JPH0547230B2 - - Google Patents

Info

Publication number
JPH0547230B2
JPH0547230B2 JP59168428A JP16842884A JPH0547230B2 JP H0547230 B2 JPH0547230 B2 JP H0547230B2 JP 59168428 A JP59168428 A JP 59168428A JP 16842884 A JP16842884 A JP 16842884A JP H0547230 B2 JPH0547230 B2 JP H0547230B2
Authority
JP
Japan
Prior art keywords
titanium
nitrogen
nitride film
titanium nitride
ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59168428A
Other languages
Japanese (ja)
Other versions
JPS6145788A (en
Inventor
Hiroshi Shimazu
Tsunemi Ooiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyushu Hitachi Maxell Ltd
Maxell Ltd
Original Assignee
Kyushu Hitachi Maxell Ltd
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyushu Hitachi Maxell Ltd, Hitachi Maxell Ltd filed Critical Kyushu Hitachi Maxell Ltd
Priority to JP16842884A priority Critical patent/JPS6145788A/en
Publication of JPS6145788A publication Critical patent/JPS6145788A/en
Publication of JPH0547230B2 publication Critical patent/JPH0547230B2/ja
Granted legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は回転式あるいは振動式などの電気か
みそりの改良に係り、特に耐摩耗性に優れた外刃
を提供することを目的とする。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to the improvement of rotating or vibrating electric shavers, and particularly aims to provide outer cutters with excellent wear resistance.

〔発明の背景〕[Background of the invention]

従来の電気かみそりに用いられている外刃は、
ニツケル電鋳やステンレス薄鋼板などで作られて
いるため、長期間使用していると汗などで変色し
て製品価値が低下する。特に外刃と内刃の摺動摩
擦により両者の金属間に固溶層が形成されたり、
摩耗により摺動面の面積が増加し、その結果摩抵
抗が大きく摺動負荷が大となり、消費電力が増大
してくるなどの欠点を有している。
The outer blades used in conventional electric razors are
Since it is made from nickel electroforming and thin stainless steel sheets, if used for a long time, it will discolor due to sweat and other factors, reducing the product's value. In particular, due to sliding friction between the outer cutter and inner cutter, a solid solution layer is formed between the two metals,
The area of the sliding surface increases due to wear, resulting in a large frictional resistance, a large sliding load, and an increase in power consumption.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、このような従来技術の欠点を
解消し、耐久性に優れ、しかも摺動抵抗の小さい
電気かみそりを提供するにある。
SUMMARY OF THE INVENTION An object of the present invention is to eliminate the drawbacks of the prior art and to provide an electric shaver that has excellent durability and low sliding resistance.

〔発明の概要〕 この目的を達成するため、本発明は、少なくと
も外刃と内刃との摺動面にあたる部分に窒化チタ
ン膜を形成し、その窒化チタン膜組織モル分率を
窒素対チタンが0.4:1〜0.8:1の範囲とするこ
とにより達成したものである。
[Summary of the Invention] In order to achieve this object, the present invention forms a titanium nitride film on at least the sliding surface of the outer cutter and the inner cutter, and sets the titanium nitride film structure molar fraction to nitrogen to titanium. This was achieved by setting the ratio to be in the range of 0.4:1 to 0.8:1.

窒化チタン膜の作成法としては、高周波スパツ
タ法、マグネトロンスパツタ法、イオンプレーテ
イングCVD法、プラズマCVD法などの方法を採
ることができ、スパツタ法ではアルゴンガスと窒
素ガスの比率と高周波電力を制御することによつ
て所望の窒素含率を得ることができる。一方イオ
ンプレーテイング法ではチタン析出速度と窒素も
しくはアンモニアとの比を制御することによつて
窒素含率を制御する。
The titanium nitride film can be created by high-frequency sputtering, magnetron sputtering, ion plating CVD, plasma CVD, etc. In sputtering, the ratio of argon gas to nitrogen gas and the high-frequency power are By controlling it, a desired nitrogen content can be obtained. On the other hand, in the ion plating method, the nitrogen content is controlled by controlling the titanium precipitation rate and the ratio of nitrogen or ammonia.

特にスパツタ法を用いる場合、アルゴンおよび
窒素ガスの全ガス圧は0.003〜0.3Torrが望まし
く、0.003Torr以下では放電せず、0.3Torr以上
では放電が不安定となる。また高周波電力は1〜
5W/cm2が望ましく、1W/cm2以下では析出速度が
遅すぎて効率が悪く、5W/cm2以上では析出速度
が飽和状態にあり全んど増加せず、ターゲツト温
度や基板温度が上昇するだけで、外刃母材に機械
的強度を低下させる等の悪影響を及ぼす。
Particularly when using the sputter method, the total gas pressure of argon and nitrogen gas is preferably 0.003 to 0.3 Torr; below 0.003 Torr, no discharge occurs, and above 0.3 Torr, the discharge becomes unstable. Also, the high frequency power is 1~
5W/cm 2 is desirable; below 1W/cm 2 the deposition rate is too slow and the efficiency is poor; above 5W/cm 2 the deposition rate is saturated and does not increase at all, causing an increase in target temperature and substrate temperature. Just doing so will have an adverse effect on the outer blade base material, such as lowering its mechanical strength.

