JPS60133628U - イオン注入装置 - Google Patents

イオン注入装置

Info

Publication number
JPS60133628U
JPS60133628U JP2017284U JP2017284U JPS60133628U JP S60133628 U JPS60133628 U JP S60133628U JP 2017284 U JP2017284 U JP 2017284U JP 2017284 U JP2017284 U JP 2017284U JP S60133628 U JPS60133628 U JP S60133628U
Authority
JP
Japan
Prior art keywords
platen
semiconductor wafer
downward
ion implantation
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545015Y2 (enrdf_load_stackoverflow
Inventor
俊雄 田中
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP2017284U priority Critical patent/JPS60133628U/ja
Publication of JPS60133628U publication Critical patent/JPS60133628U/ja
Application granted granted Critical
Publication of JPH0545015Y2 publication Critical patent/JPH0545015Y2/ja
Granted legal-status Critical Current

Links

JP2017284U 1984-02-14 1984-02-14 イオン注入装置 Granted JPS60133628U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017284U JPS60133628U (ja) 1984-02-14 1984-02-14 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017284U JPS60133628U (ja) 1984-02-14 1984-02-14 イオン注入装置

Publications (2)

Publication Number Publication Date
JPS60133628U true JPS60133628U (ja) 1985-09-06
JPH0545015Y2 JPH0545015Y2 (enrdf_load_stackoverflow) 1993-11-16

Family

ID=30510411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017284U Granted JPS60133628U (ja) 1984-02-14 1984-02-14 イオン注入装置

Country Status (1)

Country Link
JP (1) JPS60133628U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567428A (en) * 1979-07-02 1981-01-26 Nec Kyushu Ltd Holding mechanism for silicon substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567428A (en) * 1979-07-02 1981-01-26 Nec Kyushu Ltd Holding mechanism for silicon substrate

Also Published As

Publication number Publication date
JPH0545015Y2 (enrdf_load_stackoverflow) 1993-11-16

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