed. A second shock absorber 94b is provided in parallel with the lower mounting plate 64 to define a second stop position for achieving an inverted state with respect to the upper mounting plate 62. That is, the above-described inversion angle α is defined by the rotation angle between the first and second stop positions. The first stop position is indicated by a lower mounting plate 64 shown by a solid line in FIG.
Is indicated by a lower mounting plate 64 indicated by a two-dot chain line in FIG.

Here, in the state shown in FIG. 23, the inversion angle α is set to 90 degrees. Any angle can be set within a range of 180 degrees. The first and second shock absorbers 94a and 94b are set such that the centers are separated by a distance corresponding to the diameter of the circumference on which the stop pins 92a and 92b are disposed. At the lower end, the corresponding stop pins 92a, 92b
Is configured to be able to receive the contact state in a buffered state. In addition, each shock absorber 94
Reference numerals a and 94b denote positions where the corresponding stop pins 92a and 92 are buffered and received, and the respective stop positions are defined.

Although not shown, the stop pin 92
A dummy pin is inserted into all of the remaining stopper pin insertion holes 90 to which a and 92b are not attached. As described above, all the stopper pin insertion holes 90 are provided with a pair of stopper pins 92a,
By inserting the dummy pin 92b, the inner space of the left side arm 84, that is, the space in which the pair of shock absorbers 94a and 94b are provided, is substantially sealed. .

A disk-shaped sensor dog mounting plate 96 is fixed inside the right side arm 86 in FIG. On the other hand, as shown in FIG.
The left and right outer surfaces of the body block 66
A groove 6 for attaching a sensor is provided at a position facing the outer circumference of the sensor 6.
6a and 66b are formed respectively, and these grooves 66a and 66b are formed.
66b includes a second sensor 9 and a third sensor 9 for detecting the return state and the reverse state in the reverse module M2, respectively.
8a and 98b are stored respectively. The lower mounting plate 64 is located at a predetermined rotation position on the outer periphery of the plate 96 described above.
23 is in a return state (or a standby state) as shown by a solid line in FIG. In the state, the second detection dog 10 detected by the third sensor 98b
0b is attached and fixed.

Here, the second and third sensors 98
a, 98b are the corresponding first and second detection dogs 100
a, 100b are constituted by proximity sensors which are respectively turned on when approaching, and both are connected to the above-described control device;
The detection result is output to this. The detection dog may include a magnet for a magnetic sensor, and the operation may be detected by the magnetic sensor. That is, the control device switches the first switching valve 80 to the first switching mode and rotates the drive shaft 60 counterclockwise from the standby state shown in FIG. A second shock absorber 9 corresponding to the second stop pin 92b
If the third sensor 100b does not output an ON signal after a predetermined period of time in a state where the drive control is performed so that the lower mounting plate 64b is brought into contact with the lower mounting plate 4b, the lower mounting plate 64 is shifted from the standby state by a desired reversal angle α. An alarm operation is performed on the assumption that the vehicle is in an abnormal state that has stopped halfway without rotating, and an ON signal is output from the third sensor 100b within a predetermined time to execute a subsequent control procedure. ing.

The control device sets the above-mentioned first switching valve 80 to the second switching mode, and rotates the drive shaft 60 clockwise from the inverted state to the first direction. Even if a predetermined time has elapsed in a state where the stop pin 92a is driven and controlled to contact the corresponding first shock absorber 94a, the second sensor 9
When the ON signal is not output from 8a, the lower mounting plate 64
Does not return from the inversion state by the desired inversion angle α, and executes an alarm operation as an abnormal state in which the operation is stopped halfway,
By outputting an ON signal from the second sensor 98a within a predetermined time, a subsequent control procedure is executed.

[0043] Here, the four corners of the upper mounting plate 62, as shown in FIG. 17, in a state of being spaced apart from each other at a certain arrangement pitch D described above, the screw holes 62a are for mounting diameter d _1, At the four corners of the lower mounting plate 64, mounting through holes 64a are formed in the same manner as shown in FIG.
In the center of two opposing sides of the upper surface of the upper mounting plate 62, there are positioning holes 6 into which a pair of positioning pins commonly formed on the bottom surfaces of the modules M1 to M6 are inserted.
2b and a positioning groove 62c are formed. And
At the center of two opposing sides of the lower surface of the lower mounting plate 64, there is a diameter d2 that is to be inserted into a positioning hole and a positioning groove formed in the upper mounting plate of the other modules M2 to M7, respectively. A pair of positioning pins 64b separated by a predetermined distance D2 are integrally mounted in a state of protruding downward.

In this way, the inverted module M2
Other modules M2 to M7 are selectively attached to the lower part of the module, and the other modules M to M7 are mounted on the upper part of the module.
Any of 1 to M6 will be selectively attached.
It is needless to say that the reversing module M2 is not limited to the configuration of the above-described embodiment, and can be variously modified without departing from the gist of the present invention. For example, in the above-described embodiment, the first and second lower mounting plates 64 are formed using a pair of stop pins 92a and 92b.
However, the present invention is not limited to this configuration. For example, only one stop pin may be provided. By disposing one stop pin 92 in this manner, the reversal angle α of the lower mounting plate 64 is set to 180 degrees. This inversion module may be configured as an inversion module M2b of another embodiment in FIGS. 24 and 25. Inversion module M2 in such another embodiment.
b is configured so as to be particularly suitable for use in a clean room.

The structure of the inversion module M2b in another embodiment will be described below.
The same parts as those of the inversion module M2 of the above-described embodiment will be denoted by the same reference numerals, and the description thereof will be omitted. That is, in this other embodiment, FIG.
As shown in FIGS. 4 and 25, the main body block 66 has a pair of bearings 70a, 70b disposed therein and a pair of shock absorbers 94a, 94b at a position where the pair reaches the space in which the pair of shock absorbers 94a, 94b are disposed. Bakiyum Port 102
a, 102b are attached. Further, all the stopper pin insertion holes 90 are closed by inserting the dummy pins 104.

Here, all the insertion holes 90 are formed by a pair of stop pins 92a and 92b and the dummy pins 10a.
By being closed by 4, as described above in the above-described embodiment, the space is formed as a substantially closed space. As a result, by evacuating this space through the pair of vacuum ports 102a, 102b, dust generated in the shaft support operation of the pair of bearings 70a, 70b and the first and second stop pins 92a, 92b are removed. Dust generated in a positioning operation that is positioned by colliding with the corresponding first and second shock absorbers 94a and 94b is generated by the reversing module M.
The dust is collected in a cleaner (not shown) without being discharged to the outside, and the surroundings are kept clean. In this way, even if the reversing module M2b in the other embodiment is used in a clean room, the predetermined cleanliness is maintained, and it is optimal for use in this clean room.

[Description of Turning Module M3] One embodiment of the turning module M3 for performing the above-described turning operation is configured as shown in FIGS. That is, as shown mainly in FIGS. 26 and 27, the turning module M3 is composed of a pair of upper and lower pivotally mounted relative to each other around a pivot 110 set along the central axis of the pivot module M3. Mounting plates 112 and 114 are provided. Here, the lower mounting plate 11 is provided below the upper mounting plate 112.
4 is integrally attached to the upper mounting plate 112 with a rotation drive mechanism 116 for driving the rotation about the central axis of the rotation module M3. That is, the rotation drive mechanism 116 includes a main body block 118 integrally formed in a central portion of the lower surface of the upper mounting plate 112 so as to protrude downward. A through hole 120 is formed at the center of the main body block 118 so as to penetrate vertically in the figure along the center axis.

The above-mentioned rotating support shaft 110 penetrates vertically through the through hole 120, and a pair of bearings 122.
The pivoting module M3 is rotatably supported around the central axis of the pivoting module M3 via a and 122b. In addition, this pivot 1
The lower surface of the lower mounting plate 114 is fixed to the lower end of the base 10 so as to rotate integrally. That is, as shown in FIG. 34, a fitting portion 110 b having a substantially square cross section is integrally formed at the lower end of the rotation support shaft 110, while A square fitting hole 114a is formed so that the fitting portion 110b at the lower end of the rotation support shaft 110 is fitted in a complementary manner. By fitting the lower end of the rotation support shaft 110 to the lower mounting plate 114 in this way, the lower mounting plate 114 rotates integrally with the rotation of the rotation support shaft 110.

A pinion gear 124 is coaxially mounted on the outer periphery of a central portion of the rotation support shaft 110 so as to rotate integrally. On the other hand, the above-described rotation drive mechanism 116 is configured by a pneumatically operated cylinder mechanism. That is, the main body block 118 of the rotation drive mechanism 116 extends along a direction orthogonal to the rotation support shaft 110, and the first and second blocks are parallel to each other with the rotation support shaft 110 interposed therebetween. Cylinder bodies 126 and 128 are integrally provided as a drive cylinder body and a driven cylinder body.
6, 128, the first and second cylinder chambers 130, 132 extending along the direction orthogonal to the rotation support shaft 110.
Are formed as a drive cylinder chamber and a driven cylinder chamber, respectively.

Here, in the first cylinder chamber 130 disposed on the right side in FIGS. 32 and 33, the first piston 134 is slidable as a drive piston while maintaining an airtight state. The second piston 136 is housed in a second cylinder chamber 132 disposed on the left side in the drawing.
Are slidably and loosely fitted in a non-airtight state as a driven piston. The two cylinder chambers 130 and 132 are opened at their respective central portions in a state of communicating with the through holes 120. Both the pistons 134 and 136 are provided on both sides of the pinion gear 124 via the respective openings. Racks 138 and 140 meshing with each other are formed as a drive rack and a driven rack, respectively. And the first piston 1
32, one cylinder compartment 130a is defined by the portion of the cylinder chamber 130 located below in FIG. 32, and the other cylinder compartment 130a is located by the portion of the cylinder chamber 130 located above this first piston 134 in FIG. 130
b is defined. Further, compressed air introduction passages 142a, 142b through which working compressed air is introduced are formed and connected to the first cylinder body 126 at the outer ends of the one and other cylinder chambers 130a, 130b, respectively. These compressed air introduction passages 142a, 142
b is a first cylinder attached to the outer surface of one of the cylinder bodies 126.
And the second air ports 144a, 144b.

Here, the first and second air ports 144a and 144b are connected to the above-described pneumatic source 82 via a second switching valve 146 composed of an electromagnetic solenoid valve described later. . When the first switching mode is set, the second switching valve 146 introduces compressed air into one of the cylinder compartments 130a through the first air port 144a, and connects the second air port 144b to the second cylinder port 130a. Is set to discharge air from the other cylinder compartment 130b via the first cylinder port 130b, and by setting the second switching mode, air is discharged from the inside of one cylinder compartment 130a via the first air port 144a. It is configured to be set so that it is discharged and the compressed air is introduced into the other cylinder compartment 130b through the second air port 144b. In this way, by setting the first switching mode in the second switching valve 146, the rotation support shaft 110 is driven to rotate in the counterclockwise direction in FIG. Is set to be driven to rotate clockwise.

On the other hand, as is apparent from FIG. 30, the lower mounting plate 114 has a plurality of turning amount regulating holes 142 formed concentrically about the rotation support shaft 110 at every 45 degrees. The rotation amount regulating holes 142 have stopper pins 150a and 150b serving as two rotation amount regulating members.
However, as shown in FIG. 36, via each of the locking screws 151,
The attachment position is inserted so that exchange is possible. Also,
A pair of stopper bolts 152a, 152b are screwed to the main body block 118 of the upper mounting plate 112 so that the positions thereof can be adjusted and retreated. here,
The first and second stop bolts 152a, 152b are
The center-to-center distance is set to be apart by a distance corresponding to the diameter of the circumference on which the stop pins 150a and 150b are disposed. At the respective tips, the corresponding stop pins 150a and 150b are received in contact with each other. It is attached so that it can be. Each stop bolt 152a, 152b is provided with a corresponding stop pin 150.
Each of the turning stop positions is defined at the position where a and 150b contact each other.

Here, as shown in FIG. 32, shock absorbers 154a and 154b are attached to both ends of the second cylinder chamber 132 located on the left side in the figure. That is, as described above, by setting the second switching mode in the second switching valve 146, the lower mounting plate 114 is moved clockwise in FIG. 27 with respect to the upper mounting plate 112 (that is, FIG. 30 and FIG. 35, a second rack 140 having a second rack 140 that meshes with the pinion gear 124 of the rotation support shaft 110 when the rotation drive is performed in the counterclockwise direction.
The piston 136 moves in the opposite direction in synchronization with the first piston 134. Immediately before the first stopper pin 150a comes into contact with the tip of the corresponding first stopper bolt 152a, as shown in FIG. 32, the upper end in the figure of the second piston 136 located on the left side in the figure corresponds to the upper end in the figure. The first stopper pin 150a is brought into contact with the first stop bolt 1a while the first stopper pin 150a is in contact with the first shock absorber 154a.
52a, which is brought into contact with the tip end, so that the turning stop position thereof is accurately defined. On the other hand, the second switching valve 14
When the first switching mode is set at 6, the lower mounting plate 114 is driven to turn counterclockwise in FIG. 27 (that is, clockwise in FIGS. 30 and 35) with respect to the upper mounting plate 112. Immediately before the second stopper pin 150b contacts the corresponding tip of the second stopper bolt 152b, the lower end of the second piston 136 in FIG. 32 contacts the corresponding second shock absorber 154b. After the contact state is buffered, the second stopper pin 150b abuts on the tip of the corresponding second stopper bolt 152b, so that the rotation stop position is accurately defined.

Here, as shown in FIG. 32, the end of the second piston 136 in contact with the first shock absorber 154a is provided in order to reduce the impact and the contact sound at the time of contact with the first shock absorber 154a. A contact pin 156 having a rubber contact piece 156a attached to the head is attached. On the other hand, the second
Second shock absorber 154b of the piston 136 of FIG.
The contact portion 158a made of rubber is attached to the end of the head in order to reduce the impact and the contact sound at the time of contact.
A contact pin 158 to which is attached is attached.

Further, as shown in FIG. 32, a dog for confirming a turning state is provided on a side surface of the first piston 134 located on the right side in the figure toward the outside, in a state of being located at both ends along the axial direction. The first and second magnets 160a, 160
0b is attached. On the other hand, the main body block 118
A fourth side for detecting a turning state is provided on the right side surface in FIG.
And fifth sensors 162 and 164 are attached. Here, the fourth sensor 162 drives the lower mounting plate 114 to rotate clockwise in FIG. 27 so that the first stopper pin 150a corresponds to the first stopper bolt 152 corresponding to the first stopper pin 150a.
a, the turning position is defined by the first magnet 160a so as to be turned on by the first magnet 160a in a state in which the turning stop position is accurately defined, and is constituted by a non-contact type magnetic sensor. ing. That is, the fourth sensor 1
Reference numeral 62 detects that the lower mounting plate 114 is in a standby state in which the lower mounting plate 114 is vertically aligned with the upper mounting plate 112. On the other hand, the fifth sensor 164 drives the lower mounting plate 114 to rotate counterclockwise in FIG. 27 so that the second stopper pin 150b corresponds to the corresponding second stopper bolt 15b.
2b, the arrangement position is defined so as to be turned on by the second magnet 160b in a state where the turning stop position is accurately defined, and is constituted by a non-contact type magnetic sensor. I have. That is, the fifth sensor 1
Reference numeral 64 is adapted to detect that the lower mounting plate 114 is at a turning position in which the lower mounting plate 114 has turned by a predetermined angle θ around the central axis line CL with respect to the upper mounting plate 112.

