JPH0553008B2 - - Google Patents
Info
- Publication number
- JPH0553008B2 JPH0553008B2 JP14102586A JP14102586A JPH0553008B2 JP H0553008 B2 JPH0553008 B2 JP H0553008B2 JP 14102586 A JP14102586 A JP 14102586A JP 14102586 A JP14102586 A JP 14102586A JP H0553008 B2 JPH0553008 B2 JP H0553008B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- magnetic
- cleaning tape
- medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 37
- 238000004140 cleaning Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000000314 lubricant Substances 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 7
- 239000010408 film Substances 0.000 description 23
- 238000005498 polishing Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明は固定磁気デイスク装置に用いられる磁
気記録媒体の製造方法に関し、詳しくは磁気記録
媒体の表面膜面上の微少突起を除去する製造方法
に関する。[Detailed Description of the Invention] [Technical Field to which the Invention Pertains] The present invention relates to a method for manufacturing a magnetic recording medium used in a fixed magnetic disk device, and more specifically, a manufacturing method for removing minute protrusions on the surface film of a magnetic recording medium. Regarding.
磁気記録媒体（以下、単に媒体とも称する）は
一般にアルミニウム合金、強化ガラス、ポリイミ
ドなどからなる非磁性デイスク状基板の鏡面仕上
げされている表面にアルマイト処理あるいはNi
−Ｐ無電解めつき処理などの下地処理を施し、形
成された下地膜上に磁性膜を均一に形成し、さら
に、その上に保護潤滑膜を形成して作製される。
しかし、このようにして作製された媒体の表面に
は、基板表面の加工むら、その上に各膜を形成す
るときの異物や塵埃、あるいは成膜材料の凝集な
どの要因により微少突起が存在する。固定磁気デ
イスク装置においては通常コンタクト・スター
ト・ストツプ（CSS）方式が採られるが、このよ
うな微少突起は磁気ヘツドの浮動の安定性に悪影
響を及ぼす。従つて、通常これらの突起は磁性
膜、保護潤滑膜形成後最終的に研摩などにより取
り除かれていた。例えば、バニツシユヘツドを用
いる方法が多く行われている。これは、サフアイ
アやアルミナなどの硬い材料で作製されたバニツ
シユヘツドを用い、磁気ヘツドの場合と同様に回
転している媒体上に浮上させる。このときのバニ
ツシユヘツドの浮上量を通常の磁気ヘツドの浮上
量より少なくし、媒体上の微少突起にバニツシユ
ヘツドを衝突させて微少突起を折損し、通常の磁
気ヘツドの場合には磁気ヘツドに衝突しないよう
にしてしまう方法である。しかし、この方法で
は、折損後の突起の根本部は媒体上に残つてお
り、媒体の駆動開始時、停止時にはこの残存突起
に磁気ヘツドが衝突するという問題があり、ま
た、微少突起が比較的大きい場合には、突起が折
損することにより磁性膜に欠陥部が生じることも
ある。しかも、バニツシユヘツドを媒体の半径方
向に数回往復運動させる必要があり非常に時間が
かかる。
Magnetic recording media (hereinafter simply referred to as media) are generally made of a non-magnetic disk-shaped substrate made of aluminum alloy, tempered glass, polyimide, etc., and have a mirror-finished surface coated with alumite or Ni.
-P A base treatment such as electroless plating is performed, a magnetic film is uniformly formed on the formed base film, and a protective lubricant film is further formed thereon.
However, on the surface of the medium prepared in this way, microscopic protrusions may exist due to factors such as uneven processing of the substrate surface, foreign matter and dust when forming each film on it, and agglomeration of film forming materials. . A contact start stop (CSS) system is normally used in fixed magnetic disk drives, but such minute protrusions have an adverse effect on the stability of the floating of the magnetic head. Therefore, these protrusions are usually removed by polishing or the like after the magnetic film and protective lubricant film are formed. For example, a method using a burnish head is often used. This uses a vanishing head made of a hard material such as sapphire or alumina, which is levitated above a rotating medium in the same way as a magnetic head. At this time, the flying height of the vanishing head is made smaller than that of a normal magnetic head, and the vanishing head collides with a minute protrusion on the medium to break the minute protrusion. This is a method of turning it into However, with this method, the root part of the protrusion remains on the medium after the breakage, and there is a problem that the magnetic head collides with this remaining protrusion when starting or stopping the drive of the medium. If the protrusions are large, the protrusions may break, resulting in defects in the magnetic film. Moreover, it is necessary to reciprocate the burnishing head several times in the radial direction of the medium, which is very time consuming.
