JPH0545015Y2 - - Google Patents

Info

Publication number
JPH0545015Y2
JPH0545015Y2 JP1984020172U JP2017284U JPH0545015Y2 JP H0545015 Y2 JPH0545015 Y2 JP H0545015Y2 JP 1984020172 U JP1984020172 U JP 1984020172U JP 2017284 U JP2017284 U JP 2017284U JP H0545015 Y2 JPH0545015 Y2 JP H0545015Y2
Authority
JP
Japan
Prior art keywords
wafer
platen
ion implantation
semiconductor wafer
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984020172U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60133628U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2017284U priority Critical patent/JPS60133628U/ja
Publication of JPS60133628U publication Critical patent/JPS60133628U/ja
Application granted granted Critical
Publication of JPH0545015Y2 publication Critical patent/JPH0545015Y2/ja
Granted legal-status Critical Current

Links

JP2017284U 1984-02-14 1984-02-14 イオン注入装置 Granted JPS60133628U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017284U JPS60133628U (ja) 1984-02-14 1984-02-14 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017284U JPS60133628U (ja) 1984-02-14 1984-02-14 イオン注入装置

Publications (2)

Publication Number Publication Date
JPS60133628U JPS60133628U (ja) 1985-09-06
JPH0545015Y2 true JPH0545015Y2 (enrdf_load_stackoverflow) 1993-11-16

Family

ID=30510411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017284U Granted JPS60133628U (ja) 1984-02-14 1984-02-14 イオン注入装置

Country Status (1)

Country Link
JP (1) JPS60133628U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567428A (en) * 1979-07-02 1981-01-26 Nec Kyushu Ltd Holding mechanism for silicon substrate

Also Published As

Publication number Publication date
JPS60133628U (ja) 1985-09-06

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