Here, the fourth and fifth sensors 16
2, 164 is connected to the above-described control device, and outputs a detection result to the control device. That is, the control device sets the above-described second switching valve 146 to be switched to the second switching mode, and sets the rotation support shaft 110 in FIG.
A predetermined time has passed in a state where the drive control is performed such that the second stop pin 150b is rotated in the counterclockwise direction in the drawing from the first turning stop position shown in FIG. 3 to contact the second stop bolt 152b. However, when the ON signal is not output from the fifth sensor 164, the lower mounting plate 1
14 is turned off from the first turning stop position by the desired turning angle θ, and is determined to be in an abnormal state of stopping halfway, an alarm operation is performed, and an ON signal is output from the fifth sensor 164 within a predetermined time. By being output, the subsequent control procedure is executed. Further, the control device sets the above-described second switching valve 146 to be switched to the first switching mode, and rotates the rotation support shaft 110 from the second rotation stop position in the clockwise direction in the drawing. In a state where the first stop pin 150a is driven and controlled to abut on the corresponding first stop bolt 152a, if the ON signal is not output from the fourth sensor 162 even after a predetermined time has elapsed, The mounting plate 114 does not return from the second turning stop position by the desired turning angle θ, and it is determined that the mounting plate 114 is in an abnormal state in which the mounting plate 114 stops halfway, and an alarm operation is performed. Is output to execute a subsequent control procedure.

As shown in FIGS. 26 and 33, the through hole 120 opened in the upper mounting plate 112 is covered with a cover member 166. Note that this lid member 166 has
As shown in FIG. 7, a screw 168 for applying a pressurizing force is attached to the bearing 122a, so that the outer race of the bearing 122a is pressed. In this way, the spacer adjustment process is reduced,
The turning module M3 is made thinner and lower in cost.

As described above, since the turning module M3 is configured, as shown in FIG. 32, the compressed air is introduced into the cylinder sub-chamber 130b in the upper part of FIG. In the biased state, the second piston 136 connected via the pinion gear 124 is biased upward in the drawing, and as shown, the first contact pin 156 is moved to the corresponding first shock absorber 154a. With the buffer received, the first
By contacting the stop pin 150a with the corresponding first stop bolt 152a, the amount of rotation thereof is regulated, that is, the stopper stops at the first turning stop position.

On the other hand, in the swing module M3, when the second switching valve 146 is switched from the state shown in FIG. Air is introduced, and the first piston 134 is pushed upward in the drawing, so that the pinion gear 12 meshing therewith is pushed.
4 rotates along the counterclockwise direction, and accordingly, the lower mounting plate 114 that rotates integrally therewith also rotates along the counterclockwise direction. Then, in a state where the second contact pin 158 is received in a state of being buffered by the corresponding second shock absorber 154b, the second stopper pin 150b contacts the corresponding second stopper bolt 152b.
The amount of rotation is restricted, that is, the rotation is stopped at the second turning stop position.

Here, at the four corners of the upper mounting plate 112,
With the above-mentioned fixed arrangement pitch D separated from each other,
Mounting screw holes 112a having a diameter d ₁ is also lower mounting plate 1
14 at the four corners in the same manner.
Are formed respectively. In the center of two opposing sides of the upper surface of the upper mounting plate 112, each of the modules M1,
A positioning hole 112b and a positioning groove 112c into which a pair of positioning pins formed in common on the bottom surfaces of M2, M4 to M6 are respectively inserted are formed. The lower surface of the lower mounting plate 114 has a diameter d2 at the center of two opposing sides thereof, which are to be inserted into positioning holes and positioning grooves formed in the other modules M2, M4 to M7, respectively. ,
A pair of positioning pins 114c separated by a predetermined distance D2
Are integrally attached in a state of protruding downward.

In this way, the turning module M3
Any one of the other modules M2, M4 to M7 is selectively attached to a lower part of the module, and one of the other modules M1, M2, M4 to M6 is selectively attached to an upper part of the module. become. The turning module M3 is not limited to the configuration of the above-described embodiment, and can be variously modified without departing from the gist of the present invention. For example, in one embodiment described above, the lower mounting plate 1 is
Although the first and second turning stop positions of 14 have been described as being respectively defined, the invention is not limited to this configuration, and for example, only one stop pin may be provided.
By arranging one stop pin 150 in this way, the turning angle θ of the lower mounting plate 114 is set to 180 degrees. The turning module may be configured as a turning module M3b of another embodiment in FIGS. 38 and 39. The turning module M3b in such another embodiment is configured to be particularly suitable for use in a clean room.

The configuration of the turning module M3b in another embodiment will be described below. In the following description,
The same portions as those of the turning module M3 of the above-described embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Only the differences from the turning module of the above-described embodiment will be described. That is, in this other embodiment, FIG.
As shown in FIGS. 8 and 39, one side of the main body block 118 has a pair of bearings 122 disposed therein.
A vacuum port 170 is attached at a position where it reaches the through hole 120 in which a and 122b are provided.

Here, the through hole 120 is formed as a substantially closed space by being closed by the above-mentioned lid member 166. As a result, this through hole 12
0 is evacuated through the vacuum port 170, dust generated in the pivoting operation of the pair of bearings 122a, 122b is generated by the turning module M3.
The dust is collected in a cleaner (not shown) without being discharged to the outside, and the surroundings are kept clean. In addition, dust generated in the stopper portion is also discharged through the through-hole 170b.
Suctioned from 70. In this way, even if the turning module M3b according to the other embodiment is used in a clean room, the predetermined cleanliness is maintained, and it is optimal for use in this clean room.

[Description of Cushion Module M4] The cushion module M4 for performing the above-described cushion operation is, as shown in FIG. 40 to FIG. 46, an embodiment of the present invention. And a pair of upper and lower mounting plates 180 and 182 which are mounted so as to be relatively movable along each other. Here, on the lower mounting plate 182, the lower mounting plate 182 is moved along the central axis C0 to a point symmetrical position with the central axis interposed therebetween, that is, with respect to the upper mounting plate 180. A pair of guide pins 1 for guiding to approach and separate
84a and 184b are fixed in an upright state.

Here, as shown in FIG. 41, the central axis C1 of the first guide pin 184a is located on the left side of the central axis C0 of the cushion module M4 in the front view of the cushion module M4. 4 by the distance L1 and FIG.
As shown in FIG. 4, when the cushion module M4 is viewed from the right side, it is set at a position deviated by a distance L2 to the right in the drawing from the center axis C0 of the cushion module M4. As described above, both guide pins 18
4a and 184b have a point-symmetric relationship, the center axis C2 of the second guide pin 184b is not shown,
In the rear view of the cushion module M4, in a state where the cushion module M4 is viewed from the left side of the center axis C0 of the cushion module M4 by a distance L1 to the left in the figure, and not shown, but not shown. , A distance L2 to the left of the figure from the center axis of the cushion module M4,
Each is set at a deviated position.

On the other hand, an attachment block 186 is formed integrally with the upper attachment plate 180 on the lower surface at the center.
Then, with the upper mounting plate 180 and the mounting block 186 penetrating in the thickness direction, these guide pins 184a, 1
84b, the first and second through holes 18 are respectively provided.
8a and 188b are formed. Here, the upper part of each guide pin 184a, 184b is provided with a corresponding through hole 188.
a, 188b mounted on a slide bearing 190a,
190b are slidably penetrated through each of them. Note that the lower mounting plate 182 moves along with the cushioning operation, and the upper mounting plate 180
Each guide pin 1
84a, 184b have corresponding through holes 188a, 1
The respective lengths are set so as to fit inside each of them without protruding outward from the upper opening of 88b.

Further, on the lower mounting plate 182, a pair of stopper pins 192a, 192a, 232b are provided at positions symmetrical with respect to each other with the central axis interposed therebetween to prevent the lower mounting plate 182 from dropping off from the upper mounting plate 180. 192b is fixed in an upright state. Here, the center axis C3 of the first stop pin 192a is aligned with the cushion module M as shown in FIG.
In the front view of FIG. 4, the distance L3 is located to the right of the center axis C0 of the cushion module M4 in the figure,
As shown in the figure, when the cushion module M4 is viewed from the right side, the center axis C of the cushion module M4 is
They are set at positions deviated by a distance L4 to the left of the figure from 0, respectively. As described above, both stop pins 19 are used.
The center axis C4 of the second stop pin 192b is not shown in the drawing, but the center axis C4 of the second module 192b is larger than the center axis C0 of the second module M4 in a rear view. In the state where the cushion module M4 is viewed from the left side, the distance L3 is to the right of the center axis C0 of the cushion module M4 in FIG.
4 are set at positions deviated from each other.

On the other hand, these stopper pins 192a, 192b
The third and fourth through holes 194a, 194a,
194b is formed. The thickness of the mounting block 186 through which the stopper pins 192a and 192b are inserted is set to be thin, and is thin so that a predetermined space is defined between the mounting block 186 and the lower surface of the upper mounting plate 180. Parts 186a and 186b are formed. The corresponding stop pins 192a, 192b are also passed through these thin portions 186a, 186b in the respective thickness directions.
The fourth and fifth through holes 196 are respectively provided at positions facing the second holes 2b.
a, 196b are formed. Here, the upper ends of the stop pins 192a and 192b protrude upward through the corresponding fourth and fifth through holes 196a and 196b, respectively, and the upper ends thereof correspond to the corresponding fourth and fifth holes. Heads 198a and 198b formed larger in diameter than the diameters of the through holes 196a and 196b are integrally attached.

As described above, in the cushion module M4, the bottom surface of each of the heads 198a and 198b is attached to the upper surface of the corresponding thin portion 186a and 186b.
The lower mounting plate 182 is hung on the upper mounting plate 180 by abutting each other via 0a and 200b. Here, a locking member 202 formed in a substantially columnar shape is fixed on the center of the lower mounting plate 182, and the upper mounting plate 180
A central through-hole 204 is formed in the center of the hole in a state penetrating this in the thickness direction. And both mounting plates 18
Between 0,182, along its central axis,
A coil spring 206 is provided. The coil spring 206 has an urging force for urging the two mounting plates 180 and 182 in a direction away from each other. In detail, the lower end of the coil spring 206 is locked on the outer periphery of the above-described locking member 202, and the upper end of the coil spring 206 is attached via a C-ring 208 so as to close the central through hole 204. It is locked on the lower surface of the member 210.

As shown in detail in FIG. 46, the C-ring 208 is provided in one of the plurality of circumferential grooves 212 formed along the axial direction on the inner peripheral surface of the central through hole 204. By being fitted, the lid member 210 is mounted on the lower mounting plate 182 at an arbitrary height. As described above, by setting the height position of the lid member 210 relative to the lower mounting plate 182 arbitrarily, the set length of the coil spring 206 can be adjusted, and the elastic biasing force exerted by the coil spring 206 can be adjusted. is there.

On the other hand, a magnet 214 as a non-detecting portion is attached to the outer periphery of the upper end of the above-mentioned locking member 202. Then, the magnet 214 approaches the outer peripheral surface of the above-described central through hole 204 on the side where the magnet 214 is provided, due to the approaching operation of the lower mounting plate 182 to the upper mounting plate 180. 6th turned on
Sensors 216 are provided. Here, in this embodiment, the sixth sensor 216 is configured as a magnetic sensor as a non-contact sensor. still,
The sixth sensor 216 is mounted at a position where it is turned on when the lower mounting plate 182 approaches the closest position to the upper mounting plate 180. In this closest position, the pair of guide pins 184a, 1
84b and a pair of stop pins 192a, 192b are respectively formed in the corresponding through holes 188 formed in the upper mounting plate 180.
a, 188b; their lengths are set so that they do not protrude upward from 194a, 194b but fall within each.

The sixth sensor 216 is connected to the above-mentioned control device. Here, this control device is the sixth device.
The on-signal is output from the sensor 216 of this embodiment, and the operation of the shift module M6, which will be described later, causes the cushion function exhibited by the cushion module M4 to exceed the permissible amount. It is configured to determine that it has become impossible and to issue a predetermined alarm operation. In the cushion module M4 configured as described above, the lower mounting plate 182 moves the heads 19 of the stop pins 192a and 192b by the urging force of the coil spring 206 in the non-cushion mode state.
8a and 198b correspond to the corresponding cushioning materials 200a and 200, respectively.
It will be separated from the upper mounting plate 180 until it comes into contact with the upper surfaces of the thin portions 186a, 186b via Ob.

On the other hand, when inserting the gear G gripped by the clamp module M7 described later into the hole H2 shown in FIG. 6, the lower surface of the second shaft portion G3 of the gear G abuts against the bottom surface of the hole H2. In this case, the cushion operation is passively performed in the cushion module M4. That is, when the lower surface of the second shaft portion G3 of the gear G is in contact with the bottom surface of the hole H2 and the shift operation in the shift module M6, that is, the insertion operation of the gear G, is continued, the clamping is performed. Lower mounting plate 18 connected to module M7
2 is a pair of guide pins 184 so as to approach the upper mounting plate 180 against the urging force of the coil spring 206.
a and 184b to move along the central axis C0.

As described above, if the cushion module M4 is incorporated in the hand mechanism 10, for example,
When the gear G is inserted or the like, the shock along the central axis C0 accompanying the interference between the gear G and the hole H2 is absorbed, and the built-in modules and the robot 12, including the clamp module M7, are excessively large. The effective force is effectively prevented.

Here, at the four corners of the upper mounting plate 180,
With the above-mentioned fixed arrangement pitch D separated from each other,
Mounting screw holes 180a having a diameter d ₁ is also lower mounting plate 1
At the four corners 82, the mounting through holes 182a
Are formed respectively. In the center of two opposing sides of the upper surface of the upper mounting plate 180, the modules M1
A positioning hole 180b and a positioning groove 180c into which a pair of positioning pins commonly formed on the bottom surfaces of M3, M5, and M6 are respectively inserted are formed. And the lower mounting plate 1
At the center of the two sides facing each other of the lower surface 82, other modules M2, M3, at which are inserted respectively into the positioning holes and the positioning groove formed in M5 to M7, has a diameter d _2, the predetermined distance a pair of positioning pins 18 spaced by D ₂
2b is integrally attached in a state of protruding downward.

In this manner, the other modules M2, M3, M5 to M5 are located below the cushion module M4.
Any one of the modules M7 is selectively attached, and any of the other modules M1 to M3, M5, and M6 is selectively attached to an upper part of the module M7. It is needless to say that the cushion module M4 is not limited to the configuration of the above-described embodiment, but can be variously modified without departing from the gist of the present invention. For example, the cushion module may be configured as a cushion module M4b of another embodiment in FIGS. 47 to 52. The cushion module Mb in such another embodiment is configured to be optimal especially for setting a long cushion stroke.

