JPH0552120B2 - - Google Patents
Info
- Publication number
- JPH0552120B2 JPH0552120B2 JP62228291A JP22829187A JPH0552120B2 JP H0552120 B2 JPH0552120 B2 JP H0552120B2 JP 62228291 A JP62228291 A JP 62228291A JP 22829187 A JP22829187 A JP 22829187A JP H0552120 B2 JPH0552120 B2 JP H0552120B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- hole
- ultrasonic transducer
- semiconductor substrate
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 59
- 239000010408 film Substances 0.000 claims description 53
- 239000004065 semiconductor Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 description 31
- 239000002184 metal Substances 0.000 description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- 238000005530 etching Methods 0.000 description 14
- 238000005516 engineering process Methods 0.000 description 12
- 229910000838 Al alloy Inorganic materials 0.000 description 9
- 230000010355 oscillation Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 229920006267 polyester film Polymers 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- ONRPGGOGHKMHDT-UHFFFAOYSA-N benzene-1,2-diol;ethane-1,2-diamine Chemical compound NCCN.OC1=CC=CC=C1O ONRPGGOGHKMHDT-UHFFFAOYSA-N 0.000 description 1
- 238000001444 catalytic combustion detection Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22829187A JPS6472700A (en) | 1987-09-14 | 1987-09-14 | Ultrasonic transducer and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22829187A JPS6472700A (en) | 1987-09-14 | 1987-09-14 | Ultrasonic transducer and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6472700A JPS6472700A (en) | 1989-03-17 |
| JPH0552120B2 true JPH0552120B2 (de) | 1993-08-04 |
Family
ID=16874166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22829187A Granted JPS6472700A (en) | 1987-09-14 | 1987-09-14 | Ultrasonic transducer and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6472700A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4690813A (en) * | 1984-09-14 | 1987-09-01 | Alps Electric Co., Ltd. | Molybdenum oxide whiskers and a method of producing the same |
| EP2079524B1 (de) * | 2006-10-23 | 2011-05-18 | Koninklijke Philips Electronics N.V. | Symmetrische und präferenziell gesteuerte random-arrays für ultraschalltherapie |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61220600A (ja) * | 1985-03-26 | 1986-09-30 | Nec Corp | 超音波センサ |
| JPS62149299A (ja) * | 1985-12-24 | 1987-07-03 | Agency Of Ind Science & Technol | アレイ型超音波トランスデユ−サ |
-
1987
- 1987-09-14 JP JP22829187A patent/JPS6472700A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61220600A (ja) * | 1985-03-26 | 1986-09-30 | Nec Corp | 超音波センサ |
| JPS62149299A (ja) * | 1985-12-24 | 1987-07-03 | Agency Of Ind Science & Technol | アレイ型超音波トランスデユ−サ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6472700A (en) | 1989-03-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6594369B1 (en) | Electret capacitor microphone | |
| JP3091766B2 (ja) | 表面取付け型圧電セラミツク式加速度計及びその製造方法 | |
| US20030035558A1 (en) | Acoustic sensor, its manufacturing method, and semiconductor electret condenser microphone using the same acoustic sensor | |
| JP4049743B2 (ja) | 音響エネルギーの横方向の伝搬を制限する超小型超音波トランスデューサ（ｍｕｔ）基板 | |
| US5541468A (en) | Monolithic transducer array case and method for its manufacture | |
| US9618404B2 (en) | Transducer and measurement apparatus | |
| KR20110091472A (ko) | 압전 진동자 및 이것을 이용한 발진기 | |
| JP2005340961A (ja) | 音波受信装置 | |
| JP3427032B2 (ja) | エレクトレットコンデンサマイクロホン | |
| US9872120B2 (en) | Ultrasonic transducers and methods of manufacturing the same | |
| WO1989005199A1 (en) | An acoustic emission transducer and an electrical oscillator | |
| JP2008271424A (ja) | 音響センサ | |
| KR101877838B1 (ko) | 멤스 마이크로폰 소자 및 이를 포함하는 멤스 마이크로폰 모듈 | |
| JP2545714B2 (ja) | 超音波トランスジューサおよびその製造方法 | |
| JPH07121159B2 (ja) | 超音波トランスジユ−サ | |
| JPH0552120B2 (de) | ||
| JPS61220600A (ja) | 超音波センサ | |
| CN112697262B (zh) | 水听器及其制造方法 | |
| JP2545713B2 (ja) | 超音波トランスジューサとその製造方法 | |
| JPH0577240B2 (de) | ||
| JP3259322B2 (ja) | 音波トランスデューサ | |
| JPH0476560B2 (de) | ||
| JPH0547160B2 (de) | ||
| JPH05672B2 (de) | ||
| JPH067719B2 (ja) | 超音波トランスジユ−サ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |