JP2000188846A - Motor-driven actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a dead space in the moving direction of a table and, in addition, to reduce the load applied to a motor, by providing a moving member adjacently to an opening provided in the outer peripheral section of the actuator body, and linearly moving the moving member through a feed screw mechanism and the opening. SOLUTION: An opening 12a is formed in the right side face of the actuator body 12, and a feed nut section 33 and a slide table 43 are connected to each other through the opening 12a. In order to carry a work, a mounting plate and a connecting piece 47 provided in the actuator body 12 are also moved in addition to the table 43, but, since they have small sizes and light weights except the table 43, the combined load of the work and table 43 can be regarded as a carried load. Therefore, the dead space D in front of the actuator body 12 can be reduced and, at the same time, the load applied to a motor can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric actuator.

[0002]

2. Description of the Related Art Conventionally, as an electric actuator (electric cylinder) for converting a rotary motion into a linear motion, for example, one disclosed in Japanese Patent Application Laid-Open No. 8-280154 is known. A motor is attached to an actuator body that forms a large frame of the electric actuator. The output shaft of the motor is arranged in the actuator body.
A feed screw portion that is drivingly connected to the output shaft of the motor is housed in the actuator body. A feed nut that is movable along the axial direction is screwed into the feed screw. A tubular member is integrally attached to the feed nut portion. The tubular member can protrude to the outside of the actuator main body via an opening formed in an end surface of the actuator main body.

A slide table is movably provided on the upper surface of the actuator body via a guide mechanism. The tip of the slide table is connected to the tip of the tubular member via a support. The slide table moves in parallel with the tubular member while being guided by a guide mechanism. Then, when the motor is rotated in a state where the work to be transferred is placed on the slide table, the feed screw portion is rotated, and the rotational motion is converted into a linear motion of the feed nut. Thereby, the slide table moves together with the cylindrical member and the support, and the work is transported to a predetermined position.

[0004]

However, in the conventional electric actuator, not only the slide table but also the cylindrical member and the support must be moved in order to carry the work. Therefore, it is necessary to secure a wide space for allowing movement of many components outside the actuator body.
Therefore, there is a problem that the dead space in the table moving direction is large.

Further, not only the work and the slider, but also a heavy cylindrical member and a support are added to the transport load, and this transport load becomes a load on the motor. For this reason, there is a problem that the allowable transport load of the work must be limited because the driving force of the motor is limited.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and a first object of the present invention is to provide an electric actuator capable of reducing a dead space in a table moving direction. A second object of the present invention is to provide an electric actuator capable of setting a large work load or the like by reducing a load applied to a motor.

[0007]

According to the first aspect of the present invention, the rotational motion of a motor provided in an actuator body is
Converted to linear motion by the feed screw mechanism housed inside,
An opening is provided in the outer peripheral portion of the actuator body, and a moving body is provided adjacent to the outer peripheral portion, and the moving body connected to the feed screw mechanism via the opening linearly moves when the motor rotates. The point is to move.

According to this configuration, the rotational motion of the motor is converted into a linear motion by the feed screw mechanism. Then, the moving body connected to the feed screw mechanism moves. here,
The connection between the moving body and the feed screw mechanism is not connected via a member such as a heavy cylindrical member or a support. Therefore, the weight corresponding to the member can be reduced, and the load on the motor can be reduced.
Further, since the feed screw mechanism and the moving body are connected through the opening provided in the outer peripheral portion of the actuator body, it is not necessary to provide many members for connecting the feed screw mechanism and the moving body. .

According to a second aspect of the present invention, in the electric actuator according to the first aspect, the feed screw mechanism comprises:
A first screw member and a second screw member engaged with the first screw member, the second screw member being connected to the moving body through an opening in an outer peripheral portion of the actuator body, The gist of the invention is to provide a guide mechanism for guiding the moving body to the moving body.

According to this configuration, since the guide is provided on the movable body, the movable body moves straight while being accurately guided, and the second screw member connected to the movable body is prevented from rotating.

[0011] The invention described in claim 3 is the invention according to claim 1 or 2.
3. The electric actuator according to claim 1, wherein the movable body provided adjacent to an outer peripheral portion of the actuator body has a work contact surface parallel to a specific surface on the outer peripheral portion, and the work contact surface and the specific And that the moving body protrudes forward from an end of the actuator body and moves.