そこで媒体表面に微少突起が発生する原因の大
部分が基板にあることに着目し、下地処理を施さ
れた磁性膜形成前の基板表面に前述のバニツシユ
ヘツドによる仕上げ加工を行うことが知られてい
る。しかし、この場合にも残存突起の影響や下地
膜がバニツシユヘツドにより受ける損傷により、
その上に形成される磁性膜に欠陥部が発生する欠
点がある。その対策として、下地処理前の基板表
面、あるいは下地処理後で磁性膜形成前の基板表
面にラツピングテープを圧着接触させて、基板を
回転させて一種の研摩を行う方法が提案されてい
る。この方法によれば基板表面の微少突起は根本
から確実にとれ良好な基板表面が得られるが、ラ
ツピングテープはテープ基材にアルミナなどの硬
い粒子を接着剤で固着させたものであり、この方
法で処理された基板表面には微少ながら加工の痕
跡が残り、充分満足すべき平滑な面が得られるに
はいたつてない。 Focusing on the fact that most of the causes of minute protrusions on the media surface are caused by the substrate, it is known that the above-mentioned burnishing head is used to finish the surface of the substrate, which has been subjected to surface treatment before the formation of the magnetic film. . However, even in this case, due to the influence of the remaining protrusions and damage to the base film caused by the burnishing head,
There is a drawback that defects occur in the magnetic film formed thereon. As a countermeasure against this problem, a method has been proposed in which a wrapping tape is pressed into contact with the surface of the substrate before the base treatment or after the base treatment but before the magnetic film is formed, and the substrate is rotated to perform a kind of polishing. With this method, minute protrusions on the substrate surface can be reliably removed from the root and a good substrate surface can be obtained. However, wrapping tape is made by fixing hard particles such as alumina to the tape base material with an adhesive. On the surface of the substrate treated by this method, traces of processing remain, although minute, and a sufficiently satisfactory smooth surface cannot be obtained.
本発明は、上述の欠点を除去して、下地膜形成
後の基板表面、または、磁性膜、保護潤滑膜まで
形成後の媒体表面に存在する微少突起を、基板表
面または媒体表面を損傷することなく、確実に短
時間で除去し、特性の優れた媒体を製造する方法
を提供することを目的とする。
The present invention eliminates the above-mentioned drawbacks and eliminates the possibility of damaging the substrate surface or the medium surface by removing minute protrusions present on the substrate surface after the formation of the base film or on the medium surface after the formation of the magnetic film and protective lubricant film. It is an object of the present invention to provide a method for producing a medium with excellent characteristics by reliably removing it in a short time without any problems.
本発明は、上述の目的を達成するため、鏡面仕
上げした非磁性デイスク状基板の両面上に下地膜
を形成する第１工程と、該下地膜上に磁性膜及び
保護潤滑膜を順次形成する第２工程とを備えた磁
気記録媒体の製造方法において、前記基板を回転
させながらクリーニングテープをコンタクトゴム
ローラにより基板の両面側に圧着接触させ、かつ
基板とクリーニングテープを基板の半径方向に相
対的に往復移動させる第３工程を、前記第１工程
と第２工程の間又は第２工程の後に備えることを
特徴としている。
In order to achieve the above object, the present invention comprises a first step of forming a base film on both sides of a mirror-finished non-magnetic disk-shaped substrate, and a second step of sequentially forming a magnetic film and a protective lubricant film on the base film. A method for manufacturing a magnetic recording medium comprising two steps, in which a cleaning tape is pressed into contact with both sides of the substrate by a contact rubber roller while rotating the substrate, and the substrate and the cleaning tape are reciprocated relative to each other in a radial direction of the substrate. It is characterized in that a third step of moving is provided between the first step and the second step or after the second step.
以下、本発明の実施例を図面を参照しながら説
明する。
Embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明の方法を実施し得る装置の一実
施例の要部構成を示す上面図である。第１図に見
られるように実施例の装置は４つのブロツクから
なる。各ブロツクは基板１に対して対象的に配置
されており、架台７に回転可能に取り付けられた
コンタクトゴムローラ３、供給リール４、巻取り
リール５、テンシヨンローラ６およびそれらの間
に張られたクリーニングテープ２で構成されてい
る（図において番号は１ブロツクについてのみ付
し他も同様の構成であるので略す）。 FIG. 1 is a top view showing the configuration of essential parts of an embodiment of an apparatus capable of carrying out the method of the present invention. As seen in FIG. 1, the apparatus of the embodiment consists of four blocks. Each block is arranged symmetrically with respect to the substrate 1, and includes a contact rubber roller 3 rotatably attached to a pedestal 7, a supply reel 4, a take-up reel 5, a tension roller 6, and a tension roller 6 stretched between them. It consists of a cleaning tape 2 (in the figure, only one block is numbered and the other blocks are omitted as they have the same structure).