このような窒化チタン膜の膜厚は耐蝕性の点か
ら100〜300000Åの範囲が好適であり、100Å以下
では膜としての効果に乏しく、300000Å以上にす
ると、外刃の変形が生じるため望ましくない。特
に300〜100000Åの範囲が望ましい。
The thickness of such a titanium nitride film is preferably in the range of 100 to 300,000 Å from the viewpoint of corrosion resistance; if it is less than 100 Å, the film will not be effective, and if it is more than 300,000 Å, the outer cutter will deform, which is not desirable. In particular, a range of 300 to 100,000 Å is desirable.

〔発明の実施例〕[Embodiments of the invention]

以下本発明の実施例について説明する。 Examples of the present invention will be described below.

実施例 1 この第1図は実施例1に用いる高周波スパツタ
リング装置の概略構成図で、図中の1はアルゴン
ガス、2は窒素ガス、3はヒーター、4は基板、
5はチタンターゲツト、6は高周波電源、7は排
気である。
Example 1 This FIG. 1 is a schematic diagram of the high frequency sputtering apparatus used in Example 1, in which 1 is argon gas, 2 is nitrogen gas, 3 is a heater, 4 is a substrate,
5 is a titanium target, 6 is a high frequency power source, and 7 is an exhaust gas.

ニツケル電鋳刃からなる外刃8を所定数基板4
に保持し、ターゲツト5にチタンを用い、処理容
器9内に排気7によつて減圧状態としたのち、外
刃8をヒータ3により約100℃に加熱し、高周波
電源6を出力を3W/cm2一定となるようにしてア
ルゴンガス1と窒素ガス2のガス圧比を種々変え
てスパツタリングを行い、0.5μの厚さの窒化チタ
ン膜を作り、この膜のチタンと窒素との組成比を
変化させた外刃を形成した。
A predetermined number of outer blades 8 made of nickel electroformed blades are attached to the substrate 4.
After using titanium as the target 5 and reducing the pressure in the processing container 9 by the exhaust 7, the outer blade 8 is heated to approximately 100°C by the heater 3, and the high frequency power source 6 is set to an output of 3W/cm. 2 Sputtering was performed by varying the gas pressure ratio of argon gas 1 and nitrogen gas 2 while keeping it constant to create a titanium nitride film with a thickness of 0.5μ, and the composition ratio of titanium and nitrogen in this film was varied. An outer edge was formed.

実施例 2 第2図は実施例2に用いる高周波イオンプレー
テイング装置の概略構成図で、第1図の符号と同
じものは同一物を示し、10は高周波電源、11
は直流電源、12は高周波コイル、13はチタ
ン、14は電子銃、15は処理容器を示す。
Example 2 FIG. 2 is a schematic diagram of a high-frequency ion plating apparatus used in Example 2, in which the same symbols as those in FIG. 1 indicate the same parts, 10 is a high-frequency power source, 11
12 is a DC power supply, 12 is a high-frequency coil, 13 is titanium, 14 is an electron gun, and 15 is a processing container.

実施例1と同様に、ニツケル電鋳外刃8を基板
4に保持させ、電子銃14を出力を3KWとして
チタンを蒸発させ、アルゴンガス1の圧力を1×
10-4Torr、窒素ガス2の圧力6×10-5Torr、高
周波電力200W、印加電圧500Vの条件で、0.5μ厚
の窒化チタン膜を形成した。
As in Example 1, the nickel electroformed outer blade 8 is held on the substrate 4, the output of the electron gun 14 is set to 3KW to evaporate titanium, and the pressure of the argon gas 1 is set to 1×.
A titanium nitride film with a thickness of 0.5 μm was formed under the following conditions: 10 −4 Torr, nitrogen gas 2 pressure of 6×10 −5 Torr, high frequency power of 200 W, and applied voltage of 500 V.

この時作製した膜の窒素対チタンのモル分率は
0.7:1であつた。
The mole fraction of nitrogen to titanium in the film prepared at this time was
The ratio was 0.7:1.

比較例 1 実施例2で窒素ガス圧を1×104Torrとした以
外は同一条件で窒化チタンを作成した。この時の
窒化膜の窒素対チタンのモル分率は1であつた。
Comparative Example 1 Titanium nitride was produced under the same conditions as in Example 2 except that the nitrogen gas pressure was changed to 1×10 4 Torr. At this time, the molar ratio of nitrogen to titanium in the nitride film was 1.

〔発明の効果〕 上記作製した外刃を用いて電気かみそりを組み
立て駆動電流を測定し、更に50時間使用した後の
駆動電流の測定結果と比較した。
[Effects of the Invention] An electric shaver was assembled using the outer cutter produced above, the drive current was measured, and the results were compared with the measurement results of the drive current after further use for 50 hours.

実施例1で作製したチタンと窒素との比率を変
えたものについて測定した結果を第3図に示す。
FIG. 3 shows the measurement results for the samples prepared in Example 1 with different ratios of titanium and nitrogen.

