JPH0544388U - Laser processing machine - Google Patents

Abstract

(57) [Summary] (Modified) [Purpose] Regarding a device that maintains the internal pressure of the laser gas inside the laser oscillator, it is possible to reduce the deformation of the laser beam and the change in the energy distribution with a minimum of one transmission optical component that causes thermal expansion. Eliminate the deterioration of the laser gas by improving the processing condition and completely blocking the inside of the oscillator and the optical path system connected to the oscillator from the atmosphere. A condensing lens 4 for processing is closely fixed to the inner diameter of the processing head 6, and the inside of the oscillator 3, the internal space of the optical path system 2 and the inside of the lens 4 of the processing head 6 on the laser light incident light side are integrated into one. Form in a continuous space. Laser light 1 is oscillator 3
Is emitted from the laser light outlet 13 of the optical path system 2, passes through the horizontal portion of the internal space of the optical path system 2, is refracted by the mirror 12 attached to the upper corner of the right-angled bent portion, and passes through the vertical space portion of the optical path system 2 to form the processing head. The light is passed through a condenser lens 4 which is hermetically attached to the inner diameter portion of 6 and is condensed by the lens 4 to perform a required laser processing on the work 14.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a device for holding the internal pressure of laser gas inside a laser oscillator in a laser processing machine.

[0002]

[Prior art]

 The laser oscillator in the laser processing machine is filled with low-pressure laser gas. The laser oscillator is required to block the laser light outlet so that the laser light can pass therethrough in order to shut off the low-pressure laser gas inside from the atmosphere. For this reason, conventionally, a window is provided at the oscillator beam outlet as shown in FIG. 2 in order to maintain the laser internal pressure, or a narrow gap is provided at the laser light outlet of the oscillator as shown in FIG. The method of blowing the gas was used.

In the conventional example shown in FIG. 2, laser light 1 is emitted from an oscillator 3. A hollow optical path 2 is connected to the oscillator 3, and the laser beam 1 laser-processes the work through the optical path and the processing lens. Reference numeral 7 denotes a window provided in the laser light outlet side opening of the oscillator 3. The window 7 keeps the low-pressure laser gas in the oscillator 3 airtight and allows the laser light to pass therethrough.

FIG. 3 shows another conventional example, in which a narrow exit gap 8 is formed on the laser light exit side of the oscillator 3, and a blowing gas inlet 9 and a blowing gas are directed toward the gap portion 8. The outlets 10 are respectively drilled from the outer circumference. Then, a large amount of blowing gas 11 is blown from the blowing gas inlet 9 to keep the laser gas in the oscillator 3 airtight. The other mechanism is similar to that of FIG.

[0005]

[Problems to be solved by the device]

 By the way, among the above-mentioned conventional techniques, in the oscillator shown in FIG. 2 in which the window is provided at the laser light exit side opening, a part of the energy is absorbed by the window due to the long-time transmission of the laser light, and the thermal expansion phenomenon occurs. Occurs. As a result, the shape and energy distribution of the laser beam change, which adversely affects the processing state.

Further, in the case of blowing gas into the narrow exit gap portion on the laser light exit side of the oscillator shown in FIG. 3, the laser gas inside the oscillator is blown and the gas is entrained, so that a large amount of laser gas is required and There is also a problem that a large amount of soaking gas is consumed, and there is a problem that the outside atmosphere enters the inside of the oscillator.

An object of the present invention is to provide a laser processing machine equipped with a new laser gas internal pressure holding device that solves the above-mentioned problems.

[0008]

[Means for Solving the Problems]

 In order to achieve the above object, the laser beam machine of the present invention comprises an oscillator having an open laser light outlet for emitting laser light on one side and a continuous internal space completely sealed from the outside. It is characterized in that it is connected to one side of the optical path system that it has in an airtight state, and that a condenser lens is airtightly attached to the inner diameter portion of the processing head provided on the other side of the optical path system.

[0009]

[Action]

 In the laser processing machine of the present invention described above, the laser beam emitted from the laser oscillator is completely cut off from the atmosphere, and the gas pressure is kept at the same gas pressure as the inside of the oscillator. Then, the light is transmitted through a condensing lens which is hermetically mounted on the inner diameter portion of the same head, and the required laser processing is performed on the work after being condensed by the lens.

[0010]

【Example】

 Referring to the drawings, one embodiment of the present invention will be described below. A laser light outlet 13 is formed on one side of an oscillator 3 filled with a low-pressure laser gas.

Reference numeral 2 denotes an optical path system that is cut off from the atmosphere having a continuous internal space, and one side of the optical path system 2 is hermetically connected to the laser light exit side of the oscillator 3.

The other side of the optical path system 2 is bent 90 degrees from a horizontal state to form a processing head 6 facing the work 14, and a condensing lens 4 for processing is provided inside the processing head 6. I wear it in a state where airtightness is maintained.

Reference numeral 5 is a nozzle at the tip of the processing head 6, and the laser light transmitted through the condenser lens 4 from the nozzle portion is condensed in the atmosphere to perform the required laser processing on the work 14.

Reference numeral 12 denotes a mirror disposed in the upper corner of the right-angled bending portion in the middle of the optical path system 2. The laser light 1 which has passed through the horizontal space of the optical path system 2 by the mirror 12 is shown in FIG. As shown, the light is refracted by 90 degrees and passes through the vertical space of the optical path system 2 toward the processing head 6.

[0015]

[Effect of effect]

 As described above, according to the laser processing machine of the present invention, the following effects can be obtained. (1) Since the window for maintaining the airtightness is not provided in the laser light exit side opening of the oscillator 3 as in the example of the prior art, the transmission that causes thermal expansion due to the long-time transmission of the laser light. One optical component is removed, the deformation of laser light and the change of energy distribution are eliminated, and the processing condition is significantly improved. (2) Since the oscillator and the optical path system connected to the oscillator and each internal space on the laser light incident light side of the lens of the processing head are completely shielded from the atmosphere by the lens hermetically mounted inside the processing head, It is possible to prevent the deterioration of the laser gas due to the invasion of the atmosphere and to reduce the consumption of the laser gas, so that a stable output of the laser light can be obtained.

[Brief description of drawings]

FIG. 1 is a side sectional view of an essential part of an apparatus according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of essential parts in the case where a window is attached to a laser beam exit side opening of an oscillator which is an example of a conventional device.

FIG. 3 is a cross-sectional view of a main part when a laser beam outlet side opening of an oscillator which is another example of a conventional device is cut off from the outside by a blowing gas.

[Explanation of symbols]

 1 Laser Light 2 Optical Path System 3 Oscillator 4 Condensing Lens for Processing 5 Nozzle 6 Processing Head 12 Mirror 13 Laser Light Outlet 14 Workpiece

Claims (1)

[Scope of utility model registration request] 1. An oscillator having an open laser light outlet for emitting laser light on one side and an optical path system having a continuous internal space completely sealed from the outside are hermetically sealed. A laser beam machine which is connected in a state in which a condenser lens is hermetically attached to an inner diameter portion of a machining head on the other side of the optical path system.