次にこの装置を用いて本発明の磁気記録媒体の
製造方法について説明する。第１図における矢印
のａ方向へ各ブロツクを移動させて離間させる
（移動機構は図示せず）。表面に下地処理を施され
た基板１を基板駆動軸８に装着し、軸を中心に基
板１を回転駆動させる。各ブロツクを矢印のｂ方
向に移動させ、各ブロツクのクリーニングテープ
２をコンタクトゴムローラ３により基板１の両面
に圧着接触させ、基板１の両面を２個づつのクリ
ーニングテープ、従つて、合計４個のクリーニン
グテープを巻き取り移動させながら同時に研摩す
る。その状態を側面より見たＡ−Ａ断面図が第２
図、Ｂ−Ｂ断面図が第３図である。第３図に示す
ように回転している基板１の両面にクリーニング
テープ２をテンシヨンローラ６によりたわまない
ようにテンシヨンをかけながらコンタクトゴムロ
ーラ３で圧着接触した状態で、第２図に示す矢印
の方向すなわちクリーニングテープ２の各リール
の回転軸方向に基板１の半径内で架台７と共にカ
ム構造を用いて（図示はされたない）往復運動さ
せる。かくして、基板１の両面全面が４個のクリ
ーニングテープ２により研摩され、微少突起が短
時間に効率良く除去される。 Next, a method for manufacturing a magnetic recording medium of the present invention using this apparatus will be explained. Each block is moved in the direction of arrow a in FIG. 1 to separate them (the moving mechanism is not shown). A substrate 1 whose surface has been subjected to surface treatment is mounted on a substrate drive shaft 8, and the substrate 1 is rotated about the shaft. Each block is moved in the direction of arrow b, and the cleaning tape 2 of each block is pressed into contact with both sides of the substrate 1 by the contact rubber roller 3. Two cleaning tapes are applied to each side of the substrate 1, so a total of four The cleaning tape is wound and moved while polishing at the same time. The second A-A cross-sectional view of this state is shown from the side.
FIG. 3 is a sectional view taken along line B-B. As shown in FIG. 3, the cleaning tape 2 is pressed onto both sides of the rotating substrate 1 by the contact rubber roller 3 while being tensioned by the tension roller 6 so as not to bend, as shown in FIG. 2. The cleaning tape 2 is reciprocated within the radius of the substrate 1 in the direction of the arrow, that is, in the direction of the rotation axis of each reel of the cleaning tape 2, using a cam structure (not shown) together with the pedestal 7. In this way, the entire surface of both sides of the substrate 1 is polished by the four cleaning tapes 2, and minute protrusions are efficiently removed in a short time.
クリーニングテープは、例えば、天然繊維ポリ
エステル混合の不織紙からなり、コンタクトゴム
ローラは、例えばエアシリンダの押圧力で圧接さ
れる。従つて、クリーニングテープと基板表面と
の相対運動の摩擦による研摩面には、硬質の研摩
粒子を利用しているラツピングテープの場合の様
な鋭角的な加工跡は生じない。 The cleaning tape is made of, for example, nonwoven paper mixed with natural fibers and polyester, and the contact rubber roller is pressed against it by the pressing force of, for example, an air cylinder. Therefore, unlike the wrapping tape that uses hard abrasive particles, no sharp machining marks are produced on the polished surface due to the friction of the relative movement between the cleaning tape and the substrate surface.
さらに、研摩中クリーニングテープ２は第３図
の矢印に示すように供給リール４より新しいクリ
ーニングテープ２が送り出され、研摩に使用され
表面が汚染されたクリーニングテープ２は巻取り
リール５に巻き取られ、研摩面には常に清浄なク
リーニングテープが存在することになるので基板
表面より除去された微少突起により基板表面が汚
染損傷されることもない。 Furthermore, during polishing, a new cleaning tape 2 is fed out from the supply reel 4 as shown by the arrow in FIG. Since a clean cleaning tape is always present on the polished surface, the substrate surface will not be contaminated or damaged by minute protrusions removed from the substrate surface.
本実施例は下地処理を施された基板の微少突起
の除去の場合について述べたが、最終的に保護潤
滑膜まで形成した媒体の表面の微少突起の除去に
も有効である。媒体の製造において、下地処理を
施した基板表面および最終的な媒体表面について
それぞれ本実施例による微少突起の除去を行つて
も良く、また、いずれか一方の面についてのみ行
つてもよい。 Although this embodiment has been described for removing minute protrusions on a substrate that has been subjected to surface treatment, it is also effective for removing minute protrusions on the surface of a medium on which a protective lubricant film has finally been formed. In manufacturing the medium, the microprotrusions may be removed according to this embodiment from both the surface of the substrate subjected to the base treatment and the final surface of the medium, or may be removed from only one of the surfaces.