The configuration of the cushion module Mb4 in another embodiment will be described below. In the following description, the same parts as those of the cushion module M of the above-described embodiment are denoted by the same reference numerals. However, description thereof will be omitted, and only different points from the cushion module of the above-described embodiment will be described. That is, in this other embodiment, as mainly shown in FIGS. 50 to 52, the cushion module M4b of this other embodiment has a main structure in addition to the upper mounting plate 180 and the lower mounting plate 182. As an element, an intermediate member 218 is provided between the two.

First, the upper mounting plate 180 is integrally provided with a sleeve 220 extending downward along the central axis C0 at the center of the lower surface thereof. On the inner surface of this sleeve 220,
The thread groove is cut, and the thread member has a thread member 222.
Are screwed so as to be able to advance and retreat along the central axis C0. still,
An upper end of a coil spring 206 that urges the lower mounting plate 182 in a direction away from the upper mounting plate 180 is locked to a lower surface of the screw member 222. In this manner, similarly to the cushion module M4 of the above-described embodiment, the screw member 222 is rotated and driven forward and backward along the central axis C0 to thereby reduce the elastic biasing force of the coil spring 206. It can be adjusted.

On the other hand, the above-mentioned intermediate member 218 has a main body portion 224 made of a flat plate formed with a through-hole 224a in which the sleeve 220 is loosely fitted penetrating the center portion in the thickness direction. The first and second sleeves 226 are disposed so as to face each other at the same diameter, and have the center axes parallel to the center axis of the main body portion 224, respectively.
The first and second sleeves 226a and 226b are located on the circumference where the center axes of the main body portion 224 and the center axis of the main body portion 224 are arranged, and are spaced apart from them at substantially equal intervals. Third and fourth sleeves 2 each having a central axis parallel to the central axis of the body portion 224.
26c and 226d. Here, these first
Through the fourth sleeves 226a through 226d
24 so as to penetrate vertically.

As is apparent from FIGS. 48 and 50, the lower surface of the upper mounting plate 180 extends toward the first and second sleeves 226a and 226b, and the lower ends thereof correspond to the corresponding sleeves 226a and 226b. The first inserted in each of the 226b
And the second guide pins 228a and 228b are fixed in a falling state. The lower ends of the first and second guide pins 228a, 228b are slidably supported along the axial direction by slide bearings 230a, 230b attached to the inner circumferences of the first and second sleeves 226a, 226b, respectively. Have been. On the other hand, the lower mounting plate 182
The third and fourth sleeves 226c, 226
d, and the upper ends of the corresponding sleeves 226
The third and fourth guide pins 228c and 228d inserted into c and 226d are fixed in an upright state. These third and fourth guide pins 228a, 228
b are connected to the third and fourth sleeves 226c and 226.
slide bearings 23 mounted on the inner circumference of
Oc and 230d are slidably supported in the axial direction. In this way, in this embodiment, the four guide pins 228a to 228 arranged at equal intervals from each other are provided.
The lower mounting plate 182 is supported so as to be able to approach and separate from the upper mounting plate 180 via 8d.

On the other hand, as shown in FIGS. 48 and 51, in this embodiment, the first stopper pin 192a has its upper end fixed to the lower surface of the upper mounting plate 180 and its lower end connected to the main body of the intermediate member 218. It is attached to the upper attachment plate 180 so as to be taken out below the main body part 224 through a through hole 232a formed to penetrate the part 224 in the thickness direction. On the other hand, the second stop pin 192b
Is fixed to an upper surface of a mounting plate 182 having a lower end, and a through hole 232 b formed in a state where the upper end thereof penetrates the main body 224 of the intermediate member 218 in the thickness direction. So that the lower mounting plate 1
82.

At the lower end of the first stop pin 192a, a head 234a having a diameter larger than the diameter of the through hole 232a into which the first stop pin 192a is inserted is integrally attached.
The upper surface of the main body portion 224 is connected to the upper surface of the main body portion 224 via the cushioning material 236a.
The intermediate member 218 is hung by the upper mounting plate 180 by contacting the lower surface of the intermediate member 218. Further, a through hole 232b through which the second stopper pin 192b is inserted is provided at an upper end of the second stopper pin 192b.
A head 234a having a diameter larger than the diameter of the lower mounting plate 1 is integrally attached, and the lower surface of the head 234b abuts on the upper surface of the main body portion 224 via the cushioning material 236b.
82 will be suspended by the intermediate member 218. Thus, in this embodiment, the lower mounting plate 182 is suspended by the upper mounting plate 180 via the intermediate member 218.

In the cushion module M4b of another embodiment configured as described above, the cushion stroke S is defined by the movable distance S1 along the axial direction between the upper mounting plate 180 and the intermediate member 218, It is defined as the total value of the movable distance S2 along the axial direction between the lower mounting plate 182 and the intermediate member 218, and is thus made longer than the cushion stroke in the above-described embodiment. In this embodiment, the cushion stroke can be achieved, and at the same time, in this embodiment, four guide pins 228a to 228d hold the load attached under the module. The rigidity is superior to the above-described embodiment.

As shown in FIG. 52, the magnet 214
Is attached to a mounting piece 182c integrally projecting upward from the lower mounting plate 182. Here, as shown in the figure, the mounting piece 182c is attached to the intermediate member 21.
8 is set just outside. The sixth sensor 216 that is turned on by the magnet 214 is attached to a mounting piece 180d that integrally projects downward from the upper mounting plate 180. Here, the mounting piece 180d is attached to the mounting piece 1 described above.
It is set so as to be located just outside 82c. By attaching the magnet 214 and the sixth sensor 216 to the mounting pieces 182c and 180d integrally formed on the lower mounting plate 182 and the upper mounting plate 180, respectively, the same detection result as in the above-described embodiment is obtained. Can be obtained. Further, in both embodiments described above, the C ring 208 and the screw member 222 as the means for adjusting the elastic biasing force of the coil spring 206 have been described as being both attached to the upper attachment plate 180. Is not limited to this, and may be configured to be attached to the lower attachment plate 182. In short, any configuration is possible as long as the set length of the coil spring 206 can be adjusted.

[Description of Compliance Module M5] The compliance module M5 for performing the above-described compliance operation is configured as shown in FIGS. 53 to 62 as an embodiment. That is, the compliance module M5 is provided with a pair of upper and lower mounting plates 240 and 242 which are relatively movable along a direction perpendicular to the central axis thereof, with a predetermined interval therebetween and in parallel. I have. Here, these mounting plates 24
As shown in FIGS. 57 and 60, a compliance mechanism 244 is interposed between 0 and 242, and the hand mechanism 10 is moved and driven by the compliance mechanism 244 based on the operation of the robot 12. Accordingly, a locking mechanism 246 is provided to lock the upper and lower mounting plates 240 and 242 to fix the mutual alignment and to shorten the operation standby time immediately after the hand mechanism 10 stops moving. I have.

Here, the compliance mechanism 244 is
Mainly, as shown in FIGS. 57 to 60, the first and second alignment members 250, which are formed substantially in a disk shape and are arranged coaxially with each other and overlapped with a bearing 248 therebetween. 252. The first alignment member 250 is provided with a bolt 2 at the center of the upper surface of the lower mounting plate 242.
Central portion 250 secured via 54 (shown in FIG. 57)
a, a sleeve portion 250b rising from the outer periphery of the central portion 250a, and an outer flange portion 250c extending outward from an upper edge of the sleeve portion 250b. Here, the upper surface of the outer flange portion 250c is located immediately below the outer peripheral portion of the lower surface of the upper mounting plate 240 and is opposed to the outer peripheral portion. In addition, as shown in FIG. 60, a lower surface of the upper mounting plate 240 is fixed to a part of the outer flange portion 250c in order to fix an upper mounting plate 240 and a second alignment member 252 described later. A through hole 250d into which a mounting boss 240a integrally protruding toward is inserted is formed in a state penetrating in the thickness direction.

On the other hand, as shown in FIG. 60, the second alignment member 252 penetrates through the central through hole 252a through which the central portion 250a of the first alignment member 250 is inserted in the thickness direction. The outer peripheral portion 252b is formed so as to be located directly below the outer flange portion 250c of the first alignment member 250. Then, the second alignment member 252
And an attachment boss 240a that extends through the above-described through-hole 250d and is taken out below the outer flange 250c are integrally attached to each other via a bolt 256. In other words, the bolt 256
, The second alignment member 252 is fixed to the upper mounting plate 240.

Further, the first and second alignment members 250, 2
The bearing 248 interposed between the bearing races 52 is a bearing race 248 made of a substantially disk-shaped thin plate located between the two.
a, a plurality of through-holes 248b formed on the same circumference on the outer periphery of the bearing race 248a,
48b, and a bearing ball 248c housed in the housing 48b. Since the bearing 248 is configured in this manner, the first and second alignment members 250 and 252
Are supported in such a manner that they can move relative to each other in a plane perpendicular to the central axis (hereinafter, referred to as a cross section).
That is, the first and second alignment members 250 and 252
Are fixed to the lower mounting plate 242 and the upper mounting plate 240, respectively. As a result, the upper and lower mounting plates 240, 242
In the plane perpendicular to the central axis, the respective central axes can be shifted and moved.

Here, the compliance mechanism 244
In order to elastically maintain a state where the center axes of the upper and lower mounting plates 240 and 242 are aligned with each other, the urging mechanism 2
58 are provided. That is, this compliance mechanism 2
44, by the biasing mechanism 258, in the normal state, if anything such as an external force to the lower attaching plate 242 is not acting, the center axis C ₁ of the upper mounting plate 240, the central axis C ₂ of the lower mounting plate 242 Are elastically maintained in a state where they are aligned with each other along the central axis of the compliance module M5, and when an external force in a cross section acts on the lower mounting plate 242, a predetermined value is determined in accordance with the external force. It is possible to tolerate a soft deviation in this cross section within the range.

Before describing the biasing mechanism 258, the first and second alignment members 25 associated with the biasing mechanism 258 will be described.
The specific shape of 0,252 will be described first. That is, the first and second alignment members 250 and 252 are formed in the same shape so as to completely coincide with each other in a state where they are vertically stacked. Then, each alignment member 250, 252
The concave portions 260a to 260d formed in a substantially rectangular shape in a plan view at four places set at equal intervals on the outer peripheral surface of
262a to 262d are formed respectively. In addition, circumferential grooves 264 and 266 are formed on the outer peripheral surfaces of the respective alignment members 250 and 252 along the respective circumferential directions over the entire circumference.

The urging mechanism 258 for urging the first and second aligning members 250 and 252 formed in this manner so as to be aligned with each other includes a pair of upper and lower concave portions 260a and 262.
a; 260b, 262b; 260c, 262c; 260
d, 262d, a total of four support pins 268
A ring-shaped first urging member 270 that elastically urges the upper end of each support pin 268 toward the outer periphery of the first alignment member 250 collectively, and the lower end of each support pin 268 to the second alignment member. A ring-shaped second urging member 272 elastically urges the outer periphery of the member 252 collectively. Here, the diameter of each support pin 268 is the same
260b, 262b; 260c, 2
62c; in the state of being housed in 260d and 262d, the outer portions in the respective radial directions are set so as to protrude radially outward from the outer peripheral surfaces of the first and second alignment members 250 and 252. I have.

More specifically, each support pin 268 has annular cut grooves 268a and 268b formed at the upper end and the lower end, respectively. Each pair of upper and lower recesses 260a, 262a;
2b; 260c, 262c; 260d, 262d;
0, and the undercut groove 268b is circumferentially connected to the circumferential groove 266 formed on the outer circumferential surface of the second alignment member 252 so as to communicate with the circumferential groove 264 formed on the outer circumferential surface of the second alignment member 252. Are set so that they can communicate with each other. In this stored state, the four support pins 268 are connected to the first biasing member 27 fitted in the circumferential groove 264 of the first alignment member 250.
0 fits into the respective upper cutting grooves 268 a and the second biasing members 2 fitted into the circumferential grooves 266 of the second alignment member 252.
72 fits into the respective undercut grooves 268b,
Corresponding upper and lower pairs of recesses 260a, 262a; 2
60b, 262b; 260c, 262c; 260d, 2
It comes into elastic contact with the outer peripheral surface of 62d. In this way, the first and second alignment members 250 and 252 are elastically held in a state where the central axes are aligned with each other. In this embodiment, the urging member 27 is used.
0 and 272 are formed from a finely wound ring-shaped coil spring. Further, the above-described locking mechanism 246 prevents the lower mounting plate 242 from being laterally biased with respect to the upper mounting plate 240 due to inertia when the z-axis arm 14 of the robot 12 moves at a high speed in the horizontal direction. It is provided in order to.

Here, as shown in FIG. 58, the locking mechanism 246 extends between the pair of left and right support pins 268 on the lower surface of the upper mounting plate 240, and As shown in FIG. 57, the body 274 is integrally provided with a central axis parallel to the central axis of the compliance module M5. Each cylinder body 274
Has a cylinder chamber 27 extending along its own central axis.
6 is formed with its lower end opened. A piston 278 functioning as a lock pin is housed in the cylinder chamber 276 so as to be slidable along the axial direction.
A conical lock hole 278a for receiving a lock ball 280 described later is formed on the lower end surface of the piston 278.

On the other hand, as shown in FIG. 57, each of the cylinder bodies 274 has a concave portion 282, 28 formed on the outer peripheral surface of the first and second alignment members 250, 252 so as to avoid this.
4, the lower end surface is close to the upper surface of the lower mounting plate 242 and extends to a position facing the lower mounting plate 242. On the other hand, on the upper surface of the lower mounting plate 242 facing the lower end surface of each cylinder 274, a concave portion 242a in which the above-described locking ball 280 is stored and fixed is formed. Here, this ball 280 is driven into the corresponding recess 2
42, and is fixed.

A communication passage 286 communicating with the upper part of each cylinder chamber 276 is formed in the above-described upper mounting plate 240, and the outer end of each communication passage 286 is connected to the upper mounting plate 2
The air port 288 attached to the outer surface of the forty 40 is in common communication. The air port 288 is connected to the above-described pneumatic source 82 via a first on-off valve 290 described later. Here, the first opening / closing valve 290 is configured to be opened / closed by the above-described control device. This control device operates while the robot 12 determines that the z-axis arm 14 is moving and driven. Only the first on-off valve 2
90 is set to the connection mode, the air pressure source 82 is connected to each cylinder chamber 276 through the air port 288, and the control operation is performed so that compressed air is introduced into each cylinder chamber 276 through the air port 288. In other states, the first on-off valve 290 is set to the open mode, each cylinder chamber 276 is opened to the atmosphere via the air port 288, and the compressed air is released from the inside of each cylinder chamber 276 to the atmosphere. The control operation is performed so as to be discharged to As a result, the first on-off valve 2
90 is connected and driven, each piston 278 is driven to protrude from the corresponding cylinder chamber 276, and the lower mounting plate 242 is inserted into a lock hole 278a formed in the lower end surface of the piston 278.
As a result, the upper mounting plate 240 and the lower mounting plate 242 are locked with respect to each other in the lateral direction, and laterally move integrally.

