JPH0548826A - Complete contact type image sensor and unit - Google Patents

Complete contact type image sensor and unit

Info

Publication number
JPH0548826A
JPH0548826A JP3205049A JP20504991A JPH0548826A JP H0548826 A JPH0548826 A JP H0548826A JP 3205049 A JP3205049 A JP 3205049A JP 20504991 A JP20504991 A JP 20504991A JP H0548826 A JPH0548826 A JP H0548826A
Authority
JP
Japan
Prior art keywords
transparent
image sensor
light
conductor layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3205049A
Other languages
Japanese (ja)
Inventor
Masahiro Nakagawa
雅浩 中川
Tetsuro Nakamura
哲朗 中村
Takahiko Murata
隆彦 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3205049A priority Critical patent/JPH0548826A/en
Publication of JPH0548826A publication Critical patent/JPH0548826A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide a complete contact type image sensor unit of high performance which improves the antistatic property and the wear resistance and keeps the resolution of image read and the transfer efficiency of light. CONSTITUTION:A semiconductor image sensor chip 3 which has a light- transmissive substrate 1, a circuit conductor layer 2 is formed on its surface, and has a photodetector 7 and a scanning circuit 8 on the surface of the light- transmissive substrate 1 through a light-transmissive insulating resin 5 hardened by light is placed facedown so that a taking-out electrode 4 formed on the semiconductor image sensor chip 3 is brought into contact with the circuit conductor layer 2, and a transparent conductor layer 9 is provided on the light- transmissive substrate 1 in the position where the photodetector 7 and the scanning circuit 8 are abutted on each other, and a light-transmissive insulating layer 10 or the other transparent conductor layer is abutted on the rear face of the light-transmissive substrate 1 and is used as the document contact face, and a document 11 is illuminated from above by a light source (LED array) 12 and is read.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光学画像を電気信号に
変換する完全密着型イメージセンサおよび完全密着イメ
ージセンサユニットに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perfect contact image sensor and a perfect contact image sensor unit for converting an optical image into an electric signal.

【0002】[0002]

【従来の技術】従来の完全密着型イメージセンサユニッ
トは、図3に示すように表面上に回路導体層42を形成
した透光性基板41と、この透光性基板41の表面上
に、透明光硬化型絶縁樹脂45を介して実装した受光素
子47及び走査回路48を有する半導体イメージセンサ
チップ43とを備え、上記半導体イメージセンサチップ
43はフェイスダウンで、その半導体イメージセンサチ
ップ43上に形成された取り出し電極44が上記回路導
体層42に当接する構造をしたもので、透光性基板41
の裏面が直接原稿面に接する構造をとっていた。
2. Description of the Related Art A conventional perfect contact type image sensor unit has a transparent substrate 41 having a circuit conductor layer 42 formed on the surface thereof as shown in FIG. 3, and a transparent substrate 41 having a transparent surface. A semiconductor image sensor chip 43 having a light receiving element 47 and a scanning circuit 48 mounted via a photo-curing insulating resin 45 is provided, and the semiconductor image sensor chip 43 is formed face down on the semiconductor image sensor chip 43. The extraction electrode 44 has a structure in which it contacts the circuit conductor layer 42.
It had a structure in which the back side of was in direct contact with the original side.

【0003】[0003]

【発明が解決しようとする課題】しかしながら上記のよ
うな構成では、透光性基板の裏面が直接原稿面に接する
構造のため原稿が何万枚も通過することによって透光性
基板が摩耗していき、MTFや感度が低下し、また、静
電気によって透光性基板に当接した半導体素子が破損し
てしまうという課題があった。
However, in the above-mentioned structure, since the back surface of the transparent substrate is in direct contact with the original surface, the transparent substrate is worn due to the passage of tens of thousands of originals. Then, there is a problem that the MTF and the sensitivity are lowered, and that the static electricity damages the semiconductor element brought into contact with the transparent substrate.

【0004】[0004]

【課題を解決するための手段】上記課題を解決するため
に本発明の完全密着型イメージセンサユニットは、透光
性基板の裏面が直接原稿面に接しないように、透光性基
板の裏面と原稿との間に、透明絶縁層または透明導電体
層を設けることにより耐摩耗性を持たせ、さらに受光素
子及び走査回路が当接される場所で透光性基板上に、透
明導電体層を設けることにより耐静電気性をもたせる機
構を備えた完全密着型イメージセンサユニットを作成す
るものである。
In order to solve the above-mentioned problems, a perfect contact type image sensor unit of the present invention is provided with a back surface of a transparent substrate so that the back surface of the transparent substrate does not directly contact the original surface. Wear resistance is provided by providing a transparent insulating layer or a transparent conductor layer between the manuscript and the transparent conductor layer on the transparent substrate at the position where the light receiving element and the scanning circuit are in contact. By providing it, a perfect contact type image sensor unit having a mechanism for providing electrostatic resistance is created.

