JPH0543410Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a sheet surface inspection device for inspecting flaws occurring on the surface of a sheet to be inspected, such as a steel plate or a glass plate. The present invention relates to a device for exchanging masks (negative images) in a device.

[Technical background of the invention and its problems]

As shown in FIG. 5, a conventional sheet surface inspection device includes a laser device (laser transmitter) equipped with a collimator in a box-shaped case body a provided directly above a traveling sheet W to be inspected. b.
The laser beam from this laser device b is projected onto a rotating mirror c that rotates at high speed, the reflected light from this rotating mirror c is irradiated onto the sheet surface of the sheet W to be inspected, and the reflected light from this sheet surface is passed through an objective lens d. The light beam from the objective lens d is then projected onto a fixed mask (also simply referred to as a mask) e, thereby converting the diffraction pattern from the surface of the sheet into the light beam that has passed through the fixed mask e. Only the flaw W1 on the surface of the sheet is detected by a photomultiplier tube f and a signal is emitted, thereby burning the flaw _W1 on the surface of the sheet onto the film.

That is, the laser beam detects a flaw W ₁ on the sheet W to be inspected.
When this defect-specific pattern is captured, a pattern unique to the flaw is projected onto the fixed mask e, and the laser light (ray) that deviates from the good quality pattern is recorded on a film provided behind the fixed mask e.

In this way, the conventional sheet surface inspection device described above uses the diffraction pattern of a normal sheet surface as a reference, and detects any diffraction pattern that deviates from the standard as a flaw on the sheet surface. It is designed to be magnified and detected by a multiplier tube f.

On the other hand, in the above-mentioned conventional sheet surface inspection apparatus, when the type of flaw (defect) differs depending on the sheet W to be inspected, the removable cover (not shown) attached to the case body a is removed and the above-mentioned fixed The mask e is changed each time it is used. In other words, the fixed mask e is the case body a.
It is a replacement type that is stored in the.

Next, in the conventional sheet surface inspection apparatus shown in FIGS. 6 and 7, a film g provided with a plurality of masks is placed between an objective lens d and a photomultiplier tube f. A mask is wound between a supply roller i having a roller h and a take-up roller j, thereby allowing the film g to be replaced with a predetermined mask depending on the type of defect caused by the sheet W to be inspected. It is starting to be used.

That is, in FIG. 6, the sheet surface inspection apparatus described above has a drive motor k using a pulse motor provided in a part of the case body a, and rotates a gear l mounted on the output shaft of the drive motor k. A large gear m that meshes with this gear l is rotated, and a supply roll i and a take-up roll j, which are integrated with this large gear m, are rotated synchronously by a timing belt n, and winding is carried out between these rollers i and j. A predetermined mask based on the loaded film g is replaced.

Note that the laser beam from the laser device b irradiates the surface of the sheet W to be inspected that is transferred via the rotating mirror c, as in the conventional example shown in FIG. The reflected light is focused through the objective lens d and projected onto a predetermined mask of the film g, thereby making it possible to detect the diffraction pattern from the surface of the sheet W to be inspected by only the light beams that have passed through the mask. The photomultiplier tube f detects and issues a signal, and the flaw _W1 on the surface of the sheet is exposed to light on the film.

In other words, when the laser beam detects a flaw W ₁ ,
This flaw-specific pattern is projected onto a predetermined mask on the film g, and the laser light emitted from the good quality pattern is arranged to expose another film provided behind the mask.

However, in the above-mentioned first conventional example (see Fig. 5), the replacement work of the fixed mask e requires removing and replacing the removable cover attached to the case body a each time. Not only does it take time to replace the mask and the handling is troublesome, but also dust and foreign substances adhere to the fixed mask e installed inside the case body a, which may damage the condenser lens d, etc. There are drawbacks such as contamination, which reduces detection accuracy.

On the other hand, the second conventional example (see FIGS. 6 and 7) described above uses a film g provided with a plurality of masks.
Because the film is wound and transported by a supply roller i and a take-up roller j, if the type of defect (flaw) caused by the sheet W to be inspected is different, the predetermined mask of the film g is It is necessary to mutually wind or unwind from the starting end to the ending end, and when replacing the mask of these films g, there is a risk of rubbing and damaging the mask surface, and furthermore,
There are also drawbacks, such as the time-consuming handling of changing the mask.

