JPH0556114B2 - - Google Patents
Info
- Publication number
- JPH0556114B2 JPH0556114B2 JP61205058A JP20505886A JPH0556114B2 JP H0556114 B2 JPH0556114 B2 JP H0556114B2 JP 61205058 A JP61205058 A JP 61205058A JP 20505886 A JP20505886 A JP 20505886A JP H0556114 B2 JPH0556114 B2 JP H0556114B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- displacement
- piezoelectric
- piezoelectric actuator
- mounting member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 40
- 230000007246 mechanism Effects 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 6
- 238000005452 bending Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
Landscapes
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61205058A JPS6364580A (ja) | 1986-09-02 | 1986-09-02 | 圧電アクチユエ−タ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61205058A JPS6364580A (ja) | 1986-09-02 | 1986-09-02 | 圧電アクチユエ−タ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6364580A JPS6364580A (ja) | 1988-03-23 |
| JPH0556114B2 true JPH0556114B2 (enrdf_load_stackoverflow) | 1993-08-18 |
Family
ID=16500738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61205058A Granted JPS6364580A (ja) | 1986-09-02 | 1986-09-02 | 圧電アクチユエ−タ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364580A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63140661U (enrdf_load_stackoverflow) * | 1987-03-06 | 1988-09-16 | ||
| JPS63283180A (ja) * | 1987-05-15 | 1988-11-21 | Yokogawa Electric Corp | 変位センサを有する圧電アクチュエ−タ |
| JPH01298777A (ja) * | 1988-05-26 | 1989-12-01 | Yokogawa Electric Corp | 圧電アクチュエータ |
-
1986
- 1986-09-02 JP JP61205058A patent/JPS6364580A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6364580A (ja) | 1988-03-23 |
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