JPH0543240B2 - - Google Patents

Info

Publication number
JPH0543240B2
JPH0543240B2 JP62191298A JP19129887A JPH0543240B2 JP H0543240 B2 JPH0543240 B2 JP H0543240B2 JP 62191298 A JP62191298 A JP 62191298A JP 19129887 A JP19129887 A JP 19129887A JP H0543240 B2 JPH0543240 B2 JP H0543240B2
Authority
JP
Japan
Prior art keywords
ultrasonic
signal
ultrasonic transducer
common
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62191298A
Other languages
Japanese (ja)
Other versions
JPS6436198A (en
Inventor
Motoyoshi Ando
Tooru Shimazaki
Hiroshi Tabei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GE Healthcare Japan Corp
Original Assignee
Yokogawa Medical Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Medical Systems Ltd filed Critical Yokogawa Medical Systems Ltd
Priority to JP62191298A priority Critical patent/JPS6436198A/en
Publication of JPS6436198A publication Critical patent/JPS6436198A/en
Publication of JPH0543240B2 publication Critical patent/JPH0543240B2/ja
Granted legal-status Critical Current

Links

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は奇数個の超音波振動子アレイを2次元
的に、かつ、左右対称的に配列した超音波探触子
に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ultrasonic probe in which an odd number of ultrasonic transducer arrays are arranged two-dimensionally and bilaterally symmetrically.

(従来の技術) 従来から、スライス方向の分解能を向上する超
音波探触子の提案が種々なされている。例えば、
第5図に示す超音波振動子アレイを奇数個並べた
ものが知られている。第5図は超音波探触子をY
−Z面でみたときの構成図である。図において、
超音波探触子1はアレイのピツチ(配列)方向を
X方向(紙面に垂直な方向)に向け、Y方向に超
音波振動子アレイ2,3及び4を僅かに開けて並
べ、Z方向で超音波の送受波をするようになつて
いる。超音波振動子アレイ2は、アレイエレメン
トの上面から側面にかけて固着される共通電極2
aと、下面に固着される信号電極2bと、共通電
極2aを取出す共通リード2cと、信号電極2b
を取出す信号リード2dと、バツキング材2eと
を有する。又、超音波振動子アレイ3も、上記と
同様の構成で共通電極3aと、信号電極3bと、
共通リード3cと、信号リード3dと、バツキン
グ材3eとを有する。超音波振動子アレイ4も
亦、共通電極4aと、信号電極4bと、共通リー
ド4cと、信号リード4dと、バツキング材4e
とを有する。各共通リード2c,3c及び4cは
共に回路の基準点に接続される。信号リード2d
と4dは一緒にして同じ送受波部に接続され、信
号リード2dは上記とは異なる送受波部に接続さ
れる。この様な構成がX方向に配列されるアレイ
の各エレメント毎(各チヤネル毎)に構成され
る。図示されていないが、通常、共通電極側には
音響整合層を接合して半円柱状音響レンズ(X方
向を長いレンズ)が設置される。
(Prior Art) Various proposals have been made for ultrasonic probes that improve the resolution in the slice direction. for example,
An array in which an odd number of ultrasonic transducer arrays are arranged as shown in FIG. 5 is known. Figure 5 shows the ultrasonic probe
- It is a configuration diagram when viewed from the Z plane. In the figure,
The ultrasonic probe 1 has the array pitch (arrangement) direction in the X direction (perpendicular to the plane of the paper), the ultrasonic transducer arrays 2, 3, and 4 in the Y direction with slight gaps between them, and the Z direction in the It is designed to transmit and receive ultrasonic waves. The ultrasonic transducer array 2 includes a common electrode 2 fixed from the top surface to the side surface of the array element.
a, a signal electrode 2b fixed to the lower surface, a common lead 2c for taking out the common electrode 2a, and a signal electrode 2b.
It has a signal lead 2d to be taken out and a backing material 2e. Further, the ultrasonic transducer array 3 also has a common electrode 3a, a signal electrode 3b, and a common electrode 3a with the same configuration as above.
It has a common lead 3c, a signal lead 3d, and a backing material 3e. The ultrasonic transducer array 4 also includes a common electrode 4a, a signal electrode 4b, a common lead 4c, a signal lead 4d, and a backing material 4e.
and has. Each common lead 2c, 3c and 4c is connected together to a reference point of the circuit. signal lead 2d
and 4d are connected together to the same wave transmitting/receiving section, and the signal lead 2d is connected to a different wave transmitting/receiving section. Such a configuration is configured for each element (each channel) of the array arranged in the X direction. Although not shown, a semi-cylindrical acoustic lens (long in the X direction) is usually installed on the common electrode side with an acoustic matching layer bonded thereto.