【0005】[0005]

【作用】本発明は上記した構成によって、透明絶縁層を
設けることにより耐摩耗性を向上させ、透明絶縁層、ま
たは透明導電体層を使用することにより耐静電気性と耐
摩耗性とを向上させ、画像読み取りの解像度、分解能、
および光の転送効率を維持する高性能の完全密着型イメ
ージセンサユニットを実現する。
The present invention has the above-mentioned structure to improve wear resistance by providing a transparent insulating layer, and improve static resistance and wear resistance by using a transparent insulating layer or a transparent conductor layer. , Image reading resolution, resolution,
Also, a high-performance perfect contact image sensor unit that maintains the light transfer efficiency is realized.

【0006】[0006]

【実施例】以下本発明の一実施例の完全密着型イメージ
センサユニットについて、図面を参照しながら説明す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A perfect contact type image sensor unit according to an embodiment of the present invention will be described below with reference to the drawings.

【0007】図1は第一の発明の実施例における完全密
着型イメージセンサユニットの正断面図である。
FIG. 1 is a front sectional view of a perfect contact type image sensor unit in the embodiment of the first invention.

【0008】1は透光性基板、2は透光性基板1の表面
上に形成された回路導体層、3は半導体素子として用い
たイメージセンサチップ、4はイメージセンサチップ3
に設けられてる電極、5は半導体イメージセンサチップ
3を、透光性基板1へ実装するための透明光硬化型絶縁
樹脂、6は半導体イメージセンサチップ3を保護するた
めの透明保護層、7は半導体イメージセンサチップ3に
設けられている受光素子、8は半導体イメージセンサチ
ップ3に設けられている走査回路、受光素子7及び走査
回路8が当接される場所で透光性基板上に設けた透明導
電体層、10は透光性基板1の裏面で、原稿11と当接
する透明絶縁層である。11は読み取るべき原稿で、1
2は原稿11を照明する光源(LEDアレイ)で、13
はローラである。
Reference numeral 1 is a transparent substrate, 2 is a circuit conductor layer formed on the surface of the transparent substrate 1, 3 is an image sensor chip used as a semiconductor element, and 4 is an image sensor chip 3.
, 5 is a transparent photo-curable insulating resin for mounting the semiconductor image sensor chip 3 on the translucent substrate 1, 6 is a transparent protective layer for protecting the semiconductor image sensor chip 3, and 7 is The light receiving element provided on the semiconductor image sensor chip 3 is provided on the translucent substrate at a location where the scanning circuit, the light receiving element 7 and the scanning circuit 8 provided on the semiconductor image sensor chip 3 are in contact. The transparent conductor layers 10 are transparent insulating layers on the back surface of the transparent substrate 1, which are in contact with the original 11. 11 is a manuscript to be read, 1
Reference numeral 2 is a light source (LED array) for illuminating the original document 11.
Is Laura.

【0009】次に以上のように構成した完全密着型イメ
ージセンサユニットの詳部についてさらに詳細に説明す
る。
Next, the details of the perfect contact type image sensor unit constructed as described above will be described in more detail.

