JPH0542614Y2 - - Google Patents
Info
- Publication number
- JPH0542614Y2 JPH0542614Y2 JP15803488U JP15803488U JPH0542614Y2 JP H0542614 Y2 JPH0542614 Y2 JP H0542614Y2 JP 15803488 U JP15803488 U JP 15803488U JP 15803488 U JP15803488 U JP 15803488U JP H0542614 Y2 JPH0542614 Y2 JP H0542614Y2
- Authority
- JP
- Japan
- Prior art keywords
- quadrupole mass
- flange
- mass spectrometer
- vacuum
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 2
- 238000005173 quadrupole mass spectroscopy Methods 0.000 claims 1
- 239000003566 sealing material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15803488U JPH0542614Y2 (cs) | 1988-12-06 | 1988-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15803488U JPH0542614Y2 (cs) | 1988-12-06 | 1988-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0279554U JPH0279554U (cs) | 1990-06-19 |
| JPH0542614Y2 true JPH0542614Y2 (cs) | 1993-10-27 |
Family
ID=31438001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15803488U Expired - Lifetime JPH0542614Y2 (cs) | 1988-12-06 | 1988-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542614Y2 (cs) |
-
1988
- 1988-12-06 JP JP15803488U patent/JPH0542614Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0279554U (cs) | 1990-06-19 |
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