Here, as shown in FIG. 57 and FIG. 60, between the lower center part of the upper mounting plate 240 and the upper center part of the first alignment member 250 fixed to the lower mounting plate 242, A coil spring 292 is interposed, and the two are biased by the urging force of the coil spring 292 in a direction away from each other in the axial direction. As a result, the outer flange portion 250c of the first alignment member 250 elastically abuts on the outer peripheral portion 252b of the second alignment member 252, and the extending surfaces (ie, surfaces orthogonal to the center axis) of both of them. If the angle shifts to form a predetermined angle, the angle shift is allowed, and if the force causing the angle shift is removed, the two will return to a state of close contact. . That is, the provision of the coil spring 292 allows the compliance module M5 to absorb a displacement in a plane perpendicular to the vertical axis and also absorb an angular displacement between the planes perpendicular to the vertical axis. Will be. In addition, this compliance module M5
Is in a state of falling from the outer peripheral edge of the upper mounting plate 240,
A cover 294 on the sleeve is provided to substantially close the compliance mechanism 244 and locking mechanism 246 disposed therein.

The centering operation of the compliance module M5 configured as described above will be described below. Note that this centering operation can be executed only when the first opening / closing valve 290 is closed in the lock mechanism 246 and the locked state is released, as is clear from the above description. . First, as shown in FIG. 6, one gear G gripped by the clamp module M7.
When the third shaft portion G3 is fitted into the hole H2,
The position information of the hole H2 on the xy 'plane and the three-dimensional position of the z-axis arm 14 of the robot 12, that is, the position information of the gear G to be fitted, are input in advance. Reference numeral 14 denotes movement control by a control operation of the control device based on the position information.

Here, by the movement control of the z-axis arm 14, in the state of moving along the horizontal direction, that is, in the xy 'plane, the first on-off valve 290 is opened and the communication passage is opened. 286, each cylinder chamber 276
Compressed air will be supplied to the inside. In this way, each piston 278 is pushed down and biased to the locked position. As described above, the locking mechanism 246 is activated to be in the locking operation state, and each piston 278 is brought to the locking position and fitted into the lock hole 278a. It is locked in the lateral direction and moves laterally together.

On the other hand, by the movement control of the z-axis arm 14, along the vertical direction, that is, xz 'or y'-
In the state of moving in the z 'plane, the first on-off valve is closed and driven, and compressed air is not supplied into each cylinder chamber 276. Thus, each piston 27
8 is released from the lock position. Thus, the locking mechanism 246 is unlocked, and the upper and lower mounting plates 240,
242 will be brought into a state where they can move relatively freely with respect to each other in the lateral direction.

If the position information is accurate, the z-axis arm 14 is moved and driven according to the control contents of the control mechanism, and the hole H2 is positioned according to the set value. The gear G is moved directly above the hole H2 based on the above-described movement control operation, and then is moved vertically downward, so that the third shaft portion G3 of the gear G can be satisfactorily inserted into the hole H2. It will fit. However, the positioning of the hole H2 is not accurate, and the position of the z-axis arm 14 is slightly deviated from the set value in the xy 'plane, or the position of the z-axis arm 14 is changed due to an error in the drive system, for example, a backlash in gears. Occurs slightly from the position defined by the above.

When such a shift occurs, z
The lower end of the third shaft portion G3 of the gear G, which has been lowered vertically by the lowering of the shaft arm 14, comes into contact with the tapered surface formed at the opening end of the hole H2. And
When the z-axis arm 14 is further lowered, the lower end edge of the gear G receives a component force along the xy ′ plane along the tapered surface. Here, as described above, when the z-axis arm 14 moves along the up-down direction, both the lock mechanisms 246 are in a non-operating state. For this reason, the pair of upper and lower mounting plates 240 and 242 can be laterally offset relative to each other. As a result, when the gear G receives the above-described component along the xy ′ plane, the component acts on the compliance mechanism 244 via the lower mounting plate 242.

Therefore, in a state where this component force is acting, the pair of upper and lower urging members 270 and 272
From a state where the first and second alignment members 250 and 252 are elastically aligned with each other with respect to their central axes, as shown in FIG. 61, against the urging forces of these urging members 270 and 272,
The support pins 268 are inclined obliquely so that the lower mounting plate 24
2 is shifted relative to the upper mounting plate 240 along a plane perpendicular to the central axis. In this case, as shown in FIG. 61, the lower mounting plate 242 moves in a state where the gear G is supported so as to extend vertically without tilting the posture.
For this reason, the subsequent fitting operation can be performed very easily.

Thus, the third shaft portion G3 of the gear G
Between the gear G and the hole H2 is elastically absorbed by the displacement of the first and second alignment members 250 and 252 in each compliance mechanism 244, and the gear G and the hole H2 are aligned along the vertical direction. And with the lowering of the z-axis arm 14, the third shaft portion G3 of the gear G
It fits well inside. After the fitting operation of the gear G into the hole H2 is completed, the clamp module M
When the gripping of the gear G by the gear 7 is released and the z-axis arm 14 is driven to rise, the clamp module M7 rises alone with the gear G released. Then, in a state where the gear G is completely separated from the clamp module M7, the above-described component does not act on the lower mounting plate 242. As a result, the component force acting on the lower mounting plate 242 in the compliance mechanism 244 is eliminated, and the urging force of the pair of upper and lower urging members 270 and 272 causes the two mounting plates 24
At 0, 242, the shift state shown in FIG. 61 is favorably returned to the matching state shown in FIG.

In this manner, the centering operation of the compliance module M5, that is, the elastic biasing / returning operation of the compliance mechanism 244 is completed. On the other hand, the centering operation of the compliance mechanism 244 not only absorbs the displacement in the plane perpendicular to the central axis described above, but also absorbs the displacement in the plane perpendicular to the central axis as shown in FIG. In addition, the centering operation of absorbing the inclination of the central axis of the lower mounting plate 242 with respect to the central axis of the upper mounting plate 240 can be performed.

Here, at the four corners of the upper mounting plate 240,
As shown in FIG. 55, in a state of being spaced apart from each other at a certain arrangement pitch D mentioned above, screw holes 240b for attaching the diameter d ₁
However, mounting through holes 242b are formed at the four corners of the lower mounting plate 242 in the same manner as shown in FIG. In the center of two opposing sides of the upper surface of the upper mounting plate 240, a positioning hole 240c and a positioning groove into which a pair of positioning pins commonly formed on the bottom surfaces of the modules M1 to M4 and M6 are respectively inserted. 240d are formed. The other modules M2 to M are provided at the center of two opposing sides of the lower surface of the lower mounting plate 242.
4, M6, at which are inserted respectively into the positioning holes and the positioning groove formed in M7, has a diameter d _2, the predetermined distance D ₂
A pair of positioning pins 242c spaced apart from each other are integrally attached in a state of protruding downward. Thus, at the bottom of this compliance module M5,
Other modules M2 to M4, M6, and M7 are selectively attached, and another module M is provided on top of the other modules.
1 to M4 and M6 can be selectively attached.

[Description of Shift Module M6] As shown as an embodiment in FIGS. 63 to 70, the shift module M6 for performing the above-described shift operation is arranged along the central axis of the shift module M6. A pair of upper and lower mounting plates 300 and 302 which are relatively movably mounted;
An intermediate member 304 is provided between the upper and lower mounting plates 300 and 302 in a telescopic manner. Here, a movement drive mechanism 306 for moving the lower mounting plate 302 toward and away from the upper mounting plate 300 along the axial direction is integrally attached to the center of the lower surface of the upper mounting plate 300. I have. The moving drive mechanism 306 is configured as a pneumatic cylinder mechanism in this embodiment.

First, on a lower surface of the above-mentioned upper mounting plate 300, a pair of first first members extending downward are located at the same diameter and at the same distance from the center axis.
Are fixed. A sleeve-like first cover 310 surrounding the pair of first guide rods 308 is integrally formed on the outer periphery of the lower surface of the upper mounting plate 300 so as to be integrally lowered. On the other hand, on the upper surface of the lower mounting plate 302 described above, the first guide rod 308 is located on a diameter orthogonal to the diameter at which the first guide rod 308 is provided, and
8 and a pair of second extending upwardly at a position separated from the central axis by the same distance as the distance from the suspension axis.
Guide rod 312 is fixed. The first cover 3 described above is provided on the outer periphery of the upper surface of the lower mounting plate 302.
The second cover 314 is formed in an upright state integrally with the second cover 314 so as to be aligned with the second cover 314.

On the other hand, the above-mentioned intermediate member 304 is located inside the first and second covers 310 and 314, and is disposed so as to be surrounded by these. That is, the intermediate member 304 is provided at the center with the movement driving mechanism 30 described above.
And a pair of sleeves 318 into which the above-mentioned pair of first guide rods 308 are respectively inserted from above at the outer periphery of the main body 316. And a pair of second guide rods 312 integrally formed with a pair of sleeves 320 inserted from below. The first and second guide rods 308, 312 are slidably supported in corresponding sleeves 318, 320 by slide bearings 322, 324 housed in their respective inner circumferences.

On the other hand, as shown in FIGS. 64 and 68, the diameter at which the above-mentioned first pair of guide rods 308 is provided and the diameter at which the above-mentioned second pair of guide rods 312 are provided are different. The intermediate member 30 is positioned on different diameters and on the same circumference as the circumference on which they are disposed.
A first pair of stop pins 326 for restricting the rising end position of the shift module M6 is fixed to the upper surface of the main body 316 of the fourth stand 316 in an upright state. At the upper end of each of the first stop pins 326, a first head 328 that defines the rising end of the intermediate member 304 by being in contact with the lower surface of the upper mounting plate 300 is attached.
Reference numeral 8 is configured to contact the lower surface of the upper mounting plate 300 via the first cushioning member 330.

The first stopper pin 326 has a thread groove formed on the outer periphery thereof over its entire length.
Is screwed into this thread groove. As a result, the first head 328 is connected to the first stop pin 32.
6 is movable along the axial direction. That is, by moving the first head 328 along the axial direction of the first stop pin 326, the shift stroke amount of the intermediate member 304 to the upper mounting plate 300 can be changed and adjusted.

The diameter at which the first pair of guide rods 308 is disposed, the diameter at which the second pair of guide rods 312 are disposed, and the diameter at which the first pair of stop pins 326 are disposed. Are located on the same circumference as the circumference on which they are disposed, and the upper surface of the lower mounting plate 302 is provided with a shift module M6.
The second pair of stop pins 332 for regulating the lower end position in the above is fixed in a falling state.
The upper ends of the second stopper pins 332 are taken out above the main body 316 via side through holes 316b formed in the main body 316 of the intermediate member 304 so as to penetrate in the thickness direction. A second head 334 having a diameter larger than the diameter of the side through hole 316 is attached to the upper end of each second stop pin 332. Here, the lower surface of the second head 334 is brought into contact with the upper surface of the main body 316 of the intermediate member 304 via the second cushioning member 336, so that the intermediate member 30 of the lower mounting plate 302 is
4 is defined.

As shown in FIG. 68, the second head 334 attached to the upper end of each second stop pin 332 is connected to the first stop 326 of the first stop pin 326 via the first cushioning material 330. Contact the lower surface of the upper mounting plate 300,
The upper end plate 300 is inserted into a through hole 300 a formed in a state where the rising end position is defined.
The outer circumference of the second stopper pin 332 is formed with a thread groove over the entire length, and the second head 334 described above is formed.
Is screwed into this thread groove. As a result, the second head 334 is movable along the axial direction of the second stop pin 332. That is, the second head 3
The shift stroke of the lower mounting plate 302 to the intermediate member 304 can be changed and adjusted by moving the first stop pin 34 along the axial direction of the second stop pin 332.

As described above, the upper mounting plate 300 and the lower mounting plate 3
Intermediate member 30 interposed in a telescopic manner with respect to 02
4, the upper mounting plate 300 and the lower mounting plate 302 are guided so as to approach and separate from each other along the central axis, so that a sufficient shift stroke can be obtained with a small height dimension. When each module is combined, a more compact structure can be achieved.
In addition, the first pair of guide rods 308 and the second pair of guide rods 312 are used to withstand a load, so that the structure is superior in rigidity. Also,
The above-described movement drive mechanism 306 includes a cylinder body 338 integrally attached in a state of falling down at the center of the lower surface of the upper attachment plate 300, and a shift module Piston 34 housed reciprocally slidable along the center axis of Yure M6
2 and integrally connected to the lower surface of the piston 342,
A piston rod 344 projecting downward while penetrating the lower portion of the cylinder body 338 and having a lower end connected to the center of the upper surface of the lower mounting plate 302 described above.

Here, the first cylinder compartment 340a is defined by the portion of the cylinder chamber 340 located below the piston 342, while the second cylinder compartment 340 is defined by the portion of the cylinder chamber 340 located above the piston 342. 340b is defined. Then, as is clear from FIG. 70, the first cylinder compartment 340 is formed in a state where the upper mounting plate 300 and the peripheral wall of the cylinder body 338 are both penetrated.
A first communication passage 346a having one end connected to the first communication passage 346a is formed. The first communication passage 346a is connected to the upper mounting plate 3
00 first air port 34 attached to the outer surface
8a. On the other hand, in a state where the second air port 34a is juxtaposed with the first air port 348a,
8b is attached to the outer surface of the upper attachment plate 300.
Here, the second air port 348b is connected to the second cylinder chamber 340 through a second communication passage formed through the upper mounting plate 300, though not shown.
b.

Note that these first and second air ports 3
48a and 348b are connected to the above-described pneumatic source 82 via a third switching valve 350 formed of an electromagnetic solenoid valve described later. This third switching valve 350
Is a state in which the first switching mode is set, and the first cylinder compartment 34 through the first air port 348a.
0a is introduced into the second air port 348b.
Is set so as to discharge air from the second cylinder compartment 340b via the first cylinder port 348a via the first air port 348a while the second switching mode is set. It is configured so that air is discharged and switching is set so that compressed air is introduced into the second cylinder compartment 340b through the second air port 348b. Thus, the third switching valve 350
In the first switching mode, the lower mounting plate 302 is driven close to the upper mounting plate 300,
By setting the second switching mode, the lower mounting plate 302 is driven to be separated from the upper mounting plate 300.

As shown in FIG. 63 and FIG. 69, a sensor mounting stay 352 is mounted on one outer surface of the upper mounting plate 300 in a state where the sensor mounting stay 300 is standing down. A dog mounting stay 354 is mounted on one outer surface of the mounting plate 302 so as to be upright from the inner surface of the sensor mounting stay 352. A first dog 356a that defines the lower end position of the lower mounting plate 302 is mounted on the upper end of the dog mounting stay 354, and the lower mounting plate 3
The second dog 356b that defines the position of the rising end of No. 02 is attached. Here, these first and second dogs 3
Reference numerals 56a and 356b are made of magnets.
In addition, the first and second dogs 356a, 356b
Are arranged at positions separated from each other along the circumferential direction.