[Purpose of invention]

The present invention was developed in view of the above-mentioned circumstances, and consists of stacking a plurality of masks in a shelf-like manner and loading them into a case case that can be raised and lowered. , is selectively installed on the optical path of the photomultiplier tube so that it can be freely inserted and removed, so that each of the above masks can be replaced smoothly and quickly without causing damage, and it is also possible to inspect the sheet to be inspected. The present invention provides a sheet surface inspection device whose purpose is to improve measurement accuracy.

[Summary of the idea]

In the present invention, a board is provided inside the case body which is installed directly above the sheet to be inspected, a mounting member is provided upright at one end of this board, and a horizontal plate having a slide groove is provided on one side of this mounting member. A photomultiplier tube is mounted on a horizontal plate, a pair of bearings are vertically mounted on the other side of the mounting member, each guide rod is slidably mounted on both bearings, and the lower part of each guide rod is mounted vertically on the other side of the mounting member. A case case loaded with a plurality of masks is provided to be movable up and down, and horizontal feed devices are provided on the mounting members located on both sides of the case case, so that each mask can be selectively inserted into and removed from each slide groove. It is composed of

[Example of idea]

Hereinafter, the present invention will be described with reference to an illustrated embodiment.

In FIGS. 1 to 3, reference numeral 1 denotes a box-shaped case body provided directly above a sheet W to be inspected made of, for example, a steel plate, and inside this case body 1, a flat substrate 2 is provided. A mounting member 3 is erected on a rising piece 2a formed at one end of the substrate 2. Further, a horizontal plate 4 is substantially integrally formed on one side of the mounting member 3, and a pair of slide grooves 5 are provided in the horizontal plate 4 toward the mounting member 3. There is. Further, on this horizontal plate 4, a photomultiplier tube 6 is provided perpendicularly to the photodetection surface, and below the horizontal plate 4, an objective lens 7 is arranged to detect the reflection from the sheet W to be inspected. It is arranged so as to condense the light and focus it on the mask where the slide groove 5 is located.

It is assumed that the irradiation of light onto the sheet W to be inspected is performed by a laser device (not shown).

On the other hand, a pair of bearings 8 are vertically provided on the other side (right side in FIG. 1) of the mounting member 3, and each guide rod 9 is slidably mounted on both bearings 8. equipped. Further, each arm rod 8a extends horizontally from a part of both bearings 8, and a support plate 10 is provided horizontally through each stay 11 on this both arm rod 8a. There is. Furthermore, on this support plate 10, a plurality of (three in the figure) cylinder devices 12a, 12b, 12c, each including, for example, an air cylinder, are arranged in order up and down along each guide rod 13 erected on the support plate 10. They are arranged in a row downwards. Furthermore, as shown in FIG. 2, the cylinder devices 12a, 12b, and 12c have respective output shafts integral with pistons connected to each other.
The output shaft 12b of a is pivotally attached to a horizontal mounting plate 14 attached to the upper part of each guide rod 9.

On the other hand, the lower portions of the pair of support rods 15 vertically installed on the horizontal mounting plate 14 and the lower portions of each of the guide rods 9,
A box-shaped case case 16 is provided, and a plurality of horizontal grooves 17a, 17b, 17c, and 17d are formed on both sides of the case case 16. Also, each groove 17a, 17
Each mask 18a, 18b, 18c, 18d with a different diffraction pattern is slidably mounted on each mask 18b, 17c, 17d.
a, 18b, 18c, and 18d can be selectively inserted into and removed from the slide groove 5 by a horizontal feed device 19, which will be described later.

Note that each of the masks 18a, 18b, 18c,
18d is the frame A as shown in FIG.
Mask body A ₁ with different diffraction patterns inside
is fixed.

On the other hand, horizontal feeding devices 19 are provided on the mounting members 3 located on both sides of the case case 16. That is, this horizontal feeding device 19 is
A pair of horizontal guide rods 20 are provided at the bottom of the mounting member 3.
are arranged side by side, each slide member 21 is fitted to both horizontal guide rods 20, and both slide members 21
Each of the locking arm rods 22 is provided upright, and the slide members 21 are slid back and forth along the horizontal guide rods 20 by a rotary actuator 23 attached to the base plate 2. be.

The horizontal feed device 19 constitutes a crank mechanism, and each of the locking arm rods 21 locks the pins of each of the masks 18a, 18b, 18c, and 18d so as to be able to reciprocate. ing.

Therefore, by driving the rotary actuator 23, the horizontal feeding device 19 moves the slide members 21 by the crank mechanism.
Each locking arm rod 22 that is integral with the mask 18a
It is designed so that it can be inserted into the slide groove 5 by locking the pin and moving it forward.

