JPH0543088Y2 - - Google Patents

Info

Publication number
JPH0543088Y2
JPH0543088Y2 JP1987062980U JP6298087U JPH0543088Y2 JP H0543088 Y2 JPH0543088 Y2 JP H0543088Y2 JP 1987062980 U JP1987062980 U JP 1987062980U JP 6298087 U JP6298087 U JP 6298087U JP H0543088 Y2 JPH0543088 Y2 JP H0543088Y2
Authority
JP
Japan
Prior art keywords
vacuum chamber
dust collector
thin film
door
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987062980U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63170456U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987062980U priority Critical patent/JPH0543088Y2/ja
Publication of JPS63170456U publication Critical patent/JPS63170456U/ja
Application granted granted Critical
Publication of JPH0543088Y2 publication Critical patent/JPH0543088Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987062980U 1987-04-24 1987-04-24 Expired - Lifetime JPH0543088Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987062980U JPH0543088Y2 (cs) 1987-04-24 1987-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987062980U JPH0543088Y2 (cs) 1987-04-24 1987-04-24

Publications (2)

Publication Number Publication Date
JPS63170456U JPS63170456U (cs) 1988-11-07
JPH0543088Y2 true JPH0543088Y2 (cs) 1993-10-29

Family

ID=30897775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987062980U Expired - Lifetime JPH0543088Y2 (cs) 1987-04-24 1987-04-24

Country Status (1)

Country Link
JP (1) JPH0543088Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU84433A1 (fr) * 1982-10-22 1984-05-10 Mecan Arbed Dommeldange S A R Dispositif pour fournir des matieres gazeuses et solides a un bain de metal en voie d'affinage

Also Published As

Publication number Publication date
JPS63170456U (cs) 1988-11-07

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