On the other hand, the aforementioned sensor mounting stay 35
In FIG. 2, a seventh sensor 358 which is turned on by the first dog 356a in a state where the lower mounting plate 302 is lowered to the lower end position, and The eighth operation which is turned on by the second dog 356b
Sensor 360 is attached. Here, the seventh and eighth sensors 358 and 360 are both constituted by non-contact type magnetic sensors which are turned on when a magnet approaches.

Here, the seventh and eighth sensors 35
Reference numerals 8 and 360 are connected to the above-described control device and output detection results to the control device. That is, the control device sets the above-described third switching valve 350 to the first switching mode, and controls the lower mounting plate 302 to be separated from the upper mounting plate 300 in a state where the driving is controlled.
If the ON signal is not output from the seventh sensor 358 even after the lapse of the predetermined time, it is determined that the lower mounting plate 302 has stopped during the lowering operation or that the lower mounting plate 302 is in an abnormal state in which the lowering operation is not performed. The operation is executed, and the ON signal is output from the seventh sensor 358 within a predetermined time, so that the subsequent control procedure is executed. Further, the control device sets the above-described third switching valve 350 to the second switching mode and sets the lower switching plate 302 so as to approach the upper mounting plate 300 in a state where a predetermined time has elapsed. However, if the eighth sensor 360 does not output an ON signal, it is determined that the lower mounting plate 302 has stopped in the middle of the ascent operation or is in an abnormal state in which the ascending operation is not performed, and an alarm operation is performed. Then, by outputting an ON signal from the eighth sensor 360 within a predetermined time, a subsequent control procedure is executed.

As described above, since the shift module M6 is configured, the first switching mode is set in the third switching valve 350, and the first cylinder compartment is set via the first air port 348a. Compressed air is introduced into 340a, and air is discharged from the second cylinder compartment 340b through the second air port 348b, whereby the lower mounting plate 302 is driven close to the upper mounting plate 300,
Further, the second switching mode is set in the third switching valve 350, and compressed air is introduced into the second cylinder branch 340b through the second air port 348b,
By discharging air from the first cylinder compartment 340a through the first air port 348b, the lower mounting plate 3
02 is driven to be separated from the upper mounting plate.

Here, at the four corners of the upper mounting plate 300,
The fixed arrangement pitch D ₁ having the constant diameter d ₁ described above.
A mounting screw hole 300b is formed in a state where they are separated from each other, and a mounting through hole 302a is formed in each of the four corners of the lower mounting plate 302 in a similar state. In the center of two opposing sides of the upper surface of the upper mounting plate 300, a positioning hole 300c and a positioning groove 300d into which a pair of positioning pins formed in common on the bottom surfaces of the modules M1 to M5 are respectively inserted. Is formed.

The other modules M2 to M5 are provided at the center of two opposing sides of the lower surface of the lower mounting plate 302.
A pair of positioning pins 302b respectively inserted into the positioning holes and the positioning grooves formed in the M7 have a predetermined diameter d _1.
And are integrally attached in a state of protruding downward with a predetermined distance D2 therebetween. In this manner, the other modules M2 and M2 are located below the shift module M6.
M5 and M7 are selectively mounted, and any one of the other modules M1 to M5 is selectively mounted on the upper part of M5 and M7.

[Description of Clamp Module M7]
A clamp module M7 attached to the lower part of the hand mechanism 10 for gripping parts is provided in FIGS.
FIG. 8 shows a first embodiment. That is, the clamp module M7 is driven pneumatically, that is,
It is configured to be driven by the working compressed air, and includes a mounting plate 370 that is mounted on the lower surface of a lower mounting plate of another module (a mounting plate for the holder module M1). Around the mounting plate 370, a frame member 372 is integrally mounted so as to surround the mounting plate 370 so as to fall down. That is, the frame members 372 correspond to the four pieces of the mounting plate 370, respectively.
It is composed of three frame pieces 372a to 372d. As shown in FIGS. 72 and 74, a single guide rail 374 extending along the center line of the mounting plate 370 is fixed to the lower surface of the mounting plate 370. This guide rail 37
4, a pair of slide blocks 376 and 378 are slidably guided via slide guides 380 and 382, respectively. The slide guides 380, 38
2 is supported by the guide rail 374 so as not to fall off.

That is, these slide blocks 376, 3
As shown in FIG. 77, the frame 78 is slidable between a pair of frame pieces 372a and 372c opposed to each other in a space surrounded by the frame member 372 below the mounting plate 370. Specifically, these slide blocks 376 and 378
Unclamping positions (that is, maximum separation positions) where the outer surfaces abut the tip surfaces of the unclamping amount adjusting stopper bolts 384 and 386 attached to the a and 372c, respectively.
And clamp amount adjusting stopper bolts 388, 3 attached to the opposite frame pieces 372c, 372a, respectively.
90 can be independently slid between a clamp position (i.e., a maximum proximity position) where each inner surface abuts against the distal end surface of the 90.

The stopper bolts 384 and 386 for adjusting the unclamping amount are independently attached to the corresponding frame pieces 372a and 372c so as to be able to move forward and backward, respectively. That is, the maximum separation amount is arbitrarily set.
On the other hand, both stop bolts 388 and 39 for adjusting the clamp amount are used.
No. 0 extends through the through holes 378a and 376a formed in a state penetrating the opposing slide blocks 378 and 376, and the leading end extends to near the center. And
Stopper bolts 388 and 390 for adjusting both clamp amounts are
They are independently attached to the opposite frame pieces 372c and 372a so as to be able to move forward and backward, and by moving them forward and backward, the clamp position (that is, the minimum separation amount) can be set arbitrarily.

Here, the first slide block 376 located on the left side in FIG. 76 has its base end wound around the corresponding clamp amount adjusting stop bolt 388,
A through hole 378 formed in the second slide block 378
The first coil spring 392 that penetrates through a and locks the tip to the inner surface is always urged to the unclamping position. In addition, the second position located to the right in FIG.
The slide block 378 has a base end wound around the outer periphery of the corresponding stopper bolt 390 for adjusting the amount of clamp, and a through hole 376 a formed in the first slide block 376.
, And is constantly urged to the unclamping position by the second coil spring 394 whose leading end is locked to the inner surface. That is, these slide blocks 376 and 37
8 is always elastically held in the unclamped state as long as no external force acts thereon.

On the other hand, these slide blocks 376, 3
A movement drive mechanism 396 is provided for moving the 78 to the clamp position against the urging force of the corresponding coil springs 392 and 394. This movement drive mechanism 3
Reference numeral 96 in this embodiment comprises air cylinder mechanisms 396a and 396b attached to the respective slide blocks 376 and 378. Here, since these air cylinder mechanisms 396a and 396b have the same configuration, the air cylinder mechanism 396a for moving and driving the first slide block 376 is represented by a reference numeral with "a" added to each reference numeral. An air cylinder mechanism 396b for moving and driving the second slide block 378 is denoted by the same reference numeral with "b" added.
The description is omitted.

That is, the air cylinder mechanism 396a
Is located on the outer surface of the first slide block 376,
With the extension axis aligned with the corresponding clamp amount adjusting stopper bolt 388, the recess 398 having a circular cross section is used.
a is formed, and the tip of the piston 400a is loosely inserted into the recess 398a through the opening. The base end of the piston 400a is fixed to the corresponding frame piece 372a. A cylinder body 402a formed of a thin steel plate and having a closed end is slidably fitted in an airtight state around the outer periphery of the end of the piston 400a. Here, the cylinder body 402a is fixed to the first slide block 376 by fixing its tip to the end face of the recess 398a. As a result, the cylinder chamber 404a is defined by the space inside the cylinder body 402a and located in front of the distal end surface of the piston 400a.

On the other hand, a communication passage 406a communicating at one end for introducing compressed air into the above-described cylinder chamber 404a is formed in the piston 400a, and the other end of the communication passage 406a is connected to the piston 400a. It is connected to an air port 408a attached to the base end projecting outward from the corresponding frame piece 372a. Here, the air ports 408a and 408b provided in both the air cylinder mechanisms 396a and 396b are connected to the above-described pneumatic source 82 via a second on-off valve 410 described later. The second on-off valve 410 is connected to the air pressure source 8 via the first air ports 408a and 408b in a state where the connection mode is set by the control device.
2, the first and second air ports 408a, 408b are connected to the first and second cylinder chambers 404a, 404b.
The first and second air ports 40 are set so that compressed air is introduced into the first and second air ports 40 while the open mode is set.
8a and 408b via the first and second cylinders 4 respectively.
It is configured to open and switch 04a and 404b to the atmosphere and to discharge air from them.

By setting the connection mode in the second on-off valve 410 in this manner, the first and second slide blocks 376 and 378 are moved from the unclamped position to the clamped position by the respective coil springs 392. , 3
The first and second slide blocks 37 are moved and driven against the urging force of the first and second slide blocks 94 to set the open mode.
6,378 are returned from the clamped position to the unclamped position by the urging forces of the respective coil springs 392,394. In addition, these 1st and 2nd
The lower surfaces of the slide blocks 376 and 378 are provided with jaws 412 and 414 for gripping components from both sides, respectively. Accordingly, by setting the connection mode in the second on-off valve 410, these jaw 4
The gears G as parts are gripped from both sides by the parts 12, 414. Here, positioning grooves 412a and 414a are formed in the lower surface of each of the joyos 412 and 414 at the center thereof. Each positioning groove 412a, 414a is formed so as to be compatible with all the jaws, so that when the corresponding jaws 412, 414 are damaged, they serve as a reference when removing and installing a new jaw 412, 414. Have been.

Here, in this embodiment, the cylinder chamber 404a of the first air cylinder mechanism 396a is provided.
Is set to be larger than the diameter of the cylinder chamber 404b in the second air cylinder mechanism 396b. As a result, the movement driving force of the first air cylinder mechanism 396a is reduced to the second air cylinder mechanism 396b.
Is set to be larger than the moving driving force at.
For this reason, in a state where a part is specifically gripped, the first slide block 376 which is moved by a large driving force is used.
In this state, the clamp position is defined in a state where the clamp position always contacts the corresponding clamp amount adjusting stopper bolt 388. In this way, even if the mounting position of the component is deviated from the predetermined position, the clamp position is fixed to the mounting plate 3 in a state of being clamped by the two jaws 412 and 414.
70 is always set at a fixed position.

As shown in FIGS. 75 and 78, first grooves 416 and 418 for attachment are provided on the lower end surfaces of a pair of frame pieces 372b and 372d of the frame member 372 which oppose each other. Each is formed in a state of extending along the direction. In addition, these frame pieces 37
The inner grooves 2b and 372d are formed with second grooves 420 and 422, respectively, through which detection dogs 376b and 378b integrally attached to the opposite outer surfaces of the slide blocks 376 and 378 are respectively inserted. I have. On the other hand, the second piece formed on the inner surface of this frame piece 372d
The first slide block 376 is brought into the clamping position in the groove 422 of the corresponding detection dog 3.
A ninth sensor 424 that is turned on by the second slide block 76 is accommodated in the second groove 420 formed on the inner surface of the frame piece 372b.
The tenth sensor 4 that is turned on by the corresponding detection dog 378b when 78 is brought to the clamp position
26 are stored. Here, these ninth and tenth
Sensors 424, 426 together have a corresponding dog 376
b, 378b are constituted by a non-contact type proximity sensor which is turned on by approaching.

Here, the ninth and tenth sensors 4
Reference numerals 24 and 426 are connected to the above-described control device, and output detection results to the control device. That is, the control device sets the above-mentioned second on-off valve 410 to the connection mode and sets the two slide blocks 376 and 378 in the drive control so as to move from the unclamping position to the clamping position. Even if the predetermined time has passed,
If no ON signal is output from the ninth and tenth sensors 424 and 426, both slide blocks 37 are used.
6, 378 is stopped in the middle of the moving operation or is in an abnormal state in which the moving operation is not executed, and an alarm operation is executed, and the ninth and tenth sensors 4
By outputting ON signals from both 24 and 426,
The following control procedure is executed.

Further, the control device switches the above-mentioned second on-off valve 410 to the open mode and controls the drive so that both slide blocks 376 and 378 move from the unclamping position toward the clamping position. In this state, even if a predetermined time has elapsed, when the ninth and tenth sensors 424 and 426 output an ON signal, both slide blocks 376 and 378 remain stopped at the clamp position. It is determined that the locked state is abnormal, an alarm operation is performed, and the ON signal is not output from the ninth and tenth sensors 424 and 426 within a predetermined time, so that a subsequent control procedure is executed. I have.

On the other hand, the slide pieces 372b, 37
On the outer surface of the 2d, a pair of upper and lower mounting grooves 428a, 428 to which accessories are optionally mounted as necessary.
28b; 430a and 430b are formed in a substantially T-shaped cross section. In this embodiment, the slide piece 372 is used.
b, a pair of upper and lower mounting grooves 428a,
As shown in FIG. 1, an aiming unit 440 for accurately detecting the relative position of the hand mechanism 10 with respect to the gear mounting surface S1 is provided as an accessory attached via the 428b. Slide piece 37
It is detachably attached to the outer surface of 2b. Since the aiming unit 440 does not define any feature of the present invention, a detailed description thereof will be omitted, but an eleventh sensor for detecting a reference mark (not shown) defined on the mounting surface S1. 442 and the eleventh sensor 442
By detecting the fiducial mark via the
The zero origin position is calibrated. In this embodiment, the eleventh sensor 442 is constituted by an optical sensor, and more specifically, is constituted by a reflection type photocoupler.

In the clamp module M7 configured as described above, the connection mode is set in the second on-off valve 410, and the first and second air ports 408 are set.
When the compressed air is introduced into the first and second cylinder chambers through the first and second cylinder chambers a and 408b, the two jaws 412 and 414 are driven close to each other, and flattened on both sides of the first shaft portion G2 of the gear G. The surface G4 is clamped from both sides. Further, the open mode is set in the second on-off valve 410, and the compressed air is discharged from the first and second cylinder chambers through the first and second air ports 408a and 408b. , 414 are driven apart from each other, resulting in an unclamped state.

[0136] Here, the four corners of the upper surface of the mounting plate 370 has a constant diameter d ₁ described above, in a state of being spaced apart from each other at a certain arrangement pitch D _1, the mounting screw hole 370a formed Have been. The diameter d ₁ and the arrangement pitch D ₁ are set to common values for the above-described six types of modules M1 to M6. Also, the mounting plate 37
A pair of positioning pins having a common diameter d2 on the bottom surface of each of the above-described modules M1 to M6 and formed at a common separation distance D2 at the center of the two opposing pieces on the top surface of the zero. Positioning holes 370b into which are inserted respectively
And a positioning groove 370c. Note that these positioning holes 370b and positioning grooves 370c are positioned in the positioning grooves 412 of
a, 414a. As a result, the structure is compatible with the attachment of the positioning pins for positioning to the respective jaws 412 and 414.