According to this configuration, the moving body has a work contact surface parallel to a specific surface on the outer peripheral portion of the actuator body, and is arranged at a position where the work contact surface substantially matches the specific surface. Therefore, the overall thickness of the electric actuator can be reduced. Since the moving body protrudes forward from the end of the actuator body and moves, even when used in an apparatus in which the moving body of another electric actuator protrudes from a portion where the moving body protrudes, the moving bodies come into contact with each other. Problem can be solved.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 to 4, the electric actuator 11 is used as a transfer device for transferring a work. This electric actuator 11 includes an actuator main body 1 constituting a large frame thereof.
2 are provided.

As shown in FIGS. 1 and 4, the actuator main body 12 has a base portion 13. The base portion 13 has a flat bottom 13b, and a side wall standing from the left edge of the bottom 13b. 13a. Bottom 13
The angle between b and the side wall 13a is a right angle. A front cover 14 is attached to the front end surface of the base 13 with screws 15. On the bottom 13b of the base 13, a support 16 is provided from the center to the rear end. A tubular member 17 is inserted into the support portion 16. On the upper end surface of the front cover 14 and the upper end surface of the cylindrical member 17,
The top cover 18 is attached by screws 19.

Therefore, in this embodiment, FIG.
As shown in (a) and (b), the base 13, the front cover 14, the support 16, the tubular member 17, and the top cover 18 are provided.
Thereby, the actuator body 12 having an opening in a part of the outer peripheral portion is configured. That is, the actuator body 1
An opening 12a is formed in a part of the right side surface of 2, and a motor mounting portion 12b is formed in a rear end surface. Such an opening 1
2a is formed from near the center of the actuator body 12 to the front end. Specifically, FIG. 1 (a),
As shown in (b), the opening 12 a is formed between the front cover 14 and the support 16 on the right side of the actuator body 12.

As shown in FIG. 3, the actuator body 1
A part of the motor 24 is inserted and fixed to the second motor mounting opening 12b. The motor mounting port 12b of the actuator body 12 is closed by the motor 24. Motor 2
The output shaft 25 a of the motor 25 constituting the projection 4 projects into the tubular member 17. An encoder 26 for detecting the rotation amount of the motor unit 25 is fixed to the non-shaft protruding surface side of the motor unit 25. The outer shapes of the motor section 25 and the encoder 26 are both equal to a rectangular shape.

In the actuator body 12, a feed screw portion 27 as a first screw member constituting a feed screw mechanism is accommodated. A screw groove is formed on almost the entire outer peripheral surface of the feed screw portion 27. As a material for forming the feed screw portion 7, a hard metal such as stainless steel is used. The feed screw portion 27 is rotatably supported by a bearing 29 provided on the support portion 16. Feed screw part 27
Is loosely inserted into a through hole 16b formed in the support portion 16. The front end portion of the feed screw portion 27 is disposed close to the front cover 14, and the rear end portion protrudes into the tubular member 17.

The rear end of the feed screw portion 27 and the front end of the output shaft 25a of the motor portion 25 are integrally rotatably connected via a coupling 28 as connecting means. At this time, the center axis of the output shaft 25a and the center axis of the feed screw portion 27 are arranged on the same line. The feed screw portion 27 in the connected state extends in the longitudinal direction of the actuator body 12.

In the actuator body 12, a feed nut 33 as a second screw member is accommodated. The feed nut 33 is a cylindrical member that forms a feed screw mechanism together with the feed screw 27. A mounting plate 33a is provided on the outer peripheral surface of the feed nut portion 33 so as to project therefrom. Mounting plate 3
A magnet (specifically, a permanent magnet) 36 used to detect the position of the feed nut portion 33 is provided on the upper portion of 3a. Such a feed screw mechanism plays a role of mechanically converting a rotary motion into a linear motion. The feed screw 27 is screwed to the feed nut 33.

On the rear surface of the front cover 14 and on the front surface of the support portion 16, cushion members 34 and 35 are mounted as cushioning members. The cushion members 34 and 35 are arranged to face each other on the axis of the feed screw 27. The front cushion rubber 34 can be brought into contact with the front end face of the feed nut 33 at the stroke end on the front end side of the feed nut 33. Also, the rear cushion rubber 35
Can be brought into contact with the rear end face of the feed nut portion 33 at the stroke end on the rear end side of the feed nut portion 33. When the feed nut portion 33 comes into contact with the cushion rubbers 34 and 35, when the feed nut portion 33 falls into an abnormal operation state, the feed nut portion 33 functions as a stopper for the feed nut portion 33 and reduces the impact.

