JPH0542102B2 - - Google Patents

Info

Publication number
JPH0542102B2
JPH0542102B2 JP58160089A JP16008983A JPH0542102B2 JP H0542102 B2 JPH0542102 B2 JP H0542102B2 JP 58160089 A JP58160089 A JP 58160089A JP 16008983 A JP16008983 A JP 16008983A JP H0542102 B2 JPH0542102 B2 JP H0542102B2
Authority
JP
Japan
Prior art keywords
electron beam
electron
scanning
objective lens
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58160089A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6050850A (ja
Inventor
Akinari Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58160089A priority Critical patent/JPS6050850A/ja
Publication of JPS6050850A publication Critical patent/JPS6050850A/ja
Publication of JPH0542102B2 publication Critical patent/JPH0542102B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58160089A 1983-08-31 1983-08-31 走査電子顕微鏡 Granted JPS6050850A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58160089A JPS6050850A (ja) 1983-08-31 1983-08-31 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58160089A JPS6050850A (ja) 1983-08-31 1983-08-31 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS6050850A JPS6050850A (ja) 1985-03-20
JPH0542102B2 true JPH0542102B2 (pm) 1993-06-25

Family

ID=15707617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58160089A Granted JPS6050850A (ja) 1983-08-31 1983-08-31 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS6050850A (pm)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945173B2 (ja) * 1979-10-05 1984-11-05 株式会社日立製作所 走査電子顕微鏡
JPS5765656A (en) * 1980-10-08 1982-04-21 Hitachi Ltd Limited view diffraction image device

Also Published As

Publication number Publication date
JPS6050850A (ja) 1985-03-20

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