The positioning holes 370b and the positioning grooves 370c are connected to the respective modules M1 as described above.
To M6, the clamp module M7 can be attached to the lower part of any of the modules M1 to M6 in the same state. Here, for example, this clamp module M
7 is directly attached to the mounting plate 30 of the holder module M1, a screw portion formed at the lower end of a mounting screw (not shown) inserted through the mounting through hole 30a of the mounting plate 30 from above is used. It will be screwed into the mounting screw hole 370a.

It is needless to say that the clamp module M7 is not limited to the configuration of the first embodiment described above, but can be variously modified without departing from the gist of the present invention. For example, this clamp module is shown in FIG.
85 can be configured as shown in FIG. 85 as a second embodiment. That is, in the first embodiment described above, both unclamping positions of the first and second jaws 412, 414 are set in the frame member 372,
Accordingly, the maximum distance between the two yoyos 412, 414 is limited. For this reason, there is a limit that the size of the component to be clamped by this must be smaller than the frame member 372. On the other hand, in the clamp module M7b of the second embodiment, the size of the part to be clamped is substantially not limited,
It is designed to be able to clamp parts of any size.

The clamp module M7b of the second embodiment will be described below. The same parts as those of the clamp module M7 of the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Omitted. More specifically, in the second embodiment, the mounting plate 450 of the clamp module M7b is used.
Is constituted by a long plate that is selectively attached to the other modules M1 to M6 at the center thereof. The first and second slide blocks 376 and 378 are provided at both ends of the long mounting plate 450 independently of each other. That is,
The above-described guide rail 374 is divided into a pair of left and right guide rails 374a and 374b, and the first and second slide blocks 376 and 378
a and 374b are guided separately and independently. As for the first slide block 376, in the first embodiment, the corresponding clamp amount adjusting stopper bolt 388 is connected to the opposite frame piece 382c.
However, in this embodiment, the first auxiliary mounting piece 452 is fixed to the lower surface of the mounting plate 450 in order to support the mounting in this embodiment. On the other hand, with respect to the first slide block 378, in the first embodiment, the corresponding clamp amount adjusting stop bolt 390 is attached to the opposite frame piece 382a.
In this embodiment, the second auxiliary mounting piece 454 is fixed to the lower surface of the mounting plate 450 in order to support the mounting.

On the other hand, in the first embodiment described above,
The movement of the first and second slide blocks 376, 378 from the clamp position to the unclamping position is based on the biasing force of the corresponding coil springs 392, 394. In order to drive the first slide block 376 from the clamp position to the unclamping position, a third air cylinder mechanism 396c having substantially the same structure as the second air cylinder mechanism 396b is used for the first slide block 376. Block 3
76. In order to drive the second slide block 378 from the clamp position to the unclamping position, the first air cylinder mechanism 396 is used.
A fourth air cylinder mechanism 396d having substantially the same configuration as that of the second slide block 378 is attached to the second slide block 378.

However, in the second embodiment, the first
Since the pneumatic operating force is used for the reciprocating movement of the second slide block 376 and the second slide block 378, the first to fourth slide blocks are used.
Although not shown, the air cylinder mechanisms 396a and 396d are connected to the air pressure source 82 via a fourth switching valve. Here, the fourth switching valve is set in the first switching mode by the control device,
First and second air cylinder mechanisms 396a, 396b
Is connected to the air pressure source 82, and the third and fourth air cylinder mechanisms 396c and 396d are switched and set to be open to the atmosphere, respectively, and the second and third switching modes are set. Second air cylinder mechanism 39
6a and 396b are opened to the atmosphere, and the third and fourth air cylinder mechanisms 396c and 396d are switched and connected to the pneumatic source 82, respectively.

As described above, since the clamp module M7b of the second embodiment is constituted, the first switching mode is switched and set from the second switching mode in the fourth switching valve. Compressed air is introduced into the first and second cylinder chambers 404a and 404b through the second air ports 348a and 348b, respectively, and the third and fourth air ports are introduced through the third and fourth air ports 348c and 348d, respectively. By discharging air from the fourth cylinder compartments 404c and 404d, the first and second slide blocks 376 and 378 are moved from the unclamped position to the clamped position, and are driven to approach each other. Further, the fourth switching valve is set to switch from the first switching mode to the second switching mode,
Compressed air is introduced into the third and fourth cylinder chambers 404c and 404d via the third and fourth air ports 348c and 348d, respectively, and the first and second air ports 34 are provided.
The air is exhausted from the first and second cylinder chambers 404a and 404b through the first and second cylinder blocks 8a and 348b, respectively, so that the first and second slide blocks 376 and 378 are moved from the clamped position to the unclamped position. Are driven apart from each other.

As described above, the movement of the first and second slide blocks 376 and 378 from the unclamping position to the clamping position and the movement from the clamping position to the unclamping position are both driven by pneumatic control. With such a configuration, the ninth and the ninth and the ninth and the ninth and the second slide blocks 376 and 378 which are provided in the above-described first embodiment are respectively detected to be brought to the clamp positions. In addition to the ten sensors 424, 426, there are further provided eleventh and twelfth sensors 456, 258 for detecting that they have been brought to the unclamped position, respectively.
Thus, by configuring the clamp module M7b as shown in the second embodiment, it is possible to clamp a component of an arbitrary size.

In the second embodiment, the mounting plate 450
As shown in FIG. 86, a configuration in which a compliance module M5b is separately attached to the central portion of the lower surface of the device may be considered. The compliance module M5b has the same configuration as the above-described compliance module M5, but the positioning of the work W to be clamped by the clamp module M7b is provided on the lower surface of the lower mounting plate 242 of the compliance module M5b. A pair of positioning pins 296a and 296b for performing the operation are mounted so as to protrude downward. Further, on the upper surface of the work W, there are formed positioning holes Wa and Wb into which the pair of positioning pins 296a and 296b are respectively inserted and positioned.

In such a configuration, when the hand mechanism 10 descends to clamp the work W via the clamp module M7b, the pins 296a, 296
b is inserted into the positioning holes Wa and Wb of the work W from above, respectively. Even if the workpiece W is displaced in the horizontal plane, the locking mechanism 246 is set in the unlocked state, so that the compliance operation is passively executed as shown in FIG. , 296b are the corresponding positioning holes W
a and Wb, respectively. In this state, the center of the work W and the center of the compliance module M5b are shifted from each other along the horizontal direction. After that, the locking mechanism 246 is set to the locking state, whereby FIG.
As shown in FIG. 8, the center of the work W and the center of the compliance module M5b are aligned with each other. As a result, the work W brought to the predetermined center position (that is, the center of the work W is made to coincide with the center of the hand mechanism 10) is surely clamped by the clamp module M7b.

It is needless to say that the clamp module M7 is not limited to the configuration of the first and second embodiments described above, but can be variously modified without departing from the gist of the present invention. There is no. For example, this clamp module can be configured as shown in FIGS. 89 to 92 as a third embodiment. That is, in the above-described second embodiment, a component of an arbitrary size can be clamped by extending the maximum separation distance between the two jaws 412 and 414. It is difficult to do. On the other hand, in the clamp module M7c of the third embodiment, it is possible to reliably clamp an elongated component.

The clamp module M7c of the third embodiment will be described below. The same parts as those of the clamp modules M7 and M7b of the first and second embodiments are denoted by the same reference numerals. Therefore, the description is omitted. Specifically, the clamp module M7c of the third embodiment is
At the center thereof, there is provided a long base 460 selectively attached to the other modules M1 to M6. On the lower surfaces at both ends of the long base 460, first and second clamp units 462 and 464, which are configured in the same manner as the clamp module M7 of the first embodiment, change the mounting position. Mounted where possible. Here, the first and second clamp units 462, 464
Are set such that the respective clamping directions (that is, the extending directions of the guide rails 394) are orthogonal to the longitudinal axis direction of the long base 460. By configuring the clamp module M7c in this manner, the elongated part is clamped at both ends thereof by the first and second clamp units 462, 264, respectively. According to the example, this elongate part is reliably clamped.

(Explanation of Operation of Hand Mechanism 10 Equipped with All Seven Modules M1 to M7) Next, as shown in FIG. 6, the hand mechanism 10 is inserted and inserted into a hole H1 formed in the horizontal surface portion S1. The mounted gear G is clamped by a clamp module M7 attached to the lower part of the hand mechanism 10, and the gear G is fixed at a predetermined angle θ around its own central axis.
For example, a description will be given, with reference to FIGS. 93 to 95, of an operation of inserting into a hole H2 formed in an inclined surface portion S2 inclined by a predetermined angle α with respect to a horizontal surface portion after being turned by 90 degrees. That is, in this embodiment, when the hand mechanism 10 performs the above-described gripping / inserting operation,
The seven types of modules M1 to M7 are set to be arranged in the above-described order from the z-axis arm 14 of the robot 12 downward.

In FIG. 93, similarly to the case shown in FIG. 6, the inclined surface portion S2 is inclined at an inclination angle θ (45 degrees in this embodiment) with respect to the horizontal surface portion S1. Is set. In addition, FIG. 94 schematically illustrates a connection mode of sensors and valves necessary for the operation of the hand mechanism 10. These have been described in detail in the description of each of the modules M1 to M7. A first sensor 54 is attached to the holder module M1, and the first sensor 54 is attached to a mounting plate. It is set to turn on when the connection member 30 is dropped and the connection state with the fixing member 28 is released. Further, a first switching valve 80 is connected to the reversing module M2, and the first switching valve 80 is connected to the lower mounting plate 64 by setting the first switching mode. By rotating from a standby position parallel to the upper mounting plate 62 to an inversion position inverted around the rotation axis RL by the angle α, and by setting the second switching mode, the rotation shaft 60 is rotated.
Is rotated from the reverse position to the standby position. The reversing module M2 has a second sensor 9 for detecting that the lower mounting plate 64 is at the standby position.
8 and a third sensor 100 for detecting that it is in the reverse position.
Are provided. On the other hand, the turning module M3 has
The second switching valve 146 is connected to the second switching valve 146. When the first switching mode is set, the rotation support shaft 110 is connected to the lower mounting plate 114 with respect to the upper mounting plate 62. From the standby position, which coincides with the upper and lower sides, to a turning position in which the turning shaft 110 is turned around the center axis line CL by an angle θ, and the second switching mode is set. It is configured to be driven to rotate up to. In addition, the turning module M3 has a fourth attachment detecting that the lower mounting plate 114 is at the standby position.
And a fifth sensor 164 for detecting that the vehicle is at the turning position.

Further, the cushion module M4 has a sixth sensor 21 for detecting that the lower mounting plate 182 has approached the upper mounting plate 180 up to the allowable cushion amount.
6 are provided. Further, a first opening / closing valve 290 is connected to the compliance module M5. When the first opening / closing valve 290 is set to the connection mode, the lock mechanism 246 is set to the locked state, and the open mode is set. Is set so as to set an unlocked state. Further, a third switching valve 350 is connected to the shift module M6. The third switching valve 350 connects the lower mounting plate 302 to the upper mounting plate by setting the first switching mode. The lower mounting plate 302 is configured to be driven to move away from the upper mounting plate 300 when the second mounting mode is set and the lower mounting plate 302 is driven close to the upper mounting plate 300. The shift module M6 includes a seventh sensor 358 for detecting that the lower mounting plate 302 is at the lower end position, and an eighth sensor 360 for detecting that the lower mounting plate 302 is at the upper end position. I have. Finally, the clamp module M7 has a second on-off valve 410
When the connection mode is set, the second on-off valve 410 drives the two jaws 412 and 414 close to each other, clamps the component (gear G), and sets the open mode. As a result, the parts (gear G) are configured to be unclamped by driving them apart from each other.
In addition, this clamp module M7 has two
Ninth and tenth sensors 424 and 426 are provided for detecting that 2,414 are in a clamped state.

The pick-and-place operation of the component (gear G) in the hand mechanism 10 thus configured will be described with reference to the timing chart shown in FIG. First, the center axis of each of the modules M1 to M7 is, as shown in FIG.
That is, in a state where the z-axis arm 14 is aligned with the vertical axis, the z-axis arm 14 is first moved in the horizontal plane portion (i.e., x-axis) until the extension axis of the z-axis arm is aligned with the center axis of the gear G as shown in FIG. (y plane). Thereafter, the z-axis arm 14
Down through, via the shift module M6, it is close to the gear G to a height h ₀ that it can be clamped by the clamping modular Yule M7. From this state, the operation of each of the modules M1 to M7 in the hand mechanism 10 is started.

That is, first, it is determined via the aiming unit 440 attached to the clamp module M7 whether or not the hand mechanism 10 has a predetermined relative positional relationship with respect to the reference point of the horizontal surface portion S1. If it is not determined that there is a predetermined relative positional relationship, an NG signal is output from the aiming unit 440 to the control device, and the following control procedure is stopped. If it is determined that the relative positional relationship is within a predetermined time, an OK signal is output,
With the output of the K signal, the shift operation is started in the shift module M6. That is, this shift module M
The third switching valve 350 in 6 is set to switch from the first switching mode to the second switching mode and to the switching mode. As a result, the lower mounting plate 302 is
A shift operation descending from 0 is started, and with this shift operation, the clamp module M7 is brought into a state where the gear G can be clamped. That is, the clamp module M
7 are the first shaft portions G2 of the gear G.
Are located on both sides of a pair of flat portions G4 formed so as to face each other.

Then, in the shift module M6,
If the seventh sensor 358 does not output an ON signal within a predetermined time after the first switching mode is switched and set in the third switching valve 350, it is determined that an abnormal situation has occurred, and the following control procedure is performed. Stopped and an alarm is issued. On the other hand, when the ON signal is output from the seventh sensor 358 within a predetermined time, it is detected that the lower mounting plate 302 has descended to the lower end position, so that the clamp module M7 In, the clamp operation is started. That is, the second on-off valve 410 in the clamp module M7 is switched from the open mode to the connection mode. As a result, the two Joyos 412, 41
No. 4 grips the flat portion G4 of the gear G from both sides.

Here, if the ninth and tenth sensors 424 and 426 of the clamp module M7 do not output an ON signal within a predetermined time after the connection mode is switched, it is determined that an abnormal situation has occurred. Then, the following control procedure is stopped, and an alarm is issued. On the other hand, when both the ninth and tenth sensors 424, 426 output an ON signal within a predetermined time, it is determined that the gear G has been clamped by the two jaws 412, 414. Then, in the shift module M6, the lifting operation is started.