As shown in FIGS. 3 and 4, an angle-shaped support member 40 is integrally formed on the right end surface of the bottom portion 13b of the base portion 13. A guide block 41, which is a component of the linear guide mechanism 46, is provided on the upper surface of the support member 40.
Are fixed by bolts 42. Guide block 4
Reference numeral 1 denotes a member having an engagement groove 41a having a rectangular cross section on its upper surface. The engagement groove 41a is provided in the actuator body 2
2 are formed to extend along the longitudinal direction.

Above the guide block 25, a rectangular flat plate-shaped slide table 43, which is a movable body, is movably arranged. The slide table 43 extends in parallel along the axial direction of the feed screw 27. The upper surface of the slide table 43 is a surface on which the work is placed (work contact surface). The upper surface of the slide table 43
Although it is slightly higher than the upper surface (specific surface) of the actuator body 12, that is, the upper surface of the upper surface cover 18, they are almost the same height. As a material for forming the slide table 43, a metal such as aluminum is used to reduce the weight.

As shown in FIG. 4, the slide table 43
Has an elongated guide rail 44. The guide rail 44 constitutes one linear guide mechanism 46 together with the guide block 41 described above. Guide rail 4
Reference numeral 4 denotes a rectangular section, and has a length substantially equal to that of the slide table 43. The guide rail 44 is fixed to the center of the lower surface of the slide table 43 by bolts 45. The guide rail 44 extends along the longitudinal direction of the slide table 43, in other words, the feed screw portion 2.
7 extend in parallel along the axial direction. The guide rail 44 is provided with the engagement groove 41 of the guide block 41.
a is slidably engaged with a.

On the left side surface of the slide table 43, a connecting piece 47 as a connecting portion is provided so as to project toward the actuator body 12. The connecting piece 47 has a substantially rectangular shape and is formed integrally with the slide table 43. The connecting piece 47 extends below the lower surface of the slide table 43 from the center to the lower part thereof.

The connecting piece 47 is accommodated in the actuator body 12. As shown in FIG. 4, a substantially semicircular cutout portion 47a is formed on the left end surface of the connecting piece 47. The notch 47a is engaged with a part of the outer periphery of the feed nut 33. Then, in this engaged state, the connecting piece 47
And the mounting plate 33 a of the feed nut 33 are connected by a pair of screws 48. That is, the slide table 43 and the feed nut portion 33 are connected via the connecting piece 47 and the mounting plate 33a. In other words, the slide table 43 and the feed nut 33 are connected via the side opening 12a of the actuator body 12 (see FIG. 1).

Sensor mounting grooves 50 and 51 are formed on the upper end surface and the upper outer surface of the side wall 13a of the base portion 13 so as to extend along the moving direction of the feed nut portion 33. A position detection sensor 53 is mounted in the sensor mounting groove 50. This position detection sensor 53 is composed of a magnetic sensor or the like. The mounting position of the position detection sensor 53 can be changed along the moving direction of the feed nut portion 33. In addition to the sensor mounting groove 50, the position detection sensor 53 can be mounted in another sensor mounting groove 51 according to the installation state of the electric actuator 11.

As the feed nut 33 moves, the magnet 3
When 6 moves to a position corresponding to the position detection sensor 53,
The position detection sensor 53 is turned on in response to the magnetic force of the magnet 36. Thereby, the fact that the feed nut portion 33 has reached the rearmost position (origin position) is magnetically and non-contactly detected. The front end position of the feed nut 33 is detected by the encoder 26.

As shown in FIGS. 2 and 6B, a shallow locking groove 54 is formed on the upper surface of the slide table 43 along the width direction. The locking groove 54 extends in a direction orthogonal to the moving direction of the feed nut portion 33. That is,
The locking groove 54 is orthogonal to the side wall 13a of the base 13. In the locking groove 54, a T-shaped positioning jig (positioning member) 55 is detachably provided.