【0010】厚み25μm〜200μmのポリアリレー
ト(PA)、ポリエーテルサルフォン(PES)または
ポリエチレンテレフタレート(PET)等の透光性基板
1の表面上に、金や銅等の金属を、蒸着法やスパッタリ
ング法、または箔等を用いて厚さ3μm〜20μm形成
しておき、後にフォトリソ法によって回路導体層2を形
成し、受光素子7及び走査回路8が当接される場所上に
厚み3μm〜20μmの透明導電体膜9を形成する。こ
の透光性基板1の所定の位置に、アクリレート系の透明
光硬化型絶縁樹脂5をスタンピング法やスクリーン印刷
法等で所定量塗布し、その上に半導体イメージセンサチ
ップ3を電極4が所定の回路導体層2に当接するように
フェイスダウンで配置する。その後、この半導体イメー
ジセンサチップ3の上方から所定の圧力を加えながら、
透明光硬化型絶縁樹脂5に透光性基板1を通して紫外線
照射をし、硬化させ、実装を完了させる。さらにその上
から透明シリコーン等の樹脂をディスペンサー等で塗布
し、透明保護層6を形成する。
A metal such as gold or copper is vapor-deposited on the surface of the transparent substrate 1 such as polyarylate (PA), polyether sulfone (PES) or polyethylene terephthalate (PET) having a thickness of 25 μm to 200 μm. A thickness of 3 μm to 20 μm is formed in advance by using a sputtering method or a foil, and a circuit conductor layer 2 is formed later by a photolithography method, and a thickness of 3 μm to 20 μm is formed on a place where the light receiving element 7 and the scanning circuit 8 are in contact. The transparent conductor film 9 is formed. An acrylate-based transparent photo-curable insulating resin 5 is applied to a predetermined position of the light-transmissive substrate 1 by a predetermined amount by a stamping method, a screen printing method or the like, and a semiconductor image sensor chip 3 and an electrode 4 having a predetermined electrode 4 are applied thereon. It is arranged face down so as to contact the circuit conductor layer 2. After that, while applying a predetermined pressure from above the semiconductor image sensor chip 3,
The transparent photocurable insulating resin 5 is irradiated with ultraviolet rays through the translucent substrate 1 to be cured and the mounting is completed. Further, a resin such as transparent silicone is applied from above with a dispenser or the like to form the transparent protective layer 6.

【0011】上記完全密着型イメージセンサユニット
は、上記の完全密着型イメージセンサの透光性基板1の
裏面にある透明絶縁層10を原稿密着面とし、上方から
LEDアレイにより透明保護層6、透明光硬化型絶縁樹
脂5、透明導電体層9、透光性基板1及び透明絶縁層1
0を透して原稿を照射し、原稿からの光情報を透明絶縁
層10、透光性基板1、透明導電体層9及び透明光硬化
型絶縁樹脂5を透して受光素子7へ直接導き、原稿の情
報を読み取るものである。
In the perfect contact type image sensor unit, the transparent insulating layer 10 on the rear surface of the transparent substrate 1 of the perfect contact type image sensor is used as the original contact surface, and the transparent protective layer 6 and the transparent protective layer 6 are transparent by the LED array from above. Photocurable insulating resin 5, transparent conductor layer 9, translucent substrate 1 and transparent insulating layer 1
The original is illuminated through 0, and the optical information from the original is directly guided to the light receiving element 7 through the transparent insulating layer 10, the transparent substrate 1, the transparent conductor layer 9 and the transparent photocurable insulating resin 5. , To read the information on the document.

【0012】透明光硬化型絶縁樹脂5としては、ウレタ
ンアクリレート系、あるいはエポキシアクリレート系の
紫外線硬化性樹脂が接着性、光感度の点から好適であ
る。
As the transparent photo-curable insulating resin 5, urethane acrylate-based or epoxy acrylate-based UV-curable resin is preferable from the viewpoint of adhesiveness and photosensitivity.

【0013】透光性基板1として厚み20μm〜200
μm程度の薄いポリアリレートフィルムを使用し、透明
導電体層9として厚み10μm〜100μm程度の耐静
電気性及び耐摩耗性を有するようにパラジウム、酸化イ
ンジウム及びスズ等の導電微粒子を混入したウレタンア
リレート系等の透明導電シートを使用し、透光性基板と
透明導電体層との合わせての厚みは25μm〜200μ
mとすると、原稿からの光情報をレンズ系なしに光のク
ロストークなく高分解能で読み取ることができる(MT
F値50%(4lp/mm))と同時に、イメージセン
サユニット自身のサイズを飛躍的に小さくすることがで
きた。
The transparent substrate 1 has a thickness of 20 μm to 200 μm.
A urethane arylate-based material in which conductive fine particles such as palladium, indium oxide and tin are mixed so that the transparent conductor layer 9 has a thickness of about 10 μm to 100 μm and has electrostatic resistance and abrasion resistance using a thin polyarylate film of about μm. And the like, and the total thickness of the transparent substrate and the transparent conductor layer is 25 μm to 200 μm.
When m is set, optical information from the original can be read at high resolution without a crosstalk of the light without a lens system (MT
At the same time as the F value of 50% (4 lp / mm), the size of the image sensor unit itself could be dramatically reduced.