本発明によれば、クリーニングテープを用いる
ことにより、下地処理を施された基板表面あるい
は保護潤滑膜まで形成した媒体表面にある微少突
起を、その表面を損傷することなく、確実に短時
間で効率良く除去することができ、磁気記録媒体
の製造時間を大幅に短縮することができる。本発
明によれば表面を損傷することなく確実に痕跡の
残らぬように微少突起を除去できるので、基板に
適用した場合には、非常に良好な平滑性を有する
磁性膜を形成するとが可能となり、磁気特性の優
れた磁気記録媒体を得ることができ、磁気記録媒
体の表面に適用した場合には極めて平滑な表面が
得られるので、磁気ヘツドの浮上量を少なくして
も安定した浮上性が確保でき、高記録密度を指向
する固定磁気デイスク装置に用いられる薄膜磁気
記録媒体の製造に極めて有効である。
According to the present invention, by using a cleaning tape, minute protrusions on the surface of a substrate that has been subjected to base treatment or the surface of a medium on which a protective lubricant film has been formed can be removed reliably and efficiently in a short time without damaging the surface. It can be removed easily and the manufacturing time of magnetic recording media can be significantly shortened. According to the present invention, minute protrusions can be removed reliably without damaging the surface and leaving no traces, so when applied to a substrate, it is possible to form a magnetic film with very good smoothness. , it is possible to obtain a magnetic recording medium with excellent magnetic properties, and when applied to the surface of a magnetic recording medium, an extremely smooth surface can be obtained, so even if the flying height of the magnetic head is reduced, stable flying performance can be achieved. It is extremely effective for manufacturing thin film magnetic recording media used in fixed magnetic disk devices aiming at high recording density.
第１図は本発明の方法を実施し得る装置の一実
施例の要部構成を示す上面図、第２図は第１図の
Ａ−Ａ断面図、第３図は第１図のＢ−Ｂ断面図で
ある。
１……基板、２……クリーニングテープ、３…
…コンタクトゴムローラ、４……供給リール、５
……巻取りリール、６……テンシヨンローラ、７
……架台、８……基板駆動軸。
FIG. 1 is a top view showing the configuration of essential parts of an embodiment of an apparatus capable of carrying out the method of the present invention, FIG. 2 is a cross-sectional view taken along line A-A in FIG. 1, and FIG. It is a sectional view of B. 1... Board, 2... Cleaning tape, 3...
... Contact rubber roller, 4 ... Supply reel, 5
...Take-up reel, 6...Tension roller, 7
... Frame, 8... Board drive shaft.
Claims (1)
上に下地膜を形成する第１工程と、該下地膜上に
磁性膜及び保護潤滑膜を順次形成する第２工程と
を備えた磁気記録媒体の製造方法において、前記
基板を回転させながらクリーニングテープをコン
タクトゴムローラにより基板の両面側に圧着接触
させ、かつ基板とクリーニングテープを基板の半
径方向に相対的に往復移動させる第３工程を、前
記第１工程と第２工程の間又は第２工程の後に備
えることを特徴とする磁気記録媒体の製造方法。1. Manufacture of a magnetic recording medium comprising a first step of forming a base film on both sides of a mirror-finished non-magnetic disk-shaped substrate, and a second step of sequentially forming a magnetic film and a protective lubricant film on the base film. In the method, a third step of bringing a cleaning tape into pressure contact with both surfaces of the substrate using a contact rubber roller while rotating the substrate, and relatively reciprocating the substrate and the cleaning tape in a radial direction of the substrate is performed in the first step. and a second step or after the second step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14102586A JPS62298022A (en) | 1986-06-17 | 1986-06-17 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14102586A JPS62298022A (en) | 1986-06-17 | 1986-06-17 | Production of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62298022A JPS62298022A (en) | 1987-12-25 |
| JPH0553008B2 true JPH0553008B2 (en) | 1993-08-09 |
Family
ID=15282460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14102586A Granted JPS62298022A (en) | 1986-06-17 | 1986-06-17 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62298022A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4973496A (en) * | 1989-11-02 | 1990-11-27 | International Business Machines Corporation | Method for texturing magnetic disks |
-
1986
- 1986-06-17 JP JP14102586A patent/JPS62298022A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62298022A (en) | 1987-12-25 |
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