As shown in FIGS. 5, 6 (a) and 6 (b),
The positioning jig 55 includes a first block 56 extending in the width direction of the slide table 43 and a second block 57 extending in the longitudinal direction of the slide table 43. The second block 57 projects from the side surface of the first block 56, and both blocks 56, 57 are orthogonal to each other.
On the lower surface of the first block 56, a protrusion 56a extending along the width direction is formed. The protrusion 56a can be fitted into the locking groove 54.

The second block 57 has a vertically extending 2
Two screw insertion holes 57a are formed. A screw 58 is inserted into each screw insertion hole 57a, and the screw 58 is screwed into a female screw portion 43a (see FIG. 2) formed on the upper surface of the slide table 43. Then, the positioning jig 55 can be attached to the slide table 43 by tightening the screw 58.

As shown in FIG. 2, the slide table 43
A plurality of female screw portions 43b are formed on the upper surface of the front end portion. Then, as shown in FIG.
By mounting another electric actuator 11 on 3 and tightening a screw (not shown) to the female screw portion 43b, the electric actuator 11 can be stacked vertically and assembled.

In a state where the two electric actuators 11 are vertically overlapped, the upper electric actuator 1
The outer surface of the base 13 in 1 is in contact with the front surface of the first block 56. The outer surface of the side wall 13a of the base 13 and the first
Since the outer surface of the block 56 is in surface contact, the upper and lower electric actuators 11 can be arranged in an orthogonal state. Therefore, by the positioning jig 55,
The upper electric actuator 11 can be positioned with respect to the lower electric actuator 11.

Next, the operation of the electric actuator 11 configured as described above will be described. In the initial state before the power is supplied to the motor 24, the slide table 43 is at the rearmost position, that is, the origin position (the position shown in FIGS. 1A and 3). At this origin position,
The front end face of the slide table 43 is the actuator body 1
2 almost coincides with the front end face. It is assumed that a work (not shown) is placed on the upper surface of the slide table 43.

When the motor 24 is driven in the forward direction by starting the energization, the output shaft 25a and the feed screw portion 27 connected thereto are driven to rotate integrally in a predetermined direction.
The feed nut portion 33 screwed to the feed screw portion 27 is
It starts moving linearly in the forward direction (left direction in FIG. 3 and the like). Accordingly, the slide table 43 is attached to the mounting plate 33.
(a) It starts to move linearly in the forward direction via the connecting piece 47. At this time, the guide rail 44 is
It slides while engaging with 1.

Further, the mounting plate 33a and the connecting piece 47 do not protrude outside the actuator body 12 when moving. Therefore, only the slide table 43 protrudes from the front end of the actuator body 12. For this reason, as shown in FIG.
Is only a portion corresponding to the position where the slide table 43 moves (a portion indicated by a two-dot chain line in FIG. 1A).

When the feed nut 33 reaches the front end position, the encoder 26 of the motor 24 detects the position of the feed nut 33. Based on this detection, the drive of the motor 24 is stopped, and the feed nut 33 is stopped. Accordingly, the slide table 43 also stops.

Next, when the motor 24 is driven in the reverse direction, the output shaft 25a and the feed screw portion 27 connected thereto are driven.
Are integrally and rotationally driven in the opposite direction. At this time, the feed nut 33 and the slide table 43 start to move linearly in the retreating direction (rightward in FIG. 3). Also at this time, the guide rail 27 is
It slides while engaging with 1.

When the feed nut 33 reaches the rearmost position, the position of the feed nut 33 is detected by the position detection sensor 53. Based on this detection, the drive of the motor 24 is stopped, and the feed nut 33 is stopped. Accordingly, the slide table 43 also stops.

As shown in FIGS. 5 (a) and 5 (b), two electric actuators 11 are combined to move 11A in the X-axis direction (left-right movement) and 11B in the Z-axis direction (vertical movement). It is also possible to use it.

A work shown by a two-dot chain line in FIG. 5 can be attached to the work contact surface of the slide table 43 of the electric actuator 11B. When the work is attached, the slider table 43 of the electric actuator 11A is The actuator 11B and the work load are applied together. By the way, the electric actuator 1
Assuming that the thickness of 1B is “k” and the distance from the bottom surface of the work to the center of gravity is “h”, the moment load that the electric actuator 11B receives from the work: W (kg) is M
B = W × h. The moment load that the electric actuator 11A receives from the load of the workpiece W (kg) is given by MA =
W × (h + k), and it can be seen that MA increases as the thickness k of the electric actuator 11B increases. Since the thickness k of the electric actuator 11 is set to be small, it is possible to minimize the moment load MA applied to the slide table 43 of the X-axis actuator (electric actuator 11A) to be combined.

