JPH0542607Y2 - - Google Patents
Info
- Publication number
- JPH0542607Y2 JPH0542607Y2 JP1668987U JP1668987U JPH0542607Y2 JP H0542607 Y2 JPH0542607 Y2 JP H0542607Y2 JP 1668987 U JP1668987 U JP 1668987U JP 1668987 U JP1668987 U JP 1668987U JP H0542607 Y2 JPH0542607 Y2 JP H0542607Y2
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- insulating cone
- analysis
- insulating
- mass spectrometry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000001036 glow-discharge mass spectrometry Methods 0.000 claims description 7
- 239000011148 porous material Substances 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 11
- 239000007789 gas Substances 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 6
- 239000004810 polytetrafluoroethylene Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000004454 trace mineral analysis Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001793 charged compounds Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1668987U JPH0542607Y2 (enrdf_load_stackoverflow) | 1987-02-06 | 1987-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1668987U JPH0542607Y2 (enrdf_load_stackoverflow) | 1987-02-06 | 1987-02-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63125357U JPS63125357U (enrdf_load_stackoverflow) | 1988-08-16 |
| JPH0542607Y2 true JPH0542607Y2 (enrdf_load_stackoverflow) | 1993-10-27 |
Family
ID=30808775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1668987U Expired - Lifetime JPH0542607Y2 (enrdf_load_stackoverflow) | 1987-02-06 | 1987-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542607Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-06 JP JP1668987U patent/JPH0542607Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63125357U (enrdf_load_stackoverflow) | 1988-08-16 |
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