That is, in the shift module M6, the third switching valve 350 is switched from the second switching mode to the first switching mode in accordance with the output of the ON signals from the sensors 424 and 426. . As a result, a lifting operation in which the lower mounting plate 302 rises toward the upper mounting plate 300 is started. With this lifting operation, the clamp module M7 is raised while the gear G is being clamped, and the gear G is Lift up to the position indicated by Ga. Here, in this shift module M6,
If the ON signal is not output from the eighth sensor 360 within a predetermined time after the first switching mode is switched in the third switching valve 350, it is determined that an abnormal situation has occurred, and the following control procedure is performed. Is stopped and an alarm is issued. On the other hand, when the ON signal is output from the eighth sensor 360 within a predetermined time, it is determined that the predetermined shift operation has been completed. Then, the turning operation is started in the turning module M3.

That is, in the turning module M3, in response to the output of the ON signal from the eighth sensor 360,
The second switching valve 146 is set to switch from the second switching mode to the first switching mode. As a result,
The lower mounting plate 114 is turned around the central axis by a predetermined angle θ with respect to the upper mounting plate 112, that is, by 90 degrees. Here, in the turning module M3,
If the ON signal is not output from the fifth sensor 164 within a predetermined time after the first switching mode is switched by the second switching valve 146, it is determined that an abnormal situation has occurred, and the following control procedure is performed. Is stopped and an alarm is issued. On the other hand, when the fifth sensor 164 outputs an ON signal within a predetermined time, it is determined that the predetermined turning operation has been completed. Then, in the inversion module M2, the inversion operation is started.

That is, in the inversion module M2, in response to the output of the ON signal from the fifth sensor 164,
The first switching valve 80 switches from the second switching mode to the first switching valve.
The switch mode is set. As a result, the lower mounting plate 62 is reversely driven around the rotation axis 60 by the predetermined angle α with respect to the upper mounting plate 60, that is, by 45 degrees. Here, in this reversal module M2, the first
The third sensor 100 is switched within a predetermined time after the first switching mode is switched in the switching valve 80 of FIG.
If no ON signal is output from the controller, it is determined that an abnormal situation has occurred, and the following control operation is stopped, and an alarm is issued. On the other hand, when the ON signal is output from the third sensor 100 within the predetermined time, it is determined that the predetermined inversion operation has been completed, and the next control procedure is executed.

On the other hand, with the output of the ON signal from the fifth sensor 164 described above, in parallel with the above-described inversion operation,
In robot 12 moves the z-axis arm 14 in the y-axis direction by along connexion predetermined distance k _0, to indicate gear G by reference numeral Gc, the holes H2, just above the inclined surface portion S2 (i.e., holes H2 and gear G are aligned with each other). Here, the predetermined distance k ₀ is calculated from the following equation. K ₀ = k ₁ − (h ₁ + h ₀ −h _H ) tan α where k ₁ : distance on the horizontal plane S 1 from the center point of the gear G at the installation position to the center point of the hole H 2 h 1: Distance from the center axis of the driving shaft 60 to the bottom surface of the gear body G1 of the gripped gear G. During the movement of the z-axis arm 14 in the robot 12, the first on-off valve 290 of the compliance module M5 is opened. The mode is switched to the connection mode, and the lock mechanism 246 executes the lock operation. As a result, during the movement of the z-axis arm 14, the alignment operation of the compliance module M5 is prohibited.

On the other hand, as described above, with the gear G brought into alignment with the hole H2, the movement of the z-axis arm 14 is stopped, and a stop signal is output. Then, according to the output of the stop signal, the compliance module M5
Is set to switch from the connection mode to the open mode, the lock operation in the lock mechanism 246 is prohibited, the centering operation in the compliance module M5 is restarted, and the shift operation in the shift module M6 is performed. Be started. That is, the third switching valve 350 in the shift module M6
Is switched from the first switching mode to the second switching mode and switched to the mode again. As a result, a shift operation in which the lower attachment plate 302 descends from the upper attachment plate 300 is started, and with this shift operation, the clamp module M7 inserts the clamped gear G into the hole H2.

That is, with the activation of the shift module M6, the clamp module M7 is pushed down along the central axis of the shift module M6 (in other words, along the axis inclined from the vertical line by the inclination angle α). , Gear G,
It will be inserted into the corresponding hole H2. Here, in this insertion operation, as described above, in the compliance module M5, the centering operation is automatically and passively executed, and in the compliance module M4.
, A shock buffering operation at the time of interference is passively executed.

Then, in the shift module M6,
If the seventh sensor 358 does not output an ON signal within a predetermined time after the first switching mode is switched and set in the third switching valve 350, it is determined that an abnormal situation has occurred, and the following control procedure is performed. Stopped and an alarm is issued. On the other hand, when the ON signal is output from the seventh sensor 358 within a predetermined time, it is detected that the lower mounting plate 302 has descended to the lower end position, so that the clamp module M7 , An unclamping operation is started. That is, this clamp module M7
Is switched from the connection mode to the open mode. As a result, the two Joyos 412,
The gear 414 is separated from the flat part G4 of the gear G on both sides, and the gear G is unclamped from the clamp module M7.

Here, in the ninth and tenth sensors 424 and 426 of the clamp module M7, if both of the ON signals are output even after a predetermined time has elapsed since the open mode was switched, the abnormal state is detected. When it is determined that a situation has occurred, the following control procedure is stopped, and an alarm is issued. On the other hand, the ninth and tenth sensors 424, 4
If the output of the ON signal is stopped within a predetermined time from 26, it is determined that the gear G is separated from the two jaws 412 and 414 and unclamped. Then, in the shift module M6, the lifting operation is started again.

That is, in the shift module M6, the third switching valve 350 is switched from the second switching mode to the first switching mode in accordance with the stop of the output of the ON signals from the sensors 424 and 426. You. As a result, a lifting operation in which the lower mounting plate 302 is raised toward the upper mounting plate 300 is started. With this lifting operation, the clamp module M7 is raised with the gear G unclamped, and the gear G is moved to the hole H2. Will be left inside. Here, in the shift module M6, the eighth sensor 3 is set within a predetermined time after the first switching mode is switched by the third switching valve 350.
If an ON signal is not output from 60, it is determined that an abnormal situation has occurred, and the following control procedure is stopped and an alarm is issued. On the other hand, if the ON signal is output from the eighth sensor 360 within a predetermined time, it is determined that the predetermined shift operation has been completed, and the system is brought into a predetermined standby state.

Then, in the robot 12, an operation of returning the z-axis arm 14 by a predetermined distance k ₀ along the y-axis direction and returning it to the original position is executed. In the movement operation of the z-axis arm 14, similarly to the movement operation described above, the first opening / closing valve 290 of the compliance module M5 is set to switch from the open mode to the connection mode, and the lock mechanism 246 performs the lock operation. Will be executed. As a result, during the movement of the z-axis arm 14,
The centering operation in the compliance module M5 is prohibited.

When the return movement of the z-axis arm 14 by the robot 12 ends, a return movement end signal is output. With the output of the return movement end signal, in the reversing module M2 and the turning module M3,
A return operation to the standby position is started. That is, in the reversing module M2, the first switching valve 80 is switched from the first switching mode to the second switching mode in accordance with the output of the return movement end signal. As a result, the lower mounting plate 62 is returned and rotated around the rotation axis 60 by a predetermined angle α with respect to the upper mounting plate 60, that is, 45 degrees toward the standby position. Here, in the reversing module M2, the second switching valve 80
If the ON signal is not output from the second sensor 98 within a predetermined time after the switching mode is switched,
When it is determined that an abnormal situation has occurred, the following control operations are stopped, and an alarm is issued. On the other hand, the second sensor 9
When the ON signal is output within a predetermined time from 8, it is determined that the predetermined return operation has been completed, and a predetermined standby state is set.

On the other hand, in the turning module M3, the second switching valve 146 is switched from the first switching mode to the second switching mode in accordance with the output of the above-described return movement completion signal. As a result, the lower mounting plate 114
Is returned to the standby position by a predetermined angle θ around the central axis with respect to the upper mounting plate 112, that is, by 90 degrees. Here, in the turning module M3, if an ON signal is not output from the fourth sensor 162 within a predetermined time after the second switching mode is switched by the second switching valve 146, an abnormal situation occurs. As a result, the following control procedure is stopped, and an alarm is issued. On the other hand, when the fourth sensor 162 outputs an ON signal within a predetermined time, it is determined that the predetermined turning operation has been completed, and a predetermined standby state is set.

In the entire range of the control procedure described above,
An ON signal is output from the first sensor 54 of the holder module M1, the mounting plate 30 falls, and the fixing member 2
When it is determined that the connection state with the control unit 8 has been released, the control procedure is immediately stopped regardless of which control step is being executed, and an alarm operation is issued. In addition, while the shift operation in the shift module M6 is being performed, an ON signal is output from the sixth sensor 216 in the cushion module M4, and the lower mounting plate 182 is If it is determined that the distance is close to the allowable cushion amount,
The control procedure of the shift operation is immediately stopped, and an alarm is issued.

As described above, in this embodiment, when the gear G is inserted into the hole H2 juxtaposed on the inclined surface along the axis different from that of the mounted state, the robot 12 does not rotate.
On the side, it is only necessary to move independently along the x-axis, y-axis, and z-axis directions, and the lowering operation for clamping the gear G and the insertion operation along the inclined axis are directly performed. Specifically, this is achieved by driving the shift module M6. That is, assuming that the shift module M6 is not provided, the clamp module M7 is moved in the y-axis and z-axis directions in the robot 12 while the gear G is held in the inclined posture as described above. Along with this, it is necessary to execute a control for moving at the same time and in a state where their moving speeds are precisely defined, which complicates the control contents. However, in this embodiment, as described above, the hand mechanism 10
Is equipped with the shift module M6, so that the robot 12 only needs to move independently along the y-axis and z-axis directions, and does not need to directly execute the insertion operation. The control contents in the robot 12 are simplified.

In particular, in the hand mechanism 10 of this embodiment, the posture changing operation of the clamp module M7 is configured into a module for each element and executed in an independent state for each module. I have. As a result, a product change or a design change occurs, and the clamp module M7 is changed.
Even if it is necessary to change the attitude change operation in, only the module that is responsible for the attitude change element in which the change has occurred need only be changed or redesigned for the amount of movement, etc., and the design change of the entire hand mechanism It is not necessary to do. In this way, it is possible to respond to the change in the posture changing operation within a short time,
Other modules that do not need to be changed can be used as they are, so that a very economical hand mechanism 10 is provided.

(Explanation of the Optimality of the Arrangement Order of the Seven Modules M1 to M7) Next, the seven modules M1 in the case of executing the operation of the above-described hand mechanism 10 will be described.
A description will be given of the optimality of the arrangement order of M7 to M7. That is, in order to attach any one of the modules 2 to M7 to the z-axis arm 14, the holder module M1 is indispensable in a state of being located at the highest position, and in order to clamp the gear G, the clamp module M1 is required. M7 is also indispensable in the state located at the lowest position. For this reason, the holder module M in the case where the five types of modules M2 to M6 interposed are grouped together.
The order of arrangement from 1 to the clamp module M7 becomes a problem.

First, as a first condition, in this group, the reversing module M1 is located closest to the mounting plate 22 side. In other words, the other modules M2, M3,
M4 and M5 are located closer to the clamp module M7 than M1. Next, as a second condition, the shift module M6 and the turning module M3 are located closer to the holder module M1 than the cushion module M4 and the compliance module M5. As a third condition, the order of the shift module M6 and the turning module M3 is interchangeable, and the execution module M4 and the compliance module M4 are interchangeable.
The order of 5 is also interchangeable.

As a result, in one embodiment described above,
From the holder module M1 to the clamp module M7, it has been described that the modules are arranged in the order of (1) M1 → M2 → M3 → M4 → M5 → M6 → M7, but it is not limited to this. Without the above, the following three types of arrangement orders are optimal when executing the above-described insertion operation. (2) M1 → M2 → M3 → M5 → M4 → M6 → M7 (3) M1 → M3 → M2 → M4 → M5 → M6 → M7 (4) M1 → M3 → M2 → M5 → M4 → M6 → M7 If the shift module M6 under the first condition is disposed on the holder module M1 side ignoring that the shift module M6 is located closer to the clamp module M7 than the inversion module M1, the shift direction achieved by the shift module M6 The (moving direction) is limited to the vertical axis direction. As a result, the operation of inserting a pin into the hole formed in the inclined surface portion S2 cannot be performed by the shift module M6. . In this manner, the shift module M6 must be located closer to the clamp module M7 than the inversion module M1.

On the other hand, if the turning module M3 under the first condition described above is disposed on the holder module M1 side ignoring that the turning module M3 is located closer to the clamp module M7 than the reversing module M1, the turning module M3 turns. With the operation, the rotating shaft 60 of the reversing module M1 also turns to be in a state along the y-axis. As a result, in the reversing operation performed after the turning operation, the clamp module M
The gears G held by 7 are rotated around the y axis, and these gears G never face the holes H2. In this way, it is essential that the turning module M3 is located closer to the clamp module M7 than the reversing module M1.

Next, the shift module M6 and the turning module M3 under the second condition are positioned on the clamp module M7 side, ignoring that the shift module M6 and the turning module M3 are positioned closer to the holder module M1 than the cushion module M4. When you do
If a position shift occurs between the pin P and the hole H in a direction orthogonal to the inclined surface portion S2, an impact due to the interference based on the position shift is absorbed by the cushion module M4. Prior to the operation, it acts directly on the shift module M6 or the turning module M3.
For this reason, the shift module M6 and the turning module M3
In order to protect them from the impact due to the interference, it is essential that they be located closer to the holder module M1 than the cushion module M4.

On the other hand, the shift module under the second condition
Of the turning module M3 and the turning module M3
Located on holder module M1 side of module M5
Ignoring that, position it on the clamp module M7 side
Then, temporarily, along the inclined surface portion S2 between the pin P and the hole H,
If misalignment has occurred, the
Power F₀ Is compensated by the compliance module M5
Before the shift module M6 or
It will act directly on the module M4. For this reason,
Shift module M6 and turning module M3, no position
Component force F ₀ These to protect against the action of
The holder module than the compliance module M5
It is essential to be located on the side of the Mule M1.

The third condition, shift module M6
As for the interchangeability of the arrangement order between the turning module M3 and the turning module M3, the shift direction in the shift module M6 is regulated in the direction along its own central axis, and the turning axis in the turning module M3 is in the direction along its own central axis. Therefore, there is no problem even if the arrangement order of the two is changed. Regarding the third condition, that is, the transposition of the arrangement module M4 and the compliance module M5 can be switched in a passive manner, so that neither can be given priority. Yes, even if the arrangement order of both is changed, only the same situation can be achieved. It is needless to say that the present invention is not limited to the configuration of the above-described embodiment, but can be variously modified without departing from the gist of the present invention.

For example, in the above-described embodiment, the hand mechanism 10 has been described as including all seven types of modules M1 to M7. However, as described above, the hand mechanism 10 is mounted on the horizontal surface S1. This is a configuration that is necessary when performing an operation of holding the gear G that is being held at once by the clamp module M7 attached to the lower part of the hand mechanism 10 and inserting it into the hole H2 formed on the inclined surface portion S2. However, the present invention is not limited to such a configuration, and when performing another operation, the operation elements indispensable for realizing the required posture changing operation in the clamp module M7 when these operations are performed are described below. Types of modules M
What is necessary is just to achieve in the state which combined 2-6 arbitrarily.