Further, in order to assemble the two electric actuators 11 one above the other, the following procedure is performed. That is, the locking groove 54 of the lower actuator body 12
Then, the protrusion 56a of the positioning jig 55 is fitted. In this state, the positioning jig 55 is fixed to the lower actuator main body 12 with the screw 58. Next, another electric actuator 11 is placed on the upper part of the lower electric actuator 11. Then, the outer surface of the base 13 in the upper actuator body 12 is brought into contact with the front surface of the positioning jig 55, that is, the front surface of the first block 56. Thereby, the upper electric actuator 11 is positioned, and the upper and lower electric actuators 11 are orthogonal to each other. And
The upper electric actuator 11 is fixed to the lower electric actuator 11 by screws or the like (not shown).

By vertically overlapping the two electric actuators 11, the slide table 43 can be moved in two directions (two axes). As shown in FIG. 5, the lower slide table 43 can be moved in the X-axis direction shown in FIG.
3 can be moved in the Y direction shown in FIG. Therefore, the work can be transported in the Z-axis direction.

Therefore, according to this embodiment, the following effects can be obtained. (1) An opening 12 is provided on the right side of the actuator body 12.
a is formed. The feed nut 33 and the slide table 43 are connected via the opening 12a. Therefore, it is only necessary to move the slide table 43 provided outside the actuator body 12 in order to transport the work. As a result, the actuator body 1
2 can reduce the dead space D on the front side.

(2) In addition to the slide table 43, the mounting plate 33a and the connecting piece 47 provided inside the actuator body 12 are moved in order to transport the work. That is, the combined load of the work, the slide table 43, the mounting plate 33a, and the connecting piece 47 is the transport load.
Here, since the mounting plate 33a and the connecting piece 47 are smaller and lighter than the slide table 43, a combination of the work and the slide table 43 is substantially regarded as the transfer load. That is, it is possible to greatly reduce the weight of components that need to be transported other than the work.
Therefore, the load on the motor 24 can be reduced, and the allowable transport load of the work can be set large within the limited drive output of the motor 24.

(3) The feed nut 33 and the slide table 43 are connected via a connecting piece 47. The connecting portion 47 is formed integrally with the slide table 43. For this reason, there is no need to attach the connecting piece 47 to the slide table 43, and the number of assembling work steps and the number of components required for assembling can be reduced. Therefore, the manufacturing cost of the electric actuator 11 can be reduced. At the same time, the weight can be further reduced, so that the allowable transfer load of the work can be set larger.

(4) The upper surface (work contact surface) of the slide table 43 is parallel to the upper surface (specific surface) of the actuator body 12. Actuator body 12
Since the slide table 43 does not protrude upward, the overall thickness of the electric actuator 11 is reduced,
The size can be reduced. Further, as shown in FIGS. 5A and 5B, when the electric actuator 11 is used in combination, the right side of the slide table 43 and the right side of the actuator main body 12 almost coincide with each other. , The moment load due to the work load of the X-axis electric actuator 11A can be minimized.
The size of the shaft electric actuator 11A can be reduced.

(5) An engagement groove 54 is formed on the upper surface of the actuator body 12, and a positioning jig 55 is provided in the engagement groove 54. Therefore, when two electric actuators 11 are vertically stacked, the base 13 of the upper actuator body 12 is brought into surface contact with the positioning jig 55. Therefore, unlike the case where the upper actuator main body 12 is brought into point contact with the positioning pin or the like, the upper electric actuator 11 can be accurately perpendicular to the lower electric actuator 11.

(6) The positioning jig 55 is detachable from the actuator body 12 by screws 58. When the positioning jig 55 is not used for the actuator body 12, it can be removed. Therefore, the appearance quality of the electric actuator 11 can be improved.

The embodiment of the present invention may be modified as follows. -As shown in Figs. 9 and 10, the actuator body 12
May be an electric actuator 11b provided with linear guide mechanisms 46 on both left and right sides of the actuator. In this case, the base 13
Are omitted from the illustration. The support member 40 is formed integrally with the base 13 b of the base 13. According to this configuration, by providing two linear guide mechanisms 46, the work can be more accurately conveyed along the predetermined direction.

