JPH0549428B2 - - Google Patents

Info

Publication number
JPH0549428B2
JPH0549428B2 JP62064807A JP6480787A JPH0549428B2 JP H0549428 B2 JPH0549428 B2 JP H0549428B2 JP 62064807 A JP62064807 A JP 62064807A JP 6480787 A JP6480787 A JP 6480787A JP H0549428 B2 JPH0549428 B2 JP H0549428B2
Authority
JP
Japan
Prior art keywords
polishing
workpiece
tool
elastic bodies
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62064807A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63232953A (ja
Inventor
Matsuo Muneda
Takehiro Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6480787A priority Critical patent/JPS63232953A/ja
Publication of JPS63232953A publication Critical patent/JPS63232953A/ja
Publication of JPH0549428B2 publication Critical patent/JPH0549428B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP6480787A 1987-03-19 1987-03-19 研磨工具 Granted JPS63232953A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6480787A JPS63232953A (ja) 1987-03-19 1987-03-19 研磨工具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6480787A JPS63232953A (ja) 1987-03-19 1987-03-19 研磨工具

Publications (2)

Publication Number Publication Date
JPS63232953A JPS63232953A (ja) 1988-09-28
JPH0549428B2 true JPH0549428B2 (cs) 1993-07-26

Family

ID=13268883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6480787A Granted JPS63232953A (ja) 1987-03-19 1987-03-19 研磨工具

Country Status (1)

Country Link
JP (1) JPS63232953A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2941018B2 (ja) * 1990-08-31 1999-08-25 キヤノン株式会社 研磨工具
EP0808231B1 (en) * 1995-02-10 2000-11-02 Advanced Micro Devices, Inc. Chemical-mechanical polishing using curved carriers
US20130224028A1 (en) * 2012-02-28 2013-08-29 Nathan D. Korn Component blending tool assembly

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842494A (cs) * 1971-10-02 1973-06-20
JPS5646952A (en) * 1979-09-26 1981-04-28 Hitachi Ltd Dehumidifier*air conditioner

Also Published As

Publication number Publication date
JPS63232953A (ja) 1988-09-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees