JPH0547627B2 - - Google Patents
Info
- Publication number
- JPH0547627B2 JPH0547627B2 JP7345785A JP7345785A JPH0547627B2 JP H0547627 B2 JPH0547627 B2 JP H0547627B2 JP 7345785 A JP7345785 A JP 7345785A JP 7345785 A JP7345785 A JP 7345785A JP H0547627 B2 JPH0547627 B2 JP H0547627B2
- Authority
- JP
- Japan
- Prior art keywords
- bath
- evaporation
- coating material
- vapor pressure
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001704 evaporation Methods 0.000 claims description 65
- 238000000576 coating method Methods 0.000 claims description 58
- 239000011248 coating agent Substances 0.000 claims description 57
- 230000008020 evaporation Effects 0.000 claims description 52
- 239000000463 material Substances 0.000 claims description 51
- 239000000126 substance Substances 0.000 claims description 48
- 230000005484 gravity Effects 0.000 claims description 27
- 239000000654 additive Substances 0.000 claims description 19
- 230000000996 additive effect Effects 0.000 claims description 17
- 230000001747 exhibiting effect Effects 0.000 claims description 8
- 238000009835 boiling Methods 0.000 description 14
- 230000008018 melting Effects 0.000 description 10
- 238000002844 melting Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 229910052738 indium Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 229910052745 lead Inorganic materials 0.000 description 4
- 229910052797 bismuth Inorganic materials 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000004927 fusion Effects 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 229910052776 Thorium Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000005496 eutectics Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052762 osmium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7345785A JPS61235556A (ja) | 1985-04-09 | 1985-04-09 | 蒸発方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7345785A JPS61235556A (ja) | 1985-04-09 | 1985-04-09 | 蒸発方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61235556A JPS61235556A (ja) | 1986-10-20 |
| JPH0547627B2 true JPH0547627B2 (enrdf_load_html_response) | 1993-07-19 |
Family
ID=13518791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7345785A Granted JPS61235556A (ja) | 1985-04-09 | 1985-04-09 | 蒸発方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61235556A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102174869B1 (ko) * | 2016-05-18 | 2020-11-05 | 울박, 인크 | 금속 증발 재료 |
| WO2024209755A1 (ja) * | 2023-04-05 | 2024-10-10 | 株式会社アルバック | 真空蒸着装置用の蒸着源及び真空蒸着方法 |
-
1985
- 1985-04-09 JP JP7345785A patent/JPS61235556A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61235556A (ja) | 1986-10-20 |
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