As shown in FIGS. 7 and 8, an electric actuator 11a having a pair of linear guide mechanisms 46 arranged on the right side of the actuator body 12 may be used. Although not shown, an electric actuator having a pair of linear guide mechanisms 46 arranged on the left side of the actuator body 12 may be used. According to this configuration, the workpiece can be transported more accurately along the predetermined direction. With it,
The width of the electric actuator 11b can be smaller than that of the electric actuator 11a on both sides of the pair of linear guide mechanisms 46.

The number of linear guide mechanisms 46 is not limited to one or two, but may be three or more. -As shown in FIG. 11, the electric actuator 11 having one linear guide mechanism 46 above the electric actuator 11b having a pair of linear guide mechanisms 46 on one side.
May be assembled.

As shown in FIG. 12, a pair of linear guide mechanisms 46 may be assembled by vertically stacking the electric actuators 11b on one side. Further, although not shown, the electric actuator 11a having a pair of linear guide mechanisms 46 on both sides and another electric actuator 1
1, 11b may be superimposed and combined.

The actuator body 12 is provided with a passage communicating with the inside and outside thereof, and the inner end of this passage is connected to the feed screw mechanism 2.
7, 33 or guide block 4 of linear guide mechanism 46
Place it near 1. A suction means such as a pump for sucking air in the actuator body 12 through the passage is connected to the outer end of the passage. According to this configuration, it is possible to prevent grease or the like applied to the joint portion between the feed screw portion 27 and the feed nut portion 33 from scattering outside the actuator body 12.

In the above-described embodiment, two electric actuators 11 are vertically overlapped and assembled, but three or more electric actuators 11 may be combined. In the above embodiment, the connecting piece 4 is attached to the slide table 43.
7 are formed integrally with each other, but the connecting piece 47 may be formed integrally with the feed nut portion 33. Alternatively, the slide table 43, the feed nut 33, and the connecting piece 47 may be integrally formed. Furthermore, the slide table 43,
The feed nut portion 33 and the connection piece 47 may be configured separately, and the respective members may be connected by screws.

In the above embodiment, the screwing relationship between the feed screw portion 27 and the feed nut portion 33 is a mechanical screwing relationship between a male screw and a female screw (a screwing relationship with a ball screw and a sliding screw). Alternatively, a magnetic screwing relationship with a magnetic screw may be used.

The motor 24 shown in the above embodiment may be of any type, for example, a stepping motor, a servo motor, an induction motor, etc. Furthermore, a rotary machine such as an air motor that is not electrically driven may be used, and the type of the rotary drive source is not limited. Here, when a servomotor is used, since position detection can be performed by a pulse signal of an encoder, there is an advantage that the position detection sensors 52 and 53 become unnecessary.

If the photomicrosensor is mounted in the sensor mounting grooves 50 and 51, the magnet 36 is omitted, and the mounting plate 33a is a light-shielding member, the position of the feed nut portion 33 can be optically and non-contacted. It can also be detected. Alternatively, mechanical detection using a limit switch or the like is also possible, and the types of the position detection sensors 52 and 53 are not particularly limited.

The magnetic connection between the slide table 43 and the feed nut 33. A sensor mounting groove 5 on the front side of the position detection sensor 52;
A position detection sensor for detecting the position of the foremost end of the feed nut portion 33 may be provided in 0. According to this configuration, even if the encoder 26 of the motor 24 enters an abnormal operation state in which the end position of the feed nut 33 cannot be detected, the position of the feed nut 33 can be reliably detected by the position detection sensor.

Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiments will be listed below together with their effects. (1) The electric actuator according to any one of claims 1 to 3, wherein a plurality of the moving bodies are provided, and each of the moving bodies is disposed adjacent to left and right sides of the actuator body. According to this configuration, the work can be transported from both sides of the actuator body.

(2) The electric actuator according to claim 2 or 3, wherein the guide mechanism is disposed on at least one of right and left sides of the actuator body.
According to this configuration, the size of the electric actuator can be reduced.

(3) The electric actuator according to any one of (2), (3), (1) and (2), wherein a buffer member for buffering the second screw member is provided at an end of the actuator body. According to this configuration, when the second screw member enters an abnormal operation state for some reason,
It can function as a stopper for the screw member and reduce the impact.

(4) The electric actuator according to (3), wherein the cushioning member is made of an elastic cushion rubber. According to this configuration, a low-cost buffer member can be provided.

(5) A position detecting means for detecting the position of the second screw member in a non-contact manner by the proximity of a part of the second screw member can be attached to the actuator body. The electric actuator according to any one of (1) to (4). According to this configuration, the position of the second screw member can be detected.

(6) A positioning member for positioning another actuator main body superimposed on the actuator main body at a predetermined angle, and a part of the actuator main body is brought into surface contact with the positioning member. The electric actuator according to any one of (1) to (3), (1) to (5). According to this configuration, it is possible to accurately position another actuator body to be superimposed.

(7) The electric actuator according to (6), wherein the positioning member is detachably provided. According to this configuration, the positioning member can be removed when the actuator bodies are not overlapped with each other.
It is possible to prevent the appearance quality of the electric actuator from deteriorating.

(8) The second screw portion and the moving body are connected via a connecting portion, and the connecting portion is formed integrally with at least one of the moving body and the second screw member. 4. The electric actuator according to 3. According to this configuration, the assembling work can be easily performed, and the electric actuator can be downsized.

[0067]

According to the first and second aspects of the present invention, the dead space in the table moving direction can be reduced. Further, by reducing the load applied to the motor, it is possible to set a large work transfer load or the like.

According to the third aspect of the invention, the entire electric actuator can be reduced in size.

[Brief description of the drawings]

FIG. 1A is a plan view showing a state where a slide table has moved to a rearmost position, and FIG. 1B is a plan view showing a state where the slide table has moved to a frontmost position.

FIG. 2 is a perspective view of an electric actuator.

FIG. 3 is a plan sectional view of the electric actuator.

FIG. 4 is a sectional view taken along line 4-4 in FIG. 3;

5A is a front view in which two electric actuators are combined, and FIG. 5B is a side view of FIG.

6A is a plan view in which two electric actuators are combined, and FIG. 6B is a partially enlarged view of FIG.

FIG. 7 is a plan view of an electric actuator having a plurality of guide mechanisms provided on one side of an actuator body in another embodiment.

8 is a sectional view taken along line 8-8 in FIG. 7;

FIG. 9 is a sectional view taken along line 9-9 in FIG. 10;

FIG. 10 is a plan view of an electric actuator showing a type different from that of FIG. 6;

11 shows an electric actuator of the type shown in FIG. 3,
FIG. 8 is a plan view in which electric actuators of the type shown in FIG. 7 are combined.

FIG. 12 is a plan view in which electric actuators of the type shown in FIG. 7 are combined.

[Explanation of symbols]

Reference numeral 12: Actuator body, 12a: Opening, 27: Feed screw (first screw member constituting the feed screw mechanism), 3
3 ... feed nut portion (second screw member constituting the feed screw mechanism), 42 ... motor, 43 ... slide table (moving body), 41 ... guide block (guide mechanism), 44 ... guide rail (guide mechanism), 47 ... Connecting pieces (connecting parts).

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5H607 AA01 BB01 BB06 BB10 CC01 CC03 CC05 CC07 CC09 DD03 DD18 EE52 FF01 HH01 HH03 HH06 HH08 HH09

Claims (3)

[Claims] 1. A motor according to claim 1, wherein the rotary motion of the motor provided in the actuator body is converted into a linear motion by a feed screw mechanism housed therein. An electric actuator provided with a body, wherein the moving body connected to the feed screw mechanism via the opening moves linearly when the motor rotates. 2. The feed screw mechanism comprises: a first screw member;
A second screw member engaged with the first screw member, and the second screw member is connected to the moving body through an opening in an outer peripheral portion of the actuator body, and the moving body is connected to the moving body. The electric actuator according to claim 1, further comprising a guide mechanism for guiding the electric actuator. 3. The moving body provided adjacent to an outer peripheral portion of the actuator body has a work contact surface parallel to a specific surface on the outer peripheral portion, and the work contact surface and the specific surface are provided. 3. The electric actuator according to claim 1, wherein the moving body protrudes forward from an end of the actuator body and moves.