第3図は横軸にモル分率を示し、縦軸を駆動電
流を示している。この図からわかるように、初期
は窒素含率を増加するに従つて駆動電流が減少す
るものの、50時間使用後にあつては、モル分率が
0.4〜0.8の間が初期のものと比し変化少なく良好
で、窒素含率が0.3%以下でも0.9以下でも駆動電
流が大きい。
In FIG. 3, the horizontal axis shows the mole fraction, and the vertical axis shows the driving current. As can be seen from this figure, although the driving current initially decreases as the nitrogen content increases, after 50 hours of use, the mole fraction decreases.
A value between 0.4 and 0.8 is good with little change compared to the initial value, and the drive current is large even when the nitrogen content is 0.3% or less or 0.9 or less.

また実施例2で作製した外刃を用いて電気かみ
そりを組み立て同様に駆動電流を測定した結果、
初期は420mA、50時間使用後は430mAであつ
た。
In addition, as a result of assembling an electric razor using the outer blade produced in Example 2 and measuring the driving current in the same manner,
Initially it was 420mA, and after 50 hours of use it was 430mA.

次に比較例1も同様に測定した結果、初期は
410mAと小さかつたが50時間使用後は500mAと
増加傾向を示した。
Next, Comparative Example 1 was also measured in the same way, and the initial
It was small at 410mA, but after 50 hours of use, it showed an increasing trend to 500mA.

なお上記実施例、比較例はいずれも回転式ドー
ム状外刃を用いたが、往復動式網状外刃において
同様であることは言うまでもない。
Incidentally, in both the above embodiments and comparative examples, a rotary dome-shaped outer cutter was used, but it goes without saying that the same applies to a reciprocating reticulated outer cutter.

また摺動面だけでなく、皮膚と接触する側にも
窒化チタン膜を形成すると、ニツケル表面を保護
し退色、変色などがなくなるという効果がある。
Furthermore, forming a titanium nitride film not only on the sliding surface but also on the side that comes into contact with the skin has the effect of protecting the nickel surface and eliminating fading and discoloration.

更に外刃母材としてニツケル電鋳刃を用いた
が、ニツケル−コバルト合金電鋳やステンレス薄
鋼板などを用いても同様の効果が得られるもので
ある。
Furthermore, although a nickel electroformed blade is used as the outer blade base material, the same effect can be obtained by using a nickel-cobalt alloy electroforming or a stainless thin steel plate.

以上のように、窒素対チタンのモル分率を
0.4:1〜0.8:1の範囲にし、外刃の少なくとも
摺動面に窒化チタン膜を形成することによつて、
長時間使用しても駆動電流の増加を抑制して負荷
電流を押え、寿命の長い外刃が得られる。
As mentioned above, the mole fraction of nitrogen to titanium is
By setting the ratio between 0.4:1 and 0.8:1 and forming a titanium nitride film on at least the sliding surface of the outer cutter,
Even if used for a long time, the increase in drive current is suppressed and the load current is suppressed, resulting in an outer blade with a long life.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明を実施するためのスパツタリン
グ装置の一例の概略説明図、第2図は同イオンプ
レーテイング装置の一例の概略説明図、第3図は
作製した窒化チタン膜の窒素対チタンの比に対し
駆動電流の値を測定した結果を示す特性図であ
る。
FIG. 1 is a schematic explanatory diagram of an example of a sputtering apparatus for carrying out the present invention, FIG. 2 is a schematic explanatory diagram of an example of the same ion plating apparatus, and FIG. 3 is a schematic explanatory diagram of an example of the same ion plating apparatus. FIG. 3 is a characteristic diagram showing the results of measuring the value of drive current with respect to the ratio.

Claims (1)

【特許請求の範囲】[Claims] 1 少なくとも内刃との摺動面に、窒素対チタン
のモル分率が0.4:1〜0.8:1の窒化チタン膜を
形成した外刃を用いてなる電気かみそり。
1. An electric shaver using an outer cutter on which a titanium nitride film with a nitrogen to titanium molar ratio of 0.4:1 to 0.8:1 is formed on at least the sliding surface with the inner cutter.
JP16842884A 1984-08-10 1984-08-10 Electric razor Granted JPS6145788A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16842884A JPS6145788A (en) 1984-08-10 1984-08-10 Electric razor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16842884A JPS6145788A (en) 1984-08-10 1984-08-10 Electric razor

Publications (2)

Publication Number Publication Date
JPS6145788A JPS6145788A (en) 1986-03-05
JPH0547230B2 true JPH0547230B2 (en) 1993-07-16

Family

ID=15867935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16842884A Granted JPS6145788A (en) 1984-08-10 1984-08-10 Electric razor

Country Status (1)

Country Link
JP (1) JPS6145788A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07157869A (en) * 1993-12-08 1995-06-20 Aomori Pref Gov Coating method of titanium nitride film by ion plating method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5292655A (en) * 1975-09-30 1977-08-04 Seiko Epson Corp Method of fabricating electric razor blade

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5292655A (en) * 1975-09-30 1977-08-04 Seiko Epson Corp Method of fabricating electric razor blade

Also Published As

Publication number Publication date
JPS6145788A (en) 1986-03-05

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