【0014】また、受光素子7及び走査回路8が当接さ
れる場所で透光性基板上に透明導電体層9を設け、これ
をアースすることにより、原稿が擦れることによって生
じる静電気を消滅させれことができ、ノイズを低減でき
るようになった。さらに、従来のレンズ系を使うより光
の転送効率が2〜3倍程度になり、光源(LEDアレ
イ)のコスト低減にも寄与した。
Further, a transparent conductor layer 9 is provided on the translucent substrate at a position where the light receiving element 7 and the scanning circuit 8 are brought into contact with each other, and the transparent conductor layer 9 is grounded to eliminate static electricity generated by rubbing the original. It is possible to reduce noise. Further, the light transfer efficiency is about 2-3 times higher than that of the conventional lens system, which contributes to the cost reduction of the light source (LED array).

【0015】10の透明絶縁層の構成としてはナイロン
型樹脂、架橋ナイロン系樹脂、ウレタン樹脂、架橋ウレ
タン樹脂、ウレタン共重合系樹脂等の透明樹脂をスプレ
ー、印刷、塗装により薄い膜を形成して得る。また上記
の各樹脂の多重層でもよい。
The transparent insulating layer 10 is formed by spraying, printing or painting a transparent resin such as nylon resin, crosslinked nylon resin, urethane resin, crosslinked urethane resin or urethane copolymer resin to form a thin film. obtain. Further, a multi-layer of each of the above resins may be used.

【0016】図2は第二の発明の実施例における完全密
着型イメージセンサユニットの正断面図である。
FIG. 2 is a front sectional view of a perfect contact type image sensor unit in the embodiment of the second invention.

【0017】第一の発明の実施例において透光性基板1
の裏面と原稿11との間に透明絶縁層を設けていたが、
第二の発明の実施例では、透光性基板1の裏面と原稿1
1との間に透明導電体層を設けたものである。
In the embodiment of the first invention, the transparent substrate 1
A transparent insulating layer was provided between the back of the document and the manuscript 11.
In the embodiment of the second invention, the back surface of the transparent substrate 1 and the original 1
1 and a transparent conductor layer is provided between

【0018】[0018]

【発明の効果】以上のように本発明の完全密着型イメー
ジセンサユニットは、原稿面と透光性基板との間に透明
導電体層または透明絶縁層を設けることにより耐摩耗性
をもたせ、さらに受光素子及び走査回路が当接される場
所で透光性基板上に透明導電体層を設けることにより、
耐静電気性を向上させ、画像読み取りの解像度、分解
能、光の転送効率を高水準で維持でき、非常にシンプ
ル、コンパクト、かつ低コストで原稿を読み取ることが
できる。
As described above, the perfect contact type image sensor unit of the present invention has abrasion resistance by providing the transparent conductor layer or the transparent insulating layer between the document surface and the transparent substrate. By providing the transparent conductor layer on the transparent substrate at the position where the light receiving element and the scanning circuit are in contact,
The electrostatic resistance is improved, the resolution of image reading, the resolution, and the light transfer efficiency can be maintained at a high level, and the original can be read very simply, compactly, and at low cost.

【図面の簡単な説明】[Brief description of drawings]

【図1】第一の発明の実施例における完全密着型イメー
ジセンサユニットの正面断面図である。
FIG. 1 is a front sectional view of a perfect contact type image sensor unit in an embodiment of the first invention.

【図2】第二の発明の実施例における完全密着型イメー
ジセンサユニットの正面断面図である。
FIG. 2 is a front sectional view of a perfect contact type image sensor unit according to an embodiment of the second invention.

【図3】従来の完全密着型イメージセンサユニットの正
面断面図の概略図である。
FIG. 3 is a schematic front sectional view of a conventional full contact image sensor unit.

【符号の説明】[Explanation of symbols]

