JPH05505645A - 塩化物および金属のイオンを含むエッチング剤の電解的再生装置 - Google Patents

塩化物および金属のイオンを含むエッチング剤の電解的再生装置

Info

Publication number
JPH05505645A
JPH05505645A JP91504216A JP50421691A JPH05505645A JP H05505645 A JPH05505645 A JP H05505645A JP 91504216 A JP91504216 A JP 91504216A JP 50421691 A JP50421691 A JP 50421691A JP H05505645 A JPH05505645 A JP H05505645A
Authority
JP
Japan
Prior art keywords
anode
cathode
electrolytic
rods
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP91504216A
Other languages
English (en)
Japanese (ja)
Inventor
ライト，ヘリベルト
ランダー，ハンス
Original Assignee
ハンス　ヘルミュラー　マシーネンバウ　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング　ウント　コンパニー
ローベルト ボッシュ ゲゼルシャフト ミット ベシュレンクテル ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ハンス　ヘルミュラー　マシーネンバウ　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング　ウント　コンパニー, ローベルト ボッシュ ゲゼルシャフト ミット ベシュレンクテル ハフツング filed Critical ハンス　ヘルミュラー　マシーネンバウ　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング　ウント　コンパニー
Publication of JPH05505645A publication Critical patent/JPH05505645A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • ing And Chemical Polishing (AREA)
JP91504216A 1990-03-29 1991-02-23 塩化物および金属のイオンを含むエッチング剤の電解的再生装置 Pending JPH05505645A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4010035A DE4010035A1 (de) 1990-03-29 1990-03-29 Vorrichtung zur elektrolytischen regeneration eines chlorid- und metallionen enthaltenden aetzmittels
DE4010035.9 1990-03-29
PCT/EP1991/000340 WO1991014800A1 (de) 1990-03-29 1991-02-23 Vorrichtung zur elektrolytischen regeneration eines chlorid- und metallionen enthaltenden ätzmittels

Publications (1)

Publication Number Publication Date
JPH05505645A true JPH05505645A (ja) 1993-08-19

Family

ID=6403287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP91504216A Pending JPH05505645A (ja) 1990-03-29 1991-02-23 塩化物および金属のイオンを含むエッチング剤の電解的再生装置

Country Status (4)

Country Link
EP (1) EP0521867B1 (de)
JP (1) JPH05505645A (de)
DE (2) DE4010035A1 (de)
WO (1) WO1991014800A1 (de)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2008766B2 (de) * 1970-02-23 1971-07-29 Licentia Patent Verwaltungs GmbH, 6000 Frankfurt Verfahren zum regenerieren einer kupferhaltigen aetzloesung insbesondere fuer die herstellung von gedruckten schaltungen
US3764503A (en) * 1972-01-19 1973-10-09 Dart Ind Inc Electrodialysis regeneration of metal containing acid solutions
DE2241462A1 (de) * 1972-08-23 1974-03-07 Bach & Co Verfahren zum rueckgewinnen einer kupfer(ii)-chlorid enthaltenden aetzloesung
DE2650912A1 (de) * 1976-11-06 1978-05-18 Hoellmueller Maschbau H Elektrolytische regeneration eines aetzmittels
DE3330349A1 (de) * 1983-08-23 1985-03-14 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zur elektrochemischen kompensation der luftoxidation bei der elektrochemischen regenerierung von chloridhaltigen kupferaetzloesungen
DE3738996A1 (de) * 1986-12-02 1988-06-30 Robotron Veb K Verfahren und einrichtung zur kupferabscheidung aus ammoniakalischen kupferchloridloesungen

Also Published As

Publication number Publication date
DE59104080D1 (de) 1995-02-09
WO1991014800A1 (de) 1991-10-03
EP0521867B1 (de) 1994-12-28
EP0521867A1 (de) 1993-01-13
DE4010035A1 (de) 1991-10-02

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