On the other hand, when the mask 18a is pulled out from the slide groove 5, the locking arm rod 22 is moved back by driving the rotary actuator 23, and the mask 18a is housed in the case case 16. .

On the other hand, each of the cylinder devices 12a, 12b,
12c and the rotary actuator 23 are connected to a solenoid valve 25 via each lead wire 24, and this solenoid valve 25 is connected to a control circuit 26.

The operation of the present invention will be explained below.

Therefore, when the solenoid valve 25 is now actuated by the signal from the control circuit 26, the cylinder device 12a is actuated based on the command from the solenoid valve 25. Then, this cylinder device 12a has both guide tubes 9
and the case case 16 via the support rod 15.
is raised and lowered to the height of the slide groove 5 of the horizontal plate 4. Next, the horizontal feed device 19 inserts the mask 18a of the case case 16 into the slide groove 5, as described above.

Thereby, the mask 18a is inserted directly above the objective lens 7, and the flaw _W1 on the sheet W to be inspected is detected.

In this way, the present invention allows each other mask 18b, 18c, 18d to have a different diffraction pattern.
is selectively replaced as necessary to inspect the surface of the sheet to be inspected.

Next, in another embodiment of the present invention shown in FIG. 4, the case case 16 is moved up and down by a feed screw mechanism 24.

That is, in this embodiment, a motor 25 is provided on the top plate 3a that is integral with the mounting member 3, and the motor 2
By rotating the gear 26 mounted on the output shaft of 5, the feed screw 28 which is integrated with the large gear 27 meshed with this gear 26 is rotated.
The case 16 is screwed into the case 8 and is configured to be moved up and down.

[Effect of idea]

As described above, according to the present invention, the substrate 2 is placed inside the case body 1 provided directly above the sheet W to be inspected.
A mounting member 3 is provided upright on one end 2a of this substrate 2, a horizontal plate 4 having a slide groove 5 is provided on one side of this mounting member 3, and a photomultiplier tube 6 is mounted on this horizontal plate 4. A pair of bearings 3 are installed vertically on the other side of the mounting member 3, each guide rod 9 is slidably mounted on both bearings 8, and a plurality of masks are attached to the lower part of each guide rod 9. 18a, 18b, 18c, 18
A case case 16 loaded with the mask d is provided so as to be able to be raised and lowered, and a horizontal feed device 19 is provided on the mounting member 3 located on both sides of the case case 16. Since it is configured so that it can be selectively inserted and removed, not only can masks with different diffraction patterns be inserted and removed automatically, but there is no risk of damaging the masks, and the above-mentioned masks can be easily replaced. It has excellent effects such as:

[Brief explanation of the drawing]

Figure 1 is a perspective view of the sheet surface inspection device according to the present invention, Figure 2 is a front view with the case body of the present invention removed, Figure 3 is a sectional view of the mask used in the present invention, and Figure 4 is a cross-sectional view of the mask used in the present invention. The figure shows another embodiment of the present invention, and FIGS. 5 to 7 are diagrams diagrammatically showing a conventional sheet surface inspection apparatus. DESCRIPTION OF SYMBOLS 1... Case body, 2... Board, 3... Mounting member, 4... Horizontal plate, 5... Slide groove, 6... Photomultiplier tube, 7... Objective lens, 8... Bearing, 9
... Guide tube, 12a, 12b, 12c ... Cylinder device, 16 ... Case case, 18a, 1
8b, 18c, 18d...Mask, 19...Horizontal feeder, 23...Rotary actuator.

Claims (1)

[Claims for Utility Model Registration] 1. A board is provided in the case body provided directly above the sheet to be inspected, a mounting member is provided upright at one end of the board, and a horizontal mounting member having a slide groove on one side of the mounting member is provided. A plate is provided, a photomultiplier tube is attached on this horizontal plate, a pair of bearings is provided vertically on the other side of the mounting member, each guide rod is slidably mounted on both bearings, and this A case case loaded with a plurality of masks is provided at the bottom of each guide rod, a means for raising and lowering the case is provided, and a horizontal feeding device is provided on the mounting member located on both sides of the case, and each mask is selected into the slide groove. A sheet surface inspection device characterized in that it can be inserted and removed automatically. 2. The sheet surface inspection device according to claim 1, wherein the horizontal feeding device is constituted by a crank mechanism. 3. The sheet surface inspection device according to claim 1, wherein the case case is raised and lowered by a feed screw mechanism.