JPH0543439Y2 - - Google Patents
Info
- Publication number
- JPH0543439Y2 JPH0543439Y2 JP1987135114U JP13511487U JPH0543439Y2 JP H0543439 Y2 JPH0543439 Y2 JP H0543439Y2 JP 1987135114 U JP1987135114 U JP 1987135114U JP 13511487 U JP13511487 U JP 13511487U JP H0543439 Y2 JPH0543439 Y2 JP H0543439Y2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- displacement
- fixed part
- movable
- thin flexible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 30
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 101150105133 RRAD gene Proteins 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135114U JPH0543439Y2 (enEXAMPLES) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135114U JPH0543439Y2 (enEXAMPLES) | 1987-09-03 | 1987-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6440089U JPS6440089U (enEXAMPLES) | 1989-03-09 |
| JPH0543439Y2 true JPH0543439Y2 (enEXAMPLES) | 1993-11-01 |
Family
ID=31394458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987135114U Expired - Lifetime JPH0543439Y2 (enEXAMPLES) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543439Y2 (enEXAMPLES) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100421024C (zh) | 2002-09-30 | 2008-09-24 | Asml荷兰有限公司 | 光刻装置及器件制造方法 |
-
1987
- 1987-09-03 JP JP1987135114U patent/JPH0543439Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6440089U (enEXAMPLES) | 1989-03-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR20020013729A (ko) | 광학 부재 지지 프레임을 포함하는 광학 부재 마운트 | |
| KR101127970B1 (ko) | 나노 스케일 제조용 컴플라이언트 장치 | |
| KR100396020B1 (ko) | 초정밀 위치결정시스템 | |
| EP0160707B1 (en) | Piezoelectric stepping rotator | |
| US6860020B2 (en) | Ultra-precision feeding apparatus | |
| JPH0373236B2 (enEXAMPLES) | ||
| JPH0543439Y2 (enEXAMPLES) | ||
| JPH0527034Y2 (enEXAMPLES) | ||
| JPH06795Y2 (ja) | 微動回転ステージ | |
| JPH0412838B2 (enEXAMPLES) | ||
| JPS6044838B2 (ja) | 回転微動機構 | |
| JPH0240594A (ja) | あおりステージ | |
| JP2677294B2 (ja) | 圧電アクチュエータおよびそれを用いたステージ装置 | |
| US20020149293A1 (en) | Miniature device with bossed suspension member | |
| JPH0240593A (ja) | あおりステージ | |
| JPS5983581A (ja) | 回転微動機構 | |
| JP2764285B2 (ja) | 回転位置決め装置 | |
| JPS61244432A (ja) | 回動装置 | |
| JPS60130124A (ja) | 回転微動機構 | |
| JP3681541B2 (ja) | 微小回転駆動装置 | |
| JPH01193133A (ja) | 微動ステージ | |
| JPH02211415A (ja) | 角度微調節装置 | |
| JPH071447B2 (ja) | 微細位置決め装置 | |
| JPS6165427A (ja) | 移動ステ−ジ装置 | |
| JPH071449B2 (ja) | 微細位置決め装置 |