JPH0547483Y2 - - Google Patents

Info

Publication number

JPH0547483Y2

JPH0547483Y2 JP2332887U JP2332887U JPH0547483Y2 JP H0547483 Y2 JPH0547483 Y2 JP H0547483Y2 JP 2332887 U JP2332887 U JP 2332887U JP 2332887 U JP2332887 U JP 2332887U JP H0547483 Y2 JPH0547483 Y2 JP H0547483Y2

Authority

JP

Japan

Prior art keywords

gas

laser

pressure

laser oscillation

pressure reduction

Prior art date

1987-02-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

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• 230000010355 oscillation Effects 0.000 claims description 34
• 239000012535 impurity Substances 0.000 claims description 16
• 230000001105 regulatory effect Effects 0.000 claims description 12
• 230000008929 regeneration Effects 0.000 claims description 11
• 238000011069 regeneration method Methods 0.000 claims description 11
• 238000010992 reflux Methods 0.000 claims description 4
• 239000007789 gas Substances 0.000 description 134
• 229910052736 halogen Inorganic materials 0.000 description 18
• 150000002367 halogens Chemical class 0.000 description 18
• 230000007423 decrease Effects 0.000 description 10
• VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
• KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 4
• 230000000694 effects Effects 0.000 description 3
• MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 2
• CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
• ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
• YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
• 230000002411 adverse Effects 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 229910052731 fluorine Inorganic materials 0.000 description 2
• 239000011737 fluorine Substances 0.000 description 2
• JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 2
• 230000002265 prevention Effects 0.000 description 2
• 229910052724 xenon Inorganic materials 0.000 description 2
• FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
• KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
• 239000001569 carbon dioxide Substances 0.000 description 1
• 229910002092 carbon dioxide Inorganic materials 0.000 description 1
• 238000006243 chemical reaction Methods 0.000 description 1
• 229910052801 chlorine Inorganic materials 0.000 description 1
• 239000000460 chlorine Substances 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 230000005284 excitation Effects 0.000 description 1
• 230000005281 excited state Effects 0.000 description 1
• 230000005283 ground state Effects 0.000 description 1
• 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
• 230000001172 regenerating effect Effects 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1