JPH0549826B2 - - Google Patents
Info
- Publication number
- JPH0549826B2 JPH0549826B2 JP8467303A JP6730384A JPH0549826B2 JP H0549826 B2 JPH0549826 B2 JP H0549826B2 JP 8467303 A JP8467303 A JP 8467303A JP 6730384 A JP6730384 A JP 6730384A JP H0549826 B2 JPH0549826 B2 JP H0549826B2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- temperature
- heat load
- radiation shield
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 46
- 230000005855 radiation Effects 0.000 claims description 42
- 239000007789 gas Substances 0.000 claims description 29
- 229910052786 argon Inorganic materials 0.000 claims description 23
- 238000005086 pumping Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 238000001816 cooling Methods 0.000 description 20
- 238000009835 boiling Methods 0.000 description 7
- 230000002745 absorbent Effects 0.000 description 6
- 239000002250 absorbent Substances 0.000 description 6
- 238000009833 condensation Methods 0.000 description 6
- 230000005494 condensation Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000000859 sublimation Methods 0.000 description 3
- 230000008022 sublimation Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48178383A | 1983-04-04 | 1983-04-04 | |
| US481783 | 1983-04-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59218372A JPS59218372A (ja) | 1984-12-08 |
| JPH0549826B2 true JPH0549826B2 (ru) | 1993-07-27 |
Family
ID=23913381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59067303A Granted JPS59218372A (ja) | 1983-04-04 | 1984-04-04 | 低温ポンプならびにそのクロスオーバハングアップを阻止する方法 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0126909B1 (ru) |
| JP (1) | JPS59218372A (ru) |
| CA (1) | CA1220948A (ru) |
| DE (1) | DE3464948D1 (ru) |
| IL (1) | IL71403A (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009250148A (ja) * | 2008-04-08 | 2009-10-29 | Sumitomo Heavy Ind Ltd | クライオポンプおよび冷凍機 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4555907A (en) * | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
| JPS63501585A (ja) * | 1985-10-31 | 1988-06-16 | ヘリツクス テクノロジ− コ−ポレ−シヨン | 迅速吸着クライオポンプ |
| US4718241A (en) * | 1985-10-31 | 1988-01-12 | Helix Technology Corporation | Cryopump with quicker adsorption |
| EP0338113B1 (de) * | 1988-04-22 | 1992-01-29 | Leybold Aktiengesellschaft | Verfahren zur Adaption einer zweistufigen Refrigerator-Kryopumpe auf ein betimmtes Gas |
| CN112815563B (zh) | 2015-12-04 | 2022-11-01 | 皇家飞利浦有限公司 | 具有依赖于温度的热分流器的低温冷却系统 |
| CN118517395A (zh) * | 2023-12-05 | 2024-08-20 | 上海优尊真空设备有限公司 | 一种真空稳定性优异的低温真空泵 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
| US4311018A (en) * | 1979-12-17 | 1982-01-19 | Varian Associates, Inc. | Cryogenic pump |
| JPS57176372A (en) * | 1981-04-21 | 1982-10-29 | Osaka Oxgen Ind Ltd | Low temperature heat transmitter |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4295338A (en) * | 1979-10-18 | 1981-10-20 | Varian Associates, Inc. | Cryogenic pumping apparatus with replaceable pumping surface elements |
| US4356701A (en) * | 1981-05-22 | 1982-11-02 | Helix Technology Corporation | Cryopump |
-
1984
- 1984-03-29 IL IL71403A patent/IL71403A/xx not_active IP Right Cessation
- 1984-04-03 CA CA000451154A patent/CA1220948A/en not_active Expired
- 1984-04-04 JP JP59067303A patent/JPS59218372A/ja active Granted
- 1984-04-04 EP EP84103732A patent/EP0126909B1/en not_active Expired
- 1984-04-04 DE DE8484103732T patent/DE3464948D1/de not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
| US4311018A (en) * | 1979-12-17 | 1982-01-19 | Varian Associates, Inc. | Cryogenic pump |
| JPS57176372A (en) * | 1981-04-21 | 1982-10-29 | Osaka Oxgen Ind Ltd | Low temperature heat transmitter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009250148A (ja) * | 2008-04-08 | 2009-10-29 | Sumitomo Heavy Ind Ltd | クライオポンプおよび冷凍機 |
Also Published As
| Publication number | Publication date |
|---|---|
| IL71403A (en) | 1991-01-31 |
| JPS59218372A (ja) | 1984-12-08 |
| EP0126909A2 (en) | 1984-12-05 |
| EP0126909A3 (en) | 1985-01-23 |
| DE3464948D1 (en) | 1987-08-27 |
| CA1220948A (en) | 1987-04-28 |
| EP0126909B1 (en) | 1987-07-22 |
| IL71403A0 (en) | 1984-06-29 |
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| JPH0549826B2 (ru) | ||
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |