JPH0543391A - Double face heating heater for vacuum - Google Patents
Double face heating heater for vacuumInfo
- Publication number
- JPH0543391A JPH0543391A JP20180391A JP20180391A JPH0543391A JP H0543391 A JPH0543391 A JP H0543391A JP 20180391 A JP20180391 A JP 20180391A JP 20180391 A JP20180391 A JP 20180391A JP H0543391 A JPH0543391 A JP H0543391A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- vacuum
- rod
- outer plate
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Resistance Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Surface Heating Bodies (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、プラズマＣＶＤ装置、
スパッタリング装置などの真空成膜装置の大面積かつ均
一な温度分布加熱を要する製品の基板加熱装置に適用さ
れる真空用両面加熱ヒータに関する。BACKGROUND OF THE INVENTION The present invention relates to a plasma CVD apparatus,
The present invention relates to a double-sided heater for vacuum applied to a substrate heating device for products that require a large area and uniform temperature distribution heating of a vacuum film forming device such as a sputtering device.
【０００２】[0002]
【従来の技術】従来の基板加熱装置に適用される真空用
両面加熱ヒータは、図４に示すようにステンレス板２１
に多数の細長い一列の穴をあけて、その穴に棒状のヒー
タ２２を挿入し、そのステンレス板２１の表面において
均一な温度分布が得られるものとしていた。2. Description of the Related Art A vacuum double-sided heater applied to a conventional substrate heating apparatus is a stainless steel plate 21 as shown in FIG.
A large number of long and narrow rows of holes are made in the hole, and a rod-shaped heater 22 is inserted into the holes so that a uniform temperature distribution can be obtained on the surface of the stainless plate 21.
【０００３】[0003]
【発明が解決しようとする課題】従来の真空用両面加熱
ヒータにおいては、棒状ヒータ径の寸法とヒータ用穴径
の寸法精度はかなりの高精度が要求されるため加工が難
かしく、精度が出てない場合には、ヒータの寿命は短か
く、また、温度の均一度も悪かった。In the conventional double-sided heater for vacuum, it is difficult to process the dimensional accuracy of the rod-shaped heater diameter and the heater hole diameter. If not, the life of the heater was short and the temperature uniformity was poor.
【０００４】本発明は、上記課題を解決し、加工が簡単
で温度分布が均一なヒータを実現しようとするものであ
る。The present invention is intended to solve the above problems and to realize a heater which is easy to process and has a uniform temperature distribution.
【０００５】[0005]
【課題を解決するための手段】本発明の真空用両面加熱
ヒータは、一定間隔を有して対向する面にそれぞれ複数
の溝が設けられた金属からなる２枚のヒータ外板、同ヒ
ータ外板の面に沿って同ヒータ外板の溝に埋め込まれ導
線が接続された複数本の棒状ヒータ、上記ヒータ外板に
より形成された箱内に封入されたセラミックス粉末、お
よび上記ヒータ外板により形成された箱を密閉するヒー
タ蓋にフレキシブルチューブを介して接続され上記導線
と熱電対の一端が引き出されるパイプ状の真空シール部
を備えたことを特徴としている。A double-sided heater for vacuum according to the present invention comprises two heater outer plates made of metal, each of which has a plurality of grooves formed on opposite surfaces thereof at regular intervals. Formed by a plurality of rod-shaped heaters embedded in the groove of the heater outer plate along the surface of the plate and connected to conductors, ceramic powder enclosed in a box formed by the heater outer plate, and the heater outer plate It is characterized in that it is provided with a pipe-shaped vacuum seal portion which is connected to a heater lid for sealing the formed box through a flexible tube and from which one end of the lead wire and the thermocouple is drawn out.
【０００６】[0006]
【作用】上記において、ヒータ外板は断面が半円形状の
溝を設けて棒状ヒータを埋め込むため、高精度の加工が
容易である。また、この棒状ヒータは側部の半分の面が
上記ヒータ外板に接し、残りの面が熱伝達率の低いセラ
ミック粉末に接しているためよく保温され、ヒータ外板
の面の温度の均一度は高く、棒状ヒータは長寿命を保つ
ことができる。In the above, since the heater outer plate is provided with the groove having the semicircular cross section and the rod-shaped heater is embedded therein, highly accurate processing is easy. Also, since the rod-shaped heater has half of its side surface in contact with the heater outer plate and the remaining surface in contact with ceramic powder having a low heat transfer coefficient, the temperature is well maintained, and the surface uniformity of the heater outer plate is uniform. Is high, and the rod-shaped heater can maintain a long life.
【０００７】更に、上記ヒータは棒状ヒータの導線及び
熱電対の一端がフレキシブルチューブを介してヒータ蓋
に接続された真空シール部より引き出され、この真空シ
ール部はヒータが収納される真空容器内の真空を保つた
め、真空容器内で均一な所定の高温を得ることができ
る。Further, in the above heater, one end of a conductor wire and a thermocouple of a rod-shaped heater is drawn out from a vacuum seal portion connected to a heater lid through a flexible tube, and this vacuum seal portion is inside a vacuum container in which the heater is housed. Since the vacuum is maintained, a uniform high temperature can be obtained in the vacuum container.
【０００８】上記により、加工が容易であり、真空中に
おける広い面積について均一な加熱を行うことが可能で
長寿命のヒータを実現する。As described above, it is possible to realize a heater which is easy to process, can uniformly heat a wide area in a vacuum, and has a long life.
【０００９】[0009]
【実施例】本発明の一実施例を図１（ａ），（ｂ）に示
す。図１（ａ），（ｂ）に示す本実施例は、一定間隔を
有して対向する面にそれぞれ平行な縦方向の複数の溝１
１ａが設けられたステンレス又はアルミニウム等の金属
からなる２枚のヒータ外板１１、同ヒータ外板１１の溝
１１ａにそれぞれ埋め込まれ上部に導線１３が接続され
た複数本の棒状ヒータ１０、上記ヒータ外板１１により
形成された箱内に封入された酸化マグシウム等よりなる
セラミック粉末１２、上記ヒータ外板１１の上部に設け
られた導入パイプ１４が接続され外部を真空シールする
ヒータ蓋１７、および同ヒータ蓋１７の導入パイプ１４
にフレキシブルチューブ１６を介して接続され上記それ
ぞれの棒状ヒータ１０の導線１３と熱電対１３ａの一端
が引き出され外側が研磨された真空シール部１５を備え
ている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention is shown in FIGS. In this embodiment shown in FIGS. 1A and 1B, a plurality of grooves 1 in the vertical direction are arranged at regular intervals and are parallel to the facing surfaces.
Two heater outer plates 11 made of a metal such as stainless steel or aluminum provided with 1a, a plurality of rod-shaped heaters 10 each embedded in a groove 11a of the heater outer plate 11 and connected to an upper portion of a conductor 13, the heater A ceramic powder 12 made of magnesium oxide or the like sealed in a box formed by the outer plate 11, a heater lid 17 connected to an introduction pipe 14 provided on the upper part of the heater outer plate 11 for vacuum-sealing the outside, and the same. Introduction pipe 14 of heater lid 17
And a vacuum seal portion 15 which is connected via a flexible tube 16 to one end of the conductor 13 and the thermocouple 13a of each of the rod-shaped heaters 10 and whose outside is polished.
【００１０】上記において、棒状ヒータ１０が埋め込ま
れるヒータ外板１１は、断面が半円形状の溝１１ａを設
ければよいため、その加工が容易である。また、上記棒
状ヒータ１０は側部の半分の面が上記ヒータ外板１１に
接し、残りの面が熱伝達率の低いセラミック粉末１２に
接しているためよく保温され、ヒータ外板１１の面は温
度分布がほヾ均一となり、棒状ヒータ１０は長寿命を保
つことができる。In the above description, the heater outer plate 11 in which the rod-shaped heater 10 is embedded has only to be provided with the groove 11a having a semicircular cross section, so that the machining is easy. Also, since the rod-shaped heater 10 has half of its side surface in contact with the heater outer plate 11 and the remaining surface in contact with the ceramic powder 12 having a low heat transfer coefficient, the temperature is well maintained. The temperature distribution becomes almost uniform, and the rod-shaped heater 10 can maintain a long life.
【００１１】なお、上記ヒータ外板１１の溝１１ａに棒
状ヒータ１０が埋め込まれ、ヒータ外板１１の間にセラ
ミック粉末１２を封入した本実施例のヒータと従来のヒ
ータについて、それぞれの加熱状態における温度分布を
測定したところ、それぞれ図２（ａ），（ｂ）に示す結
果が得られ、本実施例のヒータが温度分布の均一性の点
で格段に優れていることが判った。The rod-shaped heater 10 is embedded in the groove 11a of the heater outer plate 11, and the ceramic powder 12 is sealed between the heater outer plates 11 of the present embodiment and the conventional heater in each heating state. When the temperature distribution was measured, the results shown in FIGS. 2 (a) and 2 (b) were obtained, respectively, and it was found that the heater of this example was remarkably excellent in the uniformity of the temperature distribution.
【００１２】本実施例のヒータについては、上部に設け
られたヒータ蓋１７の導入パイプ１４にフレキシブルチ
ューブ１６を介して接続され導線１３及び熱電対１３ａ
の一端が引き出される真空シール部１５が設けられてい
るが、本実施例のヒータが図３に示すように真空容器１
８内で用いられるためであり、上記真空シール部１５と
真空容器１８の間にシールリング１９を設けて真空容器
１８内の真空を保ち、同容器１８内において６００℃程
度の高温を得るためである。The heater of this embodiment is connected to the introduction pipe 14 of the heater lid 17 provided on the upper part through the flexible tube 16 and the lead wire 13 and the thermocouple 13a.
Although a vacuum seal portion 15 is provided to pull out one end of the vacuum container 1 as shown in FIG.
8 is used in order to maintain a vacuum in the vacuum container 18 by providing a seal ring 19 between the vacuum seal portion 15 and the vacuum container 18 and obtain a high temperature of about 600 ° C. in the container 18. is there.
