JPH0547962Y2 - - Google Patents

Info

Publication number
JPH0547962Y2
JPH0547962Y2 JP19478187U JP19478187U JPH0547962Y2 JP H0547962 Y2 JPH0547962 Y2 JP H0547962Y2 JP 19478187 U JP19478187 U JP 19478187U JP 19478187 U JP19478187 U JP 19478187U JP H0547962 Y2 JPH0547962 Y2 JP H0547962Y2
Authority
JP
Japan
Prior art keywords
tank
refrigerant gas
pipe
cooling
lower tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19478187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01101087U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19478187U priority Critical patent/JPH0547962Y2/ja
Publication of JPH01101087U publication Critical patent/JPH01101087U/ja
Application granted granted Critical
Publication of JPH0547962Y2 publication Critical patent/JPH0547962Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP19478187U 1987-12-24 1987-12-24 Expired - Lifetime JPH0547962Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19478187U JPH0547962Y2 (en, 2012) 1987-12-24 1987-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19478187U JPH0547962Y2 (en, 2012) 1987-12-24 1987-12-24

Publications (2)

Publication Number Publication Date
JPH01101087U JPH01101087U (en, 2012) 1989-07-06
JPH0547962Y2 true JPH0547962Y2 (en, 2012) 1993-12-17

Family

ID=31485490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19478187U Expired - Lifetime JPH0547962Y2 (en, 2012) 1987-12-24 1987-12-24

Country Status (1)

Country Link
JP (1) JPH0547962Y2 (en, 2012)

Also Published As

Publication number Publication date
JPH01101087U (en, 2012) 1989-07-06

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