Further, in the above-described embodiment, when the seven types of modules M1 to M7 are grouped, the hand mechanism 10 is described as being constituted only by the group of modules M1 to M7. The present invention is not limited to such a configuration. For example, the turning module M3 may be provided further on the holder module M1 side than this group. By further providing the turning module M3 in this way, it is not necessary to adopt a configuration in which the z-axis arm 22 is driven to rotate around its own central axis (that is, a vertical axis) on the robot 12 side, and the entire configuration of the robot 12 is eliminated. It can be simplified.

[0179]

As described in detail above, the robot hand mechanism according to the present invention is attached to the tip of the arm portion of the robot, and the modules for executing the predetermined element movement can be combined with each other in an independent state. The upper mounting plate and the upper mounting plate are arranged in parallel with the upper mounting plate in a hand mechanism configured to perform a desired element movement by appropriately combining arbitrary modules among these modules. A lower mounting plate movably disposed along a central axis of the lower mounting plate, and a moving drive for integrally mounting the lower mounting plate and moving the lower mounting plate toward and away from the upper mounting plate. And a shift module provided between the upper mounting plate and the lower mounting plate and having an intermediate member which is moved in a telescopic manner.

Further, in the robot hand mechanism according to the present invention, the intermediate member is guided movably along the center axis of the upper mounting plate, and is moved relative to the lower mounting plate. The intermediate member is guided so as to be movable along its central axis, the rising end position of the intermediate member with respect to the upper mounting plate is regulated, and the lower end position of the lower mounting plate with respect to the intermediate member is regulated. .
Further, in the robot hand mechanism according to the present invention, the lower mounting plate is provided with a pair of objects to be detected for indicating a rising end position and a lowering end position with respect to the upper mounting plate, and the upper mounting plate is attached to the lower mounting plate. In addition, a pair of sensors for detecting a rising end position and a falling end position of the lower mounting plate by detecting each object to be detected are attached. Further, in the robot hand mechanism according to the present invention, each of the detected objects may be constituted by a magnet, and the sensor may be constituted by a non-contact type magnetic sensor which is turned on when the corresponding magnet approaches. Features. Therefore, according to the present invention, there is provided a robot hand mechanism having a shift module capable of achieving weight reduction, high accuracy, and downsizing.

[Brief description of the drawings]

FIG. 1 is a front view showing a configuration of an embodiment of a hand mechanism according to the present invention.

FIG. 2 is a perspective view showing a configuration of an embodiment of a hand mechanism according to the present invention.

FIG. 3 inverts the hand mechanism shown in FIG. 1 by an angle α,
It is a front view shown in the state shown in the state where it turned 90 degrees.

FIG. 4 shows the hand mechanism shown in FIG. 2 inverted by an angle α,
It is a perspective view shown in the state shown in the state where it turned 90 degrees.

FIG. 5 is a perspective view schematically showing a configuration of a robot to which the hand mechanism according to the present invention is applied.

FIG. 6 is a perspective view for explaining an operation of transferring an article clamped by the hand mechanism shown in FIG. 1;

FIG. 7 is a perspective view specifically showing a configuration of a holder module provided in the hand mechanism shown in FIG. 1;

FIG. 8 is an exploded perspective view specifically showing the configuration of the holder module shown in FIG.

FIG. 9 is a top view showing the configuration of the holder module shown in FIG. 7;

FIG. 10 is a longitudinal sectional view showing the holder module shown in FIG. 9 in a state cut along the line aa.

FIG. 11 is a right side view showing a right side shape of the holder module shown in FIG. 9;

FIG. 12 is a left side view showing a left side shape of the holder module shown in FIG. 9;

FIG. 13 is a front view showing a front shape of the holder module shown in FIG. 9;

FIG. 14 is a perspective view specifically showing a configuration of an embodiment of a reversing module provided in the hand mechanism shown in FIG. 1;

15 is an exploded perspective view showing the internal structure of the reversing module shown in FIG. 14 in a divided manner.

FIG. 16 is a front view showing the front shape of the reversing module shown in FIG. 14;

FIG. 17 is a top view showing the top shape of the inversion module shown in FIG. 14;

FIG. 18 is a bottom view showing the shape of the underside of the reversing module shown in FIG. 14;

FIG. 19 is a left side view showing a left side shape of the reversing module shown in FIG. 14;

FIG. 20 is a back view showing the shape of the back of the inversion module shown in FIG. 14;

FIG. 21 is a cross-sectional view showing the inversion module shown in FIG. 16 cut along the line aa.

FIG. 22 is a cross-sectional view showing the reversing module shown in FIG. 21 in a state cut along the line bb.

FIG. 23 is a cross-sectional view showing the inversion module shown in FIG. 21 cut along the line cc.

FIG. 24 is a left side view showing a reversing module provided in the hand mechanism shown in FIG. 1 as a configuration of another embodiment.

FIG. 25 is a front view showing the front shape of the reversing module of another embodiment shown in FIG. 24;

FIG. 26 is a perspective view specifically showing a configuration of a turning module provided in the hand mechanism shown in FIG. 1;

FIG. 27 is an exploded perspective view showing the internal configuration of the turning module shown in FIG. 26 in a divided manner.

FIG. 28 is a front view showing the front shape of the turning module shown in FIG. 26;

FIG. 29 is a top view showing the top shape of the turning module shown in FIG. 26;

FIG. 30 is a bottom view showing the shape of the lower surface of the turning module shown in FIG. 26;

FIG. 31 is a left side view showing the shape of the right side of the turning module shown in FIG. 26;

FIG. 32 is a cross-sectional view showing the turning module shown in FIG. 28 in a state of being cut along the line aa.

FIG. 33 is a cross-sectional view showing the turning module shown in FIG. 21 in a state cut along line bb.

34 is a cross-sectional view showing the turning module shown in FIG. 33 in a state where it is cut along the line cc.

FIG. 35 is a cross-sectional view showing the turning module shown in FIG. 31 in a state cut along a line dd.

FIG. 36 is a cross-sectional view showing the turning module shown in FIG. 30 cut along the line ee.

FIG. 37 is a sectional view showing the turning module shown in FIG. 29 in a state cut along the line ff.

FIG. 38 is a front view showing the turning module shown in FIGS. 26 to 37 as a configuration of another embodiment.

FIG. 39 is a top view showing the top shape of the turning module according to another embodiment shown in FIG. 38;

40 is a perspective view specifically showing a configuration of an embodiment of a cushion module provided in the hand mechanism shown in FIG. 1;

FIG. 41 is a front view showing a front shape of the cushion module shown in FIG. 40;

FIG. 42 is a top view showing the top shape of the cushion module shown in FIG. 40;

FIG. 43 is a bottom view showing the bottom shape of the cushion module shown in FIG. 40;

FIG. 44 is a right side view showing the cushion module shown in FIG. 40 in a partially determined right side shape.

FIG. 45 shows a cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the a line.

46 is a cross-sectional view showing a state where a circumferential groove formed on the inner peripheral surface of the central through hole shown in FIG. 45 is formed;

47 is a front view showing a cushion module provided in the hand mechanism shown in FIG. 1 as a configuration of another embodiment.

FIG. 48 is a top view showing the top shape of the cushion module of another embodiment shown in FIG. 47;

FIG. 49 is a left side view showing the left side shape of the cushion module of another embodiment shown in FIG. 47.

FIG. 50 is a cross-sectional view showing the cushion module of another embodiment shown in FIG. 48, which is cut along the line aa.

FIG. 51 is a cross-sectional view showing the cushion module of another embodiment shown in FIG. 48, which is cut along the line bb.

FIG. 52 is a cross-sectional view showing the cushion module of another embodiment shown in FIG. 48, which is cut along the line cc.

FIG. 53 is a perspective view specifically showing a configuration of a cushion module provided in the hand mechanism shown in FIG. 1;

FIG. 54 is a front view showing a front shape of the cushion module shown in FIG. 53;

FIG. 55 is a top view showing the top shape of the cushion module shown in FIG. 53.

FIG. 56 is a bottom view showing the underside shape of the cushion module shown in FIG. 53;

FIG. 57 shows the cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the d line.

FIG. 58 shows the cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the a line.

FIG. 59 shows the cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along c line.

FIG. 60 shows a cushion module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the b line.

61 is a cross-sectional view showing the execution state of the compliance operation of the cushion module shown in FIG. 52 in a plane perpendicular to the central axis.

FIG. 62 is a cross-sectional view showing the execution state of the compliance operation of the cushion module shown in FIG. 52 in a plane orthogonal to the central axis and at an inclination with respect to the central axis.

FIG. 63 is a front view showing a front shape of a shift module provided in the hand mechanism shown in FIG. 1;

FIG. 64 is a top view showing the top shape of the shift module shown in FIG. 63.

FIG. 65 is a bottom view showing the lower surface shape of the shift module shown in FIG. 63.

FIG. 66 is a left side view showing a left side shape of the shift module shown in FIG. 63.

FIG. 67 is a cross-sectional view showing the reversing module shown in FIG. 64 cut along the line aa.

FIG. 68 is a cross-sectional view showing the reversing module shown in FIG. 64 cut along the line bb.

FIG. 69 is a cross-sectional view showing the inversion module shown in FIG. 64 in a state cut along the line cc;

70 is a cross-sectional view showing in detail a formation state of the first communication passage shown in FIG. 69.

FIG. 71 is a perspective view specifically showing a configuration of the first embodiment of the clamp module provided in the hand mechanism shown in FIG. 1;

FIG. 72 is a front view showing the front shape of the clamp module shown in FIG. 71.

FIG. 73 is a top view showing the top shape of the clamp module shown in FIG. 71;

74 is a bottom view showing the lower surface shape of the clamp module shown in FIG. 71.

75 is a right side view showing the shape of the right side of the clamp module shown in FIG. 71.

76 shows a clamp module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the line.

FIG. 77 is a perspective view of the clamp module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the line.

FIG. 78 is a perspective view of the clamp module shown in FIG.
It is sectional drawing shown in the state cut | disconnected along the line.

FIG. 79 is a perspective view showing a clamp module provided in the hand mechanism shown in FIG. 1 as a configuration of the second embodiment.

FIG. 80 is a front view showing a front shape of the clamp module according to the second embodiment shown in FIG. 79;

FIG. 81 is a top view showing the top shape of the clamp module according to the second embodiment shown in FIG. 79;

FIG. 82 is a bottom view showing the bottom shape of the clamp module of the second embodiment shown in FIG. 79;

FIG. 83 is a right side view showing the shape of the right side of the clamp module according to the second embodiment shown in FIG. 79;

FIG. 84 is a cross-sectional view showing the clamp module of the second embodiment shown in FIG. 80, cut along the line aa.

FIG. 85 is a cross-sectional view showing the clamp module of the second embodiment shown in FIG. 83, cut along the line bb.

86 is a front view showing an aspect in which a compliance module is attached to the center of the lower surface of the mounting plate of the clamp module of the second embodiment shown in FIG. 83.

87 is a front view showing a state where a positioning pin has been inserted into a work that has been displaced in the mode shown in FIG.

FIG. 88 is a front view showing a state in which the locking mechanism of the compliance module performs the locking operation from the state shown in FIG. 87 to align the center of the work with the center of the clamp module.

FIG. 89 is a perspective view showing a clamp module provided in the hand mechanism shown in FIG. 1 as a configuration of a third embodiment.

FIG. 90 is a front view showing the front shape of the clamp module according to the third embodiment shown in FIG. 89;

FIG. 91 is a top view showing the top shape of the clamp module according to the third embodiment shown in FIG. 89;

FIG. 92 is a right side view showing the shape of the right side of the clamp module of the third embodiment shown in FIG. 89.

FIG. 93 is a view for explaining gear pick and place operation by the hand mechanism in the embodiment.

FIG. 94 is a diagram showing a connection mode of sensors and valves provided in the hand mechanism in the embodiment.

FIG. 95 is a timing chart for executing a gear pick-and-place operation by the hand mechanism in the embodiment.

[Explanation of symbols]

 M1 Holder Module, M2 Reversal Module, M3 Revolving Module, M4 Cushion Module, M5 Compliance Module, M6 Shift Module, M7 Clamp Module, CL Center Axis of Z-Axis Arm, RL Rotation Axis in Reversing Module, S Horizontal plane portion, S2 inclined surface portion, H1 first hole, H2 second hole, α inversion angle, θ turning angle G gear (article), G1 gear body, G2 first shaft portion, G3 second shaft portion, G4 plane part, 10 hand mechanism, 12 robot, 14 z-axis arm, 14a long groove, 16 x-axis arm, 18 y-axis arm, 20 y-axis movement block, 22; 24; 26 drive motor, 28 fixing member, 30 mounting plate , 30a mounting through hole, 30b positioning pin, 30c positioning hole, 30d screw hole, 0e mounting hole, 30f long groove, 32 connecting mechanism, 34 main body, 34a through hole, 34c first mounting hole, 34d second mounting hole, 34e third mounting hole, 34f concave portion, 36 receiving portion, 36a one side surface, 36b groove, 38 holding part, 38a one side surface, 38b groove, 38c insertion hole, 40a; 40b bolt, 42 pin, 44 centering (history member), 45 strain sensor, 46 shear pin bolt, 48 fall prevention pin, 50 eccentric pin, 50a pin main body, 50b eccentric disk, 52 mounting piece, 54 first sensor.

Claims (4)

(57) [Claims] 1. A module which is attached to a tip of an arm portion of a robot and which can be combined with each other in a state to execute a predetermined element movement in an independent state, and by appropriately combining any of these modules, In a hand mechanism configured to perform a desired element movement, an upper mounting plate and a lower mounting plate disposed in parallel with the upper mounting plate and movably disposed along a central axis of the upper mounting plate. A movement driving means for integrally driving the lower mounting plate with respect to and moving away from the upper mounting plate, and interposed between the upper mounting plate and the lower mounting plate. And a shift module having an intermediate member, both of which are moved in a telescopic manner. 2. The intermediate member is guided so as to be movable along the central axis of the upper mounting plate, and is movable along the central axis of the lower mounting plate. 2. The robot hand mechanism according to claim 1, wherein the upper end position of the intermediate member with respect to the upper mounting plate is regulated, and the lower end position of the lower mounting plate with respect to the intermediate member is regulated. . 3. A pair of objects to be detected that indicate a rising end position and a falling end position of the lower mounting plate with respect to the upper mounting plate are attached to the lower mounting plate, and each of the detected objects is detected by the upper mounting plate. 2. The robot hand mechanism according to claim 1, wherein a pair of sensors for detecting a rising end position and a falling end position of the lower mounting plate are respectively attached. 4. The non-contact type magnetic sensor according to claim 3, wherein each of the detected objects is made of a magnet, and the sensor is made of a non-contact type magnetic sensor which is turned on when a corresponding magnet comes close to the object. The described robot hand mechanism.