1 透光性基板 2 回路導体層 3 半導体イメージセンサチップ 4 電極 5 透明光硬化型絶縁樹脂 6 透明保護層 7 受光素子 8 走査回路 9 透明導電体層 10 透明絶縁層 11 原稿 12 光源(LEDアレイ) 13 ローラ 21 透光性基板 22 回路導体層 23 半導体イメージセンサチップ 24 電極 25 透明光硬化型絶縁樹脂 26 透明保護層 27 受光素子 28 走査回路 29 透明導電体層 30 透明導電体層 31 原稿 32 光源(LEDアレイ) 33 ローラ 41 透光性基板 42 回路導体層 43 半導体イメージセンサチップ 44 電極 45 透明光硬化型絶縁樹脂 46 透明保護層 47 受光素子 48 走査回路 49 原稿 50 光源(LEDアレイ) 51 ローラ 1 Translucent Substrate 2 Circuit Conductor Layer 3 Semiconductor Image Sensor Chip 4 Electrode 5 Transparent Light Curing Insulating Resin 6 Transparent Protective Layer 7 Light-Receiving Element 8 Scanning Circuit 9 Transparent Conductor Layer 10 Transparent Insulating Layer 11 Original 12 Light Source (LED Array) 13 roller 21 translucent substrate 22 circuit conductor layer 23 semiconductor image sensor chip 24 electrode 25 transparent photocurable insulating resin 26 transparent protective layer 27 light receiving element 28 scanning circuit 29 transparent conductor layer 30 transparent conductor layer 31 original document 32 light source ( LED array) 33 roller 41 translucent substrate 42 circuit conductor layer 43 semiconductor image sensor chip 44 electrode 45 transparent photocurable insulating resin 46 transparent protective layer 47 light receiving element 48 scanning circuit 49 original 50 light source (LED array) 51 roller

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】表面上に回路導体層を形成した透光性基板
と、この透光性基板の表面上に、透明光硬化型絶縁樹脂
を介して実装した受光素子及び走査回路を有する半導体
素子とを備え、上記半導体素子はフェイスダウンで、そ
の半導体素子上に形成された取り出し電極が上記回路導
体層に当接する構造をしたもので、上記受光素子及び上
記走査回路が当接される場所で透光性基板上に透明導電
体層を設け、また上記透光性基板の裏面には透明絶縁層
を設けた完全密着型イメージセンサ。
1. A semiconductor device having a transparent substrate having a circuit conductor layer formed on the surface thereof, and a light receiving element and a scanning circuit mounted on the surface of the transparent substrate via a transparent photocurable insulating resin. And a structure in which the semiconductor element is face-down, and the extraction electrode formed on the semiconductor element is in contact with the circuit conductor layer. A perfect contact type image sensor in which a transparent conductor layer is provided on a transparent substrate, and a transparent insulating layer is provided on the back surface of the transparent substrate.
【請求項2】表面上に回路導体層を形成した透光性基板
と、この透光性基板の表面上に、透明光硬化型絶縁樹脂
を介して実装した受光素子及び走査回路を有する半導体
素子とを備え、上記半導体素子はフェイスダウンで、そ
の半導体素子上に形成された取り出し電極が上記回路導
体層に当接する構造をしたもので、上記受光素子及び上
記走査回路が当接される場所で透光性基板上に透明導電
体層を設け、また上記透光性基板の裏面には透明導電体
層を設けた完全密着型イメージセンサ。
2. A semiconductor element having a light-transmissive substrate having a circuit conductor layer formed on the surface thereof, and a light-receiving element and a scanning circuit mounted on the surface of the light-transmissive substrate via a transparent photocurable insulating resin. And a structure in which the semiconductor element is face-down, and the extraction electrode formed on the semiconductor element is in contact with the circuit conductor layer. A perfect contact image sensor in which a transparent conductor layer is provided on a transparent substrate, and a transparent conductor layer is provided on the back surface of the transparent substrate.
【請求項3】請求項1記載の完全密着型イメージセンサ
において、透光性基板の半導体素子を実装した側に上記
半導体素子に近接から原稿表面に向けて照明する原稿を
取り付け、上記透光性基板の他方表面を原稿密着面とし
た完全密着イメージセンサユニット。
3. The complete contact type image sensor according to claim 1, wherein an original which illuminates a surface of the original from near the semiconductor is mounted on the side of the transparent substrate on which the semiconductor is mounted. A complete contact image sensor unit with the other surface of the substrate as the original contact surface.
JP3205049A 1991-08-15 1991-08-15 Complete contact type image sensor and unit Pending JPH0548826A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3205049A JPH0548826A (en) 1991-08-15 1991-08-15 Complete contact type image sensor and unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3205049A JPH0548826A (en) 1991-08-15 1991-08-15 Complete contact type image sensor and unit

Publications (1)

Publication Number Publication Date
JPH0548826A true JPH0548826A (en) 1993-02-26

Family

ID=16500605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3205049A Pending JPH0548826A (en) 1991-08-15 1991-08-15 Complete contact type image sensor and unit

Country Status (1)

Country Link
JP (1) JPH0548826A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0291351A (en) * 1988-09-29 1990-03-30 Naka Tech Lab Fixing device for floor panel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0291351A (en) * 1988-09-29 1990-03-30 Naka Tech Lab Fixing device for floor panel

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