以上の構成において、関心領域の変化に対応し
て超音波振動子アレイ3のみによるX方向走査、
又は、超音波振動子アレイ2,3及び4の全てに
よるX方向走査が行われる。即ち、関心領域の変
化に対応してY方向の開口が可変され、X方向に
対しては公知のリニアアレイ型超音波探触子と同
じ走査が行われる。これにより浅い部位から深い
部位にかけてY方向の分解能が改善される。
In the above configuration, X-direction scanning using only the ultrasound transducer array 3 in response to changes in the region of interest;
Alternatively, scanning in the X direction by all of the ultrasonic transducer arrays 2, 3, and 4 is performed. That is, the aperture in the Y direction is varied in response to changes in the region of interest, and the same scanning as in the known linear array type ultrasound probe is performed in the X direction. This improves the resolution in the Y direction from the shallow region to the deep region.

この様な超音波振動子アレイを並べる方式は、
Y−Z面からみて左右対称的な構成が作りやすい
ので、波形の合成が容易である。
The method of arranging such an array of ultrasonic transducers is
Since it is easy to create a symmetrical configuration when viewed from the Y-Z plane, it is easy to synthesize waveforms.

(発明が解決しようとする問題点) しかし、従来の超音波探触子にあつては、共通
電極及び信号電極をそれぞれ共通リード及び信号
リードで個々に取出す構成となつているため、リ
ードの数が多くなり構成が複雑になると言う問題
がある。又、電気的絶縁の観点から、Y方向で隣
合うエレメントの間隔をあまり小さくできないた
め、不感領域が広い範囲で生じると言う問題もあ
る。
(Problems to be Solved by the Invention) However, in conventional ultrasonic probes, the common electrode and the signal electrode are taken out individually by the common lead and the signal lead, so the number of leads is There is a problem in that the number of components increases and the configuration becomes complicated. Further, from the viewpoint of electrical insulation, the distance between adjacent elements in the Y direction cannot be made very small, so there is a problem that a dead area occurs over a wide range.

本発明は、かかる点に鑑みてなされたものであ
り、その目的は、構成が簡単で、しかもY方向で
の不感領域を狭くする超音波探触子を実現するに
ある。
The present invention has been made in view of these points, and its purpose is to realize an ultrasonic probe that has a simple configuration and has a narrow dead area in the Y direction.

(問題点を解決するための手段) 上記目的を達成する本発明の超音波探触子は、
奇数個のY−Z断面形状が台形等である超音波振
動子アレイをX−Y面にZ軸を中心にY方向に左
右対称的に設置し、Y方向に隣合うエレメント間
で形成される溝を導電性の充填材で埋めて共通電
極を接続し、Y方向の端の超音波振動子アレイか
ら共通電極を取出すと共に、アレイと同じピツチ
の平行パターン状の信号リードを備えるプリント
板を用いて各信号電極を個々に取出すようになつ
ている。
(Means for Solving the Problems) The ultrasonic probe of the present invention that achieves the above object has the following features:
An odd number of ultrasonic transducer arrays with Y-Z cross-sectional shapes such as trapezoids are installed symmetrically in the Y direction with the Z axis as the center on the X-Y plane, and are formed between adjacent elements in the Y direction. The groove is filled with a conductive filler to connect the common electrode, and the common electrode is taken out from the ultrasonic transducer array at the end of the Y direction, using a printed board with signal leads in a parallel pattern of the same pitch as the array. Each signal electrode is taken out individually.

(実施例) 以下、本発明について図面を参照して詳細に説
明する。
(Example) Hereinafter, the present invention will be described in detail with reference to the drawings.

第1図及び第2図は本発明の一実施例による超
音波探触子を示す構成図であり、第1図はY−Z
断面図、第2図は第1図におけるA−A断面図
(X−Z断面図)である。第1図及び第2図にお
いて、超音波振動子11はZ軸を対称軸としてY
方向に3個の超音波振動子アレイ12,13及び
14をできるだけ近付けた構成となつている。各
超音波振動子アレイはY−Z面の形状が台形で、
X方向に多数のエレメントがピツチtで配列され
る(斜視図的に示すと第3図となる)。超音波振
動子アレイ12,13及び14は、上面から両側
面にかけて固着される共通電極12a,13a及
び14a,並びに下面に固着される信号電極12
b,13b及び14bを有する。各共通電極は超
音波振動子アレイ間で形成される溝15及び16
それぞれに導電性接着剤又は半田17及び18を
埋めて接続され、共通リード19及び20を介し
て取出される(共通電極と共通リードは導電性接
着剤又は半田による接続)。共通リード19及び
20は後述するプリント板21及び23それぞれ
に絶縁スペーサ24及び25を介在して一体化さ
れている。従つて、共通電極19及び20はプリ
ント板信号のリードと同じ方向で取出される。プ
リント板21,22及び23は、各板面にピツチ
tの平行パターン状の信号リードを備えている
(26はプリント板22の信号リードである)。プ
リント板22はZ軸上、即ち、超音波振動子アレ
イ13の中心線上に設置され、プリント板21及
び23はプリント板22に対し左右対称の位置に
設置される。この設置は、プリント板21,22
及び23の各板面をX−Z面(プリント板は信号
電極面に対して略垂直方向)にして行われ、信号
電極12b,13b及び14bと各プリント板の
信号リードが導電性接着剤、半田等を用いて接続
される。バツキング材27及び28はそれぞれプ
リント板21と22の間及び22と23の間に設
置され、各プリント板及び各信号電極に接合す
る。図示されていないが超音波振動子アレイ11
の上に整合層が接合され、音響レンズが設置され
る。上記バツキング材と各信号電極及び各プリン
ト板との接合、並びにスペーサとプリント板と共
通リードとの接合は絶縁性接着剤で行われる。
1 and 2 are configuration diagrams showing an ultrasonic probe according to an embodiment of the present invention, and FIG. 1 is a Y-Z
The cross-sectional view, FIG. 2 is a cross-sectional view taken along line AA (cross-sectional view taken along line X-Z) in FIG. In FIGS. 1 and 2, the ultrasonic transducer 11 has a Y axis with the Z axis as the axis of symmetry.
The configuration is such that three ultrasonic transducer arrays 12, 13, and 14 are placed as close as possible in the direction. Each ultrasonic transducer array has a trapezoidal shape on the Y-Z plane.
A large number of elements are arranged in the X direction at a pitch t (as shown in FIG. 3 in a perspective view). The ultrasonic transducer arrays 12, 13, and 14 have common electrodes 12a, 13a, and 14a fixed from the top surface to both side surfaces, and a signal electrode 12 fixed to the bottom surface.
b, 13b and 14b. Each common electrode has grooves 15 and 16 formed between the ultrasound transducer arrays.
They are connected by filling conductive adhesive or solder 17 and 18, respectively, and taken out through common leads 19 and 20 (the common electrode and the common lead are connected by conductive adhesive or solder). The common leads 19 and 20 are integrated with printed boards 21 and 23, respectively, which will be described later, with insulating spacers 24 and 25 interposed therebetween. Common electrodes 19 and 20 are therefore taken out in the same direction as the printed circuit board signal leads. The printed boards 21, 22 and 23 are each provided with signal leads in a parallel pattern with a pitch T (26 is the signal lead of the printed board 22). The printed board 22 is installed on the Z-axis, that is, on the center line of the ultrasonic transducer array 13, and the printed boards 21 and 23 are installed in symmetrical positions with respect to the printed board 22. This installation requires printed boards 21 and 22.
and 23 are placed in the X-Z plane (the printed board is approximately perpendicular to the signal electrode surface), and the signal electrodes 12b, 13b, and 14b and the signal leads of each printed board are bonded with conductive adhesive, Connected using solder or the like. Backing materials 27 and 28 are installed between printed boards 21 and 22 and between 22 and 23, respectively, and are bonded to each printed board and each signal electrode. Although not shown, the ultrasonic transducer array 11
A matching layer is bonded on top and an acoustic lens is installed. The bonding of the backing material to each signal electrode and each printed board, and the bonding of the spacer, printed board, and common lead are performed using an insulating adhesive.

以上の構成において、Y方向で超音波振動子を
近付けて配列すると共に、隣合うエレメント間の
溝を導電性部材で埋め、各超音波振動子のY方向
に配列する共通電極を一体化し、該電極を端から
共通リードを介して取出すので、不感領域が狭く
なるうえに、共通リードの数が少なくなる。又、
プリント板に形成される平行パターン状の信号リ
ードを介して信号電極を取出すので、信号リード
の束を用意する必要がない。
In the above configuration, the ultrasonic transducers are arranged close to each other in the Y direction, the grooves between adjacent elements are filled with a conductive member, and the common electrodes of each ultrasonic transducer arranged in the Y direction are integrated. Since the electrode is taken out from the end via the common lead, the dead area is narrowed and the number of common leads is reduced. or,
Since the signal electrodes are taken out through parallel patterned signal leads formed on the printed board, there is no need to prepare a bundle of signal leads.

この様な超音波探触子は、第1、第2及び第3
圧電材と(Y−Z面が台形でX方向を長軸とする
略直方体部材。上面から側面にかけて共通電極が
固着され、下面には信号電極が固着されている)、
所定のピツチの平行パターンの信号リードが形成
されたプリント板21,22及び23と、バツキ
ング材27及び28と、スペーサ24及び25
と、共通リード19及び20が用意され、以下の
工程で作られる(各符号は第1図と同様の意味を
もつている)。
Such an ultrasonic probe has a first, a second and a third
A piezoelectric material (a substantially rectangular parallelepiped member whose Y-Z plane is trapezoidal and whose long axis is in the X direction. A common electrode is fixed from the top surface to the side surface, and a signal electrode is fixed to the bottom surface),
Printed boards 21, 22 and 23 on which signal leads in a parallel pattern of a predetermined pitch are formed, backing materials 27 and 28, and spacers 24 and 25.
Then, common leads 19 and 20 are prepared and made in the following steps (each symbol has the same meaning as in FIG. 1).

(1) バツキング材27の両側にそれぞれのピツチ
を合せてプリント21及び22を接着する。
(1) Glue the prints 21 and 22 on both sides of the backing material 27, aligning their pitches.

(2) 第2圧電材(後の超音波振動子アレイ13)
の中心軸線(長手方向)をプリント板22の信
号リードのピツチ方向に合せて、第2圧電材を
バツキング材27に接着し(絶縁性接着剤使
用)、第2圧電材の信号電極とプリント板22
の信号リードを接続する(導電性接着剤、半田
等使用)。
(2) Second piezoelectric material (later ultrasonic transducer array 13)
Align the center axis (longitudinal direction) of the signal electrode with the pitch direction of the signal leads of the printed board 22, glue the second piezoelectric material to the backing material 27 (using an insulating adhesive), and connect the signal electrode of the second piezoelectric material to the printed board. 22
Connect the signal leads (using conductive adhesive, solder, etc.).

(3) 第1圧電材(後の超音波振動子アレイ12)
をバツキング材27に接着し(絶縁性接着剤使
用)、第1圧電材の信号電極とプリント板21
の信号リードを接続する(導電性接着剤、半田
等使用)。上記接着は第1圧電材を第2圧電材
にできるだけ接近させて行う。
(3) First piezoelectric material (later ultrasonic transducer array 12)
to the backing material 27 (using insulating adhesive), and connect the signal electrode of the first piezoelectric material and the printed board 21.
Connect the signal leads (using conductive adhesive, solder, etc.). The above bonding is performed by bringing the first piezoelectric material as close as possible to the second piezoelectric material.

(4) バツキング材28にプリント板23を接着し
た後、バツキング材28をプリント板22及び
第2圧電材に接着する(いずれも絶縁性接着剤
使用)。このとき、プリント板21,22及び
23の各信号リードのピツチを一致させる。
(4) After bonding the printed board 23 to the backing material 28, the backing material 28 is bonded to the printed board 22 and the second piezoelectric material (both using an insulating adhesive). At this time, the pitches of the signal leads on the printed boards 21, 22, and 23 are made to match.

(5) 第3圧電材(後の超音波振動子アレイ14)
をバツキング材28に接着し(絶縁性接着剤使
用)、第3圧電材の信号電極とプリント板23
の信号リードを接続する(導電性接着剤、半田
等使用)。上記接着は第3圧電材を第2圧電材
にできるだけ接近させて行う。
(5) Third piezoelectric material (later ultrasonic transducer array 14)
to the backing material 28 (using insulating adhesive), and connect the signal electrode of the third piezoelectric material and the printed board 23.
Connect the signal leads (using conductive adhesive, solder, etc.). The above bonding is performed by bringing the third piezoelectric material as close as possible to the second piezoelectric material.

(6) 第1と第2圧電材との間で形成される溝及び
第2と第3圧電材との間で形成される溝に導電
性部材を埋め、各圧電材のY方向に配列する共
通電極を電気的に接続する(一体化する)。
(6) Fill the groove formed between the first and second piezoelectric materials and the groove formed between the second and third piezoelectric materials with conductive members, and arrange them in the Y direction of each piezoelectric material. Electrically connect (integrate) common electrodes.

(7) プリント板21及び23の非バツキング材側
それぞれに絶縁性スペーサ24及び25を接着
する(絶縁性接着剤使用)。
(7) Glue insulating spacers 24 and 25 to the non-backing material sides of printed boards 21 and 23, respectively (using an insulating adhesive).

(8) X方向に所定のピツチで第1、第2及び第3
圧電材を同時にダイシング加工し、超音波振動
子アレイ12,13及び14を構成する。
(8) First, second and third at a predetermined pitch in the X direction.
The piezoelectric material is simultaneously diced to form ultrasonic transducer arrays 12, 13, and 14.

(9) 共通電極に共通リード19及び20を接続す
る。
(9) Connect common leads 19 and 20 to the common electrode.

(10) 超音波振動子アレイ12,13及び14の上
に整合層を接着し、その上に音響レンズを設置
する。
(10) A matching layer is adhered on top of the ultrasonic transducer arrays 12, 13, and 14, and an acoustic lens is placed on top of the matching layer.

このようにして超音波振動子アレイを平面的に
配置する超音波探触子が作られる。
In this way, an ultrasonic probe in which an array of ultrasonic transducers is arranged in a plane is manufactured.

尚、本発明は上記実施例に限定するものではな
い。Y−Z面での形状は台形ではなく、第4図の
a又はb(各符号は第1図と同じ意味で用いられ
ている)に示すように両側を直角状又は円弧状に
切欠いた形状のものであつてもよい。又、Y方向
に配置する超音波振動子アレイの数は5,7,…
の奇数であつてもよい。
Note that the present invention is not limited to the above embodiments. The shape in the Y-Z plane is not a trapezoid, but a shape with right-angled or circular arc notches on both sides, as shown in a or b in Figure 4 (each symbol is used with the same meaning as in Figure 1). It may be of. Also, the number of ultrasonic transducer arrays arranged in the Y direction is 5, 7,...
may be an odd number.

(発明の効果) 以上説明の通り、本発明の超音波探触子によれ
ば、奇数個の超音波振動子アレイをX−Y面にZ
軸を中心にY方向に左右対称的に並べ、Y方向に
隣合うアレイ間で形成される溝を埋めて共通電極
を接続し、Y方向の端の超音波振動子アレイから
共通電極を取出すと共に、アレイと同じピツチの
平行パターン状の信号リードを備えるプリント板
を用いて各信号電極を個々に取出すようになつて
いるため、構成を簡単にすることができる、又、
Y方向での不感領域を狭くすることもできる。
(Effects of the Invention) As explained above, according to the ultrasonic probe of the present invention, an odd number of ultrasonic transducer arrays are arranged in the Z-Y plane.
The ultrasonic transducer arrays are arranged symmetrically in the Y direction with the axis as the center, the common electrodes are connected by filling the grooves formed between the arrays adjacent in the Y direction, and the common electrodes are taken out from the end of the ultrasonic transducer array in the Y direction. Since each signal electrode is taken out individually using a printed board having signal leads in a parallel pattern with the same pitch as the array, the configuration can be simplified.
It is also possible to narrow the dead area in the Y direction.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は本発明の一実施例を示す構
成図、第3図は本発明の一実施例における超音波
振動子アレイを示す構成図、第4図a及びbは本
発明の他の実施例における超音波振動子アレイを
示す構成図、第5図は従来例を示す構成図であ
る。 11……超音波振動子、12,13,14……
超音波振動子アレイ、12a,13a,14a…
…共通電極、12b,13b,14b……信号電
極、15,16……溝、17,18……導電性部
材、19,20、……共通リード、21,22,
23……プリント板、19,20……共通リー
ド、26……信号リード、27,28……バツキ
ング材。
FIGS. 1 and 2 are block diagrams showing an embodiment of the present invention, FIG. 3 is a block diagram showing an ultrasonic transducer array in an embodiment of the present invention, and FIGS. 4 a and b are block diagrams showing an embodiment of the present invention. FIG. 5 is a block diagram showing an ultrasonic transducer array in another embodiment, and FIG. 5 is a block diagram showing a conventional example. 11... Ultrasonic transducer, 12, 13, 14...
Ultrasonic transducer array, 12a, 13a, 14a...
... Common electrode, 12b, 13b, 14b ... Signal electrode, 15, 16 ... Groove, 17, 18 ... Conductive member, 19, 20, ... Common lead, 21, 22,
23... Printed board, 19, 20... Common lead, 26... Signal lead, 27, 28... Backing material.

Claims (1)

【特許請求の範囲】 1 X−Y面に2次元的に配列の超音波振動子を
構成し、X方向で所定の走査を行いながらY方向
の開口可変を行う超音波探触子において、 Z軸を中心にY方向に左右対称的に奇数K個
(K=3,5,…)設置され、Y方向に隣合うエ
レメント同士で溝を形成し、かつ、該溝の幅が超
音波送受波面側が大きく開きバツキング材側が接
するほどに狭くなるような端面形状もつ超音波振
動子アレイと、該溝を埋めてY方向に隣合う共通
電極を接続する導電性の充填材と、アレイと同じ
ピツチの平行パターン状の信号リードを備えるK
個のプリント盤をアレイのピツチに合わせて信号
電極面に略垂直に、かつ、左右対称的に配置し
て、信号リードを介して各信号電極を取出す手段
と、Y方向の端に位置する超音波振動子アレイか
ら共通リードを介して共通電極を取出す手段とを
備えることを特徴とする超音波探触子。
[Claims] 1. An ultrasonic probe comprising ultrasonic transducers arranged two-dimensionally in the X-Y plane and variable aperture in the Y direction while performing a predetermined scan in the X direction, comprising: An odd number of K elements (K = 3, 5,...) are installed symmetrically in the Y direction around the axis, and the adjacent elements in the Y direction form a groove, and the width of the groove is the same as the ultrasonic wave transmission/reception wave surface. An ultrasonic transducer array with an end face shape that opens wide on the side and narrows as the backing material side touches, a conductive filling material that fills the groove and connects common electrodes adjacent in the Y direction, and an ultrasonic transducer array with the same pitch as the array. K with parallel pattern signal leads
The printed circuit boards are arranged approximately perpendicularly to the signal electrode surface and symmetrically in accordance with the pitch of the array, and a means for taking out each signal electrode through the signal lead, and a An ultrasonic probe comprising means for taking out a common electrode from a sonic transducer array via a common lead.
JP62191298A 1987-07-30 1987-07-30 Ultrasonic wave probe Granted JPS6436198A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62191298A JPS6436198A (en) 1987-07-30 1987-07-30 Ultrasonic wave probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62191298A JPS6436198A (en) 1987-07-30 1987-07-30 Ultrasonic wave probe

Publications (2)

Publication Number Publication Date
JPS6436198A JPS6436198A (en) 1989-02-07
JPH0543240B2 true JPH0543240B2 (en) 1993-07-01

Family

ID=16272234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62191298A Granted JPS6436198A (en) 1987-07-30 1987-07-30 Ultrasonic wave probe

Country Status (1)

Country Link
JP (1) JPS6436198A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192500A (en) * 1984-03-14 1985-09-30 Nippon Dempa Kogyo Co Ltd Matrix array type ultrasonic wave probe and its manufacture
JPS61114178A (en) * 1984-11-08 1986-05-31 Omron Tateisi Electronics Co Matrix array type ultrasonic oscillator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192500A (en) * 1984-03-14 1985-09-30 Nippon Dempa Kogyo Co Ltd Matrix array type ultrasonic wave probe and its manufacture
JPS61114178A (en) * 1984-11-08 1986-05-31 Omron Tateisi Electronics Co Matrix array type ultrasonic oscillator

Also Published As

Publication number Publication date
JPS6436198A (en) 1989-02-07

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