【００１３】上記により、加工が容易であり、真空中に
おける広い面積について均一な加熱を行うことができ、
長寿命のヒータを実現した。According to the above, processing is easy, and it is possible to uniformly heat a large area in a vacuum.
Realized a long-life heater.
【００１４】[0014]
【発明の効果】本発明の真空用両面加熱ヒータは、２枚
のヒータ外板に断面が半円形状の溝を設け棒状ヒータを
埋め込み、この棒状ヒータが埋め込まれた面を対向させ
てヒータ外板を配設し、棒状ヒータの導線と熱電対の一
端をヒータ蓋に接続された真空シール部より引き出すこ
とによって、加工が容易であり、真空中における広い面
積について均一な加熱を行うことが可能で、長寿命のヒ
ータを実現する。According to the double-sided heater for vacuum of the present invention, a groove having a semicircular cross section is provided in two heater outer plates to embed a rod-shaped heater, and the surfaces in which the rod-shaped heater is embedded face each other. By arranging a plate and pulling out the conductor of the rod-shaped heater and one end of the thermocouple from the vacuum seal part connected to the heater lid, processing is easy and it is possible to perform uniform heating over a wide area in vacuum. This realizes a long-life heater.
【図１】本発明の一実施例の説明図で、（ａ）はヒータ
内部の説明図、（ｂ）はヒータ外形の説明図である。FIG. 1 is an explanatory diagram of an embodiment of the present invention, (a) is an explanatory diagram of the inside of a heater, and (b) is an explanatory diagram of an outer shape of the heater.
【図２】上記一実施例と従来のヒータの温度分布の説明
図で、（ａ）は本実施例の説明図，（ｂ）は従来のヒー
タの説明図である。2A and 2B are explanatory views of temperature distributions of the above-described one embodiment and a conventional heater, FIG. 2A is an explanatory view of the present embodiment, and FIG. 2B is an explanatory view of a conventional heater.
【図３】上記一実施例のヒータが真空容器に収納された
状態の説明図である。FIG. 3 is an explanatory diagram showing a state where the heater according to the above-described embodiment is housed in a vacuum container.
【図４】従来のヒータの説明図である。FIG. 4 is an explanatory diagram of a conventional heater.
１０ 棒状ヒータ １１ ヒータ外板 １１ａ 溝 １２ セラミック粉末 １３ 導線 １３ａ 熱電対 １４ 導入パイプ １５ 真空シール部 １６ フレキシブルチューブ １７ ヒータ蓋 10 Rod-shaped heater 11 Heater outer plate 11a Groove 12 Ceramic powder 13 Conductive wire 13a Thermocouple 14 Introduction pipe 15 Vacuum seal part 16 Flexible tube 17 Heater lid
Claims (1)
複数の溝が設けられた金属からなる２枚のヒータ外板、
同ヒータ外板の面に沿って同ヒータ外板の溝に埋め込ま
れ導線が接続された複数本の棒状ヒータ、上記ヒータ外
板により形成された箱内に封入されたセラミックス粉
末、および上記ヒータ外板により形成された箱を密閉す
るヒータ蓋にフレキシブルチューブを介して接続され上
記導線と熱電対の一端が引き出されるパイプ状の真空シ
ール部を備えたことを特徴とする真空用両面加熱ヒー
タ。1. Two heater outer plates made of metal, each of which is provided with a plurality of grooves on opposite surfaces thereof at regular intervals.
A plurality of rod-shaped heaters embedded in the groove of the heater outer plate along the surface of the heater outer plate and connected to conductive wires, ceramic powder enclosed in a box formed by the heater outer plate, and the outside of the heater. A double-sided heater for vacuum, comprising a pipe-shaped vacuum seal part connected to a heater lid for sealing a box formed by a plate through a flexible tube and having one end of the lead wire and the thermocouple pulled out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20180391A JPH0543391A (en) | 1991-08-12 | 1991-08-12 | Double face heating heater for vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20180391A JPH0543391A (en) | 1991-08-12 | 1991-08-12 | Double face heating heater for vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0543391A true JPH0543391A (en) | 1993-02-23 |
Family
ID=16447184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20180391A Withdrawn JPH0543391A (en) | 1991-08-12 | 1991-08-12 | Double face heating heater for vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543391A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030063599A (en) * | 2002-01-23 | 2003-07-31 | 윤영일 | Heating apparatus |
| KR100793819B1 (en) * | 2006-06-16 | 2008-01-10 | 주식회사 펩트론 | Heat block assembly and apparatus for synthesis of organic compounds |
| KR200465006Y1 (en) * | 2012-01-18 | 2013-01-29 | 장영석 | Hiter |
-
1991
- 1991-08-12 JP JP20180391A patent/JPH0543391A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030063599A (en) * | 2002-01-23 | 2003-07-31 | 윤영일 | Heating apparatus |
| KR100793819B1 (en) * | 2006-06-16 | 2008-01-10 | 주식회사 펩트론 | Heat block assembly and apparatus for synthesis of organic compounds |
| KR200465006Y1 (en) * | 2012-01-18 | 2013-01-29 | 장영석 | Hiter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19981112 |